Pages with the fewest revisions

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  1. Advanced PECVD Recipes‏‎ (1 revision)
  2. Wafer coating procedure‏‎ (1 revision)
  3. LegacyTable‏‎ (1 revision)
  4. Lab Rules backup‏‎ (1 revision)
  5. Wafer Cleaver Recipes (LSD-155LT)‏‎ (1 revision)
  6. STD SiO2 recipe‏‎ (1 revision)
  7. Comparison of ash rate for different gas mixtures, especially between O2 only vs O2/N2 mixture.‏‎ (1 revision)
  8. ASML Stepper 3 - Substrates smaller than 100mm/4-inch‏‎ (1 revision)
  9. UCSBTEST1Gain4.jpg‏‎ (1 revision)
  10. MA6 Backside Alignment - Allowed Mark Locations‏‎ (1 revision)
  11. UV Ozone Quick Start‏‎ (1 revision)
  12. AUTOSTEP 200-PIECES instruction 6-20-19.pptx‏‎ (1 revision)
  13. Oxford Etcher - Sample Size Effect on Etch Rate‏‎ (1 revision)
  14. Unaxis SOP 3-12-2020.docx‏‎ (1 revision)
  15. Publications - 2013-2014‏‎ (1 revision)
  16. Stepper 1 (GCA6300) How to select proper chuck‏‎ (1 revision)
  17. ASML Stepper 3 - Job Creator‏‎ (1 revision)
  18. PECVD1-SiN-standard recipe.pdf‏‎ (1 revision)
  19. Unaxis Test Recipe Page‏‎ (1 revision)
  20. SiN 100C Table-2019‏‎ (1 revision)
  21. Filmetrics F50 - Operating Procedure‏‎ (1 revision)
  22. RIE5 - Standard Operating procedure (Cortex Software)‏‎ (1 revision)
  23. ProcessGroup: Shipping Samples on Dicing Tape+Frame‏‎ (1 revision)
  24. Nanofab-IT - Add Device to Network‏‎ (1 revision)
  25. Ellipsometer (Woollam) - Measuring thin dielectrics with Native Oxide pre-measurement‏‎ (1 revision)
  26. Sputter 5‏‎ (1 revision)
  27. Flood Exposure Recipes‏‎ (1 revision)
  28. Hummer SEM Sample Coater - Techniques to reduce charging in SEMs‏‎ (1 revision)
  29. Stepper 1 (GCA 6300) Available chucks‏‎ (1 revision)
  30. Intellemetrics Laser Etch Monitor Procedure for Plasma-Therm Etchers‏‎ (1 revision)
  31. Equipment Group - Video Training Procedures‏‎ (1 revision)
  32. YES Recipe Screenshots: STD-O2‏‎ (1 revision)
  33. Video Training - Introduction (Internal)‏‎ (1 revision)
  34. InP Etch test -details‏‎ (1 revision)
  35. TEST PAGE‏‎ (1 revision)
  36. Photomask Ordering Procedure for UCSB Users‏‎ (1 revision)
  37. InP Etch Test-in details‏‎ (1 revision)
  38. AUTOSTEP 200-PIECES 1st litho BL and BR orientation.pptx‏‎ (1 revision)
  39. Stepper 1 (GCA 6300) Substrate Thickness, Shim Thickness ans Target Thickness‏‎ (1 revision)
  40. Surfscan Errors and Workarounds‏‎ (1 revision)
  41. Stepper 2 (AutoStep 200) - Operating Procedure - Piece Parts‏‎ (1 revision)
  42. Operating Instructions‏‎ (1 revision)
  43. YES Recipe Screenshots: STD-N2-O2‏‎ (1 revision)
  44. PECVD.docx‏‎ (1 revision)
  45. PECVD1 Operating Instructions.pdf‏‎ (1 revision)
  46. Older Publications‏‎ (1 revision)
  47. Stepper 2 (Autostep 200) - Chuck Selection‏‎ (2 revisions)
  48. Strip Annealer‏‎ (2 revisions)
  49. ADT 7100 - Recovering an Old Recipe (2019)‏‎ (2 revisions)
  50. Test Data of etching SiO2 with CHF3/CF4/O2‏‎ (2 revisions)

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