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  1. MLA150 - Troubleshooting‏‎ (44 revisions)
  2. Research‏‎ (44 revisions)
  3. Lab Rules‏‎ (42 revisions)
  4. Oxygen Plasma System Recipes‏‎ (41 revisions)
  5. Atomic Layer Deposition Recipes‏‎ (40 revisions)
  6. RIE Etching Recipes‏‎ (40 revisions)
  7. COVID-19 User Policies‏‎ (40 revisions)
  8. Contact Aligner (SUSS MA-6)‏‎ (40 revisions)
  9. Ion Beam Deposition (Veeco NEXUS)‏‎ (39 revisions)
  10. ASML Stepper 3 Error Recovery, Troubleshooting and Calibration‏‎ (38 revisions)
  11. Packaging Recipes‏‎ (35 revisions)
  12. Old training manual‏‎ (34 revisions)
  13. Tube Furnace (Tystar 8300)‏‎ (34 revisions)
  14. Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher‏‎ (34 revisions)
  15. Stepper 2 (AutoStep 200) Operating Procedures‏‎ (32 revisions)
  16. RIE 3 (MRC)‏‎ (31 revisions)
  17. HF Vapor Etch‏‎ (31 revisions)
  18. Vapor HF Etch‏‎ (30 revisions)
  19. Atomic Layer Deposition (Oxford FlexAL)‏‎ (30 revisions)
  20. Services‏‎ (30 revisions)
  21. Other Dry Etching Recipes‏‎ (30 revisions)
  22. ICP-Etch (Unaxis VLR)‏‎ (29 revisions)
  23. Tony Bosch‏‎ (28 revisions)
  24. PECVD1 Wafer Coating Process‏‎ (27 revisions)
  25. Aidan Hopkins‏‎ (26 revisions)
  26. Sputter 3 (AJA ATC 2000-F)‏‎ (26 revisions)
  27. Stepper 1 (GCA 6300) - Standard Operating Procedure‏‎ (26 revisions)
  28. Demis D. John‏‎ (25 revisions)
  29. Mike Silva‏‎ (25 revisions)
  30. Biljana Stamenic‏‎ (25 revisions)
  31. Usage Data and Statistics‏‎ (25 revisions)
  32. Ellipsometer (Woollam)‏‎ (25 revisions)
  33. DUMMY TOOL‏‎ (24 revisions)
  34. Suss Aligners (SUSS MJB-3)‏‎ (24 revisions)
  35. Don Freeborn‏‎ (24 revisions)
  36. Wafer Coating Process Traveler‏‎ (23 revisions)
  37. CAIBE (Oxford Ion Mill)‏‎ (23 revisions)
  38. RIE 2 (MRC)‏‎ (22 revisions)
  39. GoPro Hero8 Black (Internal)‏‎ (21 revisions)
  40. DSEIII (PlasmaTherm/Deep Silicon Etcher)‏‎ (21 revisions)
  41. Plasma Clean (YES EcoClean)‏‎ (21 revisions)
  42. Autostep 200 Mask Making Guidance‏‎ (21 revisions)
  43. IR Thermal Microscope (QFI)‏‎ (20 revisions)
  44. Rapid Thermal Processor (SSI Solaris 150)‏‎ (20 revisions)
  45. Rapid Thermal Processor (AET RX6)‏‎ (20 revisions)
  46. RIE 5 (PlasmaTherm)‏‎ (20 revisions)
  47. Brian Lingg‏‎ (20 revisions)
  48. Tom Reynolds‏‎ (20 revisions)
  49. Sputter 4 (AJA ATC 2200-V)‏‎ (20 revisions)
  50. Probe Station & Curve Tracer‏‎ (19 revisions)
  51. Oxford ICP Etcher (PlasmaPro 100 Cobra)‏‎ (19 revisions)
  52. UCSB NanoFab Microscope Training‏‎ (19 revisions)
  53. Automated Coat/Develop System (S-Cubed Flexi)‏‎ (19 revisions)
  54. Lift-Off with DUV Imaging + PMGI Underlayer‏‎ (19 revisions)
  55. Process Group - Process Control Data‏‎ (19 revisions)
