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...s between polymer deposition "Dep" / Polymer etch "Etch A" / Si etch "Etch B" steps. Step Times gives fine control. *Bosch Cycles: Dep: 1.2sec / Etch A: 1.5sec / Etch B: 2.0sec

|J. Duan, H. Huang, B. Dong, D. Jung, J.C. Norman, J.E. Bowers, F. Grillot |J.S.  Lee, S. Choi, M. Pendharkar, D.J. Pennachio, B. Markman, M. Seas, S. Koelling, M.A. Verheijen,L. Casparis, K.D. Petersson

# H. Vandeparre, M. Piñeirua, F. Brau, B. Roman, J. Bico, C. Gay, W. Bao, C. N. Lau, P. M. Reis, and P. Damman, “W # Zuwei Liu, Adam Bushmaker, Mehmet Aykol, and Stephen B. Cronin,“ Thermal Emission Spectra from Individual Suspended Carbon Nanot