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Showing below up to 337 results in range #1 to #337.

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  1. ADT 7100 - Initial Setup Before Cutting
  2. ADT 7100 - Recovering an Old Recipe (2019)
  3. ADT UV-Tape Table 1042R
  4. ASML 5500: Choose Marks for Prealignment
  5. ASML 5500: Recovering from a Typo in Reticle ID
  6. ASML 5500: Recovering from an Error
  7. ASML 5500 Mask Making Guidelines
  8. ASML DUV: Edge Bead Removal via Photolithography
  9. ASML Stepper 3: Wafer Handler Reset Procedure
  10. ASML Stepper 3 - Job Creator
  11. ASML Stepper 3 - Substrates smaller than 100mm/4-inch
  12. ASML Stepper 3 - UCSB Test Reticles
  13. ASML Stepper 3 Dicing Guide Programming
  14. ASML Stepper 3 Error Recovery, Troubleshooting and Calibration
  15. ASML Stepper 3 Standard Operating Procedure
  16. AUTOSTEP 200-PIECES 1st litho BL and BR orientation.pptx
  17. AUTOSTEP 200-PIECES instruction 6-20-19.pptx
  18. Adam Abrahamsen
  19. Advanced PECVD Recipes
  20. Aidan Hopkins
  21. Ashers (Technics PEII)
  22. Atomic Force Microscope (Bruker ICON)
  23. Atomic Layer Deposition (Oxford FlexAL)
  24. Atomic Layer Deposition Recipes
  25. Automated Coat/Develop System (S-Cubed Flexi)
  26. Automated Wafer Cleaver (Loomis LSD-155LT)
  27. Autostep 200 Mask Making Guidance
  28. Autostep 200 Old training manual
  29. Autostep 200 Troubleshooting and Recovery
  30. Autostep 200 User Accessible Commands
  31. Biljana Stamenic
  32. Bill Millerski
  33. Bill Mitchell
  34. Brian Lingg
  35. Brian Thibeault
  36. CAIBE (Oxford Ion Mill)
  37. CC-PRIME OnBoarding 2022-08
  38. CDE ResMap Quick-Start instructions
  39. COVID-19 User Policies
  40. Calculators + Utilities
  41. Chemical-Mechanical Polisher (Logitech)
  42. Chemical List
  43. Chemical List - OLD 2018-09-05
  44. Claudia Gutierrez
  45. Comparison of ash rate for different gas mixtures, especially between O2 only vs O2/N2 mixture.
  46. Contact Aligner (SUSS MA-6)
  47. Contact Alignment Recipes
  48. Critical Point Dryer
  49. DS-K101-304 Bake Temp. versus Develop Rate
  50. DSEIII (PlasmaTherm/Deep Silicon Etcher)
  51. DUMMY TOOL
  52. DUV Flood Expose
  53. Dan Read
  54. Deep UV Optical Microscope (Olympus)
  55. Demis D. John
  56. Deposition Data - temporary 2021-12-15
  57. Dicing Saw (ADT)
  58. Digital Microscope (Olympus DSX1000)
  59. Direct-Write Lithography Recipes
  60. Don Freeborn
  61. Dry Etching Recipes
  62. E-BEAM
  63. E-Beam 1 (Sharon)
  64. E-Beam 2 (Custom)
  65. E-Beam 3 (Temescal)
  66. E-Beam 4 (CHA)
  67. E-Beam 5 (Plasys)
  68. E-Beam Evaporation Recipes
  69. E-Beam Lithography Recipes
  70. E-Beam Lithography System (JEOL JBX-6300FS)
  71. Editing Tutorials
  72. Electronics Presentations
  73. Ellipsometer (Rudolph)
  74. Ellipsometer (Woollam)
  75. Ellipsometer (Woollam) - Measuring thin dielectrics with Native Oxide pre-measurement
  76. Ellipsometer (Woollam) - Measuring thin metals with oxide pre-measurement
  77. Equipment Group - Video Training Procedures
  78. Errors
  79. Exposing a wafer piece
  80. FIJI - Microscope Measurement Tools
  81. Field Emission SEM 2 (JEOL IT800SHL)
  82. Film Stress (Tencor Flexus)
  83. Filmetrics F10-RT-UVX Operating Procedure
  84. Filmetrics F40-UV Microscope-Mounted
  85. Filmetrics F40-UV Quick Start
  86. Filmetrics F50 - Operating Procedure
  87. Flip-Chip Bonder (Finetech)
  88. Flood Exposure Recipes
  89. Fluorescence Microscope (Olympus MX51)
  90. Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP)
