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• 11:31, 4 January 2024 John d talk contribs deleted page KLA-Tencor Surfscan - Standard Operating Procedure (Moved data to another page: content was: "This tool can be used for scanning 4", 6" and 8" wafers. Pieces could be also scanned, but they need to be mounted on either 4" or 8" wafer. The maximum thickness of a wafer (or a wafer+mounted piece) is up to 1mm. ==SURFSCAN 6200== LOG IN using the access code: '''boss''' ( if the keyboard is not working use the virtual keyboard on the monitor). Double click on the icon...", and the only contributor was "Biljana"...)