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  • Sputter 3 (AJA ATC 2000-F)
    |super= Tony Bosch |email=bosch@ece.ucsb.edu
    3 KB (479 words) - 10:36, 30 August 2022
  • ICP Etching Recipes
    ==High Rate Bosch Etch (DSEIII)== *[//wiki.nanotech.ucsb.edu/wiki/images/4/4a/10-Si_Etch_Bosch_DSEIII.pdf Bosch Process Recipe and Characterization] - Standard recipe on the tool.
    28 KB (4,350 words) - 17:09, 9 April 2024
  • Template:Tool2
    *: Tony Bosch #make Recipes section optional via #IF conditional. Doesn't appear to work with the auto-"recipes" template coding.
    8 KB (1,058 words) - 01:14, 19 October 2022
  • Template:Publications
    ''Warren Jin, Demis D. John, Jared F. Bauters, Tony Bosch, Brian J. Thibeault, and John E. Bowers'' ''D. T. Spencer, T. Drake, ... John E. Bowers, Scott A. Diddams, Scott B. Papp''
    7 KB (874 words) - 09:36, 18 August 2022
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