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11:26, 6 September 2012
ALD-Al2O3-100-Recipe.pdf
(
file
)
1.08 MB
1
11:26, 6 September 2012
ALD-Al2O3-Plasma-300C-Recipe.pdf
(
file
)
992 KB
1
11:25, 6 September 2012
ALD-Al2O3-300-Saturated-Recipe.pdf
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file
)
1.2 MB
1
08:06, 28 August 2012
Template-info.png
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file
)
3 KB
1
10:57, 22 August 2012
Sputter4-Tungston-Films.pdf
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file
)
2.82 MB
1
10:57, 22 August 2012
Sputter4-TiAu-Films.pdf
(
file
)
267 KB
1
10:54, 22 August 2012
Surfscan-Operation-Manual.pdf
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file
)
2.38 MB
1
10:50, 22 August 2012
ALD-Operating-Instrucitons.pdf
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file
)
68 KB
1
07:34, 21 August 2012
E-Beam-4-Operating-Procedures.pdf
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file
)
748 KB
1
13:12, 20 August 2012
UNAXIS-VLR-InP-Etch-Ar-200C-Recipe.pdf
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file
)
44 KB
1
13:10, 20 August 2012
UNAXIS-VLR-InP-Etch-200C-Recipe.pdf
(
file
)
44 KB
1
11:21, 20 August 2012
PECVD2-SiO2-Recipe-100%SiH4-LDR-250C.pdf
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file
)
42 KB
1
11:21, 20 August 2012
PECVD2-SiO2-Recipe-100%SiH4-LDR-100C.pdf
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file
)
42 KB
1
11:21, 20 August 2012
PECVD2-SiO2-Recipe-100%SiH4-LDR-50C.pdf
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file
)
42 KB
1
11:20, 20 August 2012
PECVD2-SiO2-Recipe-100%SiH4-HDR-250C.pdf
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file
)
42 KB
1
11:20, 20 August 2012
PECVD2-SiO2-Recipe-100%SiH4-HDR-100C.pdf
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file
)
42 KB
1
11:20, 20 August 2012
PECVD2-SiO2-Recipe-100%SiH4-HDR-50C.pdf
(
file
)
42 KB
1
11:17, 20 August 2012
PECVD2-SiO2-Recipe-NoAr-50C.pdf
(
file
)
41 KB
1
11:17, 20 August 2012
PECVD2-SiO2-Recipe-NoAr-100C.pdf
(
file
)
42 KB
1
11:17, 20 August 2012
PECVD2-SiO2-Recipe-NoAr-250C.pdf
(
file
)
42 KB
1
11:12, 20 August 2012
PECVD2-SiO2-Recipe-5W-250C.pdf
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file
)
41 KB
1
11:12, 20 August 2012
PECVD2-SiO2-Recipe-5W-100C.pdf
(
file
)
41 KB
1
11:12, 20 August 2012
PECVD2-SiO2-Recipe-5W-50C.pdf
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file
)
41 KB
1
11:11, 20 August 2012
Holograph.jpg
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file
)
1.03 MB
1
09:37, 20 August 2012
PECVD2-SiN-Recipe-NoAr-ExtraN2-120W-250C-Low-Stress.pdf
(
file
)
41 KB
1
09:37, 20 August 2012
PECVD2-SiN-Recipe-NoAr-ExtraN2-120W-100C-Low-Stress.pdf
(
file
)
41 KB
1
09:37, 20 August 2012
PECVD2-SiN-Recipe-NoAr-ExtraN2-120W-50C-Low-Stress.pdf
(
file
)
41 KB
1
09:33, 20 August 2012
PECVD2-SiN-Recipe-NoAr-120W-250C-Low-Stress.pdf
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file
)
42 KB
1
09:33, 20 August 2012
PECVD2-SiN-Recipe-NoAr-50W-250C-Medium-Stress.pdf
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file
)
41 KB
1
09:32, 20 August 2012
PECVD2-SiN-Recipe-NoAr-5W-250C-High-Stress.pdf
(
file
)
41 KB
1
09:32, 20 August 2012
PECVD2-SiN-Recipe-NoAr-120W-100C-Low-Stress.pdf
(
file
)
41 KB
1
09:32, 20 August 2012
PECVD2-SiN-Recipe-NoAr-50W-100C-Medium-Stress.pdf
(
file
)
42 KB
1
09:32, 20 August 2012
PECVD2-SiN-Recipe-NoAr-5W-100C-High-Stress.pdf
(
file
)
42 KB
1
09:32, 20 August 2012
PECVD2-SiN-Recipe-NoAr-120W-50C-Low-Stress.pdf
(
file
)
42 KB
1
09:32, 20 August 2012
PECVD2-SiN-Recipe-NoAr-50W-50C-Medium-Stress.pdf
(
file
)
41 KB
1
09:31, 20 August 2012
PECVD2-SiN-Recipe-NoAr-5W-50C-High-Stress.pdf
(
file
)
41 KB
1
09:20, 20 August 2012
PECVD2-SiN-Recipe-120W-250C-Low-Stress.pdf
(
file
)
41 KB
1
09:19, 20 August 2012
PECVD2-SiN-Recipe-50W-250C-Medium-Stress.pdf
(
file
)
41 KB
1
09:18, 20 August 2012
PECVD2-SiN-Recipe-5W-250C-High-Stress.pdf
(
file
)
41 KB
1
08:58, 20 August 2012
Panasonic2-SiOx-Recipe.pdf
(
file
)
41 KB
1
08:57, 20 August 2012
Panasonic1-SiO-Etch.pdf
(
file
)
36 KB
1
10:37, 17 August 2012
PECVD2-SiN-Recipe-120W-50C-Low-Stress.pdf
(
file
)
41 KB
1
10:37, 17 August 2012
PECVD2-SiN-Recipe-50W-50C-Medium-Stress.pdf
(
file
)
41 KB
1
10:36, 17 August 2012
PECVD2-SiN-Recipe-5W-50C-High-Stress.pdf
(
file
)
41 KB
1
10:18, 17 August 2012
PECVD2-SiN-Recipe-120W-100C-Low-Stress.pdf
(
file
)
41 KB
1
10:17, 17 August 2012
PECVD2-SiN-Recipe-50W-100C-Medium-Stress.pdf
(
file
)
41 KB
1
10:17, 17 August 2012
PECVD2-SiN-Recipe-5W-100C-High-Stress.pdf
(
file
)
41 KB
1
12:08, 16 August 2012
PECVD2-SiO2-Data.pdf
(
file
)
35 KB
1
12:08, 16 August 2012
PECVD2-SiO2-Recipe.pdf
(
file
)
34 KB
1
12:07, 16 August 2012
PECVD2-SiN-Data.pdf
(
file
)
36 KB
1
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