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- 01:46, 27 June 2022 diff hist -6 Template:StaffInfo DJ TESTING added "primary" supervisor
- 01:43, 27 June 2022 diff hist +13 DUMMY TOOL
- 01:42, 27 June 2022 diff hist 0 Template:Tool2 move Description, Mfg, Model above supervisors
- 01:40, 27 June 2022 diff hist -68 Template:Tool2 remove table split after supervisors, use HR instead
- 01:38, 27 June 2022 diff hist +18 m Template:Tool2
- 01:37, 27 June 2022 diff hist -86 Template:Tool2 try removing table break, use HR instead
- 01:34, 27 June 2022 diff hist -6 DUMMY TOOL
- 01:30, 27 June 2022 diff hist -28 m Template:Tool2
- 01:28, 27 June 2022 diff hist +27 m Template:Tool2
- 01:27, 27 June 2022 diff hist +1 m Template:Tool2
- 01:27, 27 June 2022 diff hist +18 Template:Tool2 combine super/super2 into one table
- 01:21, 27 June 2022 diff hist -26 Template:Tool2 Undo revision 160044 by John d (talk) Tag: Undo
- 01:20, 27 June 2022 diff hist -1 Template:Tool2 undo revision 157023 by John d (talk)
- 01:18, 27 June 2022 diff hist +1 m Template:Tool2
- 01:17, 27 June 2022 diff hist +26 Template:Tool2 tool info at top, then supervisors, then materials/categories
- 01:13, 27 June 2022 diff hist +131 m Template:StaffInfoSecondary DJ
- 01:12, 27 June 2022 diff hist +2 m Template:StaffInfo DJ
- 01:12, 27 June 2022 diff hist +32 Template:StaffInfo DJ
- 01:11, 27 June 2022 diff hist +1,132 Template:StaffContactInfo DJ updated docs on how to edit contact info
- 01:07, 27 June 2022 diff hist -566 Template:Tool2 updated documentation pointing to Template:StaffContactInfo_DJ
- 00:58, 27 June 2022 diff hist 0 m Template:StaffContactInfo DJ
- 00:58, 27 June 2022 diff hist +133 Template:StaffContactInfo DJ changed all {{{super}}}-->{{{1}}}, and added example sytax
- 00:54, 27 June 2022 diff hist -12 Template:StaffContactInfo DJ changed only Tony and Demis {{{super}}}--> {{{1}}}
- 00:52, 27 June 2022 diff hist +194 Template:StaffContactInfo DJ added includeonly & noinclude sections
- 00:51, 27 June 2022 diff hist +1,761 N Template:StaffContactInfo DJ copied #IFEQ section of "tool2_DJ"
- 00:50, 27 June 2022 diff hist -1,721 Template:Tool2 deleted Staff contact info {{ifeq}}, replaced with {{StaffContactInfo_DJ}}
- 00:40, 27 June 2022 diff hist +116 Template:Tool2
- 00:38, 27 June 2022 diff hist -6 Template:Tool2
- 00:38, 27 June 2022 diff hist -12 Template:StaffInfoSecondary DJ
- 00:34, 27 June 2022 diff hist +39 Template:StaffInfoSecondary DJ
- 00:26, 27 June 2022 diff hist +3 Template:Tool2
- 00:26, 27 June 2022 diff hist -3 Template:Tool2
- 00:26, 27 June 2022 diff hist 0 Template:Tool2
- 00:25, 27 June 2022 diff hist +3 Template:Tool2 new hr
- 00:23, 27 June 2022 diff hist +3 Template:Tool2 HR between super/super2
- 06:15, 25 June 2022 diff hist +7 Template:Announcements ASML update
- 21:08, 23 June 2022 diff hist -34 Template:Announcements asml update
- 07:50, 23 June 2022 diff hist +69 ICP Etching Recipes →Oxford ICP Etcher (PlasmaPro 100 Cobra): updated recipes, linked to SOP for travelers for each recipe Tag: Visual edit
