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  • ...s between polymer deposition "Dep" / Polymer etch "Etch A" / Si etch "Etch B" steps. Step Times gives fine control. *[//wiki.nanotech.ucsb.edu/wiki/images/b/b8/SLR_-_SiVertHF.pdf SiVertHF] - Si Vertical Etch using C<sub>4</sub>F<sub
    15 KB (2,345 words) - 14:24, 9 November 2021
  • |J. Duan, H. Huang, B. Dong, D. Jung, J.C. Norman, J.E. Bowers, F. Grillot |J.S.  Lee, S. Choi, M. Pendharkar, D.J. Pennachio, B. Markman, M. Seas, S. Koelling, M.A. Verheijen,L. Casparis, K.D. Petersson
    77 KB (11,491 words) - 15:10, 27 November 2019
  • # H. Vandeparre, M. Piñeirua, F. Brau, B. Roman, J. Bico, C. Gay, W. Bao, C. N. Lau, P. M. Reis, and P. Damman, “W # Zuwei Liu, Adam Bushmaker, Mehmet Aykol, and Stephen B. Cronin,“ Thermal Emission Spectra from Individual Suspended Carbon Nanot
    100 KB (14,246 words) - 15:34, 4 March 2020