Uploads by Biljana

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This special page shows all uploaded files.

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Date Name Thumbnail Size Description Versions
11:00, 21 August 2013 Panasonic1-SiO-Etch-SEM.pdf (file) 48 KB   2
09:01, 24 March 2020 Autostep main computer -1.png (file) 49 KB   1
10:15, 27 March 2020 Unaxis SOP 3-27-2020.pdf (file) 52 KB   1
15:07, 5 January 2024 GCA 6300+chucks+shims 2023.xlsx (file) 54 KB   1
08:56, 24 March 2020 Autostep Cabinet .png (file) 56 KB   1
14:42, 1 April 2014 IBD Ta2O5 deposition details.pdf (file) 57 KB   1
14:58, 31 March 2014 IBD SiO2 Standard Recipe.pdf (file) 57 KB   1
15:05, 31 March 2014 New IBD SiO2 Standard Recipe.pdf (file) 57 KB   1
13:21, 1 April 2014 IBD SiNdeposition.pdf (file) 59 KB   1
12:28, 29 December 2023 GCA 6300 Running a JOB 3.pdf (file) 60 KB   1
16:59, 20 March 2014 PECVD1 SIN 2-pt Thickness uniformity March 2014.pdf (file) 62 KB   1
13:46, 20 March 2014 PECVD1 Operating Instructions.pdf (file) 64 KB   1
08:51, 21 March 2014 ALD operating instructions-1.pdf (file) 66 KB   1
12:29, 29 December 2023 GCA 6300 Reboot frozen keyboard.pdf (file) 69 KB   1
11:23, 7 April 2020 Glossary.docx (file) 71 KB   1
10:07, 31 March 2014 RIE 3 Operationing instructions.pdf (file) 71 KB   1
12:28, 29 December 2023 GCA 6300 General Information about system 4.pdf (file) 77 KB   1
15:53, 8 January 2024 AUTOSTEP 200 User Accessible Commands 010524.pdf (file) 77 KB   1
12:29, 29 December 2023 GCA6300 Optimizing the process 6.pdf (file) 78 KB   1
16:39, 30 March 2020 PECVD.docx (file) 79 KB   1
14:02, 20 March 2014 PECVD1 SIN 2-pt Thickness-index uniformity March 2014.pdf (file) 82 KB   2
14:43, 23 May 2017 Sputter5 SiO2 2017 SiO2 film.pdf (file) 86 KB   1
16:36, 13 March 2014 ADV OXIDE data.pdf (file) 88 KB   1
17:02, 13 March 2014 ADV.PECVD OXIDE-March 2014.pdf (file) 91 KB   1
17:39, 5 January 2024 Autostep 200 - Standard Operating Procedure-2023.pdf (file) 92 KB   1
16:46, 8 January 2024 Focus and exposure optimization- Autostep200-II.pdf (file) 94 KB   1
14:12, 20 March 2014 PECVD1 SIN Thickness and index uniformity March 2014.pdf (file) 94 KB   1
15:37, 29 December 2023 GCA 6300 - Commands.pdf (file) 96 KB   1
14:55, 19 March 2014 PECVD1-SiN Data-March 2014.pdf (file) 101 KB   1
14:05, 20 March 2014 PECVD1 SIN Thickness &index uniformity March 2014.pdf (file) 103 KB   1
10:07, 13 March 2014 PECVD1-SiN Calibration-February 2014 SiN 1000A.pdf (file) 103 KB   1
12:29, 29 December 2023 GCA 6300 Programming a Job 7.pdf (file) 103 KB   1
17:00, 5 January 2024 Autostep 200 Chucks table.pdf (file) 105 KB   1
10:00, 13 March 2014 PECVD1-SiN Calibration-February 2014.pdf (file) 105 KB   1
14:31, 24 March 2014 ADV. PECVD OXIDE data-March 2014.pdf (file) 105 KB   1
13:51, 7 April 2014 ADV OXIDE data April 2014.pdf (file) 106 KB   1
16:53, 12 March 2014 PECVD1-PECVD SIN data-February 2014 SiN Index,dep.rates,stress.pdf (file) 106 KB   1
09:37, 13 March 2014 PECVD1-SiN data.pdf (file) 106 KB   1
08:00, 24 March 2020 Autostep 200 Upper keyboard.png (file) 108 KB   1
08:48, 24 March 2020 Computer-2 -smart set.png (file) 110 KB   1
11:20, 13 March 2014 PECVD1- SiO2 Calibratiion February 2014 SiO2 1000A.pdf (file) 112 KB   1
08:35, 24 March 2020 Lower keyboard.png (file) 113 KB   1
12:06, 13 March 2014 PECVD1- SiO2 Calibratiion February 2014-1 SiO2 1000A.pdf (file) 113 KB   1
15:11, 5 January 2024 GCA 6300 Chucks table 2023.pdf (file) 113 KB   1
09:53, 12 April 2016 Surfscan-Surfscan 6200 info.pdf (file) 114 KB   1
12:06, 21 March 2014 PECVD1 SiO2 Data-March 2014 SiO2 Data.pdf (file) 116 KB   1
15:44, 15 April 2014 PECVD1 SiO2 Data-April 2014 SiO2 Data.pdf (file) 116 KB   1
15:35, 20 March 2014 PECVD1 SIN Data-March 2014 SIN data.pdf (file) 117 KB   1
12:12, 20 March 2014 New PECVD1 SIN Data-March 2014 SIN data.pdf (file) 117 KB   1
15:29, 15 April 2014 PECVD1 SIN Data-April 2014 SIN data.pdf (file) 117 KB   1
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