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  1. Molecular Vapor Deposition Recipes‏‎ (2 revisions)
  2. Critical Point Dryer‏‎ (2 revisions)
  3. SSI Solaris 150 - Operating Procedure‏‎ (2 revisions)
  4. ASML Stepper 3: Wafer Handler Reset Procedure‏‎ (2 revisions)
  5. Michael Barreraz‏‎ (2 revisions)
  6. Nanofab Job Postings‏‎ (2 revisions)
  7. Main Page mod‏‎ (2 revisions)
  8. Ellipsometer (Woollam) - Measuring thin metals with oxide pre-measurement‏‎ (2 revisions)
  9. GCA 6300 training manual -old instructions‏‎ (2 revisions)
  10. Strip Annealer‏‎ (2 revisions)
  11. Surfscan photo‏‎ (2 revisions)
  12. SiO2 Etching Test using CF4/CHF3‏‎ (2 revisions)
  13. Exposing a wafer piece‏‎ (2 revisions)
  14. ADT 7100 - Recovering an Old Recipe (2019)‏‎ (2 revisions)
  15. Unaxis SiN100C 300nm-2019‏‎ (2 revisions)
  16. Surfscan6200 photos‏‎ (2 revisions)
  17. Autostep 200 Old training manual‏‎ (2 revisions)
  18. Step Profilometer (Dektak 6M)‏‎ (2 revisions)
  19. Process Group - Lab Stocking/Supplies Tasks‏‎ (2 revisions)
  20. Errors‏‎ (2 revisions)
  21. Video Training: Uploading to GauchoCast/Panopto (Internal)‏‎ (2 revisions)
  22. Test Data of etching SiO2 with CHF3/CF4/O2‏‎ (2 revisions)
  23. Test Data of Etching SiO2 with CHF3/CF4-Florine ICP Etcher‏‎ (3 revisions)
  24. Photolithography - Improving Adhesion Photoresist Adhesion‏‎ (3 revisions)
  25. Vacuum Sealer‏‎ (3 revisions)
  26. Test Data of etching SiO2 with CHF3/CF4-Florine ICP Etcher‏‎ (3 revisions)
  27. DS-K101-304 Bake Temp. versus Develop Rate‏‎ (3 revisions)
  28. MLA Recipes‏‎ (3 revisions)
  29. Wire Saw (Takatori)‏‎ (3 revisions)
  30. Vapor HF Etch (uETCH)‏‎ (3 revisions)
  31. ADT UV-Tape Table 1042R‏‎ (3 revisions)
  32. Glossary‏‎ (3 revisions)
  33. Vacuum Oven (YES)‏‎ (3 revisions)
  34. PECVD1-SiN standard recipe.pdf‏‎ (3 revisions)
  35. ASML 5500: Recovering from a Typo in Reticle ID‏‎ (3 revisions)
  36. Sputter 1 (Custom)‏‎ (3 revisions)
  37. Gold Plating Bench‏‎ (3 revisions)
  38. MLA150 - CAD Files and Templates‏‎ (3 revisions)
  39. Nick test‏‎ (3 revisions)
  40. Mike Day‏‎ (3 revisions)
  41. Video Training: Hosting with Zoom and GacuhoCast/Panopto‏‎ (3 revisions)
  42. User Accessible Commands‏‎ (3 revisions)
  43. ASML Stepper 3 Dicing Guide Programming‏‎ (3 revisions)
  44. MVD - Wafer Coating - Process Traveler‏‎ (3 revisions)
  45. Ellipsometer (Rudolph)‏‎ (3 revisions)
  46. Peder Lenvik‏‎ (3 revisions)
  47. YES-SPR220-Various-Temps‏‎ (3 revisions)
  48. Logitech WBS7 - Procedure for Wax Mounting with Spin-On Crystalbond‏‎ (3 revisions)
  49. Jack Whaley‏‎ (4 revisions)
  50. Electronics Presentations‏‎ (4 revisions)
  51. Wafer Scanning process Traveler‏‎ (4 revisions)
  52. Filmetrics F10-RT-UVX Operating Procedure‏‎ (4 revisions)
  53. Laser Etch Monitor Simulation in Python‏‎ (4 revisions)
  54. MLA150 - Large Image GDS Generation‏‎ (4 revisions)
  55. Process Group - Process Control Data‏‎ (4 revisions)
