All public logs
Jump to navigation
Jump to search
Combined display of all available logs of UCSB Nanofab Wiki. You can narrow down the view by selecting a log type, the username (case-sensitive), or the affected page (also case-sensitive).
(newest | oldest) View (newer 100 | older 100) (20 | 50 | 100 | 250 | 500)- 08:07, 17 August 2012 Zwarburg talk contribs deleted page File:SurfScan 6200-Operating MAnual.pdf
- 08:07, 17 August 2012 Zwarburg talk contribs deleted page File:SurfScan 6200-Operating Manual.pdf
- 08:07, 17 August 2012 Zwarburg talk contribs deleted page File:Operations Man.pdf
- 08:07, 17 August 2012 Zwarburg talk contribs deleted page File:Operatig Man.pdf
- 08:07, 17 August 2012 Zwarburg talk contribs deleted page File:Recipe 151.pdf
- 08:07, 17 August 2012 Zwarburg talk contribs deleted page File:Recipe 183.pdf
- 08:07, 17 August 2012 Zwarburg talk contribs deleted page File:Recipe 309.pdf
- 08:07, 17 August 2012 Zwarburg talk contribs deleted page File:CF4-O2 clean.pdf
- 08:07, 17 August 2012 Zwarburg talk contribs deleted page File:Ar-CHF3 line purge.pdf
- 08:07, 17 August 2012 Zwarburg talk contribs deleted page File:SiO2 vert.pdf
- 08:07, 17 August 2012 Zwarburg talk contribs deleted page File:O2clean with CF4 coat.pdf
- 08:07, 17 August 2012 Zwarburg talk contribs deleted page File:O2clean.pdf
- 08:07, 17 August 2012 Zwarburg talk contribs deleted page File:SiO2cclnct.pdf
- 08:07, 17 August 2012 Zwarburg talk contribs deleted page File:SiO2 clnct.pdf
- 08:07, 17 August 2012 Zwarburg talk contribs deleted page File:CF4O2clean.pdf
- 08:07, 17 August 2012 Zwarburg talk contribs deleted page File:SiN etch.pdf
- 08:06, 17 August 2012 Zwarburg talk contribs deleted page File:Recipe 102.pdf
- 08:06, 17 August 2012 Zwarburg talk contribs deleted page File:Recipe 100.pdf
- 08:06, 17 August 2012 Zwarburg talk contribs deleted page File:Recipe 101.pdf
- 08:06, 17 August 2012 Zwarburg talk contribs deleted page File:Recipe 103.pdf
- 08:06, 17 August 2012 Zwarburg talk contribs deleted page File:Recipe 104.pdf
- 08:06, 17 August 2012 Zwarburg talk contribs deleted page File:O2+CF4.pdf
- 08:06, 17 August 2012 Zwarburg talk contribs deleted page File:Recipe 106.pdf
- 08:05, 17 August 2012 Zwarburg talk contribs deleted page File:Recipe 107.pdf
- 08:05, 17 August 2012 Zwarburg talk contribs deleted page File:Recipe 108.pdf
- 08:05, 17 August 2012 Zwarburg talk contribs deleted page File:Recipe 109.pdf
- 08:04, 17 August 2012 Zwarburg talk contribs deleted page File:InP 200C Standard.pdf
- 08:04, 17 August 2012 Zwarburg talk contribs deleted page File:ICP II SiN and SiO2 etch rates.pdf
- 08:04, 17 August 2012 Zwarburg talk contribs deleted page File:Vik's recipe.pdf
- 08:04, 17 August 2012 Zwarburg talk contribs deleted page File:Bill's recipe.pdf
- 08:03, 17 August 2012 Zwarburg talk contribs deleted page File:PM1 InP Etch 200C H2 Ar Std.pdf
- 08:03, 17 August 2012 Zwarburg talk contribs deleted page File:PM1 O2 Etch 15min 200C.pdf
- 08:03, 17 August 2012 Zwarburg talk contribs deleted page File:PM1 O2 Etch 15min 30C.pdf
- 08:03, 17 August 2012 Zwarburg talk contribs deleted page File:PM1 O2 Etch 30min 200C.pdf
- 08:03, 17 August 2012 Zwarburg talk contribs deleted page File:PM1 O2 Etch 60min 200C.pdf