- 07:42, 23 June 2022 diff hist +36 Oxford ICP Etcher (PlasmaPro 100 Cobra) →Detailed Specifications: updated recipes available Tag: Visual edit
- 07:52, 22 June 2022 diff hist 0 Template:Tool2
- 07:51, 22 June 2022 diff hist -59 Template:Tool2
- 07:50, 22 June 2022 diff hist +36 Template:Tool2
- 07:49, 22 June 2022 diff hist -40 Template:Tool2 try removing StaffInfoSecondary "ifeq"
- 07:46, 22 June 2022 diff hist -1,952 Template:Tool2
- 07:45, 22 June 2022 diff hist +49 Template:Tool2
- 07:23, 22 June 2022 diff hist -1 m Template:StaffInfo DJ →Versions
- 07:22, 22 June 2022 diff hist -1 m Template:StaffInfo DJ
- 07:21, 22 June 2022 diff hist +27 Template:StaffInfoSecondary DJ added includeonly tags
- 07:21, 22 June 2022 diff hist +27 Template:StaffInfo DJ added includeonly tags
- 07:19, 22 June 2022 diff hist +20 DUMMY TOOL
- 07:18, 22 June 2022 diff hist +3 DUMMY TOOL
- 07:18, 22 June 2022 diff hist +4 DUMMY TOOL switch to tool2_DJ
- 07:17, 22 June 2022 diff hist +74 DUMMY TOOL →About Tag: Visual edit
- 07:15, 22 June 2022 diff hist +1,957 N DUMMY TOOL pasted nanonex source
- 07:14, 22 June 2022 diff hist +58 Template:Tool2 added "super2" to the example
- 07:12, 22 June 2022 diff hist +171 Template:Tool2 removed 3rd args and switch to all _DJ templates
- 07:05, 22 June 2022 diff hist +72 Template:StaffInfo DJ removed extra argument
- 06:48, 22 June 2022 diff hist +1 SEM Sample Coater (Hummer) trying "tool2" template
- 06:46, 22 June 2022 diff hist +64 Tool List →Vacuum Deposition: Added SEM Hummer coater, adn Thermal Evap heading Tag: Visual edit
- 06:41, 22 June 2022 diff hist +2,046 N Hummer SEM Sample Coater - Techniques to reduce charging in SEMs added BillM's technique current Tag: Visual edit
- 06:23, 22 June 2022 diff hist +775 SEM Sample Coater (Hummer) added more info and placeholder for SOP and link to techniqures to reduce chargign Tag: Visual edit
- 06:16, 22 June 2022 diff hist +39 Field Emission SEM 2 (JEOL IT800SHL) →Mechanical: added limited 4-inch wf movemnt Tag: Visual edit
- 06:15, 22 June 2022 diff hist +1,483 Field Emission SEM 2 (JEOL IT800SHL) added specs from user maual, SOP section (empty) and link to Hummer ocater Tag: Visual edit
- 11:28, 21 June 2022 diff hist +595 Frequently Asked Questions →General NanoFab Questions: added "how can i access the lab" section Tag: Visual edit
- 08:29, 21 June 2022 diff hist 0 m Template:Announcements minor reorder
- 08:29, 21 June 2022 diff hist -17 Template:Announcements →PureStrip Bath Heater DOWN: itUP
- 08:12, 21 June 2022 diff hist +5 m Template:Announcements →Masks Optional as of June 13
- 07:48, 21 June 2022 diff hist +24 Template:Announcements ASML uodate
- 22:07, 20 June 2022 diff hist +35 MLA150 - Design Guidelines →Automatic Alignment: added recommended cross dimensions Tag: Visual edit
- 16:59, 18 June 2022 diff hist +4 m Brian Lingg current Tag: Visual edit
- 16:58, 18 June 2022 diff hist +62 Brian Lingg Tag: Visual edit
- 10:19, 18 June 2022 diff hist +36 Brian Lingg retirement notice Tag: Visual edit
