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Showing below up to 250 results in range #21 to #270.

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  1. Wafer coating procedure‏‎ (1 revision)
  2. LegacyTable‏‎ (1 revision)
  3. STD SiO2 recipe‏‎ (1 revision)
  4. Comparison of ash rate for different gas mixtures, especially between O2 only vs O2/N2 mixture.‏‎ (1 revision)
  5. Lab Rules backup‏‎ (1 revision)
  6. Wafer Cleaver Recipes (LSD-155LT)‏‎ (1 revision)
  7. UCSBTEST1Gain4.jpg‏‎ (1 revision)
  8. ASML Stepper 3 - Substrates smaller than 100mm/4-inch‏‎ (1 revision)
  9. AUTOSTEP 200-PIECES instruction 6-20-19.pptx‏‎ (1 revision)
  10. MA6 Backside Alignment - Allowed Mark Locations‏‎ (1 revision)
  11. UV Ozone Quick Start‏‎ (1 revision)
  12. Oxford Etcher - Sample Size Effect on Etch Rate‏‎ (1 revision)
  13. Unaxis SOP 3-12-2020.docx‏‎ (1 revision)
  14. ASML Stepper 3 - Job Creator‏‎ (1 revision)
  15. PECVD1-SiN-standard recipe.pdf‏‎ (1 revision)
  16. Unaxis Test Recipe Page‏‎ (1 revision)
  17. Publications - 2013-2014‏‎ (1 revision)
  18. Stepper 1 (GCA6300) How to select proper chuck‏‎ (1 revision)
  19. SiN 100C Table-2019‏‎ (1 revision)
  20. Filmetrics F50 - Operating Procedure‏‎ (1 revision)
  21. RIE5 - Standard Operating procedure (Cortex Software)‏‎ (1 revision)
  22. ProcessGroup: Shipping Samples on Dicing Tape+Frame‏‎ (1 revision)
  23. Nanofab-IT - Add Device to Network‏‎ (1 revision)
  24. Sputter 5‏‎ (1 revision)
  25. Flood Exposure Recipes‏‎ (1 revision)
  26. Ellipsometer (Woollam) - Measuring thin dielectrics with Native Oxide pre-measurement‏‎ (1 revision)
  27. Exposing a wafer piece‏‎ (2 revisions)
  28. Unaxis SiN100C 300nm-2019‏‎ (2 revisions)
  29. Surfscan6200 photos‏‎ (2 revisions)
  30. Autostep 200 Old training manual‏‎ (2 revisions)
  31. Errors‏‎ (2 revisions)
  32. SiO2 Etching Test using CF4/CHF3‏‎ (2 revisions)
  33. CDE ResMap Quick-Start instructions‏‎ (2 revisions)
  34. ASML 5500: Choose Marks for Prealignment‏‎ (2 revisions)
  35. Stepper 2 (Autostep 200) - Table of Chucks, Shims, Target Thicknesses‏‎ (2 revisions)
  36. E-Beam 5 (Plasys)‏‎ (2 revisions)
  37. ADT 7100 - Recovering an Old Recipe (2019)‏‎ (2 revisions)
  38. Stepper 2 (Autostep 200) - Chuck Selection‏‎ (2 revisions)
  39. Strip Annealer‏‎ (2 revisions)
  40. Test Data of etching SiO2 with CHF3/CF4/O2‏‎ (2 revisions)
  41. Test Page‏‎ (2 revisions)
  42. GCA 6300 training manual -old instructions‏‎ (2 revisions)
  43. PECVD1-SIN Standard Recipe (PlasmaTherm 790)‏‎ (2 revisions)
  44. Process Group - Lab Stocking/Supplies Tasks‏‎ (2 revisions)
  45. Molecular Vapor Deposition Recipes‏‎ (2 revisions)
  46. THz Physics Presentations‏‎ (2 revisions)
  47. E-Beam Lithography Recipes‏‎ (2 revisions)