  56. Tech Talks Seminar Series‏‎ (19 revisions)
  57. Filmetrics F40-UV Microscope-Mounted‏‎ (19 revisions)
  58. Oven 5 (Labline)‏‎ (19 revisions)
  59. Troubleshooting and Recovery‏‎ (19 revisions)
  60. MLA150 - Design Guidelines‏‎ (18 revisions)
  61. Laser Scanning Confocal M-scope (Olympus LEXT)‏‎ (18 revisions)
  62. Thermal Processing Recipes‏‎ (18 revisions)
  63. Atomic Force Microscope (Bruker ICON)‏‎ (18 revisions)
  64. Sputter 5 (AJA ATC 2200-V)‏‎ (18 revisions)
  65. Wafer Bonder (Logitech WBS7)‏‎ (18 revisions)
  66. Main Page‏‎ (17 revisions)
  67. Plasma Activation (EVG 810)‏‎ (17 revisions)
  68. XeF2 Etch (Xetch)‏‎ (17 revisions)
  69. Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer)‏‎ (16 revisions)
  70. PECVD1 Wafer Coating Process Traveler‏‎ (16 revisions)
  71. DUV Flood Expose‏‎ (16 revisions)
  72. E-Beam Lithography System (JEOL JBX-6300FS)‏‎ (16 revisions)
  73. Unaxis VLR Etch - Process Control Data‏‎ (15 revisions)
  74. Laser Etch Monitoring‏‎ (15 revisions)
  75. ASML Stepper 3 Standard Operating Procedure‏‎ (15 revisions)
  76. ASML Stepper 3 - UCSB Test Reticles‏‎ (14 revisions)
  77. Step Profilometer (DektakXT)‏‎ (14 revisions)
  78. Lee Sawyer‏‎ (14 revisions)
  79. Field Emission SEM 2 (JEOL IT800SHL)‏‎ (13 revisions)
  80. InP etch result in details‏‎ (13 revisions)
  81. Chemical List‏‎ (12 revisions)
  82. Nanofab Job Postings‏‎ (12 revisions)
  83. Brian Thibeault‏‎ (12 revisions)
  84. Process Group - Remote Fabrication Jobs‏‎ (12 revisions)
  85. Ovens - Overview of All Lab Ovens‏‎ (12 revisions)
  86. Molecular Vapor Deposition‏‎ (12 revisions)
  87. Wafer Bonder (SUSS SB6-8E)‏‎ (12 revisions)
  88. YES-SPR220-Various-Temps‏‎ (12 revisions)
  89. Film Stress (Tencor Flexus)‏‎ (12 revisions)
  90. Chemical-Mechanical Polisher (Logitech)‏‎ (12 revisions)
  91. Homepage Draft1‏‎ (11 revisions)
  92. IR Aligner (SUSS MJB-3 IR)‏‎ (11 revisions)
  93. Step Profilometer (KLA Tencor P-7)‏‎ (11 revisions)
  94. UV Ozone Reactor‏‎ (11 revisions)
  95. Deep UV Optical Microscope (Olympus)‏‎ (11 revisions)
  96. Wafer Coating Process Traveler1‏‎ (10 revisions)
  97. Intellemetrics Laser Etch Monitor Procedure for Panasonic ICP Etchers‏‎ (10 revisions)
  98. Ning Cao‏‎ (10 revisions)
  99. GCA 6300 USer Accessible Commands‏‎ (10 revisions)
  100. CC-PRIME OnBoarding 2022-08‏‎ (10 revisions)
  101. IBD: Calibrating Optical Thickness‏‎ (10 revisions)
  102. Adam Abrahamsen‏‎ (10 revisions)
  103. Logitech WBS7 - Procedure for Wax Mounting with bulk Crystalbond Stick‏‎ (10 revisions)
  104. Photolithography - Manual Edge-Bead Removal Techniques‏‎ (10 revisions)
  105. Unaxis wafer coating procedure‏‎ (10 revisions)