- 08:03, 17 August 2012 Zwarburg talk contribs deleted page File:PM1 O2 Etch 2min 30C.pdf
- 08:03, 17 August 2012 Zwarburg talk contribs deleted page File:Recipe 6.pdf
- 08:03, 17 August 2012 Zwarburg talk contribs deleted page File:Recipe6.pdf
- 08:03, 17 August 2012 Zwarburg talk contribs deleted page File:O2etch 15min 30C.pdf
- 08:03, 17 August 2012 Zwarburg talk contribs deleted page File:PM1O2 Etch 60min 200C.pdf
- 08:03, 17 August 2012 Zwarburg talk contribs deleted page Unaxis VLR Recipes (content was: "{| style="color:black; background-color:#ffffcc;" cellpadding="4" class="wikitable" |Recipe |Standard Recipes |Comments |- |1 | SiN process 2%SiH4.pdf|SiN pro…" (and the only contributor was "Biljana"))
- 08:02, 17 August 2012 Zwarburg talk contribs deleted page File:PECVD 1 Standard recipes.pdf
- 08:02, 17 August 2012 Zwarburg talk contribs deleted page File:Standard recipe for SiN deposition in PECVD 1.pdf
- 08:02, 17 August 2012 Zwarburg talk contribs deleted page File:Standard recipe for SiO2 deposition in PECVD 1.pdf
- 08:02, 17 August 2012 Zwarburg talk contribs deleted page File:Advanced PECVD 2 Standard plasma clean.pdf
- 08:02, 17 August 2012 Zwarburg talk contribs deleted page File:Advanced PECVD 2 SiO2 deposition.pdf
- 08:02, 17 August 2012 Zwarburg talk contribs deleted page File:Advanced PECVD 2 LS SiN deposition.pdf
- 08:02, 17 August 2012 Zwarburg talk contribs deleted page File:Advanced PECVD 2 SiN deposition.pdf
- 08:01, 17 August 2012 Zwarburg talk contribs deleted page File:Standard recipe SiN deposition PECVD 1.pdf
- 08:01, 17 August 2012 Zwarburg talk contribs deleted page File:Standard recipe SiO2 deposition PECVD 1.pdf
- 08:01, 17 August 2012 Zwarburg talk contribs deleted page File:Standard SiN deposition PECVD 1.pdf
- 08:01, 17 August 2012 Zwarburg talk contribs deleted page File:Standard SiN deposition-PECVD 1.pdf
- 08:01, 17 August 2012 Zwarburg talk contribs deleted page File:SiN deposition 2%SiH4 100C-120W-low stress.pdf
- 08:01, 17 August 2012 Zwarburg talk contribs deleted page File:SiN deposition 2%SiH4 100C-50W-medium stress.pdf
- 08:01, 17 August 2012 Zwarburg talk contribs deleted page File:SiN deposition 2%SiH4 100C-5W-high stress.pdf
- 08:01, 17 August 2012 Zwarburg talk contribs deleted page GCA-6300-Resist Table.pdf (content was: "{| border="1" class="wikitable" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center; font-size: 95%" |- bgcolor="#D0E7FF" ! width="725" …" (and the only contributor was "Biljana"))
- 06:25, 17 August 2012 Zwarburg talk contribs uploaded File:PECVD2-SiN-Recipe-120W-Low-Stress.pdf
- 06:25, 17 August 2012 Zwarburg talk contribs uploaded File:PECVD2-SiN-Recipe-50W-Medium-Stress.pdf
- 06:25, 17 August 2012 Zwarburg talk contribs uploaded File:PECVD2-SiN-Recipe-5W-High-Stress.pdf
- 12:08, 16 August 2012 Zwarburg talk contribs deleted page File:Advanced PECVD 2 SiO2 Data-particles, thickness, index.pdf
- 12:08, 16 August 2012 Zwarburg talk contribs uploaded File:PECVD2-SiO2-Data.pdf
- 12:08, 16 August 2012 Zwarburg talk contribs uploaded File:PECVD2-SiO2-Recipe.pdf
- 12:07, 16 August 2012 Zwarburg talk contribs deleted page File:Advanced PECVD 2 SiN Data-particles, thickness, index.pdf
- 12:07, 16 August 2012 Zwarburg talk contribs uploaded File:PECVD2-SiN-Data.pdf
