Recent changes
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Track the most recent changes to the wiki on this page.
List of abbreviations:
- N
- This edit created a new page (also see list of new pages)
- m
- This is a minor edit
- b
- This edit was performed by a bot
- (±123)
- The page size changed by this number of bytes
20 May 2022
| m 10:46 | ICP-PECVD (Unaxis VLR) diffhist +13 John d talk contribs →Detailed Specifications | ||||
19 May 2022
| 21:12 | Template:Announcements diffhist -193 John d talk contribs AFM up, deleted F10, LEXT | ||||
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20:58 | Oxford ICP Etcher - Process Control Data 7 changes history +773 [John d (7×)] | |||
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20:58 (cur | prev) 0 John d talk contribs Tag: Visual edit | |||
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20:56 (cur | prev) +43 John d talk contribs updated SEM links to state "45°" or "XS" Tag: Visual edit | ||||
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20:43 (cur | prev) 0 John d talk contribs Tag: Visual edit | |||
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20:42 (cur | prev) +125 John d talk contribs uploaded SEMs Tag: Visual edit | ||||
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09:27 (cur | prev) +153 John d talk contribs added etch cal, SEMs TBA Tag: Visual edit | ||||
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09:15 (cur | prev) +156 John d talk contribs added "sample prep" section - still needs solution detials added Tag: Visual edit | ||||
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08:43 (cur | prev) +296 John d talk contribs Added dummy InP and seasoning steps Tag: Visual edit | ||||
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20:42 | (Upload log) [John d (3×)] | |||
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20:42 John d talk contribs uploaded File:Oxford InP 60C XS05.jpg | ||||
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20:41 John d talk contribs uploaded File:Oxford InP 60C 45DEG05.jpg | ||||
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20:39 John d talk contribs uploaded File:Oxford InP 60C 45DEG02.jpg | ||||
18 May 2022
| 17:16 | Probe Station & Curve Tracer diffhist -111 John d talk contribs deleted old DMM - removed form setup (didn't work) | ||||
| m 10:43 | Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher diffhist +247 Pakala talk contribs still a low etch rate on new fl cal | ||||
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10:41 | (Upload log) [Pakala (2×)] | |||
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10:41 Pakala talk contribs uploaded File:SiO2 Fl 10 CS 007.jpg | ||||
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10:41 Pakala talk contribs uploaded File:SiO2 Fl 10 45D-003.jpg | ||||
13 May 2022
| 07:30 | Optical Film Thickness (Nanometric) diffhist +100 John d talk contribs note to use FIlmtrics F40, and locaiton=Removed From Lab | ||||
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07:28 | Tool List 2 changes history -122 [John d (2×)] | |||
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07:28 (cur | prev) -41 John d talk contribs →Thickness + Optical Constants: Deleted Nanometrics (removed from lab) Tag: Visual edit | ||||
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07:26 (cur | prev) -81 John d talk contribs →Thin-Film/Material Analysis: deleted FIlmetrics F20 Tag: Visual edit | ||||
| 07:27 | Optical Film Thickness (Filmetrics) diffhist +148 John d talk contribs tool decomissioned notice,locaiton="removed from lab" | ||||
12 May 2022
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m 10:48 | Oxford ICP Etcher - Process Control Data 2 changes history +225 [Pakala (2×)] | |||
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10:48 (cur | prev) +186 Pakala talk contribs added new cal to oxford 60c Tag: Visual edit | |||
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09:02 (cur | prev) +39 Pakala talk contribs started to enter new cal on oxford60c Tag: Visual edit | |||
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10:47 | (Upload log) [Pakala (2×)] | |||
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10:47 Pakala talk contribs uploaded File:Oxford 60c 10 CS 008.jpg | ||||
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10:47 Pakala talk contribs uploaded File:Oxford 60c 10 45D 003.jpg | ||||
11 May 2022
| 11:39 | Services diffhist +101 John d talk contribs link to hourly rates | ||||
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11:33 | Template:Announcements 5 changes history -417 [Thibeault (2×); John d (3×)] | |||
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11:33 (cur | prev) -34 John d talk contribs →AFM: DOWN: fix link | |||
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11:33 (cur | prev) +86 John d talk contribs →AFM: DOWN: link to tool | |||
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11:32 (cur | prev) +124 John d talk contribs AFM down | ||||
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10:21 (cur | prev) -4 Thibeault talk contribs | ||||
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10:20 (cur | prev) -589 Thibeault talk contribs | ||||
| m 10:36 | Test Data of etching SiO2 with CHF3/CF4 diffhist +16 Pakala talk contribs added selectivity to ICP2 cals | ||||
| m 10:33 | Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher diffhist +241 Pakala talk contribs addded entry to fl cals, added selectivity. etch rate is 10% lower | ||||
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10:28 | (Upload log) [Pakala (4×)] | |||
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10:28 Pakala talk contribs uploaded File:SiO2 Fl 09 CS 006.jpg | ||||
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10:28 Pakala talk contribs uploaded File:SiO2 Fl 09 45D 005.jpg | ||||
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10:20 Pakala talk contribs uploaded File:ICP1 07 CS 006.jpg | ||||
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10:20 Pakala talk contribs uploaded File:ICP1 07 45D 008.jpg | ||||
| m 10:24 | Test Data of etching SiO2 with CHF3/CF4-ICP1 diffhist +227 Pakala talk contribs added entry in ICP1 cals, added selectivity | ||||
10 May 2022
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N 17:32 | Process Group - Process Control Data 2 changes history +4,216 [John d (2×)] | |||
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17:32 (cur | prev) +912 John d talk contribs →Etching: links to all etching process control pages Tag: Visual edit | ||||
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17:17 (cur | prev) +3,304 John d talk contribs Links to all PECVD and IBD data pages Tag: Visual edit | |||
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m 17:27 | ICP Etching Recipes 2 changes history -175 [John d (2×)] | |||
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17:27 (cur | prev) -27 John d talk contribs Renaming Process Control Data Tag: Visual edit | |||
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17:25 (cur | prev) -148 John d talk contribs renamed "historical data" to "process control" data Tag: Visual edit | |||
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17:18 | Sputtering Recipes 4 changes history +93 [John d (4×)] | |||
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17:18 (cur | prev) -6 John d talk contribs →Ion Beam Deposition (Veeco NEXUS) Tag: Visual edit | |||
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17:18 (cur | prev) -2 John d talk contribs →Ion Beam Deposition (Veeco NEXUS): changed style to Page Title Tag: Visual edit | ||||
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17:16 (cur | prev) +71 John d talk contribs minor updates Tag: Visual edit | |||
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17:06 (cur | prev) +30 John d talk contribs →Ion Beam Deposition (Veeco NEXUS): rename process control plots for clarity Tag: Visual edit | ||||
| 17:15 | Ion Beam Deposition (Veeco NEXUS) diffhist +12 John d talk contribs →Detailed Specifications: mentioned ITO not installed, minor formatting | ||||
| 17:01 | PECVD Recipes diffhist -23 John d talk contribs renamed Process Control plots for clarity | ||||
| 16:35 | Nanofab Staff Internal Pages diffhist +135 John d talk contribs →Process Group: link to Process Control Data | ||||
| m 08:58 | Test Data of etching SiO2 with CHF3/CF4 diffhist 0 Pakala talk contribs fixed typo on icp2 cals | ||||
| 07:24 | Template:Announcements diffhist -108 John d talk contribs F50 up | ||||