  106. Measurements and Imaging with Amscope Camera - Quickstart Usage Guide‏‎ (10 revisions)
  107. InP Etch Test Result in Details‏‎ (10 revisions)
  108. KLayout Design Tips‏‎ (10 revisions)
  109. Photoluminescence PL Setup (Custom)‏‎ (9 revisions)
  110. GCA 6300 Mask Making Guidance‏‎ (9 revisions)
  111. Oven 4 (Thermo-Fisher HeraTherm)‏‎ (9 revisions)
  112. Optical Film Thickness (Nanometric)‏‎ (9 revisions)
  113. Holographic Lith/PL Setup (Custom)‏‎ (9 revisions)
  114. Bill Mitchell‏‎ (9 revisions)
  115. YES-150C-Various-Resists‏‎ (9 revisions)
  116. KLA Tencor P7 - Saving Profile Data‏‎ (9 revisions)
  117. Ashers (Technics PEII)‏‎ (9 revisions)
  118. Nano-Imprint (Nanonex NX2000)‏‎ (9 revisions)
  119. Old Deposition Data - NastaziaM 2021-11-22‏‎ (9 revisions)
  120. Fluorescence Microscope (Olympus MX51)‏‎ (9 revisions)
  121. SEM 1 (JEOL IT800SHL)‏‎ (9 revisions)
  122. Process Group - Billing Instructions‏‎ (9 revisions)
  123. FIJI - Microscope Measurement Tools‏‎ (8 revisions)
  124. Filmetrics F40-UV Quick Start‏‎ (8 revisions)
  125. SEM Sample Coater (Hummer)‏‎ (8 revisions)
  126. ASML 5500: Recovering from an Error‏‎ (8 revisions)
  127. Focused Ion-Beam Lithography (Raith Velion)‏‎ (8 revisions)
  128. Resistivity Mapper (CDE RESMAP)‏‎ (8 revisions)
  129. Deposition Data - temporary 2021-12-15‏‎ (7 revisions)
  130. High Temp Oven (Blue M)‏‎ (7 revisions)
  131. ADT 7100 - Initial Setup Before Cutting‏‎ (7 revisions)
  132. RIE 1 (Custom)‏‎ (7 revisions)
  133. Dan Read‏‎ (7 revisions)
  134. Programming a Job‏‎ (7 revisions)
  135. Flip-Chip Bonder (Finetech)‏‎ (7 revisions)
  136. Optical Film Spectra + Optical Properties (Filmetrics F10-RT-UVX)‏‎ (7 revisions)
  137. Stocked Chemical List‏‎ (7 revisions)
  138. PECV1 Wafer Coating Process Traveler‏‎ (7 revisions)
  139. Ovens 1, 2 & 3 (Labline)‏‎ (7 revisions)
  140. NanoFab Process Group‏‎ (7 revisions)
  141. Autostep 200 User Accessible Commands‏‎ (7 revisions)
  142. Optical Film Thickness & Wafer-Mapping (Filmetrics F50)‏‎ (7 revisions)
  143. Probe Station: I-V Curves with Keithley 2400 and Python Script‏‎ (7 revisions)
  144. Wafer Scanning/Coating Process Traveler ( combined/less detailed)‏‎ (7 revisions)
  145. PECVD1-(PlasmaTherm 790)‏‎ (7 revisions)
  146. GCA Old full training manual‏‎ (7 revisions)
  147. Bill Millerski‏‎ (7 revisions)
  148. Optical Film Thickness (Filmetrics)‏‎ (6 revisions)
  149. E-BEAM‏‎ (6 revisions)
  150. Wafer Cleaver (PELCO Flip-Scribe)‏‎ (6 revisions)
  151. Luis Zuzunaga‏‎ (6 revisions)
  152. Automated Wafer Cleaver (Loomis LSD-155LT)‏‎ (6 revisions)
  153. Digital Microscope (Olympus DSX1000)‏‎ (6 revisions)
  154. Olympus LEXT OLS4000 Confocal uScope - Quick Start‏‎ (6 revisions)