- 10:11, 17 June 2022 diff hist +30 Template:Announcements unaxis-dep up
- 10:01, 17 June 2022 diff hist +4 Template:Announcements asml update
- 10:26, 16 June 2022 diff hist +188 Template:Announcements asml and unaxis updates
- 19:05, 15 June 2022 diff hist +405 Ashers (Technics PEII) Added recipes, updated applications with times. Tag: Visual edit
- 18:55, 15 June 2022 diff hist +134 ICP Etching Recipes →UV6-0.8 Etching: update PR strip headers to be more general, and update FL-ICP Pr strip section. Tag: Visual edit
- 08:27, 15 June 2022 diff hist +163 Photolithography - Manual Edge-Bead Removal Techniques →Lithographic: mentioend 4-inch metal masks Tag: Visual edit
- 08:26, 15 June 2022 diff hist +404 MLA150 - Troubleshooting →Solutions for small substrates: added EBR techniques link Tag: Visual edit
- 16:59, 13 June 2022 diff hist 0 PECVD Recipes →SiO2 deposition (PECVD #1): fix SiO2 link display
- 11:20, 13 June 2022 diff hist +16 Template:Announcements masks optional
- 11:17, 13 June 2022 diff hist 0 COVID-19 User Policies reverted "full covid policy" "last updated" date to previous Tag: Visual edit
- 11:15, 13 June 2022 diff hist +21 COVID-19 User Policies masks optional update Tag: Visual edit
- 09:26, 13 June 2022 diff hist +644 Frequently Asked Questions →Processing/Fabrication Questions: added "my glassware is missing" section, linked to policy Tag: Visual edit
- 16:10, 10 June 2022 diff hist -12 Template:Announcements →Unaxis-Dep: Down: SiD4 ETA June 13th
- 16:09, 10 June 2022 diff hist 0 m Template:Announcements →PureStrip Bath Heater DOWN
- 16:09, 10 June 2022 diff hist +225 Template:Announcements PureStrip bath down
- 15:26, 10 June 2022 diff hist -89 Template:Announcements deleted plating bench downtime, added Gasonics down
- 12:54, 9 June 2022 diff hist +174 Template:Announcements ASML down update
- 16:01, 8 June 2022 diff hist +437 Dry Etching Recipes link to etching process control data, new heading levels for the huge table Tag: Visual edit
- 15:55, 8 June 2022 diff hist +412 Vacuum Deposition Recipes link to process control data Tag: Visual edit
- 15:53, 8 June 2022 diff hist +33 Process Group - Process Control Data updated heading titles to include "Process COntrol Data" for linking purposes. Tag: Visual edit
- 10:29, 6 June 2022 diff hist +5 m Deep UV Optical Microscope (Olympus) →Other Info Tag: Visual edit
- 10:28, 6 June 2022 diff hist +118 Filmetrics F40-UV Microscope-Mounted link to all scopes Tag: Visual edit
- 10:27, 6 June 2022 diff hist +118 Digital Microscope (Olympus DSX1000) link to all scopes Tag: Visual edit
- 10:27, 6 June 2022 diff hist +207 Deep UV Optical Microscope (Olympus) note that DUV camera is non-funcitonal Tag: Visual edit
- 10:26, 6 June 2022 diff hist +101 Laser Scanning Confocal M-scope (Olympus LEXT) link to all scopes Tag: Visual edit
- 07:52, 6 June 2022 diff hist +184 Template:Announcements ASML down - TCU
- 23:10, 4 June 2022 diff hist -141 Template:Announcements deleted lab open, updated Unaxis SiD4 delivery.