  48. Video Training: Uploading to GauchoCast/Panopto (Internal)‏‎ (2 revisions)
  49. Surfscan photo‏‎ (2 revisions)
  50. Thermal Evaporator 2‏‎ (2 revisions)
  51. ASML Stepper 3: Wafer Handler Reset Procedure‏‎ (2 revisions)
  52. Michael Barreraz‏‎ (2 revisions)
  53. Plasma Clean (Gasonics 2000)‏‎ (2 revisions)
  54. Main Page mod‏‎ (2 revisions)
  55. SPR220-7 at 3kW various temperature without N2 gas‏‎ (2 revisions)
  56. Vapor HF Etch (uETCH)‏‎ (3 revisions)
  57. Nanofab New User Onboarding‏‎ (3 revisions)
  58. Mike Day‏‎ (3 revisions)
  59. ASML 5500: Recovering from a Typo in Reticle ID‏‎ (3 revisions)
  60. Sputter 1 (Custom)‏‎ (3 revisions)
  61. Video Training: Hosting with Zoom and GacuhoCast/Panopto‏‎ (3 revisions)
  62. Nick test‏‎ (3 revisions)
  63. Foong Fatt‏‎ (3 revisions)
  64. Glossary‏‎ (3 revisions)
  65. User Accessible Commands‏‎ (3 revisions)
  66. MVD - Wafer Coating - Process Traveler‏‎ (3 revisions)
  67. ASML Stepper 3 Dicing Guide Programming‏‎ (3 revisions)
  68. Vacuum Sealer‏‎ (3 revisions)
  69. Ellipsometer (Woollam) - Measuring thin metals with oxide pre-measurement‏‎ (3 revisions)
  70. ADT UV-Tape Table 1042R‏‎ (3 revisions)
  71. PECVD1-SiN standard recipe.pdf‏‎ (3 revisions)
  72. Test Data of Etching SiO2 with CHF3/CF4-Florine ICP Etcher‏‎ (3 revisions)
  73. Test Data of etching SiO2 with CHF3/CF4-Florine ICP Etcher‏‎ (3 revisions)
  74. Logitech WBS7 - Procedure for Wax Mounting with Spin-On Crystalbond‏‎ (3 revisions)
  75. Ellipsometer (Rudolph)‏‎ (3 revisions)
  76. DS-K101-304 Bake Temp. versus Develop Rate‏‎ (3 revisions)
  77. MLA Recipes‏‎ (3 revisions)
  78. Gold surface oxidation (darkening) due to O2/N2 plasma; the need for O2 only recipe.‏‎ (3 revisions)
  79. Wire Saw (Takatori)‏‎ (3 revisions)
  80. Vacuum Oven (YES)‏‎ (3 revisions)
  81. Critical Point Dryer‏‎ (4 revisions)
  82. KLA Tencor P7 - Basic profile instructions‏‎ (4 revisions)
  83. Test Data of etching SiO2 with CHF3/CF4-Florine‏‎ (4 revisions)
  84. Photolithography - Improving Adhesion Photoresist Adhesion‏‎ (4 revisions)
  85. Jack Whaley‏‎ (4 revisions)
  86. Peder Lenvik‏‎ (4 revisions)
  87. Claudia Gutierrez‏‎ (4 revisions)
  88. Suss MA-6 Backside Alignment QuickStart‏‎ (4 revisions)
  89. Gold Plating Bench‏‎ (4 revisions)
  90. GCA 6300 Reboot Procedures‏‎ (4 revisions)
  91. Electronics Presentations‏‎ (4 revisions)
  92. Tube Furnace AlGaAs Oxidation (Lindberg)‏‎ (4 revisions)
  93. MLA150 - Large Image GDS Generation‏‎ (4 revisions)
  94. Wafer Scanning process Traveler‏‎ (4 revisions)
  95. Vraj Mehalana‏‎ (4 revisions)
  96. Laser Etch Monitor Simulation in Python‏‎ (4 revisions)
  97. ASML DUV: Edge Bead Removal via Photolithography‏‎ (4 revisions)
