Uploads by Biljana

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Date Name Thumbnail Size Description Versions
08:52, 20 October 2017 New AdvPECVD-LS Nitride2 300C standard recipe LS Nitride2 standard recipe.pdf (file) 380 KB   1
15:03, 2 January 2019 STD LSNitride2 5-9-18.pdf (file) 400 KB   1
14:48, 2 January 2019 18.pdf (file) 400 KB   1
10:39, 24 January 2024 Wafer Particle Count-Process Traveler.pdf (file) 426 KB   2
13:46, 3 October 2012 PECVD2-SiO2-SEM-LDR SiO2-100% SiH4-100C-15W.pdf (file) 446 KB   1
16:04, 10 October 2012 SEM pictures SiO2 100C.pdf (file) 566 KB   1
15:03, 8 January 2015 New PECVD1-SiO2-standard recipe 2014 SiO2 standard recipe.pdf (file) 594 KB   1
15:04, 8 January 2015 New PECVD1-SiN-standard recipe 2014 SiN standard recipe.pdf (file) 595 KB   1
11:54, 9 January 2015 New Adv PECVD OXIDE 300C standard recipe OXIDE Standard Recipe.pdf (file) 653 KB   1
10:52, 11 December 2014 NewAdvPECVD OXIDE 300C standard recipe.pdf (file) 653 KB   1
16:53, 3 October 2012 PECVD2-SiNx-high stress-SEM-2% SiH4-100C-5W.pdf (file) 658 KB   1
16:48, 3 October 2012 PECVD2-SiNx-medium stress-SEM-2% SiH4-100C-50W.pdf (file) 700 KB   1
16:36, 3 October 2012 PECVD2-SiNx -SEM-2% SiH4-100C-50W.pdf (file) 706 KB   1
11:42, 21 October 2014 PECVD1-LS SIN-Turner05recipe 2014 LS SIN recipe.pdf (file) 733 KB   1
10:59, 21 April 2020 Adv. PECVD2-STD SiO2.xlsx (file) 783 KB   2
11:24, 6 April 2020 Area from 1.png (file) 862 KB   1
10:37, 6 April 2020 Area from Equals Max size.png (file) 866 KB   1
10:08, 21 April 2020 Adv. PECVD2- STD LSNitride2.xlsx (file) 944 KB   1
10:30, 6 April 2020 LPD Ranges.png (file) 957 KB   1
16:34, 21 March 2014 PECVD1-SiO2-standard recipe 1000A.pdf (file) 1,007 KB   1
16:37, 5 December 2014 PECVD1-LS SIN recipe 2014.pdf (file) 1.03 MB   1
12:39, 8 January 2024 Single centered mask-Piece 2nd litho AUTOSTEP 200.pdf (file) 1.19 MB   1
10:53, 1 October 2014 PECVD1-SiON-recipe 2014 LS SION recipe.pdf (file) 1.24 MB   1
15:24, 10 October 2014 PECVD1-SiON-recipe 2014 LS SION recipe LS SION recipe.pdf (file) 1.24 MB   1
16:23, 3 December 2014 PECVD1-LS SION recipe 2014.pdf (file) 1.24 MB   1
12:18, 10 December 2014 PECVD1-LS SION-recipe2014 LS SION recipe.pdf (file) 1.24 MB   1
10:05, 21 April 2020 Adv. PECVD2- STD Nitride2.xlsx (file) 1.31 MB   1
12:33, 8 January 2024 4 Quads mask plate Piece - 2nd litho AUTOSTEP 200 (1).pdf (file) 1.35 MB   1
16:11, 8 January 2015 New PECVD1-LS SIN-Turner05recipe 2014 LS SIN recipe.pdf (file) 1.38 MB   1
14:19, 26 March 2019 UCSBTEST2 for small particles.png (file) 1.45 MB   1
13:40, 26 March 2019 UCSBTEST2 - gain4 for (0.160-1.60)um particles.png (file) 1.45 MB   1
14:14, 15 April 2020 4 Quads mask plate Piece - 2nd litho AUTOSTEP 200.pptx (file) 1.51 MB   1
14:24, 7 April 2020 PECVD2 clean.png (file) 1.59 MB   1
15:31, 8 January 2015 New PECVD1-LS SION-recipe 2014 LS SION recipe.pdf (file) 1.59 MB   1
14:21, 7 April 2020 AdvPECVD2LSNdep2.jpg (file) 1.68 MB   1
14:06, 26 March 2019 UCSBTEST.png (file) 1.69 MB   1
14:14, 7 April 2020 PECVD1-cleaning.png (file) 1.79 MB   1
14:32, 7 April 2020 PECVD2 photo for cleaning.png (file) 1.88 MB   1
17:12, 5 January 2024 Autostep 200 chucks-2023.pdf (file) 2.58 MB   1
15:02, 17 October 2014 Dirty platen photos.pdf (file) 2.65 MB   1
11:58, 8 January 2024 Single centered mask-Piece 1st litho AUTOSTEP 200.pdf (file) 2.76 MB   1
10:01, 8 April 2020 AUTOSTEP 200-PIECES 1st litho BL and BR orientation.pptx (file) 3.27 MB   1
14:15, 15 April 2020 Single centerd mask- Piece 1st litho AUTOSTEP 200-PIECES.pptx (file) 3.27 MB   1
14:36, 15 April 2020 Single centered mask-Piece 1st litho AUTOSTEP 200.pptx (file) 3.27 MB   1
12:10, 11 December 2014 Photos Sheet1.pdf (file) 4.23 MB   1
20:32, 7 April 2020 AUTOSTEP 200-PIECES instruction 6-20-19.pptx (file) 4.72 MB   1
15:28, 5 January 2024 GCA 6300 Available chucks 2023.pdf (file) 4.96 MB   1
09:50, 7 April 2020 PECVD1 particulates in 2019.jpg (file) 6.68 MB   1
17:17, 1 April 2020 Recipe parameters.jpg (file) 6.98 MB   1
15:07, 5 January 2024 GCA 6300 Available chucks 2023.pptx (file) 7.03 MB   1
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