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Date Name Thumbnail Size Description Versions
10:55, 3 October 2012 PECVD2-SiN-Recipe-Low stress SiNx-100%SiH4-120W-50C.pdf (file) 42 KB   1
10:59, 3 October 2012 PECVD2-SiN-Recipe-Low stres SiNx-100% SiH4-120W-100C.pdf (file) 41 KB   1
11:00, 3 October 2012 PECVD2-SiN-Recipe-Low stress SiNx-100% SiH4-120W-250C.pdf (file) 42 KB   1
11:05, 3 October 2012 PECVD2-SiN-Recipe-Medium stress SiNx-100%SiH4-120W-50C.pdf (file) 41 KB   1
11:05, 3 October 2012 PECVD2-SiN-Recipe-Medium stres SiNx-100% SiH4-120W-100C.pdf (file) 41 KB   1
11:06, 3 October 2012 PECVD2-SiN-Recipe-Medium stress SiNx-100% SiH4-120W-250C.pdf (file) 42 KB   1
11:12, 3 October 2012 PECVD2-SiN-Table-Low stres SiNx-100% SiH4-120W-100C.pdf (file) 41 KB   1
11:17, 3 October 2012 PECVD2-SiN-SEM- Medium stres SiNx-100% SiH4-120W-100C.pdf (file) 375 KB   1
12:41, 3 October 2012 PECVD2-SiO2-LDR-100% SiH4.pdf (file) 39 KB   1
12:46, 3 October 2012 PECVD2-SiO2-SEM-LDR SiO2-100% SiH4-100C-15W.pdf (file) 446 KB   1
12:50, 3 October 2012 PECVD2-SiO2-HDR-100% SiH4.pdf (file) 39 KB   1
14:36, 3 October 2012 PECVD2-SiNx-Comparison table-2% SiH4-100C-120W.pdf (file) 34 KB   1
14:38, 3 October 2012 PECVD2-SiNx-Comparison table-2% SiH4-250C-120W.pdf (file) 34 KB   1
14:48, 3 October 2012 PECVD2-SiNxComparison table-2% SiH4-100C-120W.pdf (file) 34 KB   1
14:49, 3 October 2012 PECVD2-SiNxComparison table-2% SiH4-250C-120W.pdf (file) 34 KB   1
14:55, 3 October 2012 PECVD2-SiNx Comparison table-2% SiH4-100C-120W.pdf (file) 35 KB   1
14:56, 3 October 2012 PECVD2-SiNx Comparison table-2% SiH4-250C-120W.pdf (file) 35 KB   1
15:08, 3 October 2012 PECVD2-SiNx-l.s.-Comparison table-2% SiH4-100C-120W.pdf (file) 34 KB   1
15:09, 3 October 2012 PECVD2-SiNx -m.s.-Comparison table-2% SiH4-100C-120W.pdf (file) 35 KB   1
15:09, 3 October 2012 PECVD2-SiNx -h.s.-Comparison table-2% SiH4-100C-120W.pdf (file) 41 KB   1
15:11, 3 October 2012 PECVD2-SiNx-m.s.-Comparison table-2% SiH4-100C-120W.pdf (file) 35 KB   1
15:14, 3 October 2012 PECVD2-SiNx-medium-Comparison table-2% SiH4-100C-120W.pdf (file) 35 KB   1
15:36, 3 October 2012 PECVD2-SiNx -SEM-2% SiH4-100C-50W.pdf (file) 706 KB   1
15:48, 3 October 2012 PECVD2-SiNx-medium stress-SEM-2% SiH4-100C-50W.pdf (file) 700 KB   1
15:53, 3 October 2012 PECVD2-SiNx-high stress-SEM-2% SiH4-100C-5W.pdf (file) 658 KB   1
14:52, 10 October 2012 PECVD2-SiO2Recipe-5W-50C.pdf (file) 41 KB   1
14:52, 10 October 2012 PECVD2-SiO2Recipe-5W-100C.pdf (file) 41 KB   1
14:52, 10 October 2012 PECVD2-SiO2Recipe-5W-250C.pdf (file) 41 KB   1
15:00, 10 October 2012 SiO2 film Unaxis ICP vs PECVD I.pdf (file) 41 KB   1
15:04, 10 October 2012 SEM pictures SiO2 100C.pdf (file) 566 KB   1
15:36, 20 August 2013 Gas Change CHF3-Ar-3.pdf (file) 40 KB   1
15:38, 20 August 2013 Gas Change CF4-SF6-CF4.pdf (file) 40 KB   1
15:54, 20 August 2013 Standard recipe SiN-PECVD.pdf (file) 36 KB   1
15:54, 20 August 2013 Standard recipe SiO2-PECVD.pdf (file) 36 KB   1
10:00, 21 August 2013 Panasonic1-SiO-Etch-SEM.pdf (file) 48 KB   2
08:53, 11 September 2013 WIKI PECVD SIN Index,dep.rates,stress.pdf (file) 130 KB   1
08:55, 11 September 2013 PECVD1-WIKI PECVD SiN Index, dep.rates, stress.pdf (file) 130 KB   1
15:53, 12 March 2014 PECVD1-PECVD SIN data-February 2014 SiN Index,dep.rates,stress.pdf (file) 106 KB   1
16:09, 12 March 2014 PECVD1 SiN data-February 2014 AFM roughness.pdf (file) 156 KB   1
08:37, 13 March 2014 PECVD1-SiN data.pdf (file) 106 KB   1
09:00, 13 March 2014 PECVD1-SiN Calibration-February 2014.pdf (file) 105 KB   1
09:07, 13 March 2014 PECVD1-SiN Calibration-February 2014 SiN 1000A.pdf (file) 103 KB   1
10:20, 13 March 2014 PECVD1- SiO2 Calibratiion February 2014 SiO2 1000A.pdf (file) 112 KB   1
11:06, 13 March 2014 PECVD1- SiO2 Calibratiion February 2014-1 SiO2 1000A.pdf (file) 113 KB   1
15:36, 13 March 2014 ADV OXIDE data.pdf (file) 88 KB   1
16:02, 13 March 2014 ADV.PECVD OXIDE-March 2014.pdf (file) 91 KB   1
13:43, 19 March 2014 PECVD1-SiN-standard recipe.pdf (file) 189 KB   1
13:55, 19 March 2014 PECVD1-SiN Data-March 2014.pdf (file) 101 KB   1
15:20, 19 March 2014 SiO2 100% SiH4 HDR 50C.pdf (file) 42 KB   1
11:08, 20 March 2014 PECVD1-SiN-standard recipe 1000A.pdf (file) 295 KB   1
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