  98. Filmetrics F10-RT-UVX Operating Procedure‏‎ (4 revisions)
  99. Old Training Manual‏‎ (5 revisions)
  100. News Feed‏‎ (5 revisions)
  101. Spin Rinse Dryer (SemiTool)‏‎ (5 revisions)
  102. Old Deposition Data - 2021-12-15‏‎ (5 revisions)
  103. Mechanical Polisher (Allied)‏‎ (5 revisions)
  104. Sputter 2 (SFI Endeavor)‏‎ (5 revisions)
  105. Goniometer (Rame-Hart A-100) - Operating Procedure‏‎ (5 revisions)
  106. PubList2018‏‎ (5 revisions)
  107. Thermal Evaporator 1‏‎ (5 revisions)
  108. Lift-Off with I-Line Imaging Resist + LOL2000 Underlayer‏‎ (5 revisions)
  109. Tino Sy‏‎ (5 revisions)
  110. Wafer Cleaver (PELCO Flip-Scribe)‏‎ (6 revisions)
  111. Luis Zuzunaga‏‎ (6 revisions)
  112. Automated Wafer Cleaver (Loomis LSD-155LT)‏‎ (6 revisions)
  113. Digital Microscope (Olympus DSX1000)‏‎ (6 revisions)
  114. S-Cubed Flexi - Operating Procedure‏‎ (6 revisions)
  115. Olympus LEXT OLS4000 Confocal uScope - Quick Start‏‎ (6 revisions)
  116. MLA150 - CAD Files and Templates‏‎ (6 revisions)
  117. Tube Furnace Wafer Bonding (Thermco)‏‎ (6 revisions)
  118. Photonics Presentations‏‎ (6 revisions)
  119. E-BEAM‏‎ (6 revisions)
  120. Optical Film Thickness (Filmetrics)‏‎ (6 revisions)
  121. High Temp Oven (Blue M)‏‎ (7 revisions)
  122. ADT 7100 - Initial Setup Before Cutting‏‎ (7 revisions)
  123. RIE 1 (Custom)‏‎ (7 revisions)
  124. Optical Film Spectra + Optical Properties (Filmetrics F10-RT-UVX)‏‎ (7 revisions)
  125. Dan Read‏‎ (7 revisions)
  126. Programming a Job‏‎ (7 revisions)
  127. Flip-Chip Bonder (Finetech)‏‎ (7 revisions)
  128. PECV1 Wafer Coating Process Traveler‏‎ (7 revisions)
  129. Stocked Chemical List‏‎ (7 revisions)
  130. Ovens 1, 2 & 3 (Labline)‏‎ (7 revisions)
  131. NanoFab Process Group‏‎ (7 revisions)
  132. Autostep 200 User Accessible Commands‏‎ (7 revisions)
  133. Optical Film Thickness & Wafer-Mapping (Filmetrics F50)‏‎ (7 revisions)
  134. Probe Station: I-V Curves with Keithley 2400 and Python Script‏‎ (7 revisions)
  135. Wafer Scanning/Coating Process Traveler ( combined/less detailed)‏‎ (7 revisions)
  136. PECVD1-(PlasmaTherm 790)‏‎ (7 revisions)
  137. GCA Old full training manual‏‎ (7 revisions)
  138. Bill Millerski‏‎ (7 revisions)
  139. Deposition Data - temporary 2021-12-15‏‎ (7 revisions)
  140. Filmetrics F40-UV Quick Start‏‎ (8 revisions)
  141. FIJI - Microscope Measurement Tools‏‎ (8 revisions)
  142. ASML 5500: Recovering from an Error‏‎ (8 revisions)
  143. SEM Sample Coater (Hummer)‏‎ (8 revisions)
  144. Focused Ion-Beam Lithography (Raith Velion)‏‎ (8 revisions)
  145. Resistivity Mapper (CDE RESMAP)‏‎ (8 revisions)
  146. Optical Film Thickness (Nanometric)‏‎ (9 revisions)
  147. GCA 6300 Mask Making Guidance‏‎ (9 revisions)
