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Show new changes starting from 11:37, 4 December 2022
   
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2 December 2022

     16:16  ICP Etching Recipes diffhist +745 John d talk contribs →‎Si Etching (Fluorine ICP Etcher): added Al2O3/SiO2 masking procedure Tag: Visual edit
     16:09  Dry Etching Recipes diffhist +25 John d talk contribs fixed FL-ICP: Si link Tag: Visual edit

1 December 2022

     11:23  Direct-Write Lithography Recipes‎‎ 3 changes history +37 [John d‎ (3×)]
     
11:23 (cur | prev) +20 John d talk contribs converted File links to Media links (open PDF directly) Tag: Visual edit
     
11:20 (cur | prev) 0 John d talk contribs testing File-->Media link
     
11:16 (cur | prev) +17 John d talk contribs linkto nLOF2020 Tag: Visual edit
     11:20  Contact Alignment Recipes‎‎ 2 changes history +401 [John d‎ (2×)]
     
11:20 (cur | prev) +443 John d talk contribs links to all PR datasheets Tag: Visual edit
     
11:10 (cur | prev) -42 John d talk contribs added some of the PR datasheet links Tag: Visual edit
     11:14 Upload log John d talk contribs uploaded a new version of File:AXP4000pb-Datasheet.pdf(New datasheet, actually the "addiitonal information" sheet from Microchem Includes spin curves for ALL 4000 series PR's. from here: https://www.microchemicals.com/products/photoresists/az_p4110.html)

29 November 2022

     23:12  MLA150 - Design Guidelines diffhist +323 John d talk contribs →‎Greyscale Lithography: clarified levels and linked to GDSpy Tag: Visual edit

28 November 2022

     16:47  Template:Announcements diffhist +206 John d talk contribs ASML Dec 12th Laser PM
     09:54  RIE 5 (PlasmaTherm) diffhist +111 John d talk contribs →‎Detailed Specifications: added laser monitor Tag: Visual edit

23 November 2022

     15:29  Maskless Aligner (Heidelberg MLA150) diffhist +985 John d talk contribs →‎Video Trainings: added old video training back Tag: Visual edit
     11:30  Dicing Saw (ADT) diffhist 0 Sawyer l talk contribs Updated SOP Tag: Visual edit
     11:29 Upload log Sawyer l talk contribs uploaded File:ADT SOP Rev G.pdf
     10:41  Wet Benches diffhist +682 John d talk contribs →‎Plating Bench: added basic info of what is/isn't provided. Tag: Visual edit
     10:36  Frequently Asked Questions diffhist +67 John d talk contribs →‎Bring a new chemical/material into the lab Tag: Visual edit

22 November 2022

     15:57  IBD: Calibrating Optical Thickness diffhist +42 John d talk contribs minor corrections Tag: Visual edit
     09:22  Laser Etch Monitoring diffhist +616 John d talk contribs self-training allowed Tag: Visual edit
     08:28  ASML Stepper 3 Standard Operating Procedure diffhist +243 John d talk contribs →‎Running a focus and/or exposure matrix: added how to view/modufy exposure before exposing Tag: Visual edit

21 November 2022

     17:46  Oxford ICP Etcher - Process Control Data diffhist +231 Noahdutra talk contribs Tag: Visual edit
     17:42  (Upload log) [Noahdutra‎ (10×)]
     