  155. S-Cubed Flexi - Operating Procedure‏‎ (6 revisions)
  156. Tube Furnace Wafer Bonding (Thermco)‏‎ (6 revisions)
  157. MLA150 - CAD Files and Templates‏‎ (6 revisions)
  158. Photonics Presentations‏‎ (6 revisions)
  159. Lift-Off with I-Line Imaging Resist + LOL2000 Underlayer‏‎ (5 revisions)
  160. Tino Sy‏‎ (5 revisions)
  161. Old Training Manual‏‎ (5 revisions)
  162. News Feed‏‎ (5 revisions)
  163. Spin Rinse Dryer (SemiTool)‏‎ (5 revisions)
  164. Old Deposition Data - 2021-12-15‏‎ (5 revisions)
  165. Mechanical Polisher (Allied)‏‎ (5 revisions)
  166. Sputter 2 (SFI Endeavor)‏‎ (5 revisions)
  167. Goniometer (Rame-Hart A-100) - Operating Procedure‏‎ (5 revisions)
  168. PubList2018‏‎ (5 revisions)
  169. Thermal Evaporator 1‏‎ (5 revisions)
  170. Filmetrics F10-RT-UVX Operating Procedure‏‎ (4 revisions)
  171. Critical Point Dryer‏‎ (4 revisions)
  172. Test Data of etching SiO2 with CHF3/CF4-Florine‏‎ (4 revisions)
  173. Photolithography - Improving Adhesion Photoresist Adhesion‏‎ (4 revisions)
  174. KLA Tencor P7 - Basic profile instructions‏‎ (4 revisions)
  175. Jack Whaley‏‎ (4 revisions)
  176. Peder Lenvik‏‎ (4 revisions)
  177. Claudia Gutierrez‏‎ (4 revisions)
  178. Suss MA-6 Backside Alignment QuickStart‏‎ (4 revisions)
  179. Gold Plating Bench‏‎ (4 revisions)
  180. Electronics Presentations‏‎ (4 revisions)
  181. Tube Furnace AlGaAs Oxidation (Lindberg)‏‎ (4 revisions)
  182. GCA 6300 Reboot Procedures‏‎ (4 revisions)
  183. MLA150 - Large Image GDS Generation‏‎ (4 revisions)
  184. Vraj Mehalana‏‎ (4 revisions)
  185. Wafer Scanning process Traveler‏‎ (4 revisions)
  186. ASML DUV: Edge Bead Removal via Photolithography‏‎ (4 revisions)
  187. Laser Etch Monitor Simulation in Python‏‎ (4 revisions)
  188. Wire Saw (Takatori)‏‎ (3 revisions)
  189. Vacuum Oven (YES)‏‎ (3 revisions)
  190. Mike Day‏‎ (3 revisions)
  191. ASML 5500: Recovering from a Typo in Reticle ID‏‎ (3 revisions)
  192. Vapor HF Etch (uETCH)‏‎ (3 revisions)
  193. Nanofab New User Onboarding‏‎ (3 revisions)
  194. Sputter 1 (Custom)‏‎ (3 revisions)
  195. Foong Fatt‏‎ (3 revisions)
  196. Video Training: Hosting with Zoom and GacuhoCast/Panopto‏‎ (3 revisions)
  197. Nick test‏‎ (3 revisions)
  198. Glossary‏‎ (3 revisions)
  199. User Accessible Commands‏‎ (3 revisions)
  200. MVD - Wafer Coating - Process Traveler‏‎ (3 revisions)
  201. Vacuum Sealer‏‎ (3 revisions)
  202. ASML Stepper 3 Dicing Guide Programming‏‎ (3 revisions)
  203. ADT UV-Tape Table 1042R‏‎ (3 revisions)
  204. Ellipsometer (Woollam) - Measuring thin metals with oxide pre-measurement‏‎ (3 revisions)
  205. PECVD1-SiN standard recipe.pdf‏‎ (3 revisions)
  206. Test Data of Etching SiO2 with CHF3/CF4-Florine ICP Etcher‏‎ (3 revisions)