  148. Oven 4 (Thermo-Fisher HeraTherm)‏‎ (9 revisions)
  149. Holographic Lith/PL Setup (Custom)‏‎ (9 revisions)
  150. Bill Mitchell‏‎ (9 revisions)
  151. YES-150C-Various-Resists‏‎ (9 revisions)
  152. KLA Tencor P7 - Saving Profile Data‏‎ (9 revisions)
  153. Ashers (Technics PEII)‏‎ (9 revisions)
  154. Nano-Imprint (Nanonex NX2000)‏‎ (9 revisions)
  155. Fluorescence Microscope (Olympus MX51)‏‎ (9 revisions)
  156. SEM 1 (JEOL IT800SHL)‏‎ (9 revisions)
  157. Process Group - Billing Instructions‏‎ (9 revisions)
  158. Old Deposition Data - NastaziaM 2021-11-22‏‎ (9 revisions)
  159. Photoluminescence PL Setup (Custom)‏‎ (9 revisions)
  160. Wafer Coating Process Traveler1‏‎ (10 revisions)
  161. Intellemetrics Laser Etch Monitor Procedure for Panasonic ICP Etchers‏‎ (10 revisions)
  162. GCA 6300 USer Accessible Commands‏‎ (10 revisions)
  163. Ning Cao‏‎ (10 revisions)
  164. CC-PRIME OnBoarding 2022-08‏‎ (10 revisions)
  165. Logitech WBS7 - Procedure for Wax Mounting with bulk Crystalbond Stick‏‎ (10 revisions)
  166. IBD: Calibrating Optical Thickness‏‎ (10 revisions)
  167. Adam Abrahamsen‏‎ (10 revisions)
  168. Photolithography - Manual Edge-Bead Removal Techniques‏‎ (10 revisions)
  169. Unaxis wafer coating procedure‏‎ (10 revisions)
  170. Measurements and Imaging with Amscope Camera - Quickstart Usage Guide‏‎ (10 revisions)
  171. InP Etch Test Result in Details‏‎ (10 revisions)
  172. KLayout Design Tips‏‎ (10 revisions)
  173. Step Profilometer (KLA Tencor P-7)‏‎ (11 revisions)
  174. UV Ozone Reactor‏‎ (11 revisions)
  175. Deep UV Optical Microscope (Olympus)‏‎ (11 revisions)
  176. Homepage Draft1‏‎ (11 revisions)
  177. IR Aligner (SUSS MJB-3 IR)‏‎ (11 revisions)
  178. Brian Thibeault‏‎ (12 revisions)
  179. Ovens - Overview of All Lab Ovens‏‎ (12 revisions)
  180. Process Group - Remote Fabrication Jobs‏‎ (12 revisions)
  181. Wafer Bonder (SUSS SB6-8E)‏‎ (12 revisions)
  182. Molecular Vapor Deposition‏‎ (12 revisions)
  183. YES-SPR220-Various-Temps‏‎ (12 revisions)
  184. Film Stress (Tencor Flexus)‏‎ (12 revisions)
  185. Chemical-Mechanical Polisher (Logitech)‏‎ (12 revisions)
  186. Chemical List‏‎ (12 revisions)
  187. Nanofab Job Postings‏‎ (12 revisions)
  188. InP etch result in details‏‎ (13 revisions)
  189. Field Emission SEM 2 (JEOL IT800SHL)‏‎ (13 revisions)
  190. Step Profilometer (DektakXT)‏‎ (14 revisions)
  191. Lee Sawyer‏‎ (14 revisions)
  192. ASML Stepper 3 - UCSB Test Reticles‏‎ (14 revisions)
  193. Laser Etch Monitoring‏‎ (15 revisions)
  194. ASML Stepper 3 Standard Operating Procedure‏‎ (15 revisions)
  195. Unaxis VLR Etch - Process Control Data‏‎ (15 revisions)
  196. Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer)‏‎ (16 revisions)
  197. PECVD1 Wafer Coating Process Traveler‏‎ (16 revisions)