  91. Focused Ion-Beam Lithography (Raith Velion)
  92. Foong Fatt
  93. Frequently Asked Questions
  94. GCA 6300 Mask Making Guidance
  95. GCA 6300 Reboot Procedures
  96. GCA 6300 USer Accessible Commands
  97. GCA 6300 training manual -old instructions
  98. GCA Old full training manual
  99. Glossary
  100. GoPro Hero8 Black (Internal)
  101. Gold Plating Bench
  102. Gold surface oxidation (darkening) due to O2/N2 plasma; the need for O2 only recipe.
  103. Goniometer (Rame-Hart A-100) - Operating Procedure
  104. HF Vapor Etch
  105. High Temp Oven (Blue M)
  106. Holographic Lith/PL Setup (Custom)
  107. Homepage Draft1
  108. Hummer SEM Sample Coater - Techniques to reduce charging in SEMs
  109. IBD: Calibrating Optical Thickness
  110. ICP-Etch (Unaxis VLR)
  111. ICP-PECVD (Unaxis VLR)
  112. ICP Etch 1 (Panasonic E646V)
  113. ICP Etch 2 (Panasonic E626I)
  114. ICP Etching Recipes
  115. IR Aligner (SUSS MJB-3 IR)
  116. IR Thermal Microscope (QFI)
  117. InP Etch Rate and Selectivity (InP/SiO2)
  118. InP Etch Test-in details
  119. InP Etch Test Result in Details
  120. InP Etch test -details
  121. InP etch result in details
  122. Intellemetrics Laser Etch Monitor Procedure for Panasonic ICP Etchers
  123. Intellemetrics Laser Etch Monitor Procedure for Plasma-Therm Etchers
  124. Ion Beam Deposition (Veeco NEXUS)
  125. Jack Whaley
  126. KLA Tencor P7 - Basic profile instructions
  127. KLA Tencor P7 - Saving Profile Data
  128. KLayout Design Tips
  129. Lab Rules
  130. Lab Rules OLD 2018
  131. Lab Rules backup
  132. Laser Etch Monitor Simulation in Python
  133. Laser Etch Monitoring
  134. Laser Scanning Confocal M-scope (Olympus LEXT)
  135. Lee Sawyer
  136. LegacyTable
  137. Lift-Off with DUV Imaging + PMGI Underlayer
  138. Lift-Off with I-Line Imaging Resist + LOL2000 Underlayer
  139. Lithography Recipes
  140. Logitech WBS7 - Procedure for Wax Mounting with Spin-On Crystalbond
  141. Logitech WBS7 - Procedure for Wax Mounting with bulk Crystalbond Stick
  142. Luis Zuzunaga
  143. MA6 Backside Alignment - Allowed Mark Locations
  144. MLA150 - CAD Files and Templates
  145. MLA150 - Design Guidelines
  146. MLA150 - Large Image GDS Generation
  147. MLA150 - Troubleshooting
  148. MLA Recipes
  149. MVD - Wafer Coating - Process Traveler
  150. Main Page
  151. Main Page mod
  152. Maskless Aligner (Heidelberg MLA150)
  153. Measurements and Imaging with Amscope Camera - Quickstart Usage Guide
  154. Mechanical Polisher (Allied)
  155. Michael Barreraz
  156. Microscopes
  157. Mike Day
  158. Mike Silva
  159. Molecular Vapor Deposition
  160. Molecular Vapor Deposition Recipes
  161. Nano-Imprint (Nanonex NX2000)
  162. NanoFab Process Group
  163. Nanofab-IT - Add Device to Network
  164. Nanofab Job Postings
  165. Nanofab New User Onboarding
  166. Nanofab Staff Internal Pages
  167. News Feed
  168. Nick test
  169. Ning Cao
  170. OLD - PECVD2 Recipes
  171. Old Deposition Data - 2021-12-15
  172. Old Deposition Data - NastaziaM 2021-11-22
  173. Old Training Manual
  174. Old training manual
