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This special page shows all uploaded files.

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Date Name Thumbnail Size Description Versions
14:39, 11 September 2013 01-ICP-PECVD-a-Si-Deposition Recipe-250C.pdf (file) 495 KB   1
16:08, 11 September 2013 02-ICP-PECVD-a-Si Film-90C.pdf (file) 131 KB   1
16:03, 11 September 2013 03-Amorphous-Si-PECVD-2.pdf (file) 248 KB   1
09:07, 17 September 2013 05-SiO2 Nano-structure Etch.pdf (file) 937 KB   1
11:36, 17 September 2013 06-XeF2-etch-recipe.pdf (file) 312 KB   1
15:42, 18 September 2013 07-GaN Etch-Panasonic-ICP-1.pdf (file) 1.43 MB   1
15:40, 19 September 2013 08-Plasma Etching of GaN-RIE5.pdf (file) 706 KB   1
14:13, 24 September 2013 09-Plasma Etching of GaN-UnaxisPM1.pdf (file) 500 KB   1
09:59, 25 September 2013 10-Si Etch using DRIE (single-step).pdf (file) 843 KB   1
11:16, 27 September 2013 11-CZT etching-1.pdf (file) 110 KB   1
10:58, 2 October 2013 12-Plasma Etching of AlGaAs-Panasonic ICP-1-Etcher.pdf (file) 870 KB   1
11:26, 2 October 2013 13-GaAs-AlGaAs Etching-RIE-5.pdf (file) 599 KB   1
13:47, 2 October 2013 14-AlAs-GR-cal etch-Unaxis ICP etcher.pdf (file) 671 KB   1
13:41, 2 October 2013 15-GaAs etch-Unaxis ICP etcher.pdf (file) 765 KB   1
16:11, 2 October 2013 16-GaAs etch-ICP-2.pdf (file) 229 KB   1
08:19, 3 October 2013 17-InP&InGaAs etch-Cl2H2Ar-Unaxis-VLR.pdf (file) 1,009 KB   1
10:40, 3 October 2013 18-InP-based etching-Cl2N2Ar.pdf (file) 985 KB   1
09:02, 7 October 2013 19-AlN-Sputtering-Film-Sputter-2.pdf (file) 157 KB   1
09:19, 7 October 2013 20-Al-Sputtering-Film-Sputter-2.pdf (file) 599 KB   1
10:37, 10 October 2013 21-Au-Sputter-film-recipes-Sputter-2.pdf (file) 240 KB   1
10:22, 28 October 2013 22-TiO2-Film-Sputter-2.pdf (file) 172 KB   1
14:03, 18 March 2014 23-Tungsten Sputtering Film-Sputter-4-Ar.pdf (file) 310 KB   1
12:23, 5 November 2013 24-Ni and Ta Films using Sputter-3.pdf (file) 165 KB   1
16:57, 30 January 2014 25-Dry Etch of Unaxis ICP-grown SiO2 using Vapor HF tool-a.pdf (file) 1.74 MB   1
16:59, 30 January 2014 26-Dry Etch of Unaxis ICP-grown SiO2 using Vapor HF tool-b.pdf (file) 1.07 MB   1
15:09, 18 March 2014 27-SiNx Film (Bias=50W) Sidewall Coverage.pdf (file) 150 KB   1
15:28, 18 March 2014 28-Very-low-pin-hole-density SiNx film at 300 C.pdf (file) 410 KB   1
16:10, 17 April 2014 29-UnaxisPM3-SiO2-SiH4-O2-He.pdf (file) 88 KB   1
14:11, 18 April 2014 30-Redicing Nanowire Diameter by Thermal Oxidation and Vapored HF Etch.pdf (file) 1.31 MB   1
14:22, 18 April 2014 31-Holography Process for 1D-lines and 2D-dots-rev-3-13-2014.pdf (file) 624 KB   1
09:22, 21 January 2015 32-Reducing AlCl3 Corrosion with CHF3 plasma.pdf (file) 636 KB   1
10:21, 27 January 2015 33-Etching SiO2 with Vertical Side-wall.pdf (file) 924 KB   1
15:59, 29 June 2015 34-High-stress SiNx at 250 C using Unaxis ICP deposition tool.pdf (file) 10 KB   1
15:27, 29 June 2015 35-Low-stress SiNx at 250 C using Unaxis ICP deposition tool.pdf (file) 118 KB   1
16:15, 29 June 2015 36-Medium-stress SiNx using Unaxis ICP deposition tool.pdf (file) 16 KB   1
15:12, 22 June 2015 3600 D, D2v Spin Speed Curve.pdf (file) 52 KB   1
11:39, 30 June 2015 37-Low-stress SiNx at 100 C using Unaxis ICP deposition tool.pdf (file) 169 KB   1
11:55, 30 June 2015 38-High-stress SiNx at 100 C using Unaxis ICP deposition tool.pdf (file) 43 KB   1
12:07, 30 June 2015 39-Medium-stress SiNx at 100C using Unaxis ICP deposition tool.pdf (file) 48 KB   1
14:08, 22 July 2015 42-Etching Platinum using Oxford Ion Mill Tool-a.pdf (file) 1.62 MB   1
13:58, 22 July 2015 42-Etching Platinum using Oxford Ion Mill Tool.pdf (file) 1.62 MB   1
14:36, 2 September 2015 43-Issue with the etch of InP-InGaAs-and- InAlAs-b.pdf (file) 838 KB   1
15:49, 9 October 2015 44-Etching Gold with Al2O3 Mask using Oxford Ion Mill Tool.pdf (file) 2.28 MB   1
16:23, 1 December 2015 45-Etching Nickel with Al2O3 Mask using Oxford Ion Mill Tool.pdf (file) 1.87 MB   1
16:42, 16 December 2015 46-Mo Film using Sputter3.pdf (file) 143 KB   1
16:22, 16 February 2016 47-Photolithography of SU8-2005.pdf (file) 1.55 MB   1
16:30, 16 February 2016 48-Photolithography of SU8-2010.pdf (file) 360 KB   1
16:39, 16 February 2016 49-Photolithography of SU8-2015-a.pdf (file) 327 KB   1
16:24, 17 February 2016 50-InP Etch-2-17-2016.pdf (file) 842 KB   1
15:54, 13 January 2017 51-SiNx-Etch-Recipe-using-RIE3.pdf (file) 1.07 MB   1
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