Uploads by Biljana

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Date Name Thumbnail Size Description Versions
14:55, 15 April 2014 PECVD1-SiN-standard recipe 1000A-April 2014.pdf (file) 19 KB   1
12:08, 20 March 2014 PECVD1-SiN-standard recipe 1000A.pdf (file) 295 KB   1
14:58, 15 April 2014 PECVD1-SiN-standard recipe 2014.pdf (file) 298 KB   1
10:25, 10 December 2014 PECVD1-SiN-standard recipe 2014 SiN standard recipe.pdf (file) 298 KB   1
10:00, 13 March 2014 PECVD1-SiN Calibration-February 2014.pdf (file) 105 KB   1
10:07, 13 March 2014 PECVD1-SiN Calibration-February 2014 SiN 1000A.pdf (file) 103 KB   1
14:55, 19 March 2014 PECVD1-SiN Data-March 2014.pdf (file) 101 KB   1
09:37, 13 March 2014 PECVD1-SiN data.pdf (file) 106 KB   1
10:32, 10 December 2014 PECVD1-SiN standard recipe 2014.pdf (file) 299 KB   1
16:34, 21 March 2014 PECVD1-SiO2-standard recipe 1000A.pdf (file) 1,007 KB   1
15:42, 15 April 2014 PECVD1-SiO2-standard recipe 2014.pdf (file) 299 KB   1
11:22, 10 December 2014 PECVD1-SiO2-standard recipe 2014 SiO2 standard recipe.pdf (file) 299 KB   1
10:53, 1 October 2014 PECVD1-SiON-recipe 2014 LS SION recipe.pdf (file) 1.24 MB   1
15:24, 10 October 2014 PECVD1-SiON-recipe 2014 LS SION recipe LS SION recipe.pdf (file) 1.24 MB   1
09:55, 11 September 2013 PECVD1-WIKI PECVD SiN Index, dep.rates, stress.pdf (file) 130 KB   1
12:06, 13 March 2014 PECVD1- SiO2 Calibratiion February 2014-1 SiO2 1000A.pdf (file) 113 KB   1
11:20, 13 March 2014 PECVD1- SiO2 Calibratiion February 2014 SiO2 1000A.pdf (file) 112 KB   1
14:14, 7 April 2020 PECVD1-cleaning.png (file) 1.79 MB   1
13:46, 20 March 2014 PECVD1 Operating Instructions.pdf (file) 64 KB   1
14:02, 20 March 2014 PECVD1 SIN 2-pt Thickness-index uniformity March 2014.pdf (file) 82 KB   2
16:59, 20 March 2014 PECVD1 SIN 2-pt Thickness uniformity March 2014.pdf (file) 62 KB   1
15:29, 15 April 2014 PECVD1 SIN Data-April 2014 SIN data.pdf (file) 117 KB   1
15:35, 20 March 2014 PECVD1 SIN Data-March 2014 SIN data.pdf (file) 117 KB   1
14:05, 20 March 2014 PECVD1 SIN Thickness &index uniformity March 2014.pdf (file) 103 KB   1
14:12, 20 March 2014 PECVD1 SIN Thickness and index uniformity March 2014.pdf (file) 94 KB   1
17:09, 12 March 2014 PECVD1 SiN data-February 2014 AFM roughness.pdf (file) 156 KB   1
15:44, 15 April 2014 PECVD1 SiO2 Data-April 2014 SiO2 Data.pdf (file) 116 KB   1
12:06, 21 March 2014 PECVD1 SiO2 Data-March 2014 SiO2 Data.pdf (file) 116 KB   1
09:50, 7 April 2020 PECVD1 particulates in 2019.jpg (file) 6.68 MB   1
11:59, 3 October 2012 PECVD2-SiN-Recipe-Low stres SiNx-100% SiH4-120W-100C.pdf (file) 41 KB   1
11:55, 3 October 2012 PECVD2-SiN-Recipe-Low stress SiNx-100%SiH4-120W-50C.pdf (file) 42 KB   1
12:00, 3 October 2012 PECVD2-SiN-Recipe-Low stress SiNx-100% SiH4-120W-250C.pdf (file) 42 KB   1
12:05, 3 October 2012 PECVD2-SiN-Recipe-Medium stres SiNx-100% SiH4-120W-100C.pdf (file) 41 KB   1
12:05, 3 October 2012 PECVD2-SiN-Recipe-Medium stress SiNx-100%SiH4-120W-50C.pdf (file) 41 KB   1
12:06, 3 October 2012 PECVD2-SiN-Recipe-Medium stress SiNx-100% SiH4-120W-250C.pdf (file) 42 KB   1
12:17, 3 October 2012 PECVD2-SiN-SEM- Medium stres SiNx-100% SiH4-120W-100C.pdf (file) 375 KB   1
12:12, 3 October 2012 PECVD2-SiN-Table-Low stres SiNx-100% SiH4-120W-100C.pdf (file) 41 KB   1
15:36, 3 October 2012 PECVD2-SiNx-Comparison table-2% SiH4-100C-120W.pdf (file) 34 KB   1
15:38, 3 October 2012 PECVD2-SiNx-Comparison table-2% SiH4-250C-120W.pdf (file) 34 KB   1
16:53, 3 October 2012 PECVD2-SiNx-high stress-SEM-2% SiH4-100C-5W.pdf (file) 658 KB   1
16:08, 3 October 2012 PECVD2-SiNx-l.s.-Comparison table-2% SiH4-100C-120W.pdf (file) 34 KB   1
16:11, 3 October 2012 PECVD2-SiNx-m.s.-Comparison table-2% SiH4-100C-120W.pdf (file) 35 KB   1
16:14, 3 October 2012 PECVD2-SiNx-medium-Comparison table-2% SiH4-100C-120W.pdf (file) 35 KB   1
16:48, 3 October 2012 PECVD2-SiNx-medium stress-SEM-2% SiH4-100C-50W.pdf (file) 700 KB   1
15:48, 3 October 2012 PECVD2-SiNxComparison table-2% SiH4-100C-120W.pdf (file) 34 KB   1
15:49, 3 October 2012 PECVD2-SiNxComparison table-2% SiH4-250C-120W.pdf (file) 34 KB   1
16:36, 3 October 2012 PECVD2-SiNx -SEM-2% SiH4-100C-50W.pdf (file) 706 KB   1
16:09, 3 October 2012 PECVD2-SiNx -h.s.-Comparison table-2% SiH4-100C-120W.pdf (file) 41 KB   1
16:09, 3 October 2012 PECVD2-SiNx -m.s.-Comparison table-2% SiH4-100C-120W.pdf (file) 35 KB   1
15:55, 3 October 2012 PECVD2-SiNx Comparison table-2% SiH4-100C-120W.pdf (file) 35 KB   1
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