  175. Older Publications
  176. Olympus LEXT OLS4000 Confocal uScope - Quick Start
  177. Operating Instructions
  178. Optical Film Spectra + Optical Properties (Filmetrics F10-RT-UVX)
  179. Optical Film Thickness & Wafer-Mapping (Filmetrics F50)
  180. Optical Film Thickness (Filmetrics)
  181. Optical Film Thickness (Nanometric)
  182. Other Dry Etching Recipes
  183. Oven 4 (Thermo-Fisher HeraTherm)
  184. Oven 5 (Labline)
  185. Ovens - Overview of All Lab Ovens
  186. Ovens 1, 2 & 3 (Labline)
  187. Oxford Etcher - Sample Size Effect on Etch Rate
  188. Oxford ICP Etcher (PlasmaPro 100 Cobra)
  189. Oxford ICP Etcher - Process Control Data
  190. Oxygen Plasma System Recipes
  191. PECV1 Wafer Coating Process Traveler
  192. PECVD.docx
  193. PECVD1-(PlasmaTherm 790)
  194. PECVD1-SIN Standard Recipe (PlasmaTherm 790)
  195. PECVD1-SiN-standard recipe.pdf
  196. PECVD1-SiN standard recipe.pdf
  197. PECVD1 Operating Instructions.pdf
  198. PECVD1 Recipes
  199. PECVD1 Wafer Coating Process
  200. PECVD1 Wafer Coating Process Traveler
  201. PECVD 1 (PlasmaTherm 790)
  202. PECVD 2 (Advanced Vacuum)
  203. PECVD Recipes
  204. Packaging Recipes
  205. Peder Lenvik
  206. Photolithography - Improving Adhesion Photoresist Adhesion
  207. Photolithography - Manual Edge-Bead Removal Techniques
  208. Photoluminescence PL Setup (Custom)
  209. Photomask Ordering Procedure for UCSB Users
  210. Photonics Presentations
  211. Plasma Activation (EVG 810)
  212. Plasma Clean (Gasonics 2000)
  213. Plasma Clean (YES EcoClean)
  214. Probe Station: I-V Curves with Keithley 2400 and Python Script
  215. Probe Station & Curve Tracer
  216. ProcessGroup: Shipping Samples on Dicing Tape+Frame
  217. Process Group - Billing Instructions
  218. Process Group - Lab Stocking/Supplies Tasks
  219. Process Group - Process Control Data
  220. Process Group - Remote Fabrication Jobs
  221. Programming a Job
  222. PubList2018
  223. Publications - 2013-2014
  224. RIE5 - Standard Operating procedure (Cortex Software)
  225. RIE 1 (Custom)
  226. RIE 2 (MRC)
  227. RIE 3 (MRC)
  228. RIE 5 (PlasmaTherm)
  229. RIE Etching Recipes
  230. Rapid Thermal Processor (AET RX6)
  231. Rapid Thermal Processor (SSI Solaris 150)
  232. Research
  233. Resistivity Mapper (CDE RESMAP)
  234. S-Cubed Flexi - Operating Procedure
  235. SEM 1 (JEOL IT800SHL)
  236. SEM Sample Coater (Hummer)
  237. SPR220-7 at 3kW various temperature without N2 gas
  238. STD SiO2 recipe
  239. Services
  240. SiN 100C Table-2019
  241. SiO2 Etching Test using CF4/CHF3
  242. Spin Rinse Dryer (SemiTool)
  243. Sputter 1 (Custom)
  244. Sputter 2 (SFI Endeavor)
  245. Sputter 3 (AJA ATC 2000-F)
  246. Sputter 4 (AJA ATC 2200-V)
  247. Sputter 5
  248. Sputter 5 (AJA ATC 2200-V)
  249. Sputtering Recipes
  250. Staff List
  251. Step Profilometer (DektakXT)
  252. Step Profilometer (KLA Tencor P-7)
  253. Stepper 1 (GCA6300) How to select proper chuck
  254. Stepper 1 (GCA 6300)
  255. Stepper 1 (GCA 6300) - Standard Operating Procedure
  256. Stepper 1 (GCA 6300) Available chucks