17:42 Noahdutra talk contribs uploaded File:CS oxford 111822 002.jpg
     
17:41 Noahdutra talk contribs uploaded File:30D oxford 111822 002.jpg
     
17:33 Noahdutra talk contribs uploaded File:CS unaxis 111822 003.jpg
     
17:33 Noahdutra talk contribs uploaded File:30D unaxis 111822 002.jpg
     
17:26 Noahdutra talk contribs uploaded File:CS pan2 111822 002.jpg
     
17:26 Noahdutra talk contribs uploaded File:30D pan2 111822 002.jpg
     
17:20 Noahdutra talk contribs uploaded File:CS pan1 111822 002.jpg
     
17:19 Noahdutra talk contribs uploaded File:30D pan1 111822 002.jpg
     
17:09 Noahdutra talk contribs uploaded File:CS FICP 111822 002.jpg
     
17:09 Noahdutra talk contribs uploaded File:30D FICP 111822 002.jpg
     17:41  Unaxis VLR Etch - Process Control Data diffhist +293 Noahdutra talk contribs Tag: Visual edit
     17:30  Test Data of etching SiO2 with CHF3/CF4 diffhist +228 Noahdutra talk contribs Tag: Visual edit
     17:23  Test Data of etching SiO2 with CHF3/CF4-ICP1 diffhist +232 Noahdutra talk contribs Tag: Visual edit
     17:18  Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher diffhist +228 Noahdutra talk contribs Tag: Visual edit

20 November 2022

     13:32  Staff List‎‎ 2 changes history +79 [John d‎ (2×)]
     
13:32 (cur | prev) +11 John d talk contribs added Vraj Tel# Tag: Visual edit
     
12:48 (cur | prev) +68 John d talk contribs →‎Financial & Administrative: added Vraj M Tag: Visual edit
N    12:52  Vraj Mehalana diffhist +351 John d talk contribs Added contact info & basic info guesses Tag: Visual edit: Switched
     08:26  Template:Announcements diffhist +132 John d talk contribs Lee's MA6 service

17 November 2022

     09:12  Template:Announcements diffhist -182 Silva talk contribs →‎EVG Down

15 November 2022

     17:44  Sputtering Recipes diffhist -553 John d talk contribs →‎Ion Beam Deposition (Veeco NEXUS): fixed links to Historical Data fro SiO/TaO Tag: Visual edit
     17:14  PECVD Recipes diffhist -132 John d talk contribs fixed links to pre-2022 historical data Tag: Visual edit
     15:56  Process Group - Process Control Data diffhist +120 John d talk contribs link to Old pre-2022 Dep data Tag: Visual edit
     07:49  Template:Announcements‎‎ 2 changes history -290 [John d‎ (2×)]
     
07:49 (cur | prev) -164 John d talk contribs deleete veterans day
     
07:48 (cur | prev) -126 John d talk contribs JEOL SEM UP

14 November 2022

     17:25  Unaxis VLR Etch - Process Control Data diffhist +231 Noahdutra talk contribs Tag: Visual edit
     17:21  (Upload log) [Noahdutra‎ (10×)]
     
17:21 Noahdutra talk contribs uploaded File:CS unaxis 111122 002.jpg
     
17:19 Noahdutra talk contribs uploaded File:30D unaxis 111122 002.jpg
     
17:09 Noahdutra talk contribs uploaded File:CS pan2 110722 003.jpg
     
17:07 Noahdutra talk contribs uploaded File:30D pan2 110722 002.jpg
     
16:55 Noahdutra talk contribs uploaded File:CS pan1 110722 002.jpg
     
16:53 Noahdutra talk contribs uploaded File:30D pan1 110722 002.jpg
     
16:45 Noahdutra talk contribs uploaded File:CS oxford 111122 002.jpg
     
16:44 Noahdutra talk contribs uploaded File:30D oxford 111122 002.jpg
     
16:34 Noahdutra talk contribs uploaded File:CS FICP 110722 002.jpg
     
16:31 Noahdutra talk contribs uploaded File:30D FICP 110722 002.jpg
     17:14  Test Data of etching SiO2 with CHF3/CF4 diffhist +230 Noahdutra talk contribs Tag: Visual edit
     17:03  Test Data of etching SiO2 with CHF3/CF4-ICP1 diffhist +233 Noahdutra talk contribs Tag: Visual edit
     16:53  Oxford ICP Etcher - Process Control Data diffhist +232 Noahdutra talk contribs Tag: Visual edit
     16:41  Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher diffhist +231 Noahdutra talk contribs Tag: Visual edit
 m   12:03  Lab Rules diffhist -77 Thibeault talk contribs Added after hours access directions and changed wireless access section Tag: Visual edit
     10:43  Photolithography - Manual Edge-Bead Removal Techniques diffhist +173 John d talk contribs →‎Lithographic Edge Bead Removal: added location of EBR photo mask Tag: Visual edit