- 12:13, 1 June 2022 diff hist +203 Template:Announcements plating bench down 6/7th
- 11:03, 1 June 2022 diff hist +34 m Template:Announcements
- 10:13, 1 June 2022 diff hist -272 Template:Announcements CR open
- 08:58, 1 June 2022 diff hist +48 Template:Announcements HVAC closure update
- 08:11, 27 May 2022 diff hist +50 m Lift-Off with I-Line Imaging Resist + LOL2000 Underlayer added author credits Tag: Visual edit
- 21:24, 26 May 2022 diff hist +258 MLA Recipes →Positive Resist (MLA150) current Tag: Visual edit
- 21:22, 26 May 2022 diff hist +25 MLA Recipes →Positive Resist (MLA150) Tag: Visual edit
- 15:54, 26 May 2022 diff hist +210 COVID-19 User Policies masks mandatory May 27th Tag: Visual edit: Switched
- 15:50, 26 May 2022 diff hist -1,097 Template:Announcements deleted: Old COVID policy (March), AFM UP, F50 Up
- 15:48, 26 May 2022 diff hist +419 Template:Announcements masks mandatory May 27th
- 11:57, 26 May 2022 diff hist +84 Lab Rules →Wet Benches: Added heading for "Glassware Confiscation Policy" (2.9.2.1) Tag: Visual edit
- 09:28, 25 May 2022 diff hist -1 m Template:Announcements
- 09:28, 25 May 2022 diff hist +159 Template:Announcements Unaxis Dep down SiD4
- 12:14, 24 May 2022 diff hist +333 Template:Announcements CR closure June 1, 6-9am
- 15:43, 20 May 2022 diff hist +6 m Test Data of etching SiO2 with CHF3/CF4 set header row Tag: Visual edit
- 10:46, 20 May 2022 diff hist +13 m ICP-PECVD (Unaxis VLR) →Detailed Specifications Tag: Visual edit
- 21:12, 19 May 2022 diff hist -193 Template:Announcements AFM up, deleted F10, LEXT
- 20:58, 19 May 2022 diff hist 0 m Oxford ICP Etcher - Process Control Data Tag: Visual edit
- 20:56, 19 May 2022 diff hist +43 Oxford ICP Etcher - Process Control Data updated SEM links to state "45°" or "XS" Tag: Visual edit
- 20:43, 19 May 2022 diff hist 0 m Oxford ICP Etcher - Process Control Data Tag: Visual edit
- 20:42, 19 May 2022 diff hist +125 Oxford ICP Etcher - Process Control Data uploaded SEMs Tag: Visual edit
- 20:42, 19 May 2022 diff hist 0 N File:Oxford InP 60C XS05.jpg current
- 20:41, 19 May 2022 diff hist 0 N File:Oxford InP 60C 45DEG05.jpg current
- 20:39, 19 May 2022 diff hist 0 N File:Oxford InP 60C 45DEG02.jpg current
- 09:27, 19 May 2022 diff hist +153 Oxford ICP Etcher - Process Control Data added etch cal, SEMs TBA Tag: Visual edit
- 09:15, 19 May 2022 diff hist +156 Oxford ICP Etcher - Process Control Data added "sample prep" section - still needs solution detials added Tag: Visual edit
- 08:43, 19 May 2022 diff hist +296 Oxford ICP Etcher - Process Control Data Added dummy InP and seasoning steps Tag: Visual edit
- 17:16, 18 May 2022 diff hist -111 Probe Station & Curve Tracer deleted old DMM - removed form setup (didn't work) Tag: Visual edit
- 07:30, 13 May 2022 diff hist +100 Optical Film Thickness (Nanometric) note to use FIlmtrics F40, and locaiton=Removed From Lab current Tag: Visual edit
- 07:28, 13 May 2022 diff hist -41 Tool List →Thickness + Optical Constants: Deleted Nanometrics (removed from lab) Tag: Visual edit
- 07:27, 13 May 2022 diff hist +148 Optical Film Thickness (Filmetrics) tool decomissioned notice,locaiton="removed from lab" current Tag: Visual edit
- 07:26, 13 May 2022 diff hist -81 Tool List →Thin-Film/Material Analysis: deleted FIlmetrics F20 Tag: Visual edit
- 11:39, 11 May 2022 diff hist +101 Services link to hourly rates Tag: Visual edit