  56. IBD: Calibrating Optical Thickness‏‎ (4 revisions)
  57. Mechanical Polisher (Allied)‏‎ (4 revisions)
  58. KLA Tencor P7 - Basic profile instructions‏‎ (4 revisions)
  59. GCA 6300 Reboot Procedures‏‎ (4 revisions)
  60. Test Data of etching SiO2 with CHF3/CF4-Florine‏‎ (4 revisions)
  61. Claudia Gutierrez‏‎ (4 revisions)
  62. Tube Furnace AlGaAs Oxidation (Lindberg)‏‎ (4 revisions)
  63. ASML DUV: Edge Bead Removal via Photolithography‏‎ (4 revisions)
  64. Step Profile (Dektak IIA)‏‎ (4 revisions)
  65. Suss MA-6 Backside Alignment QuickStart‏‎ (4 revisions)
  66. GCA 6300 Mask Making Guidance‏‎ (5 revisions)
  67. Tube Furnace Wafer Bonding (Thermco)‏‎ (5 revisions)
  68. Thermal Evaporator 1‏‎ (5 revisions)
  69. Wafer Cleaver (PELCO Flip-Scribe)‏‎ (5 revisions)
  70. Lift-Off with I-Line Imaging Resist + LOL2000 Underlayer‏‎ (5 revisions)
  71. Old Deposition Data - 2021-12-15‏‎ (5 revisions)
  72. Tino Sy‏‎ (5 revisions)
  73. Spin Rinse Dryer (SemiTool)‏‎ (5 revisions)
  74. PubList2018‏‎ (5 revisions)
  75. Goniometer (Rame-Hart A-100) - Operating Procedure‏‎ (5 revisions)
  76. Old Training Manual‏‎ (5 revisions)
  77. Holographic Lith/PL Setup (Custom)‏‎ (5 revisions)
  78. Sputter 2 (SFI Endeavor)‏‎ (5 revisions)
  79. Olympus LEXT OLS4000 Confocal uScope - Quick Start‏‎ (6 revisions)
  80. Photonics Presentations‏‎ (6 revisions)
  81. Photoluminescence PL Setup (Custom)‏‎ (6 revisions)
  82. Optical Film Thickness (Filmetrics)‏‎ (6 revisions)
  83. Probe Station: I-V Curves with Keithley 2400 and Python Script‏‎ (6 revisions)
  84. NanoFab Process Group‏‎ (6 revisions)
  85. Resistivity Mapper (CDE RESMAP)‏‎ (6 revisions)
  86. Digital Microscope (Olympus DSX1000)‏‎ (6 revisions)
  87. E-BEAM‏‎ (6 revisions)
  88. Luis Zuzunaga‏‎ (6 revisions)
  89. S-Cubed Flexi - Operating Procedure‏‎ (6 revisions)
  90. Photolithography - Manual Edge-Bead Removal Techniques‏‎ (6 revisions)
  91. Ovens 1, 2 & 3 (Labline)‏‎ (7 revisions)
  92. Bill Millerski‏‎ (7 revisions)
  93. ADT 7100 - Initial Setup Before Cutting‏‎ (7 revisions)
  94. Optical Film Thickness & Wafer-Mapping (Filmetrics F50)‏‎ (7 revisions)
  95. PECV1 Wafer Coating Process Traveler‏‎ (7 revisions)
  96. Field Emission SEM 2 (JEOL 7600F)‏‎ (7 revisions)
  97. Programming a Job‏‎ (7 revisions)
  98. PECVD1-(PlasmaTherm 790)‏‎ (7 revisions)
  99. High Temp Oven (Blue M)‏‎ (7 revisions)
  100. RIE 1 (Custom)‏‎ (7 revisions)
  101. Amscope Quickstart Usage Guide‏‎ (7 revisions)
  102. GCA Old full training manual‏‎ (7 revisions)
  103. Flip-Chip Bonder (Finetech)‏‎ (7 revisions)
  104. ASML 5500: Recovering from an Error‏‎ (7 revisions)
  105. Optical Film Spectra + Optical Properties (Filmetrics F10-RT-UVX)‏‎ (7 revisions)
  106. Wafer Scanning/Coating Process Traveler ( combined/less detailed)‏‎ (7 revisions)
  107. Stocked Chemical List‏‎ (7 revisions)
  108. Dan Read‏‎ (7 revisions)
  109. Deposition Data - temporary 2021-12-15‏‎ (7 revisions)