  198. DUV Flood Expose‏‎ (16 revisions)
  199. E-Beam Lithography System (JEOL JBX-6300FS)‏‎ (16 revisions)
  200. Main Page‏‎ (17 revisions)
  201. Plasma Activation (EVG 810)‏‎ (17 revisions)
  202. XeF2 Etch (Xetch)‏‎ (17 revisions)
  203. MLA150 - Design Guidelines‏‎ (18 revisions)
  204. Laser Scanning Confocal M-scope (Olympus LEXT)‏‎ (18 revisions)
  205. Thermal Processing Recipes‏‎ (18 revisions)
  206. Atomic Force Microscope (Bruker ICON)‏‎ (18 revisions)
  207. Sputter 5 (AJA ATC 2200-V)‏‎ (18 revisions)
  208. Wafer Bonder (Logitech WBS7)‏‎ (18 revisions)
  209. Oxford ICP Etcher (PlasmaPro 100 Cobra)‏‎ (19 revisions)
  210. Automated Coat/Develop System (S-Cubed Flexi)‏‎ (19 revisions)
  211. UCSB NanoFab Microscope Training‏‎ (19 revisions)
  212. Lift-Off with DUV Imaging + PMGI Underlayer‏‎ (19 revisions)
  213. Process Group - Process Control Data‏‎ (19 revisions)
  214. Tech Talks Seminar Series‏‎ (19 revisions)
  215. Filmetrics F40-UV Microscope-Mounted‏‎ (19 revisions)
  216. Troubleshooting and Recovery‏‎ (19 revisions)
  217. Oven 5 (Labline)‏‎ (19 revisions)
  218. Probe Station & Curve Tracer‏‎ (19 revisions)
  219. Rapid Thermal Processor (SSI Solaris 150)‏‎ (20 revisions)
  220. Rapid Thermal Processor (AET RX6)‏‎ (20 revisions)
  221. RIE 5 (PlasmaTherm)‏‎ (20 revisions)
  222. Brian Lingg‏‎ (20 revisions)
  223. Tom Reynolds‏‎ (20 revisions)
  224. Sputter 4 (AJA ATC 2200-V)‏‎ (20 revisions)
  225. IR Thermal Microscope (QFI)‏‎ (20 revisions)
  226. GoPro Hero8 Black (Internal)‏‎ (21 revisions)
  227. DSEIII (PlasmaTherm/Deep Silicon Etcher)‏‎ (21 revisions)
  228. Plasma Clean (YES EcoClean)‏‎ (21 revisions)
  229. Autostep 200 Mask Making Guidance‏‎ (21 revisions)
  230. RIE 2 (MRC)‏‎ (22 revisions)
  231. Wafer Coating Process Traveler‏‎ (23 revisions)
  232. CAIBE (Oxford Ion Mill)‏‎ (23 revisions)
  233. DUMMY TOOL‏‎ (24 revisions)
  234. Suss Aligners (SUSS MJB-3)‏‎ (24 revisions)
  235. Don Freeborn‏‎ (24 revisions)
  236. Demis D. John‏‎ (25 revisions)
  237. Mike Silva‏‎ (25 revisions)
  238. Biljana Stamenic‏‎ (25 revisions)
  239. Usage Data and Statistics‏‎ (25 revisions)
  240. Ellipsometer (Woollam)‏‎ (25 revisions)
  241. Aidan Hopkins‏‎ (26 revisions)
  242. Sputter 3 (AJA ATC 2000-F)‏‎ (26 revisions)
  243. Stepper 1 (GCA 6300) - Standard Operating Procedure‏‎ (26 revisions)
  244. PECVD1 Wafer Coating Process‏‎ (27 revisions)
  245. Tony Bosch‏‎ (28 revisions)
  246. ICP-Etch (Unaxis VLR)‏‎ (29 revisions)
  247. Atomic Layer Deposition (Oxford FlexAL)‏‎ (30 revisions)
  248. Services‏‎ (30 revisions)
  249. Other Dry Etching Recipes‏‎ (30 revisions)
  250. Vapor HF Etch‏‎ (30 revisions)

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