- 11:33, 11 May 2022 diff hist -34 m Template:Announcements →AFM: DOWN: fix link
- 11:33, 11 May 2022 diff hist +86 m Template:Announcements →AFM: DOWN: link to tool
- 11:32, 11 May 2022 diff hist +124 Template:Announcements AFM down
- 17:32, 10 May 2022 diff hist +912 Process Group - Process Control Data →Etching: links to all etching process control pages Tag: Visual edit
- 17:27, 10 May 2022 diff hist -27 m ICP Etching Recipes Renaming Process Control Data Tag: Visual edit
- 17:25, 10 May 2022 diff hist -148 m ICP Etching Recipes renamed "historical data" to "process control" data Tag: Visual edit
- 17:18, 10 May 2022 diff hist -6 m Sputtering Recipes →Ion Beam Deposition (Veeco NEXUS) Tag: Visual edit
- 17:18, 10 May 2022 diff hist -2 Sputtering Recipes →Ion Beam Deposition (Veeco NEXUS): changed style to Page Title Tag: Visual edit
- 17:17, 10 May 2022 diff hist +3,304 N Process Group - Process Control Data Links to all PECVD and IBD data pages Tag: Visual edit
- 17:16, 10 May 2022 diff hist +71 m Sputtering Recipes minor updates Tag: Visual edit
- 17:15, 10 May 2022 diff hist +12 Ion Beam Deposition (Veeco NEXUS) →Detailed Specifications: mentioned ITO not installed, minor formatting Tag: Visual edit
- 17:06, 10 May 2022 diff hist +30 Sputtering Recipes →Ion Beam Deposition (Veeco NEXUS): rename process control plots for clarity Tag: Visual edit
- 17:01, 10 May 2022 diff hist -23 PECVD Recipes renamed Process Control plots for clarity Tag: Visual edit
- 16:35, 10 May 2022 diff hist +135 Nanofab Staff Internal Pages →Process Group: link to Process Control Data Tag: Visual edit
- 07:24, 10 May 2022 diff hist -108 Template:Announcements F50 up
- 12:17, 5 May 2022 diff hist +24 Test Data of etching SiO2 with CHF3/CF4 updated temperature reduction comment Tag: Visual edit
- 14:32, 4 May 2022 diff hist +3 PECVD Recipes →Si3N4 [ICP-PECVD]: corrected "current process data" links, previously pointed to "HDSiO" tab Tag: Visual edit
- 08:44, 4 May 2022 diff hist +354 Template:Announcements F50 down
- 08:41, 4 May 2022 diff hist -96 Template:Announcements →F10-RT Down: fixed links
- 08:40, 4 May 2022 diff hist +724 Template:Announcements F10-RT down
- 08:17, 4 May 2022 diff hist +2 Oxford ICP Etcher - Process Control Data modified comment on "brown gunk" observation. Tag: Visual edit
- 08:16, 4 May 2022 diff hist 0 m Oxford ICP Etcher - Process Control Data →Dependence on Sample Size: set table row to header style Tag: Visual edit
- 08:13, 4 May 2022 diff hist -113 Oxford ICP Etcher - Process Control Data Add row explaining change in mask pattern Tag: Visual edit
- 16:21, 3 May 2022 diff hist -419 Template:Announcements deleted lasb closure
- 16:13, 2 May 2022 diff hist +291 S-Cubed Flexi - Operating Procedure link to DSK bake vs dev rate, recipe minor updates Tag: Visual edit
- 16:05, 2 May 2022 diff hist +2,188 S-Cubed Flexi - Operating Procedure inital procedure, and initial recipes Tag: Visual edit
- 11:14, 29 April 2022 diff hist +161 Oxford ICP Etcher - Process Control Data bolded the title row Tag: Visual edit
- 14:27, 28 April 2022 diff hist +45 Unaxis VLR Etch - Process Control Data comments on undercut profile from 3/29/22 Tag: Visual edit
- 17:48, 27 April 2022 diff hist +355 Lift-Off with I-Line Imaging Resist + LOL2000 Underlayer mentioned switching Imaging PR Tag: Visual edit
- 17:45, 27 April 2022 diff hist +23 m Lithography Recipes →Lift-Off Recipes Tag: Visual edit