  110. Autostep 200 User Accessible Commands‏‎ (7 revisions)
  111. Profilm3D - Quick Start - Surface Roughness Measurement (PSI Mode)‏‎ (8 revisions)
  112. SEM Sample Coater (Hummer)‏‎ (8 revisions)
  113. Filmetrics F40-UV Quick Start‏‎ (8 revisions)
  114. Focused Ion-Beam Lithography (Raith Velion)‏‎ (8 revisions)
  115. FIJI - Microscope Measurement Tools‏‎ (8 revisions)
  116. Wafer Bonder (SUSS SB6-8E)‏‎ (8 revisions)
  117. Logitech WBS7 - Procedure for Wax Mounting with bulk Crystalbond Stick‏‎ (8 revisions)
  118. Fluorescence Microscope (Olympus MX51)‏‎ (9 revisions)
  119. Oven 4 (Thermo-Fisher HeraTherm)‏‎ (9 revisions)
  120. Step Profilometer (KLA Tencor P-7)‏‎ (9 revisions)
  121. KLA Tencor P7 - Saving Profile Data‏‎ (9 revisions)
  122. Bill Mitchell‏‎ (9 revisions)
  123. Optical Film Thickness (Nanometric)‏‎ (9 revisions)
  124. YES-150C-Various-Resists‏‎ (9 revisions)
  125. Old Deposition Data - NastaziaM 2021-11-22‏‎ (9 revisions)
  126. KLayout Design Tips‏‎ (9 revisions)
  127. Ashers (Technics PEII)‏‎ (9 revisions)
  128. Process Group - Billing Instructions‏‎ (9 revisions)
  129. KLA-Tencor Surfscan - Standard Operating Procedure‏‎ (9 revisions)
  130. MLA150 - Design Guidelines‏‎ (9 revisions)
  131. Nano-Imprint (Nanonex NX2000)‏‎ (9 revisions)
  132. Adam Abrahamsen‏‎ (10 revisions)
  133. Wafer Coating Process Traveler1‏‎ (10 revisions)
  134. GCA 6300 USer Accessible Commands‏‎ (10 revisions)
  135. Intellemetrics Laser Etch Monitor Procedure for Panasonic ICP Etchers‏‎ (10 revisions)
  136. InP Etch Test Result in Details‏‎ (10 revisions)
  137. Ning Cao‏‎ (10 revisions)
  138. UV Ozone Reactor‏‎ (10 revisions)
  139. CC-PRIME OnBoarding 2022-08‏‎ (10 revisions)
  140. Unaxis wafer coating procedure‏‎ (10 revisions)
  141. Process Group - Remote Fabrication Jobs‏‎ (11 revisions)
  142. IR Aligner (SUSS MJB-3 IR)‏‎ (11 revisions)
  143. Deep UV Optical Microscope (Olympus)‏‎ (11 revisions)
  144. Brian Thibeault‏‎ (12 revisions)
  145. Chemical List‏‎ (12 revisions)
  146. XeF2 Etch (Xetch)‏‎ (12 revisions)
  147. Ovens - Overview of All Lab Ovens‏‎ (12 revisions)
  148. Molecular Vapor Deposition‏‎ (12 revisions)
  149. Film Stress (Tencor Flexus)‏‎ (12 revisions)
  150. Laser Etch Monitoring‏‎ (12 revisions)
  151. Chemical-Mechanical Polisher (Logitech)‏‎ (12 revisions)
  152. Suss Aligners (SUSS MJB-3)‏‎ (13 revisions)
  153. ASML Stepper 3 Standard Operating Procedure‏‎ (13 revisions)
  154. InP etch result in details‏‎ (13 revisions)
  155. ASML Stepper 3 - UCSB Test Reticles‏‎ (13 revisions)
  156. Main Page‏‎ (14 revisions)
  157. Rapid Thermal Processor (SSI Solaris 150)‏‎ (14 revisions)
  158. Lee Sawyer‏‎ (14 revisions)
  159. Unaxis VLR Etch - Process Control Data‏‎ (15 revisions)
  160. Autostep 200 Mask Making Guidance‏‎ (15 revisions)
  161. UNAVAILABLE - Optical Profilometer - White-Light/Phase-Shift Interference (Filmetrics Profilm3D)‏‎ (15 revisions)
