Uploads by Biljana

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Date Name Thumbnail Size Description Versions
09:53, 11 September 2013 WIKI PECVD SIN Index,dep.rates,stress.pdf (file) 130 KB   1
12:02, 30 March 2020 Unaxis SOP 3-30-2020.docx (file) 134 KB   1
10:15, 27 March 2020 Unaxis SOP 3-27-2020.pdf (file) 52 KB   1
10:00, 27 March 2020 Unaxis SOP 3-12-2020.docx (file) 133 KB   1
14:19, 26 March 2019 UCSBTEST2 for small particles.png (file) 1.45 MB   1
08:21, 7 April 2020 UCSBTEST2 .png (file) 626 KB   1
13:40, 26 March 2019 UCSBTEST2 - gain4 for (0.160-1.60)um particles.png (file) 1.45 MB   1
09:33, 1 April 2020 UCSBTEST2.jpg (file) 162 KB   1
08:54, 1 April 2020 UCSBTEST1Gain4.jpg (file) 162 KB scan for gain4 1
08:19, 7 April 2020 UCSBTEST1.png (file) 611 KB   1
14:06, 26 March 2019 UCSBTEST.png (file) 1.69 MB   1
10:54, 24 May 2017 Thermal evaporator 2 Sheet1.pdf (file) 31 KB   1
13:17, 24 May 2017 Thermal evaporator 2.pdf (file) 20 KB   1
13:28, 24 May 2017 Thermal evaporator 2-new Sheet1.pdf (file) 20 KB   1
13:36, 31 March 2014 Thermal Evaporator2.pdf (file) 40 KB   1
10:07, 12 April 2016 Surfscan.jpg (file) 162 KB   1
09:53, 12 April 2016 Surfscan-Surfscan 6200 info.pdf (file) 114 KB   1
16:54, 20 August 2013 Standard recipe SiO2-PECVD.pdf (file) 36 KB   1
16:54, 20 August 2013 Standard recipe SiN-PECVD.pdf (file) 36 KB   1
14:43, 23 May 2017 Sputter5 SiO2 2017 SiO2 film.pdf (file) 86 KB   1
14:15, 15 April 2020 Single centered mask-Piece 2nd litho AUTOSTEP 200.pptx (file) 1.47 MB   1
14:36, 15 April 2020 Single centered mask-Piece 1st litho AUTOSTEP 200.pptx (file) 3.27 MB   1
14:15, 15 April 2020 Single centerd mask- Piece 1st litho AUTOSTEP 200-PIECES.pptx (file) 3.27 MB   1
16:00, 10 October 2012 SiO2 film Unaxis ICP vs PECVD I.pdf (file) 41 KB   1
16:20, 19 March 2014 SiO2 100% SiH4 HDR 50C.pdf (file) 42 KB   1
16:03, 2 January 2019 STD SiO2 5-9-18.pdf (file) 239 KB   1
15:49, 2 January 2019 STD Oxide 5-9-18 Dep.recipe.pdf (file) 238 KB   1
15:39, 2 January 2019 STD Nitride 5-9-18 Dep.recipe.pdf (file) 209 KB   1
15:26, 2 January 2019 STD Nitride 5-9-18.pdf (file) 209 KB   1
14:15, 2 January 2019 STD LSNitride2 recipe new info 1-2-2019 Dep.recipe.pdf (file) 349 KB   2
10:32, 27 December 2018 STD LSNitride2 recipe new info.pdf (file) 37 KB   2
15:03, 2 January 2019 STD LSNitride2 5-9-18.pdf (file) 400 KB   1
14:16, 2 January 2019 STD LSNitride2 12-14-18 recipe.pdf (file) 349 KB   1
10:10, 27 May 2020 SOP for Advanced Vacuum PECVD.pdf (file) 41 KB 5-27-2020 Biljana Stamenic 1
11:56, 31 March 2014 SFI Sputter.pdf (file) 35 KB   1
16:04, 10 October 2012 SEM pictures SiO2 100C.pdf (file) 566 KB   1
17:17, 1 April 2020 Recipe parameters.jpg (file) 6.98 MB   1
13:20, 24 March 2020 RMS control.png (file) 26 KB   1
10:07, 31 March 2014 RIE 3 Operationing instructions.pdf (file) 71 KB   1
12:10, 11 December 2014 Photos Sheet1.pdf (file) 4.23 MB   1
11:00, 21 August 2013 Panasonic1-SiO-Etch-SEM.pdf (file) 48 KB   2
14:32, 7 April 2020 PECVD2 photo for cleaning.png (file) 1.88 MB   1
14:24, 7 April 2020 PECVD2 clean.png (file) 1.59 MB   1
15:52, 10 October 2012 PECVD2-SiO2Recipe-5W-50C.pdf (file) 41 KB   1
15:52, 10 October 2012 PECVD2-SiO2Recipe-5W-250C.pdf (file) 41 KB   1
15:52, 10 October 2012 PECVD2-SiO2Recipe-5W-100C.pdf (file) 41 KB   1
13:46, 3 October 2012 PECVD2-SiO2-SEM-LDR SiO2-100% SiH4-100C-15W.pdf (file) 446 KB   1
13:41, 3 October 2012 PECVD2-SiO2-LDR-100% SiH4.pdf (file) 39 KB   1
13:50, 3 October 2012 PECVD2-SiO2-HDR-100% SiH4.pdf (file) 39 KB   1
15:56, 3 October 2012 PECVD2-SiNx Comparison table-2% SiH4-250C-120W.pdf (file) 35 KB   1
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