11 November 2022

     12:25  ICP Etching Recipes‎‎ 2 changes history +3,820 [John d‎ (2×)]
 m   
12:25 (cur | prev) +37 John d talk contribs →‎Through Silicon Via etch (DSEiii): author credit Tag: Visual edit
     
12:23 (cur | prev) +3,783 John d talk contribs →‎DSEIII_(PlasmaTherm/Deep_Silicon_Etcher): added procedure for through-wafer etch Tag: Visual edit
     12:14  Packaging Recipes diffhist +99 John d talk contribs →‎Wafer Bonder (Logitech WBS7): reocmmandations on each Tag: Visual edit
     12:06  Ashers (Technics PEII) diffhist -116 John d talk contribs →‎Recipes: link to recipes page, deleted recipes form this page Tag: Visual edit
     12:05  Oxygen Plasma System Recipes diffhist -64 John d talk contribs →‎Chamber Clean after CF4 Etching: deleted 300W recipe Tag: Visual edit
     07:37  Template:Announcements‎‎ 3 changes history -658 [John d‎ (3×)]
 m   
07:37 (cur | prev) +16 John d talk contribs
     
07:35 (cur | prev) -822 John d talk contribs deleted ASML msgs, MLA150 msg
     
07:35 (cur | prev) +148 John d talk contribs Vet day holiday

10 November 2022

 m   20:23  Wet Etching Recipes diffhist -5 John d talk contribs →‎Organic removal Tag: Visual edit

9 November 2022

     14:12  Template:Announcements diffhist +182 John d talk contribs evg down
     14:11  Stepper 3 (ASML DUV)‎‎ 2 changes history +529 [John d‎ (2×)]
 m   
14:11 (cur | prev) +32 John d talk contribs →‎Training Procedure Tag: Visual edit
     
14:07 (cur | prev) +497 John d talk contribs →‎Online Video Trainings: added "training procedure" section Tag: Visual edit

8 November 2022

     13:41  Automated Coat/Develop System (S-Cubed Flexi)‎‎ 4 changes history +523 [John d‎ (4×)]
 m   
13:41 (cur | prev) +1 John d talk contribs →‎Recipes Tag: Visual edit
 m   
13:41 (cur | prev) -1 John d talk contribs
     
13:41 (cur | prev) +267 John d talk contribs link to recipes table Tag: Visual edit
     
13:19 (cur | prev) +256 John d talk contribs indicated which PR's/chems are availabelf for general use Tag: Visual edit
     13:39  S-Cubed Flexi - Operating Procedure‎‎ 2 changes history -531 [John d‎ (2×)]
 m   
13:39 (cur | prev) +10 John d talk contribs Tag: Visual edit
     
13:39 (cur | prev) -541 John d talk contribs →‎Allowed Recipes: link to recipes Tag: Visual edit
     13:38  Lithography Recipes‎‎ 4 changes history +3,290 [John d‎ (4×)]
     
13:38 (cur | prev) +128 John d talk contribs link to Auto-coater recipes Tag: Visual edit
 m   
13:36 (cur | prev) +2 John d talk contribs rmeove TOC
     
13:36 (cur | prev) -2 John d talk contribs add TOC tmeporarily
     
13:35 (cur | prev) +3,162 John d talk contribs →‎Automated Coat/Develop System Recipes (S-Cubed Flexi): added recipes table Tag: Visual edit
     12:19  Stepper Recipes diffhist +199 John d talk contribs →‎Positive Resist (ASML DUV): added UV26 Tag: Visual edit: Switched
     08:12  Template:Announcements diffhist +237 Hopkins a talk contribs

4 November 2022

     12:25  Template:Announcements diffhist -258 John d talk contribs ASML PM Complete