  162. DUV Flood Expose‏‎ (15 revisions)
  163. E-Beam Lithography System (JEOL JBX-6300FS)‏‎ (16 revisions)
  164. Field Emission SEM 1 (FEI Sirion)‏‎ (16 revisions)
  165. Wafer Bonder (Logitech WBS7)‏‎ (16 revisions)
  166. Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer)‏‎ (16 revisions)
  167. Plasma Activation (EVG 810)‏‎ (16 revisions)
  168. PECVD1 Wafer Coating Process Traveler‏‎ (16 revisions)
  169. Usage Data and Statistics‏‎ (17 revisions)
  170. UCSB NanoFab Microscope Training‏‎ (17 revisions)
  171. Thermal Processing Recipes‏‎ (17 revisions)
  172. Biljana Stamenic‏‎ (17 revisions)
  173. Plasma Clean (YES EcoClean)‏‎ (17 revisions)
  174. Probe Station & Curve Tracer‏‎ (18 revisions)
  175. Rapid Thermal Processor (AET RX6)‏‎ (18 revisions)
  176. Sputter 5 (AJA ATC 2200-V)‏‎ (18 revisions)
  177. Oxford ICP Etcher (PlasmaPro 100 Cobra)‏‎ (18 revisions)
  178. Laser Scanning Confocal M-scope (Olympus LEXT)‏‎ (18 revisions)
  179. Oxygen Plasma System Recipes‏‎ (18 revisions)
  180. Atomic Force Microscope (Bruker ICON)‏‎ (18 revisions)
  181. Tech Talks Seminar Series‏‎ (19 revisions)
  182. Oven 5 (Labline)‏‎ (19 revisions)
  183. Automated Coat/Develop System (S-Cubed Flexi)‏‎ (19 revisions)
  184. Aidan Hopkins‏‎ (19 revisions)
  185. Lift-Off with DUV Imaging + PMGI Underlayer‏‎ (19 revisions)
  186. DSEIII (PlasmaTherm/Deep Silicon Etcher)‏‎ (19 revisions)
  187. Filmetrics F40-UV Microscope-Mounted‏‎ (19 revisions)
  188. Troubleshooting and Recovery‏‎ (19 revisions)
  189. IR Thermal Microscope (QFI)‏‎ (20 revisions)
  190. RIE 5 (PlasmaTherm)‏‎ (20 revisions)
  191. Brian Lingg‏‎ (20 revisions)
  192. RIE 2 (MRC)‏‎ (20 revisions)
  193. Sputter 4 (AJA ATC 2200-V)‏‎ (20 revisions)
  194. Tom Reynolds‏‎ (20 revisions)
  195. CAIBE (Oxford Ion Mill)‏‎ (21 revisions)
  196. Ellipsometer (Woollam)‏‎ (21 revisions)
  197. GoPro Hero8 Black (Internal)‏‎ (21 revisions)
  198. Wafer Coating Process Traveler‏‎ (23 revisions)
  199. Don Freeborn‏‎ (24 revisions)
  200. Mike Silva‏‎ (24 revisions)
  201. DUMMY TOOL‏‎ (24 revisions)
  202. Demis D. John‏‎ (25 revisions)
  203. Stepper 2 (AutoStep 200) Operating Procedures‏‎ (25 revisions)
  204. Packaging Recipes‏‎ (26 revisions)
  205. Sputter 3 (AJA ATC 2000-F)‏‎ (26 revisions)
  206. Stepper 1 (GCA 6300) - Standard Operating Procedure‏‎ (26 revisions)
  207. Nanofab Staff Internal Pages‏‎ (26 revisions)
  208. PECVD1 Wafer Coating Process‏‎ (27 revisions)
  209. ASML Stepper 3 Error Recovery, Troubleshooting and Calibration‏‎ (27 revisions)
  210. Tony Bosch‏‎ (28 revisions)
  211. Atomic Layer Deposition (Oxford FlexAL)‏‎ (29 revisions)
  212. Services‏‎ (29 revisions)
  213. ICP-Etch (Unaxis VLR)‏‎ (29 revisions)
  214. Other Dry Etching Recipes‏‎ (29 revisions)
  215. Vapor HF Etch‏‎ (30 revisions)
  216. RIE 3 (MRC)‏‎ (31 revisions)
  217. Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher‏‎ (31 revisions)
  218. HF Vapor Etch‏‎ (31 revisions)
