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11:55, 3 October 2012
PECVD2-SiN-Recipe-Low stress SiNx-100%SiH4-120W-50C.pdf
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file
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42 KB
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11:59, 3 October 2012
PECVD2-SiN-Recipe-Low stres SiNx-100% SiH4-120W-100C.pdf
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file
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41 KB
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12:00, 3 October 2012
PECVD2-SiN-Recipe-Low stress SiNx-100% SiH4-120W-250C.pdf
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file
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42 KB
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12:05, 3 October 2012
PECVD2-SiN-Recipe-Medium stress SiNx-100%SiH4-120W-50C.pdf
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file
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41 KB
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12:05, 3 October 2012
PECVD2-SiN-Recipe-Medium stres SiNx-100% SiH4-120W-100C.pdf
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file
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41 KB
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12:06, 3 October 2012
PECVD2-SiN-Recipe-Medium stress SiNx-100% SiH4-120W-250C.pdf
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file
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42 KB
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12:12, 3 October 2012
PECVD2-SiN-Table-Low stres SiNx-100% SiH4-120W-100C.pdf
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41 KB
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12:17, 3 October 2012
PECVD2-SiN-SEM- Medium stres SiNx-100% SiH4-120W-100C.pdf
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375 KB
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13:41, 3 October 2012
PECVD2-SiO2-LDR-100% SiH4.pdf
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39 KB
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13:46, 3 October 2012
PECVD2-SiO2-SEM-LDR SiO2-100% SiH4-100C-15W.pdf
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446 KB
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13:50, 3 October 2012
PECVD2-SiO2-HDR-100% SiH4.pdf
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39 KB
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15:36, 3 October 2012
PECVD2-SiNx-Comparison table-2% SiH4-100C-120W.pdf
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34 KB
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15:38, 3 October 2012
PECVD2-SiNx-Comparison table-2% SiH4-250C-120W.pdf
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34 KB
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15:48, 3 October 2012
PECVD2-SiNxComparison table-2% SiH4-100C-120W.pdf
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34 KB
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15:49, 3 October 2012
PECVD2-SiNxComparison table-2% SiH4-250C-120W.pdf
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34 KB
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15:55, 3 October 2012
PECVD2-SiNx Comparison table-2% SiH4-100C-120W.pdf
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35 KB
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15:56, 3 October 2012
PECVD2-SiNx Comparison table-2% SiH4-250C-120W.pdf
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35 KB
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16:08, 3 October 2012
PECVD2-SiNx-l.s.-Comparison table-2% SiH4-100C-120W.pdf
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file
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34 KB
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16:09, 3 October 2012
PECVD2-SiNx -m.s.-Comparison table-2% SiH4-100C-120W.pdf
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35 KB
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16:09, 3 October 2012
PECVD2-SiNx -h.s.-Comparison table-2% SiH4-100C-120W.pdf
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file
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41 KB
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16:11, 3 October 2012
PECVD2-SiNx-m.s.-Comparison table-2% SiH4-100C-120W.pdf
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file
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35 KB
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16:14, 3 October 2012
PECVD2-SiNx-medium-Comparison table-2% SiH4-100C-120W.pdf
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35 KB
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16:36, 3 October 2012
PECVD2-SiNx -SEM-2% SiH4-100C-50W.pdf
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706 KB
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16:48, 3 October 2012
PECVD2-SiNx-medium stress-SEM-2% SiH4-100C-50W.pdf
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700 KB
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16:53, 3 October 2012
PECVD2-SiNx-high stress-SEM-2% SiH4-100C-5W.pdf
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658 KB
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15:52, 10 October 2012
PECVD2-SiO2Recipe-5W-50C.pdf
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file
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41 KB
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15:52, 10 October 2012
PECVD2-SiO2Recipe-5W-100C.pdf
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41 KB
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15:52, 10 October 2012
PECVD2-SiO2Recipe-5W-250C.pdf
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file
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41 KB
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16:00, 10 October 2012
SiO2 film Unaxis ICP vs PECVD I.pdf
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41 KB
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16:04, 10 October 2012
SEM pictures SiO2 100C.pdf
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566 KB
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16:36, 20 August 2013
Gas Change CHF3-Ar-3.pdf
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file
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40 KB
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16:38, 20 August 2013
Gas Change CF4-SF6-CF4.pdf
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40 KB
1
16:54, 20 August 2013
Standard recipe SiN-PECVD.pdf
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file
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36 KB
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16:54, 20 August 2013
Standard recipe SiO2-PECVD.pdf
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file
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36 KB
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11:00, 21 August 2013
Panasonic1-SiO-Etch-SEM.pdf
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file
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48 KB
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09:53, 11 September 2013
WIKI PECVD SIN Index,dep.rates,stress.pdf
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130 KB
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09:55, 11 September 2013
PECVD1-WIKI PECVD SiN Index, dep.rates, stress.pdf
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file
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130 KB
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16:53, 12 March 2014
PECVD1-PECVD SIN data-February 2014 SiN Index,dep.rates,stress.pdf
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106 KB
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17:09, 12 March 2014
PECVD1 SiN data-February 2014 AFM roughness.pdf
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156 KB
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09:37, 13 March 2014
PECVD1-SiN data.pdf
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106 KB
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10:00, 13 March 2014
PECVD1-SiN Calibration-February 2014.pdf
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file
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105 KB
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10:07, 13 March 2014
PECVD1-SiN Calibration-February 2014 SiN 1000A.pdf
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103 KB
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11:20, 13 March 2014
PECVD1- SiO2 Calibratiion February 2014 SiO2 1000A.pdf
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file
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112 KB
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12:06, 13 March 2014
PECVD1- SiO2 Calibratiion February 2014-1 SiO2 1000A.pdf
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113 KB
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16:36, 13 March 2014
ADV OXIDE data.pdf
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88 KB
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17:02, 13 March 2014
ADV.PECVD OXIDE-March 2014.pdf
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file
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91 KB
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14:43, 19 March 2014
PECVD1-SiN-standard recipe.pdf
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file
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189 KB
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14:55, 19 March 2014
PECVD1-SiN Data-March 2014.pdf
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file
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101 KB
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16:20, 19 March 2014
SiO2 100% SiH4 HDR 50C.pdf
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file
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42 KB
1
12:08, 20 March 2014
PECVD1-SiN-standard recipe 1000A.pdf
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file
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295 KB
1
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