- 17:39, 27 April 2022 diff hist +10 m Lithography Recipes →Lift-Off Recipes Tag: Visual edit
- 17:35, 27 April 2022 diff hist +4,054 Lift-Off with I-Line Imaging Resist + LOL2000 Underlayer wrote initial process Tag: Visual edit
- 16:34, 27 April 2022 diff hist +891 N Lift-Off with I-Line Imaging Resist + LOL2000 Underlayer added Tips, copied from DUV Liftoff page Tag: Visual edit
- 16:32, 27 April 2022 diff hist +142 Lift-Off with DUV Imaging + PMGI Underlayer corrected typo current Tag: Visual edit
- 16:29, 27 April 2022 diff hist -23 Lift-Off with DUV Imaging + PMGI Underlayer →Tips: fixed link to liftoff tutorial Tag: Visual edit
- 16:25, 27 April 2022 diff hist +633 Lithography Recipes →Lift-Off Recipes: link to I-Line Liftoff w/ LOL underlayer Tag: Visual edit
- 18:49, 26 April 2022 diff hist +72 Template:Announcements updated lab closure msg
- 15:51, 26 April 2022 diff hist +200 Unaxis VLR Etch - Process Control Data →Data - InP Ridge Etch (Unaxis VLR): updated chamber conditioning Tag: Visual edit
- 12:03, 25 April 2022 diff hist +339 Microscopes added AmScope camera model #, minor changes to liknj to Amscope section Tag: Visual edit
- 19:02, 20 April 2022 diff hist +49 Tool List →Dry Etch: added Raith Velion to Dry Etch > Ion Milling section Tag: Visual edit
- 23:31, 19 April 2022 diff hist +200 Dry Etching Recipes added Nb, Os rows, "A" for Pan1/2 Tag: Visual edit
- 23:14, 19 April 2022 diff hist +174 Thermal Processing Recipes →Bonding with Intermediate layer: link to Logitech recipes page Tag: Visual edit
- 11:54, 19 April 2022 diff hist -36 m Template:Announcements →LEXT Confocal: DOWN: fix link
- 11:53, 19 April 2022 diff hist +154 Template:Announcements →LEXT Confocal: DOWN: linked to DX-1000
- 11:51, 19 April 2022 diff hist +117 Template:Announcements updated floor cleaning closure
- 13:09, 15 April 2022 diff hist -799 Unaxis VLR Etch - Process Control Data added WorkInProgress, example table rows Tag: Visual edit
- 13:08, 15 April 2022 diff hist +1,403 N Unaxis VLR Etch - Process Control Data pasted table from Oxford ICP Tag: Visual edit: Switched
- 13:06, 15 April 2022 diff hist +9 ICP Etching Recipes →ICP-Etch (Unaxis VLR): link to Process Control Data Tag: Visual edit
- 13:02, 15 April 2022 diff hist +233 ICP Etching Recipes added Process Control Data sections for each tool Tag: Visual edit
- 11:56, 15 April 2022 diff hist +72 Process Group - Remote Fabrication Jobs fixed links to Equipment work Tag: Visual edit
- 20:51, 13 April 2022 diff hist -228 Template:Announcements Deleted DUVscope
- 20:49, 13 April 2022 diff hist +229 Template:Announcements Friday lab closure
- 17:45, 12 April 2022 diff hist +225 Dry Etching Recipes Oxford links to GaN+GaAs recipes Tag: Visual edit
- 17:43, 12 April 2022 diff hist +5 Dry Etching Recipes Oxford GaN link Tag: Visual edit
- 17:43, 12 April 2022 diff hist +1 m ICP Etching Recipes →Oxford ICP Etcher (PlasmaPro 100 Cobra) Tag: Visual edit
- 17:40, 12 April 2022 diff hist +275 ICP Etching Recipes →Oxford ICP Etcher (PlasmaPro 100 Cobra): link to GaN etch recipes Tag: Visual edit
- 13:12, 12 April 2022 diff hist -632 Template:Announcements deleted MJB, EBL service
- 12:50, 12 April 2022 diff hist +3 Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher
- 12:49, 12 April 2022 diff hist +1 Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher moved cals table to the top
