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This special page shows all uploaded files.

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Date Name Thumbnail Size Description Versions
11:42, 22 December 2014 Ti-Au-Sputtering-Films-AJA2-rev1.pdf (file) 275 KB   1
11:27, 22 December 2014 Sputter-2-AlN-Endeavor-rev1.pdf (file) 89 KB   1
16:27, 21 March 2014 W-TiW-Sputtering-AJA-4-Data-Recipe-RevB.pdf (file) 489 KB   1
16:08, 21 March 2014 W-TiW-Sputtering-AJA-4-Data-Recipe-RevA.pdf (file) 488 KB   1
11:12, 21 March 2014 Argon-ion-beam-etching-ebeam1-procedure-data-revA.pdf (file) 144 KB   1
15:36, 18 March 2014 Al-AFM-Variation-Deposition-Rate-Rev1.pdf (file) 362 KB   1
15:17, 18 March 2014 Al-thickness-variation-with-rate.jpg (file) 48 KB   1
14:54, 18 March 2014 Vapor-Pressure-Chart-2.xlsx (file) 266 KB   1
14:52, 18 March 2014 Vapor-Pressure-Chart.xlsx (file) 266 KB   2
11:33, 28 January 2014 Nanoinprint-Lithopgraphy-UV-Low-Pressure-Temperature-Ormostamp-PDMS-RevA.docx (file) 19 KB   1
10:58, 28 January 2014 OrmoPrime-NIL-Adhesion-RevA.pdf (file) 242 KB   1
10:56, 28 January 2014 OrmoStamp-NIL-Lithography-UV-Soft-RevA.pdf (file) 186 KB   1
10:12, 28 January 2014 Mr-UVCur21.pdf (file) 133 KB   1
10:59, 27 January 2014 Lithography-BCB-photo-lowk-dielectric-spinon-4024-40-revA.docx (file) 1.42 MB   1
16:38, 24 October 2013 Panasonic 1-SiC-ICP-RIE-Etch-Plasma-SF6-RevA.pdf (file) 345 KB   1
15:25, 24 October 2013 Panasonic1-sapphire-etch-RIE-Plasma-BCl3-ICP-RevA.pdf (file) 430 KB   1
13:40, 24 October 2013 Panasonic1-GaAs-PhotonicCrystal-RIE-Plasma-Nanoscale-Etch-RevA.pdf (file) 175 KB   1
11:34, 24 October 2013 Panasonic1-GaAs-Via-Etch-Plasma-RIE-Fast-DRIE-RevA.pdf (file) 189 KB   1
10:14, 24 October 2013 Panasonic1-GaN-AlGaN-Selective-Etch-Plasma-RIE-ICP-RevA.pdf (file) 189 KB   1
17:05, 23 October 2013 RIE2-ITO-Etch-MHA-Plasma-RevA.pdf (file) 157 KB   1
16:40, 23 October 2013 RIE2-InGaAs-InP-InAlAs-Etch-Plasma-RIE-RevA.pdf (file) 372 KB   1
16:11, 23 October 2013 Panasonic1-TiW-W-Etch-Plasma-RIE-RevA.pdf (file) 198 KB   1
15:05, 22 October 2013 Panasonic1-SiN-Etch-Plasma-CF4-O2-ICP-revA.pdf (file) 74 KB   1
11:40, 22 October 2013 Panasonic2-ICP-Plasma-Etch-SiN-nanoscale-rev1.pdf (file) 579 KB   1
11:18, 22 October 2013 Panasonic2-ICP-Plasma-Etch-SiO2-nanoscale-rev1.pdf (file) 580 KB   1
15:49, 27 September 2013 Panasonic-1-Ti-Etch-Deep-RevA.pdf (file) 497 KB   1
11:53, 27 September 2013 Panasonic-1-Al-Etch-RevA.pdf (file) 85 KB   1
11:16, 30 August 2013 Panasonic1-SiO2-Data-Process-Variation-CHF3-revA.pdf (file) 487 KB   1
16:06, 18 July 2013 Holography-Process-Variation-revA.pdf (file) 678 KB   1
16:05, 18 July 2013 Holography-Process-Gratings-revA.pdf (file) 611 KB   1
14:37, 18 July 2013 Thermal-Nanoimprint-Process-Tutorial-revA.pdf (file) 531 KB   1
16:58, 10 July 2013 RemoverPG-revA.pdf (file) 73 KB   1
16:55, 10 July 2013 OMNICOAT-revA.pdf (file) 186 KB   1
16:52, 10 July 2013 SU-8-2075-revA.pdf (file) 223 KB   1
16:51, 10 July 2013 SU-8-2015-revA.pdf (file) 251 KB   1
16:45, 10 July 2013 512B-Application-Data-Bake-revA.pdf (file) 292 KB   1
16:45, 10 July 2013 512B-Datasheet-revA.pdf (file) 226 KB   1
16:37, 10 July 2013 BCB-cyclotene-4000-revA.pdf (file) 198 KB   1
16:37, 10 July 2013 BCB-cyclotene-3000-revA.pdf (file) 531 KB   1
16:10, 10 July 2013 Panasonic-1-Cr-Etch-revA.pdf (file) 254 KB   1
14:21, 22 April 2013 UV210-Positive-Resist-Datasheet.pdf (file) 582 KB   1
14:20, 22 April 2013 DS-K101-Anti-Reflective-Coating.pdf (file) 960 KB   1
14:20, 22 April 2013 AR2-Anti-Reflective-Coating.pdf (file) 91 KB   1
14:18, 22 April 2013 UVN2300-Negative-Resist-Datasheet.pdf (file) 326 KB   1
14:16, 22 April 2013 UVN30-Negative-Ressit-Datasheet.pdf (file) 326 KB Negative resist for ASML Stepper - UVN2300 requires higher exposure 1
13:54, 22 April 2013 UV6-Positive-Resist-Datasheet.pdf (file) 384 KB Datasheet for UV6 positive resist for ASML stepper 1
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