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Date Name Thumbnail Size User Description Versions
08:42, 23 July 2012 (4-Methylthiophenyl)methyl phenyl sulfonium triflate MSDS.pdf (file) 27 KB Zwarburg {{MSDS}} 1
08:42, 23 July 2012 (4-Phenylthiophenyl)diphenylsulfonium triflate MSDS.pdf (file) 30 KB Zwarburg {{MSDS}} 1
14:39, 11 September 2013 01-ICP-PECVD-a-Si-Deposition Recipe-250C.pdf (file) 495 KB Ningcao   1
16:08, 11 September 2013 02-ICP-PECVD-a-Si Film-90C.pdf (file) 131 KB Ningcao   1
16:03, 11 September 2013 03-Amorphous-Si-PECVD-2.pdf (file) 248 KB Ningcao   1
09:07, 17 September 2013 05-SiO2 Nano-structure Etch.pdf (file) 937 KB Ningcao   1
11:36, 17 September 2013 06-XeF2-etch-recipe.pdf (file) 312 KB Ningcao   1
15:42, 18 September 2013 07-GaN Etch-Panasonic-ICP-1.pdf (file) 1.43 MB Ningcao   1
15:40, 19 September 2013 08-Plasma Etching of GaN-RIE5.pdf (file) 706 KB Ningcao   1
14:13, 24 September 2013 09-Plasma Etching of GaN-UnaxisPM1.pdf (file) 500 KB Ningcao   1
15:02, 17 January 2018 10-Si Etch Bosch DSEIII.pdf (file) 616 KB Thibeault   1
16:52, 3 June 2016 10-Si Etch Bosch Release DRIE.pdf (file) 533 KB Thibeault   1
15:02, 17 January 2018 10-Si Etch Single Step Smooth Sidewall DSEIII.pdf (file) 1.63 MB Thibeault   1
09:59, 25 September 2013 10-Si Etch using DRIE (single-step).pdf (file) 843 KB Ningcao   1
19:17, 18 March 2019 104 Ta Etch.pdf (file) 257 KB Mitchell   1
11:16, 27 September 2013 11-CZT etching-1.pdf (file) 110 KB Ningcao   1
17:09, 8 November 2012 1165-Resist-Remover.pdf (file) 1.61 MB Zwarburg   1
08:42, 23 July 2012 1165 Stripper MSDS.pdf (file) 132 KB Zwarburg {{MSDS}} 1
10:58, 2 October 2013 12-Plasma Etching of AlGaAs-Panasonic ICP-1-Etcher.pdf (file) 870 KB Ningcao   1
11:26, 2 October 2013 13-GaAs-AlGaAs Etching-RIE-5.pdf (file) 599 KB Ningcao   1
13:47, 2 October 2013 14-AlAs-GR-cal etch-Unaxis ICP etcher.pdf (file) 671 KB Ningcao   1
13:41, 2 October 2013 15-GaAs etch-Unaxis ICP etcher.pdf (file) 765 KB Ningcao   1
16:11, 2 October 2013 16-GaAs etch-ICP-2.pdf (file) 229 KB Ningcao   1
08:19, 3 October 2013 17-InP&InGaAs etch-Cl2H2Ar-Unaxis-VLR.pdf (file) 1,009 KB Ningcao   1
08:42, 23 July 2012 18-Crown-6 MSDS.pdf (file) 32 KB Zwarburg {{MSDS}} 1
10:40, 3 October 2013 18-InP-based etching-Cl2N2Ar.pdf (file) 985 KB Ningcao   1
14:48, 2 January 2019 18.pdf (file) 400 KB Biljana   1
09:02, 7 October 2013 19-AlN-Sputtering-Film-Sputter-2.pdf (file) 157 KB Ningcao   1
12:11, 4 October 2019 194 Ru Etch O2,Cl2.pdf (file) 405 KB John d BillM - Pan2 Ru etch 2019-09-19 1
08:42, 23 July 2012 2-Bromo-3-hexylthiophene MSDS.pdf (file) 37 KB Zwarburg {{MSDS}} 1
08:42, 23 July 2012 2-Hydroxy-2-Methylpropiophenone MSDS.pdf (file) 31 KB Zwarburg {{MSDS}} 1
09:19, 7 October 2013 20-Al-Sputtering-Film-Sputter-2.pdf (file) 599 KB Ningcao   1
16:42, 21 February 2020 2000 pixel mkids.pdf (file) 9.69 MB Thibeault   1
10:46, 13 July 2021 200um square v1.gds (file) 170 bytes John d TESTING only - please delte 1
09:34, 25 January 2019 2018 User Chart by Discipline.png (file) 63 KB Thibeault   1
22:51, 13 January 2022 2022-01-11 Oxford InP Ridge Wiki Post - Cal01.pdf (file) 1.13 MB John d Oxford ICP Etch Cal SEMs 1
22:55, 13 January 2022 2022-01-12 Oxford InP Ridge Wiki Post - Cal02.pdf (file) 1.11 MB John d Oxford ICP Cal SEMs 1
23:03, 13 January 2022 2022-01-12 Oxford InP Ridge Wiki Post - Cal03.pdf (file) 1.53 MB John d Oxford ICP Etch Cals03 1
10:37, 10 October 2013 21-Au-Sputter-film-recipes-Sputter-2.pdf (file) 240 KB Ningcao   1
10:22, 28 October 2013 22-TiO2-Film-Sputter-2.pdf (file) 172 KB Ningcao   1
14:03, 18 March 2014 23-Tungsten Sputtering Film-Sputter-4-Ar.pdf (file) 310 KB Ningcao   1
12:23, 5 November 2013 24-Ni and Ta Films using Sputter-3.pdf (file) 165 KB Ningcao   1
16:57, 30 January 2014 25-Dry Etch of Unaxis ICP-grown SiO2 using Vapor HF tool-a.pdf (file) 1.74 MB Ningcao   1
16:59, 30 January 2014 26-Dry Etch of Unaxis ICP-grown SiO2 using Vapor HF tool-b.pdf (file) 1.07 MB Ningcao   1
15:09, 18 March 2014 27-SiNx Film (Bias=50W) Sidewall Coverage.pdf (file) 150 KB Ningcao   1
15:28, 18 March 2014 28-Very-low-pin-hole-density SiNx film at 300 C.pdf (file) 410 KB Ningcao   1
16:10, 17 April 2014 29-UnaxisPM3-SiO2-SiH4-O2-He.pdf (file) 88 KB Ningcao   1
08:42, 23 July 2012 3-Aminopropyl)triethoxysilane MSDS.pdf (file) 45 KB Zwarburg {{MSDS}} 1
14:11, 18 April 2014 30-Redicing Nanowire Diameter by Thermal Oxidation and Vapored HF Etch.pdf (file) 1.31 MB Ningcao   1
18:10, 29 July 2022 30D 001.jpg (file) 109 KB Noahdutra SiO2 Etch Pan 1 7/27/22 1
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