- 12:07, 16 August 2012 Zwarburg talk contribs deleted page File:Advanced PECVD2 Nitride 2 deposition.pdf
- 12:07, 16 August 2012 Zwarburg talk contribs uploaded File:PECVD2-SiN-Recipe.pdf
- 12:05, 16 August 2012 Zwarburg talk contribs deleted page File:PECVD 1 SiO2 data-particles, thickness, index.pdf
- 12:05, 16 August 2012 Zwarburg talk contribs uploaded File:PECVD1-SiO2-Data.pdf
- 12:05, 16 August 2012 Zwarburg talk contribs deleted page File:PECVD 1 SiN data-particles, thickness, index.pdf
- 12:05, 16 August 2012 Zwarburg talk contribs uploaded File:PECVD1-SiN-Data.pdf
- 12:03, 16 August 2012 Zwarburg talk contribs uploaded File:PECVD1-SiO2-Recipe.pdf
- 12:03, 16 August 2012 Zwarburg talk contribs deleted page File:Standard SiO2 deposition PECVD 1.pdf
- 12:03, 16 August 2012 Zwarburg talk contribs deleted page File:Standard SiO2 deposition-PECVD 1.pdf
- 12:01, 16 August 2012 Zwarburg talk contribs uploaded File:PECVD1-SiN-Recipe.pdf
- 10:21, 16 August 2012 Zwarburg talk contribs deleted page Standard recipes for deposition (content was: "{| style="color:black; background-color:#ffffcc;" cellpadding="4" class="wikitable" |Recipe |Standard Recipes |Comments |- |1 | SiN process 2%SiH4.pdf|SiN pro…" (and the only contributor was "Biljana"))
- 10:21, 16 August 2012 Zwarburg talk contribs deleted page SiN process 2%SiH4.pdf (content was: "*SiN deposition 2%SiH4 250C-120W-low stress * media: SiN deposition 2%SiH4 100C-120W-low stress.pdf|S…" (and the only contributor was "Biljana"))
- 10:21, 16 August 2012 Zwarburg talk contribs deleted page SiN Low stress 2%SiH4.pdf (content was: "*SiN deposition 2% SiH4 No Ar 100C-120W low stress *media:SiN deposition 250C-120W low stress.pdf|SiN depositi…" (and the only contributor was "Biljana"))
- 10:21, 16 August 2012 Zwarburg talk contribs deleted page Recipe 155.pdf (content was: "* recipe 155" (and the only contributor was "Biljana"))
- 10:21, 16 August 2012 Zwarburg talk contribs deleted page Recipe 123.pdf (content was: "* recipe 123" (and the only contributor was "Biljana"))
- 10:21, 16 August 2012 Zwarburg talk contribs deleted page Recipe 120.pdf (content was: "* recipe 120" (and the only contributor was "Biljana"))
- 10:21, 16 August 2012 Zwarburg talk contribs deleted page Recipe 116.pdf (content was: "* recipe 116" (and the only contributor was "Biljana"))
- 10:21, 16 August 2012 Zwarburg talk contribs deleted page PM1 O2 etches.pdf (content was: "* PM1 O2 Etch 2min 30C * PM1 O2 Etch 15min 30C *media:PM1 O2 Etch 15min 200C.pdf| PM1 O2 Etch …" (and the only contributor was "Biljana"))
- 10:21, 16 August 2012 Zwarburg talk contribs deleted page PECVD 1 Standard recipes.pdf (content was: "*Standard SiN deposition-PECVD 1 *Standard SiO2 deposition-PECVD 1" (and the only contributor was "Biljana"))
- 10:20, 16 August 2012 Zwarburg talk contribs deleted page Media.operatons Man.pdf (content was: "File:Operations Man.pdf" (and the only contributor was "Biljana"))
- 10:20, 16 August 2012 Zwarburg talk contribs deleted page InP Etch-200C-ning (content was: "InP Etch-200C-ning.pdf" (and the only contributor was "Biljana"))
- 10:20, 16 August 2012 Zwarburg talk contribs deleted page ICP I Standard recipes.pdf (content was: "{| style="color:black; background-color:#ffffcc;" cellpadding="10" class="wikitable" |Recipe No |Standard Recipes |Comments |- |105 |media:CF4-O2 clean.pdf|CF4…" (and the only contributor was "Biljana"))
