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21 March 2024
17:03 | Stepper Recipes diffhist +58 John d talk contribs →Negative Resist (ASML DUV): UVN dev time |
11 March 2024
09:54 | ICP Etching Recipes diffhist +271 John d talk contribs →Through Silicon Via (TSV) etch (DSEiii): added note on TSV rocess - discuss with staff before running |
5 March 2024
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18:43 | (Upload log) [John d (4×)] | |||
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18:43 John d talk contribs uploaded a new version of File:Oxford Etcher - InP Ridge Etch using Oxford PlasmaPro 100 Cobra - 2021-09-08.pdf (added info abotu :stadnard" recipe, name, mounting method etc.) | ||||
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18:35 John d talk contribs uploaded a new version of File:Oxford Etcher - InP Grating Etch at 20 C - Oxford Cobra 300 2021-08-26.pdf (added temp and carrier to recipe page) | ||||
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18:33 John d talk contribs uploaded a new version of File:Oxford Etcher - InP Grating Etch at 20 C - Oxford Cobra 300 2021-08-26.pdf (fixed typo in std recipe name) | ||||
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18:22 John d talk contribs uploaded a new version of File:Oxford Etcher - InP Grating Etch at 20 C - Oxford Cobra 300 2021-08-26.pdf (v2, added "std" recipe on top slide.) |
4 March 2024
m 16:25 | Packaging Recipes diffhist +47 John d talk contribs →Dicing Saw Recipes (ADT 7100) |