  207. Test Data of etching SiO2 with CHF3/CF4-Florine ICP Etcher‏‎ (3 revisions)
  208. Logitech WBS7 - Procedure for Wax Mounting with Spin-On Crystalbond‏‎ (3 revisions)
  209. Ellipsometer (Rudolph)‏‎ (3 revisions)
  210. DS-K101-304 Bake Temp. versus Develop Rate‏‎ (3 revisions)
  211. Gold surface oxidation (darkening) due to O2/N2 plasma; the need for O2 only recipe.‏‎ (3 revisions)
  212. MLA Recipes‏‎ (3 revisions)
  213. Michael Barreraz‏‎ (2 revisions)
  214. Plasma Clean (Gasonics 2000)‏‎ (2 revisions)
  215. ASML Stepper 3: Wafer Handler Reset Procedure‏‎ (2 revisions)
  216. SPR220-7 at 3kW various temperature without N2 gas‏‎ (2 revisions)
  217. Main Page mod‏‎ (2 revisions)
  218. Exposing a wafer piece‏‎ (2 revisions)
  219. Surfscan6200 photos‏‎ (2 revisions)
  220. Autostep 200 Old training manual‏‎ (2 revisions)
  221. Unaxis SiN100C 300nm-2019‏‎ (2 revisions)
  222. Errors‏‎ (2 revisions)
  223. SiO2 Etching Test using CF4/CHF3‏‎ (2 revisions)
  224. CDE ResMap Quick-Start instructions‏‎ (2 revisions)
  225. ASML 5500: Choose Marks for Prealignment‏‎ (2 revisions)
  226. Stepper 2 (Autostep 200) - Table of Chucks, Shims, Target Thicknesses‏‎ (2 revisions)
  227. E-Beam 5 (Plasys)‏‎ (2 revisions)
  228. ADT 7100 - Recovering an Old Recipe (2019)‏‎ (2 revisions)
  229. Stepper 2 (Autostep 200) - Chuck Selection‏‎ (2 revisions)
  230. Strip Annealer‏‎ (2 revisions)
  231. Test Data of etching SiO2 with CHF3/CF4/O2‏‎ (2 revisions)
  232. Test Page‏‎ (2 revisions)
  233. GCA 6300 training manual -old instructions‏‎ (2 revisions)
  234. PECVD1-SIN Standard Recipe (PlasmaTherm 790)‏‎ (2 revisions)
  235. THz Physics Presentations‏‎ (2 revisions)
  236. Process Group - Lab Stocking/Supplies Tasks‏‎ (2 revisions)
  237. Molecular Vapor Deposition Recipes‏‎ (2 revisions)
  238. E-Beam Lithography Recipes‏‎ (2 revisions)
  239. Video Training: Uploading to GauchoCast/Panopto (Internal)‏‎ (2 revisions)
  240. Thermal Evaporator 2‏‎ (2 revisions)
  241. Surfscan photo‏‎ (2 revisions)
  242. ProcessGroup: Shipping Samples on Dicing Tape+Frame‏‎ (1 revision)
  243. Nanofab-IT - Add Device to Network‏‎ (1 revision)
  244. RIE5 - Standard Operating procedure (Cortex Software)‏‎ (1 revision)
  245. Flood Exposure Recipes‏‎ (1 revision)
  246. Ellipsometer (Woollam) - Measuring thin dielectrics with Native Oxide pre-measurement‏‎ (1 revision)
  247. Sputter 5‏‎ (1 revision)
  248. Intellemetrics Laser Etch Monitor Procedure for Plasma-Therm Etchers‏‎ (1 revision)
  249. Hummer SEM Sample Coater - Techniques to reduce charging in SEMs‏‎ (1 revision)
  250. Stepper 1 (GCA 6300) Available chucks‏‎ (1 revision)

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