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17:55, 2 February 2024
SURFSCAN 6200 122123 for 4inch wafers.pdf
(
file
)
127 KB
2
17:14, 21 December 2023
SURFSCAN 6200 2 and 3inch wafers.pdf
(
file
)
127 KB
1
17:55, 2 February 2024
SURFSCAN 6200 122123 for 8inch wafers.pdf
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file
)
127 KB
2
09:55, 11 September 2013
PECVD1-WIKI PECVD SiN Index, dep.rates, stress.pdf
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file
)
130 KB
1
09:53, 11 September 2013
WIKI PECVD SIN Index,dep.rates,stress.pdf
(
file
)
130 KB
1
12:00, 24 March 2014
Operating Ebeam1-2.pdf
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file
)
130 KB
1
10:00, 27 March 2020
Unaxis SOP 3-12-2020.docx
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file
)
133 KB
1
12:02, 30 March 2020
Unaxis SOP 3-30-2020.docx
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file
)
134 KB
1
17:14, 21 December 2023
SURFSCAN 6200 Small substrates.pdf
(
file
)
136 KB
1
17:55, 2 February 2024
SURFSCAN 6200 122123 small substrates.pdf
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file
)
139 KB
2
11:02, 11 January 2024
IBD SOP.pdf
(
file
)
142 KB
1
16:30, 5 January 2024
Autostep 200 Running a JOB One Page Instructions.pdf
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file
)
148 KB
1
15:43, 5 January 2024
GCA 6300 Standard Operating Procedure 010524.pdf
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file
)
152 KB
1
16:34, 8 January 2024
General information about AUTOSTEP 200.pdf
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file
)
153 KB
1
15:26, 5 January 2024
GCA 6300+chucks+shims 2023 (1).pdf
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file
)
153 KB
1
17:09, 12 March 2014
PECVD1 SiN data-February 2014 AFM roughness.pdf
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file
)
156 KB
1
10:07, 12 April 2016
Surfscan.jpg
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file
)
162 KB
1
08:54, 1 April 2020
UCSBTEST1Gain4.jpg
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file
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162 KB
scan for gain4
1
09:33, 1 April 2020
UCSBTEST2.jpg
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file
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162 KB
1
11:02, 11 January 2024
IBD Troubleshooting Guide.pdf
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file
)
166 KB
1
10:03, 31 March 2014
New Operating Instructions Ebeam.pdf
(
file
)
169 KB
1
11:41, 8 January 2024
Autostep 200 - Setting up the Job.pdf
(
file
)
176 KB
1
14:43, 19 March 2014
PECVD1-SiN-standard recipe.pdf
(
file
)
189 KB
1
15:39, 2 January 2019
STD Nitride 5-9-18 Dep.recipe.pdf
(
file
)
209 KB
1
15:26, 2 January 2019
STD Nitride 5-9-18.pdf
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file
)
209 KB
1
15:49, 2 January 2019
STD Oxide 5-9-18 Dep.recipe.pdf
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file
)
238 KB
1
16:03, 2 January 2019
STD SiO2 5-9-18.pdf
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file
)
239 KB
1
15:14, 8 May 2015
Autostep 200 Training Manual-4-10-15 .pdf
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file
)
252 KB
1
14:05, 23 March 2020
GCA 6300 Training Manual-3-23-2020.pdf
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file
)
257 KB
1
15:10, 8 May 2015
GCA 6300 Training Manual-4-10-2015.pdf
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file
)
257 KB
1
14:11, 23 March 2020
GCA 6300 Training Manual- 3-23-2020.pdf
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file
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257 KB
1
14:30, 23 March 2020
Autostep200 Training Manual 3-23-2020.pdf
(
file
)
257 KB
1
09:40, 23 March 2020
GCA 6300 Stepper Training Manual- Full version 2020.pdf
(
file
)
263 KB
1
09:00, 23 March 2020
GCA 6300 Stepper Training Manual- Full version 2019.pdf
(
file
)
263 KB
1
12:08, 20 March 2014
PECVD1-SiN-standard recipe 1000A.pdf
(
file
)
295 KB
1
15:39, 20 March 2014
PECVD1-SiN-1000A Standard recipe.pdf
(
file
)
296 KB
1
14:58, 15 April 2014
PECVD1-SiN-standard recipe 2014.pdf
(
file
)
298 KB
1
10:25, 10 December 2014
PECVD1-SiN-standard recipe 2014 SiN standard recipe.pdf
(
file
)
298 KB
1
15:42, 15 April 2014
PECVD1-SiO2-standard recipe 2014.pdf
(
file
)
299 KB
1
10:32, 10 December 2014
PECVD1-SiN standard recipe 2014.pdf
(
file
)
299 KB
1
14:58, 11 December 2014
NewPECVD1-SiN-standard recipe 2014.pdf
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file
)
299 KB
1
14:59, 11 December 2014
NewPECVD1-SiO2-standard recipe 2014.pdf
(
file
)
299 KB
1
11:22, 10 December 2014
PECVD1-SiO2-standard recipe 2014 SiO2 standard recipe.pdf
(
file
)
299 KB
1
15:26, 9 January 2024
Autostep 200 Stepper manual focus.pdf
(
file
)
307 KB
1
14:16, 2 January 2019
STD LSNitride2 12-14-18 recipe.pdf
(
file
)
349 KB
1
14:15, 2 January 2019
STD LSNitride2 recipe new info 1-2-2019 Dep.recipe.pdf
(
file
)
349 KB
2
15:43, 8 January 2024
Autostep200 Training Old Training Manual.pdf
(
file
)
361 KB
1
11:56, 9 January 2015
New Adv PECVD-Nitride2 300C standard recipe Nitride2 Standard Recipe.pdf
(
file
)
373 KB
1
12:01, 11 December 2014
NewAdvPECVD-Nitride2 300C standard recipe.pdf
(
file
)
373 KB
1
12:17, 3 October 2012
PECVD2-SiN-SEM- Medium stres SiNx-100% SiH4-120W-100C.pdf
(
file
)
375 KB
1
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