- 10:20, 16 August 2012 Zwarburg talk contribs deleted page Advanced PECVD 2 Standard recipes.pdf (content was: "*Advanced PECVD 2 standard plasma clean *media:Advanced PECVD 2 SiO2 deposition.pdf|Advanced PECVD 2 Oxide …" (and the only contributor was "Biljana"))
- 10:20, 16 August 2012 Zwarburg talk contribs deleted page Advanced PECVD 2 Data-particles, thickness, index.pdf (content was: "*Advanced PECVD 2 Oxide Data-particles, thickness, index *media:Advanced PECVD 2 SiN Data-p…" (and the only contributor was "Biljana"))
- 10:20, 16 August 2012 Zwarburg talk contribs deleted page GCA-6300 Stepper Lithography Recipes.pdf (content was: "{| border="1" class="wikitable" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center;" |- bgcolor="#D0E7FF" ! width="1675" height="45" co…" (and the only contributor was "Biljana"))
- 10:19, 16 August 2012 Zwarburg talk contribs deleted page PECVD 1 Data- particles, thickness, index.pdf (content was: "*PECVD1 SiO2 data-particles, thickness, index *media:PECVD 1 SiN data-particles, thickness, index.pd…" (and the only contributor was "Biljana"))
- 10:19, 16 August 2012 Zwarburg talk contribs deleted page Recipe 105.pdf (content was: "* recipe 105" (and the only contributor was "Biljana"))
- 10:19, 16 August 2012 Zwarburg talk contribs deleted page Recipe 118.pdf (content was: "* recipe 118" (and the only contributor was "Biljana"))
- 10:19, 16 August 2012 Zwarburg talk contribs deleted page Recipe 151.pdf (content was: "* recipe 151" (and the only contributor was "Biljana"))
- 10:19, 16 August 2012 Zwarburg talk contribs deleted page Recipe 122.pdf (content was: "* recipe 122" (and the only contributor was "Biljana"))
- 10:19, 16 August 2012 Zwarburg talk contribs deleted page Recipe 309.pdf (content was: "* recipe 309" (and the only contributor was "Biljana"))
- 10:19, 16 August 2012 Zwarburg talk contribs deleted page SiN Deposition 100C Low stress.pdf (content was: "*SiN Deposition 100C-120W Low stress *media:SiN Deposition 250C-120W Low stress.pdf|SiN Deposition 2500C-120W …" (and the only contributor was "Biljana"))
- 10:19, 16 August 2012 Zwarburg talk contribs deleted page SiN low stress2% SiH4 No Ar.pdf (content was: "*SiN deposition 2% SiH4 No Ar 100C-120W low stress *media:SiN deposition 250C-120W low stress.pdf|SiN depositi…" (and the only contributor was "Biljana"))
- 10:19, 16 August 2012 Zwarburg talk contribs deleted page Standard Recipes (content was: "{| style="color:black; background-color:#ffffcc;" cellpadding="4" class="wikitable" |Recipe |Standard Recipes |Comments |- |1 |media: InP 200C Standard.pdf|In…" (and the only contributor was "Biljana"))
- 10:18, 16 August 2012 Zwarburg talk contribs deleted page SiN process 2% SiH4 No Ar.pdf (content was: "*SiN deposition 2%SiH4 No Ar 250C-120W-low stress * media: SiN deposition 2%SiH4 No Ar 100C-120…" (and the only contributor was "Biljana"))
- 10:18, 16 August 2012 Zwarburg talk contribs deleted page SiN Process Low stress.pdf (content was: "* SiN deposition 100C-120W-low stress * media:SiN deposition 250C-120W-low stress.pdf|SiN deposition 250C-120W…" (and the only contributor was "Biljana"))