Help
Uploads by Biljana
Jump to navigation
Jump to search
This special page shows all uploaded files.
File list
Items per page:
20
50
100
250
500
Search for media name:
Username:
Include old versions of files
Go
First page
Previous page
Next page
Last page
Date
Name
Thumbnail
Size
Description
Versions
16:57, 8 April 2014
New Advanced PECVD-Nitride2 300C standard recipe.pdf
(
file
)
41 KB
1
11:59, 3 October 2012
PECVD2-SiN-Recipe-Low stres SiNx-100% SiH4-120W-100C.pdf
(
file
)
41 KB
1
15:52, 10 October 2012
PECVD2-SiO2Recipe-5W-50C.pdf
(
file
)
41 KB
1
12:05, 3 October 2012
PECVD2-SiN-Recipe-Medium stres SiNx-100% SiH4-120W-100C.pdf
(
file
)
41 KB
1
16:00, 10 October 2012
SiO2 film Unaxis ICP vs PECVD I.pdf
(
file
)
41 KB
1
12:05, 3 October 2012
PECVD2-SiN-Recipe-Medium stress SiNx-100%SiH4-120W-50C.pdf
(
file
)
41 KB
1
11:55, 3 October 2012
PECVD2-SiN-Recipe-Low stress SiNx-100%SiH4-120W-50C.pdf
(
file
)
42 KB
1
10:18, 31 March 2014
Advanced PECVD-LS Nitride2 300C standard recipe.pdf
(
file
)
42 KB
1
16:26, 8 April 2014
Advanced PECVD-LS Nitride2 300C standard recipe LS Nitride2 standard recipe.pdf
(
file
)
42 KB
1
10:37, 31 March 2014
New Advanced PECVD-LS Nitride2 300C standard recipe.pdf
(
file
)
42 KB
1
16:20, 19 March 2014
SiO2 100% SiH4 HDR 50C.pdf
(
file
)
42 KB
1
12:06, 3 October 2012
PECVD2-SiN-Recipe-Medium stress SiNx-100% SiH4-120W-250C.pdf
(
file
)
42 KB
1
12:00, 3 October 2012
PECVD2-SiN-Recipe-Low stress SiNx-100% SiH4-120W-250C.pdf
(
file
)
42 KB
1
09:15, 16 April 2014
AdvPECVD OXIDE 300C standard recipe.pdf
(
file
)
42 KB
1
09:11, 16 April 2014
AdvPECVD-Nitride2 300C standard recipe.pdf
(
file
)
42 KB
1
09:18, 16 April 2014
AdvPECVD-LS Nitride2 300C standard recipe.pdf
(
file
)
43 KB
1
09:03, 24 March 2020
Autostep main computer switch.png
(
file
)
43 KB
1
15:09, 26 March 2020
Autostep 200 panel door.png
(
file
)
47 KB
1
11:00, 21 August 2013
Panasonic1-SiO-Etch-SEM.pdf
(
file
)
48 KB
2
09:01, 24 March 2020
Autostep main computer -1.png
(
file
)
49 KB
1
10:15, 27 March 2020
Unaxis SOP 3-27-2020.pdf
(
file
)
52 KB
1
15:07, 5 January 2024
GCA 6300+chucks+shims 2023.xlsx
(
file
)
54 KB
1
08:56, 24 March 2020
Autostep Cabinet .png
(
file
)
56 KB
1
14:42, 1 April 2014
IBD Ta2O5 deposition details.pdf
(
file
)
57 KB
1
14:58, 31 March 2014
IBD SiO2 Standard Recipe.pdf
(
file
)
57 KB
1
15:05, 31 March 2014
New IBD SiO2 Standard Recipe.pdf
(
file
)
57 KB
1
13:21, 1 April 2014
IBD SiNdeposition.pdf
(
file
)
59 KB
1
12:28, 29 December 2023
GCA 6300 Running a JOB 3.pdf
(
file
)
60 KB
1
16:59, 20 March 2014
PECVD1 SIN 2-pt Thickness uniformity March 2014.pdf
(
file
)
62 KB
1
13:46, 20 March 2014
PECVD1 Operating Instructions.pdf
(
file
)
64 KB
1
08:51, 21 March 2014
ALD operating instructions-1.pdf
(
file
)
66 KB
1
12:29, 29 December 2023
GCA 6300 Reboot frozen keyboard.pdf
(
file
)
69 KB
1
11:23, 7 April 2020
Glossary.docx
(
file
)
71 KB
1
10:07, 31 March 2014
RIE 3 Operationing instructions.pdf
(
file
)
71 KB
1
12:28, 29 December 2023
GCA 6300 General Information about system 4.pdf
(
file
)
77 KB
1
15:53, 8 January 2024
AUTOSTEP 200 User Accessible Commands 010524.pdf
(
file
)
77 KB
1
12:29, 29 December 2023
GCA6300 Optimizing the process 6.pdf
(
file
)
78 KB
1
16:39, 30 March 2020
PECVD.docx
(
file
)
79 KB
1
14:02, 20 March 2014
PECVD1 SIN 2-pt Thickness-index uniformity March 2014.pdf
(
file
)
82 KB
2
14:43, 23 May 2017
Sputter5 SiO2 2017 SiO2 film.pdf
(
file
)
86 KB
1
16:36, 13 March 2014
ADV OXIDE data.pdf
(
file
)
88 KB
1
17:02, 13 March 2014
ADV.PECVD OXIDE-March 2014.pdf
(
file
)
91 KB
1
17:39, 5 January 2024
Autostep 200 - Standard Operating Procedure-2023.pdf
(
file
)
92 KB
1
16:46, 8 January 2024
Focus and exposure optimization- Autostep200-II.pdf
(
file
)
94 KB
1
14:12, 20 March 2014
PECVD1 SIN Thickness and index uniformity March 2014.pdf
(
file
)
94 KB
1
15:37, 29 December 2023
GCA 6300 - Commands.pdf
(
file
)
96 KB
1
14:55, 19 March 2014
PECVD1-SiN Data-March 2014.pdf
(
file
)
101 KB
1
14:05, 20 March 2014
PECVD1 SIN Thickness &index uniformity March 2014.pdf
(
file
)
103 KB
1
10:07, 13 March 2014
PECVD1-SiN Calibration-February 2014 SiN 1000A.pdf
(
file
)
103 KB
1
12:29, 29 December 2023
GCA 6300 Programming a Job 7.pdf
(
file
)
103 KB
1
First page
Previous page
Next page
Last page
Navigation menu
Personal tools
Create account
Log in
Namespaces
Special page
Variants
Views
More
Search
InvisibleMenu
QuickLinks
Lab Rules
Common Questions/FAQ
Staff List
Equipment Signup
Chemicals + MSDS
Equipment
Full Tool List
Lithography
Vacuum Deposition
Dry Etch
Wet Processing
Thermal Processing
Packaging
Metrology & Test
Recipes and Data
Lithography
Vacuum Deposition
Dry Etching
Wet Etching
Thermal Processing
Packaging Tools
Data + Info
Process Control Data
Calculators/Utilities
NanoFab Info
Research + Pubs
Tech Talks
Tools
User contributions
Logs
View user groups
Special pages
Printable version
