Recent changes
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Track the most recent changes to the wiki on this page.
List of abbreviations:
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- m
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- b
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25 March 2024
10:26 | Template:Announcements diffhist +351 Mehalana v talk contribs |
21 March 2024
17:03 | Stepper Recipes diffhist +58 John d talk contribs →Negative Resist (ASML DUV): UVN dev time |
13:24 | Wet Benches diffhist +169 Mehalana v talk contribs Wet Bench SOP Added |
11:24 | User creation log User account Day m talk contribs was created |
20 March 2024
15:05 | MLA150 - Troubleshooting diffhist +149 John d talk contribs →Causes: added OAF driving off wafer |
15:04 | Direct-Write Lithography Recipes diffhist +172 John d talk contribs →Maskless Aligner (Heidelberg MLA150): link to Troubleshooting/OOFocus section |
19 March 2024
18 March 2024
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11:56 | Template:Announcements 4 changes history +223 [Mehalana v (4×)] | |||
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11:56 (cur | prev) +11 Mehalana v talk contribs →ALD Oxford | ||||
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11:55 (cur | prev) +212 Mehalana v talk contribs | ||||
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11:53 (cur | prev) +137 Mehalana v talk contribs | ||||
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11:52 (cur | prev) -137 Mehalana v talk contribs →RIE 5 is up |
14 March 2024
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17:27 | Direct-Write Lithography Recipes 2 changes history +400 [John d (2×)] | |||
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17:27 (cur | prev) +429 John d talk contribs →Maskless Aligner (Heidelberg MLA150): added FEM comment Tag: Visual edit | ||||
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17:17 (cur | prev) -29 John d talk contribs →Greyscale Lithography (MLA150): deleted Flood Expose column Tag: Visual edit |
13 March 2024
03:27 | Stepper 3 (ASML DUV) diffhist -1,261 John d talk contribs removed Wiki-hosted ASML procedures, linked to gDrive procedures (access restricted) |
12 March 2024
16:16 | Nanofab Job Postings diffhist +62 John d talk contribs →Process/Wafer Fab Engineer Level 3 (Staff position): not reviewing apps |
16:13 | Main Page diffhist +48 John d talk contribs link to Job Postings |
15:47 | Template:Announcements diffhist -1,402 John d talk contribs deleted duplicates and old >2wk old annc |
11 March 2024
09:54 | ICP Etching Recipes diffhist +271 John d talk contribs →Through Silicon Via (TSV) etch (DSEiii): added note on TSV rocess - discuss with staff before running |
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09:42 | Staff List 2 changes history +84 [John d (2×)] | |||
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09:42 (cur | prev) +9 John d talk contribs →Process Group Tag: Visual edit | |||
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09:42 (cur | prev) +75 John d talk contribs →Process Group: added mission statement Tag: Visual edit |
9 March 2024
10:19 | IBD: Calibrating Optical Thickness diffhist -1 John d talk contribs Corrected 1050/1100 FP correction |
7 March 2024
12:54 | Nanofab Job Postings diffhist +861 John d talk contribs added R&D2 pos |
11:15 | Tube Furnace (Tystar 8300) diffhist +526 John d talk contribs process limits added |
5 March 2024
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18:43 | (Upload log) [John d (4×)] | |||
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18:43 John d talk contribs uploaded a new version of File:Oxford Etcher - InP Ridge Etch using Oxford PlasmaPro 100 Cobra - 2021-09-08.pdf (added info abotu :stadnard" recipe, name, mounting method etc.) | ||||
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18:35 John d talk contribs uploaded a new version of File:Oxford Etcher - InP Grating Etch at 20 C - Oxford Cobra 300 2021-08-26.pdf (added temp and carrier to recipe page) | ||||
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18:33 John d talk contribs uploaded a new version of File:Oxford Etcher - InP Grating Etch at 20 C - Oxford Cobra 300 2021-08-26.pdf (fixed typo in std recipe name) | ||||
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18:22 John d talk contribs uploaded a new version of File:Oxford Etcher - InP Grating Etch at 20 C - Oxford Cobra 300 2021-08-26.pdf (v2, added "std" recipe on top slide.) |
4 March 2024
m 16:25 | Packaging Recipes diffhist +47 John d talk contribs →Dicing Saw Recipes (ADT 7100) |
1 March 2024
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15:17 | Template:Announcements 3 changes history +412 [Mehalana v (3×)] | |||
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15:17 (cur | prev) +30 Mehalana v talk contribs →ICP1 Down | ||||
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15:17 (cur | prev) +34 Mehalana v talk contribs →DSE is Up | ||||
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15:17 (cur | prev) +348 Mehalana v talk contribs |
13:55 | Oxygen Plasma System Recipes diffhist +148 John d talk contribs →N2/O2 Recipes: note that wafers get hotter than recipe name indicates. |
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12:07 | Suss Aligners (SUSS MJB-3) 2 changes history +288 [John d (2×)] | |||
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12:07 (cur | prev) +3 John d talk contribs →IR Aligner: removed hammamatsu Tag: Visual edit | ||||
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12:06 (cur | prev) +285 John d talk contribs →IR Aligner: added photo of front-to-back IR camera alignment inspection Tag: Visual edit |
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12:04 | (Upload log) [John d (2×)] | |||
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12:04 John d talk contribs uploaded File:IR Alignment check 01 - crop.png | ||||
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11:30 John d talk contribs uploaded File:OlympusDSX1000.jpg (New photo with non-proprietary image.) |
11:52 | Tool List diffhist +85 John d talk contribs →Optical Microscopy: link to MJB-IR IR scope |
29 February 2024
m 21:08 | Field Emission SEM 2 (JEOL IT800SHL) diffhist +19 John d talk contribs |
21:07 | SEM 1 (JEOL IT800SHL) diffhist +419 John d talk contribs →Operating Procedures: linked to CalTech stuf correction vid with tops |
13:46 | Oxygen Plasma System Recipes diffhist +132 John d talk contribs →N2/O2 effect on Gold contacts & Substrate Temperature: minor additions to clarify gold optical absorption |
27 February 2024
12:29 | Direct-Write Lithography Recipes diffhist +135 John d talk contribs →Greyscale Lithography (MLA150): added link to GS page |