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15:07, 5 January 2024
GCA 6300 Available chucks 2023.pptx
(
file
)
7.03 MB
1
17:17, 1 April 2020
Recipe parameters.jpg
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file
)
6.98 MB
1
09:50, 7 April 2020
PECVD1 particulates in 2019.jpg
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file
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6.68 MB
1
15:28, 5 January 2024
GCA 6300 Available chucks 2023.pdf
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file
)
4.96 MB
1
20:32, 7 April 2020
AUTOSTEP 200-PIECES instruction 6-20-19.pptx
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file
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4.72 MB
1
12:10, 11 December 2014
Photos Sheet1.pdf
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file
)
4.23 MB
1
14:36, 15 April 2020
Single centered mask-Piece 1st litho AUTOSTEP 200.pptx
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file
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3.27 MB
1
14:15, 15 April 2020
Single centerd mask- Piece 1st litho AUTOSTEP 200-PIECES.pptx
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file
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3.27 MB
1
10:01, 8 April 2020
AUTOSTEP 200-PIECES 1st litho BL and BR orientation.pptx
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file
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3.27 MB
1
11:58, 8 January 2024
Single centered mask-Piece 1st litho AUTOSTEP 200.pdf
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file
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2.76 MB
1
15:02, 17 October 2014
Dirty platen photos.pdf
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file
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2.65 MB
1
17:12, 5 January 2024
Autostep 200 chucks-2023.pdf
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file
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2.58 MB
1
14:32, 7 April 2020
PECVD2 photo for cleaning.png
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file
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1.88 MB
1
14:14, 7 April 2020
PECVD1-cleaning.png
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file
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1.79 MB
1
14:06, 26 March 2019
UCSBTEST.png
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file
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1.69 MB
1
14:21, 7 April 2020
AdvPECVD2LSNdep2.jpg
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file
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1.68 MB
1
15:31, 8 January 2015
New PECVD1-LS SION-recipe 2014 LS SION recipe.pdf
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file
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1.59 MB
1
14:24, 7 April 2020
PECVD2 clean.png
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file
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1.59 MB
1
14:14, 15 April 2020
4 Quads mask plate Piece - 2nd litho AUTOSTEP 200.pptx
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file
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1.51 MB
1
13:40, 26 March 2019
UCSBTEST2 - gain4 for (0.160-1.60)um particles.png
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file
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1.45 MB
1
14:19, 26 March 2019
UCSBTEST2 for small particles.png
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file
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1.45 MB
1
16:11, 8 January 2015
New PECVD1-LS SIN-Turner05recipe 2014 LS SIN recipe.pdf
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file
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1.38 MB
1
12:33, 8 January 2024
4 Quads mask plate Piece - 2nd litho AUTOSTEP 200 (1).pdf
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file
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1.35 MB
1
10:05, 21 April 2020
Adv. PECVD2- STD Nitride2.xlsx
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file
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1.31 MB
1
12:18, 10 December 2014
PECVD1-LS SION-recipe2014 LS SION recipe.pdf
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file
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1.24 MB
1
16:23, 3 December 2014
PECVD1-LS SION recipe 2014.pdf
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file
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1.24 MB
1
15:24, 10 October 2014
PECVD1-SiON-recipe 2014 LS SION recipe LS SION recipe.pdf
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file
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1.24 MB
1
10:53, 1 October 2014
PECVD1-SiON-recipe 2014 LS SION recipe.pdf
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file
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1.24 MB
1
12:39, 8 January 2024
Single centered mask-Piece 2nd litho AUTOSTEP 200.pdf
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file
)
1.19 MB
1
16:37, 5 December 2014
PECVD1-LS SIN recipe 2014.pdf
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file
)
1.03 MB
1
16:34, 21 March 2014
PECVD1-SiO2-standard recipe 1000A.pdf
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file
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1,007 KB
1
10:30, 6 April 2020
LPD Ranges.png
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file
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957 KB
1
10:08, 21 April 2020
Adv. PECVD2- STD LSNitride2.xlsx
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file
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944 KB
1
10:37, 6 April 2020
Area from Equals Max size.png
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file
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866 KB
1
11:24, 6 April 2020
Area from 1.png
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file
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862 KB
1
10:59, 21 April 2020
Adv. PECVD2-STD SiO2.xlsx
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file
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783 KB
2
11:42, 21 October 2014
PECVD1-LS SIN-Turner05recipe 2014 LS SIN recipe.pdf
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file
)
733 KB
1
16:36, 3 October 2012
PECVD2-SiNx -SEM-2% SiH4-100C-50W.pdf
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file
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706 KB
1
16:48, 3 October 2012
PECVD2-SiNx-medium stress-SEM-2% SiH4-100C-50W.pdf
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file
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700 KB
1
16:53, 3 October 2012
PECVD2-SiNx-high stress-SEM-2% SiH4-100C-5W.pdf
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file
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658 KB
1
10:52, 11 December 2014
NewAdvPECVD OXIDE 300C standard recipe.pdf
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file
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653 KB
1
11:54, 9 January 2015
New Adv PECVD OXIDE 300C standard recipe OXIDE Standard Recipe.pdf
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file
)
653 KB
1
15:04, 8 January 2015
New PECVD1-SiN-standard recipe 2014 SiN standard recipe.pdf
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file
)
595 KB
1
15:03, 8 January 2015
New PECVD1-SiO2-standard recipe 2014 SiO2 standard recipe.pdf
(
file
)
594 KB
1
16:04, 10 October 2012
SEM pictures SiO2 100C.pdf
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file
)
566 KB
1
13:46, 3 October 2012
PECVD2-SiO2-SEM-LDR SiO2-100% SiH4-100C-15W.pdf
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file
)
446 KB
1
10:39, 24 January 2024
Wafer Particle Count-Process Traveler.pdf
(
file
)
426 KB
2
14:48, 2 January 2019
18.pdf
(
file
)
400 KB
1
15:03, 2 January 2019
STD LSNitride2 5-9-18.pdf
(
file
)
400 KB
1
08:52, 20 October 2017
New AdvPECVD-LS Nitride2 300C standard recipe LS Nitride2 standard recipe.pdf
(
file
)
380 KB
1
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