  219. Tube Furnace (Tystar 8300)‏‎ (32 revisions)
  220. MLA150 - Troubleshooting‏‎ (33 revisions)
  221. Old training manual‏‎ (34 revisions)
  222. Stepper 2 (Autostep 200) - Job Programming‏‎ (34 revisions)
  223. Contact Aligner (SUSS MA-6)‏‎ (35 revisions)
  224. Ion Beam Deposition (Veeco NEXUS)‏‎ (35 revisions)
  225. Atomic Layer Deposition Recipes‏‎ (39 revisions)
  226. Maskless Aligner (Heidelberg MLA150)‏‎ (39 revisions)
  227. COVID-19 User Policies‏‎ (39 revisions)
  228. RIE Etching Recipes‏‎ (40 revisions)
  229. Dicing Saw (ADT)‏‎ (40 revisions)
  230. ASML 5500 Mask Making Guidelines‏‎ (41 revisions)
  231. Direct-Write Lithography Recipes‏‎ (41 revisions)
  232. Microscopes‏‎ (41 revisions)
  233. Lab Rules‏‎ (41 revisions)
  234. Research‏‎ (42 revisions)
  235. Surface Analysis (KLA/Tencor Surfscan)‏‎ (46 revisions)
  236. Lab Rules OLD 2018‏‎ (47 revisions)
  237. Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP)‏‎ (47 revisions)
  238. Wet Benches‏‎ (47 revisions)
  239. Autostep 200 Troubleshooting and Recovery‏‎ (48 revisions)
  240. PECVD 2 (Advanced Vacuum)‏‎ (48 revisions)
  241. Contact Alignment Recipes‏‎ (49 revisions)
  242. ICP Etch 2 (Panasonic E640)‏‎ (51 revisions)
  243. Editing Tutorials‏‎ (52 revisions)
  244. Staff List‏‎ (53 revisions)
  245. Test Data of etching SiO2 with CHF3/CF4-ICP1‏‎ (55 revisions)
  246. Stepper 2 (AutoStep 200)‏‎ (56 revisions)
  247. OLD - PECVD2 Recipes‏‎ (56 revisions)
  248. ICP Etch 1 (Panasonic E626I)‏‎ (58 revisions)
  249. InP Etch Rate and Selectivity (InP/SiO2)‏‎ (60 revisions)
  250. Oxford ICP Etcher - Process Control Data‏‎ (60 revisions)
  251. E-Beam Evaporation Recipes‏‎ (60 revisions)
  252. ICP-PECVD (Unaxis VLR)‏‎ (61 revisions)
  253. Thermal Evaporation Recipes‏‎ (62 revisions)
  254. E-Beam 4 (CHA)‏‎ (62 revisions)
  255. PECVD 1 (PlasmaTherm 790)‏‎ (64 revisions)
  256. Thermal Evap 2 (Solder)‏‎ (66 revisions)
  257. Wet Etching Recipes‏‎ (67 revisions)
  258. Chemical List - OLD 2018-09-05‏‎ (68 revisions)
  259. E-Beam 3 (Temescal)‏‎ (68 revisions)
  260. E-Beam 1 (Sharon)‏‎ (69 revisions)
  261. E-Beam 2 (Custom)‏‎ (71 revisions)
  262. Calculators + Utilities‏‎ (74 revisions)
  263. Stepper 3 (ASML DUV)‏‎ (75 revisions)
  264. Thermal Evap 1‏‎ (76 revisions)
  265. Stepper Recipes‏‎ (76 revisions)
  266. Test Data of etching SiO2 with CHF3/CF4‏‎ (81 revisions)
  267. Stepper 1 (GCA 6300)‏‎ (83 revisions)
  268. Frequently Asked Questions‏‎ (98 revisions)
  269. PECVD1 Recipes‏‎ (105 revisions)
  270. Wafer scanning process traveler‏‎ (116 revisions)
  271. Tool List‏‎ (172 revisions)
  272. Dry Etching Recipes‏‎ (188 revisions)
  273. Vacuum Deposition Recipes‏‎ (222 revisions)
  274. Lithography Recipes‏‎ (226 revisions)
  275. ICP Etching Recipes‏‎ (318 revisions)
  276. Sputtering Recipes‏‎ (403 revisions)
  277. PECVD Recipes‏‎ (809 revisions)

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