  257. Stepper 1 (GCA 6300) Substrate Thickness, Shim Thickness ans Target Thickness
  258. Stepper 2 (AutoStep 200)
  259. Stepper 2 (AutoStep 200) - Operating Procedure - Piece Parts
  260. Stepper 2 (AutoStep 200) Operating Procedures
  261. Stepper 2 (Autostep 200) - Chuck Selection
  262. Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences
  263. Stepper 2 (Autostep 200) - Table of Chucks, Shims, Target Thicknesses
  264. Stepper 3 (ASML DUV)
  265. Stepper Recipes
  266. Stocked Chemical List
  267. Strip Annealer
  268. Surface Analysis (KLA/Tencor Surfscan)
  269. Surfscan6200 photos
  270. Surfscan Errors and Workarounds
  271. Surfscan photo
  272. Suss Aligners (SUSS MJB-3)
  273. Suss MA-6 Backside Alignment QuickStart
  274. TEST PAGE
  275. THz Physics Presentations
  276. Tech Talks Seminar Series
  277. Test Data of Etching SiO2 with CHF3/CF4-Florine ICP Etcher
  278. Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher
  279. Test Data of etching SiO2 with CHF3/CF4
  280. Test Data of etching SiO2 with CHF3/CF4-Florine
  281. Test Data of etching SiO2 with CHF3/CF4-Florine ICP Etcher
  282. Test Data of etching SiO2 with CHF3/CF4-ICP1
  283. Test Data of etching SiO2 with CHF3/CF4/O2
  284. Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer)
  285. Test Page
  286. Thermal Evap 1
  287. Thermal Evap 2 (Solder)
  288. Thermal Evaporation Recipes
  289. Thermal Evaporator 1
  290. Thermal Evaporator 2
  291. Thermal Processing Recipes
  292. Tino Sy
  293. Tom Reynolds
  294. Tony Bosch
  295. Tool List
  296. Troubleshooting and Recovery
  297. Tube Furnace (Tystar 8300)
  298. Tube Furnace AlGaAs Oxidation (Lindberg)
  299. Tube Furnace Wafer Bonding (Thermco)
  300. UCSBTEST1Gain4.jpg
  301. UCSB NanoFab Microscope Training
  302. UV Ozone Quick Start
  303. UV Ozone Reactor
  304. Unaxis SOP 3-12-2020.docx
  305. Unaxis SiN100C 300nm-2019
  306. Unaxis Test Recipe Page
  307. Unaxis VLR Etch - Process Control Data
  308. Unaxis wafer coating procedure
  309. Usage Data and Statistics
  310. User Accessible Commands
  311. Vacuum Deposition Recipes
  312. Vacuum Oven (YES)
  313. Vacuum Sealer
  314. Vapor HF Etch
  315. Vapor HF Etch (uETCH)
  316. Video Training: Hosting with Zoom and GacuhoCast/Panopto
  317. Video Training: Uploading to GauchoCast/Panopto (Internal)
  318. Video Training - Introduction (Internal)
  319. Vraj Mehalana
  320. Wafer Bonder (Logitech WBS7)
  321. Wafer Bonder (SUSS SB6-8E)
  322. Wafer Cleaver (PELCO Flip-Scribe)
  323. Wafer Cleaver Recipes (LSD-155LT)
  324. Wafer Coating Process Traveler
  325. Wafer Coating Process Traveler1
  326. Wafer Scanning/Coating Process Traveler ( combined/less detailed)
  327. Wafer Scanning process Traveler
  328. Wafer coating procedure
  329. Wafer scanning process traveler
  330. Wet Benches
  331. Wet Etching Recipes
  332. Wire Saw (Takatori)
  333. XeF2 Etch (Xetch)
  334. YES-150C-Various-Resists
  335. YES-SPR220-Various-Temps
  336. YES Recipe Screenshots: STD-N2-O2
  337. YES Recipe Screenshots: STD-O2

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