Uploads by Biljana

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Date Name Thumbnail Size Description Versions
16:57, 8 April 2014 New Advanced PECVD-Nitride2 300C standard recipe.pdf (file) 41 KB   1
11:59, 3 October 2012 PECVD2-SiN-Recipe-Low stres SiNx-100% SiH4-120W-100C.pdf (file) 41 KB   1
15:52, 10 October 2012 PECVD2-SiO2Recipe-5W-50C.pdf (file) 41 KB   1
12:05, 3 October 2012 PECVD2-SiN-Recipe-Medium stres SiNx-100% SiH4-120W-100C.pdf (file) 41 KB   1
16:00, 10 October 2012 SiO2 film Unaxis ICP vs PECVD I.pdf (file) 41 KB   1
12:05, 3 October 2012 PECVD2-SiN-Recipe-Medium stress SiNx-100%SiH4-120W-50C.pdf (file) 41 KB   1
11:55, 3 October 2012 PECVD2-SiN-Recipe-Low stress SiNx-100%SiH4-120W-50C.pdf (file) 42 KB   1
10:18, 31 March 2014 Advanced PECVD-LS Nitride2 300C standard recipe.pdf (file) 42 KB   1
16:26, 8 April 2014 Advanced PECVD-LS Nitride2 300C standard recipe LS Nitride2 standard recipe.pdf (file) 42 KB   1
10:37, 31 March 2014 New Advanced PECVD-LS Nitride2 300C standard recipe.pdf (file) 42 KB   1
16:20, 19 March 2014 SiO2 100% SiH4 HDR 50C.pdf (file) 42 KB   1
12:06, 3 October 2012 PECVD2-SiN-Recipe-Medium stress SiNx-100% SiH4-120W-250C.pdf (file) 42 KB   1
12:00, 3 October 2012 PECVD2-SiN-Recipe-Low stress SiNx-100% SiH4-120W-250C.pdf (file) 42 KB   1
09:15, 16 April 2014 AdvPECVD OXIDE 300C standard recipe.pdf (file) 42 KB   1
09:11, 16 April 2014 AdvPECVD-Nitride2 300C standard recipe.pdf (file) 42 KB   1
09:18, 16 April 2014 AdvPECVD-LS Nitride2 300C standard recipe.pdf (file) 43 KB   1
09:03, 24 March 2020 Autostep main computer switch.png (file) 43 KB   1
15:09, 26 March 2020 Autostep 200 panel door.png (file) 47 KB   1
11:00, 21 August 2013 Panasonic1-SiO-Etch-SEM.pdf (file) 48 KB   2
09:01, 24 March 2020 Autostep main computer -1.png (file) 49 KB   1
10:15, 27 March 2020 Unaxis SOP 3-27-2020.pdf (file) 52 KB   1
08:56, 24 March 2020 Autostep Cabinet .png (file) 56 KB   1
14:42, 1 April 2014 IBD Ta2O5 deposition details.pdf (file) 57 KB   1
14:58, 31 March 2014 IBD SiO2 Standard Recipe.pdf (file) 57 KB   1
15:05, 31 March 2014 New IBD SiO2 Standard Recipe.pdf (file) 57 KB   1
13:21, 1 April 2014 IBD SiNdeposition.pdf (file) 59 KB   1
16:59, 20 March 2014 PECVD1 SIN 2-pt Thickness uniformity March 2014.pdf (file) 62 KB   1
13:46, 20 March 2014 PECVD1 Operating Instructions.pdf (file) 64 KB   1
08:51, 21 March 2014 ALD operating instructions-1.pdf (file) 66 KB   1
11:23, 7 April 2020 Glossary.docx (file) 71 KB   1
10:07, 31 March 2014 RIE 3 Operationing instructions.pdf (file) 71 KB   1
16:39, 30 March 2020 PECVD.docx (file) 79 KB   1
14:02, 20 March 2014 PECVD1 SIN 2-pt Thickness-index uniformity March 2014.pdf (file) 82 KB   2
14:43, 23 May 2017 Sputter5 SiO2 2017 SiO2 film.pdf (file) 86 KB   1
16:36, 13 March 2014 ADV OXIDE data.pdf (file) 88 KB   1
17:02, 13 March 2014 ADV.PECVD OXIDE-March 2014.pdf (file) 91 KB   1
14:12, 20 March 2014 PECVD1 SIN Thickness and index uniformity March 2014.pdf (file) 94 KB   1
14:55, 19 March 2014 PECVD1-SiN Data-March 2014.pdf (file) 101 KB   1
14:05, 20 March 2014 PECVD1 SIN Thickness &index uniformity March 2014.pdf (file) 103 KB   1
10:07, 13 March 2014 PECVD1-SiN Calibration-February 2014 SiN 1000A.pdf (file) 103 KB   1
10:00, 13 March 2014 PECVD1-SiN Calibration-February 2014.pdf (file) 105 KB   1
14:31, 24 March 2014 ADV. PECVD OXIDE data-March 2014.pdf (file) 105 KB   1
13:51, 7 April 2014 ADV OXIDE data April 2014.pdf (file) 106 KB   1
16:53, 12 March 2014 PECVD1-PECVD SIN data-February 2014 SiN Index,dep.rates,stress.pdf (file) 106 KB   1
09:37, 13 March 2014 PECVD1-SiN data.pdf (file) 106 KB   1
08:00, 24 March 2020 Autostep 200 Upper keyboard.png (file) 108 KB   1
08:48, 24 March 2020 Computer-2 -smart set.png (file) 110 KB   1
11:20, 13 March 2014 PECVD1- SiO2 Calibratiion February 2014 SiO2 1000A.pdf (file) 112 KB   1
08:35, 24 March 2020 Lower keyboard.png (file) 113 KB   1
12:06, 13 March 2014 PECVD1- SiO2 Calibratiion February 2014-1 SiO2 1000A.pdf (file) 113 KB   1
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