Uploads by Biljana

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Date Name Thumbnail Size Description Versions
16:43, 8 April 2014 Advanced PECVD LS NITRIDE2 April 2014 LS NITRIDE 2 Data 2014 .pdf (file) 0 bytes   1
13:59, 15 April 2014 IBD SiN Data April 2014 IBD SIN data 2014.pdf (file) 0 bytes   1
16:48, 8 April 2014 New Advanced PECVD LS NITRIDE2 April 2014.pdf (file) 0 bytes   1
14:12, 15 April 2014 New IBD SiN Data April 2014.pdf (file) 0 bytes   1
14:41, 15 April 2014 New IBD TiO2 Data April 2014.pdf (file) 0 bytes   1
10:26, 2 April 2014 New IBD TiO2 deposition.pdf (file) 0 bytes   1
15:26, 7 April 2020 Mask plate-Sign convention.png (file) 6 KB   1
15:22, 7 April 2020 Alignment key offset Sign Convention.png (file) 6 KB   1
10:57, 11 January 2024 IBD SOP.docx (file) 15 KB   1
08:14, 23 March 2020 GCA 6300 Reboot computers.docx (file) 16 KB   1
14:55, 15 April 2014 PECVD1-SiN-standard recipe 1000A-April 2014.pdf (file) 19 KB   1
13:28, 24 May 2017 Thermal evaporator 2-new Sheet1.pdf (file) 20 KB   1
13:17, 24 May 2017 Thermal evaporator 2.pdf (file) 20 KB   1
13:17, 24 March 2020 Autostep stage control.png (file) 25 KB   1
13:20, 24 March 2020 RMS control.png (file) 26 KB   1
13:15, 24 March 2020 Autostep DSW.png (file) 26 KB   1
11:54, 29 December 2023 GCA 6300 Programming a Job 7.docx (file) 28 KB   1
10:54, 24 May 2017 Thermal evaporator 2 Sheet1.pdf (file) 31 KB   1
12:29, 29 December 2023 GCA 6300 Shutdown and Start up.pdf (file) 32 KB   1
11:45, 31 March 2014 AET RTA Operating Instructions.pdf (file) 34 KB   1
15:36, 3 October 2012 PECVD2-SiNx-Comparison table-2% SiH4-100C-120W.pdf (file) 34 KB   1
15:38, 3 October 2012 PECVD2-SiNx-Comparison table-2% SiH4-250C-120W.pdf (file) 34 KB   1
16:08, 3 October 2012 PECVD2-SiNx-l.s.-Comparison table-2% SiH4-100C-120W.pdf (file) 34 KB   1
15:48, 3 October 2012 PECVD2-SiNxComparison table-2% SiH4-100C-120W.pdf (file) 34 KB   1
15:49, 3 October 2012 PECVD2-SiNxComparison table-2% SiH4-250C-120W.pdf (file) 34 KB   1
16:11, 3 October 2012 PECVD2-SiNx-m.s.-Comparison table-2% SiH4-100C-120W.pdf (file) 35 KB   1
16:09, 3 October 2012 PECVD2-SiNx -m.s.-Comparison table-2% SiH4-100C-120W.pdf (file) 35 KB   1
15:55, 3 October 2012 PECVD2-SiNx Comparison table-2% SiH4-100C-120W.pdf (file) 35 KB   1
15:56, 3 October 2012 PECVD2-SiNx Comparison table-2% SiH4-250C-120W.pdf (file) 35 KB   1
16:14, 3 October 2012 PECVD2-SiNx-medium-Comparison table-2% SiH4-100C-120W.pdf (file) 35 KB   1
11:56, 31 March 2014 SFI Sputter.pdf (file) 35 KB   1
16:54, 20 August 2013 Standard recipe SiN-PECVD.pdf (file) 36 KB   1
16:54, 20 August 2013 Standard recipe SiO2-PECVD.pdf (file) 36 KB   1
10:32, 27 December 2018 STD LSNitride2 recipe new info.pdf (file) 37 KB   2
13:50, 3 October 2012 PECVD2-SiO2-HDR-100% SiH4.pdf (file) 39 KB   1
13:41, 3 October 2012 PECVD2-SiO2-LDR-100% SiH4.pdf (file) 39 KB   1
13:36, 31 March 2014 Thermal Evaporator2.pdf (file) 40 KB   1
16:36, 20 August 2013 Gas Change CHF3-Ar-3.pdf (file) 40 KB   1
14:57, 24 March 2014 Advanced PECVD OXIDE 300C standard recipe.pdf (file) 40 KB   1
16:38, 20 August 2013 Gas Change CF4-SF6-CF4.pdf (file) 40 KB   1
09:36, 27 May 2020 Advanced Vacuum PECVD.pdf (file) 41 KB   1
10:10, 27 May 2020 SOP for Advanced Vacuum PECVD.pdf (file) 41 KB 5-27-2020 Biljana Stamenic 1
10:35, 31 March 2014 New Advanced PECVD OXIDE 300C standard recipe.pdf (file) 41 KB   1
15:32, 24 March 2014 NEw Advanced PECVD OXIDE 300C standard recipe.pdf (file) 41 KB   1
16:25, 8 April 2014 Advanced PECVD OXIDE 300C standard recipe OXIDE Standard Recipe.pdf (file) 41 KB   1
16:50, 24 March 2014 Advanced PECVD-Nitride2 300C standard recipe.pdf (file) 41 KB   3
16:52, 24 March 2014 Advanced PECVD-Nitride2 300C standard recipe Nitride2 recipe.pdf (file) 41 KB   1
16:24, 8 April 2014 Advanced PECVD-Nitride2 300C standard recipe Nitride2 Standard Recipe.pdf (file) 41 KB   1
12:12, 3 October 2012 PECVD2-SiN-Table-Low stres SiNx-100% SiH4-120W-100C.pdf (file) 41 KB   1
10:25, 31 March 2014 Advanced PECVD-Nitride2 300C Standard Recipe.pdf (file) 41 KB   2
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