- 21:08, 7 April 2022 diff hist +1,997 N ASML Stepper 3 - Job Creator initial description of usage and caveats current Tag: Visual edit
- 12:12, 7 April 2022 diff hist +105 Frequently Asked Questions →Authorship on Publications: added local technicians are put as authors Tag: Visual edit
- 10:17, 5 April 2022 diff hist +368 Template:Announcements added JEOL EBL service
- 10:48, 4 April 2022 diff hist +264 Template:Announcements added Lee's MJB service
- 12:55, 31 March 2022 diff hist +10 IBD: Calibrating Optical Thickness added approx year developed Tag: Visual edit
- 12:54, 31 March 2022 diff hist +241 IBD: Calibrating Optical Thickness minor updates Tag: Visual edit
- 12:51, 31 March 2022 diff hist 0 File:IBD SiO-FP - long 1100nm - Reflectivity Spectrum (EMpy).png John d uploaded a new version of File:IBD SiO-FP - long 1100nm - Reflectivity Spectrum (EMpy).png current
- 12:50, 31 March 2022 diff hist -42 Ion Beam Deposition (Veeco NEXUS) →Recipes: DBR Calibration-Method page created, removed the "avaialbel from process group" text Tag: Visual edit
- 12:49, 31 March 2022 diff hist +4,212 N IBD: Calibrating Optical Thickness initial version, full method described, images inserted. Tag: Visual edit
- 12:43, 31 March 2022 diff hist +97 N File:IBD 9-period DBR - Reflectivity Spectrum (EMpy).png current
- 12:36, 31 March 2022 diff hist +105 N File:IBD SiO-FP - long 1100nm - Reflectivity Spectrum (EMpy).png
- 13:30, 29 March 2022 diff hist +13 m ICP-PECVD (Unaxis VLR) →Recipes: format link to bold/underline Tag: Visual edit
- 05:20, 26 March 2022 diff hist +173 Microscopes note about turning turrets by hand Tag: Visual edit
- 05:19, 26 March 2022 diff hist +165 UCSB NanoFab Microscope Training added not about turning obj turrets by hand Tag: Visual edit
- 16:57, 23 March 2022 diff hist +74 ASML 5500 Mask Making Guidelines →Submission Details: move Barcode to "vendor instructions" Tag: Visual edit
- 14:09, 23 March 2022 diff hist +341 Template:Announcements GCA service added
- 14:08, 23 March 2022 diff hist +228 Template:Announcements DUV Scope update
- 10:40, 23 March 2022 diff hist +4 m Calculators + Utilities →Example CAD File Tag: Visual edit
- 10:29, 23 March 2022 diff hist +36 Stepper 3 (ASML DUV) →Design & Fabrication Tools: Changed title to "Design Tools". JobCreator: mention remotely-uploadable, Tag: Visual edit
- 12:31, 22 March 2022 diff hist +164 m Maskless Aligner (Heidelberg MLA150) →Video Trainings: minor formatting Tag: Visual edit
- 12:29, 22 March 2022 diff hist +6 Dry Etching Recipes fixed link to FL-ICP recipes Tag: Visual edit
- 11:02, 22 March 2022 diff hist +30 m Optical Film Thickness (Nanometric) formatting "unavaialble" note Tag: Visual edit
- 10:59, 22 March 2022 diff hist +108 Optical Film Thickness (Nanometric) Note stating tool removed from lab. Tag: Visual edit
- 16:10, 21 March 2022 diff hist +66 COVID-19 User Policies masks optional, added "in progress" to full policies. Tag: Visual edit
- 16:08, 21 March 2022 diff hist -438 Template:Announcements New COVID letter from chancellor. deleted ASML maint. LEXT down.
- 17:06, 3 March 2022 diff hist +9 Chemical-Mechanical Polisher (Logitech) link to Logitech Bonder Tag: Visual edit
- 17:04, 3 March 2022 diff hist +126 Wafer Bonder (Logitech WBS7) →About: links to applicable tools Tag: Visual edit
- 12:45, 3 March 2022 diff hist 0 PECVD Recipes →Low-Stress SiN deposition (PECVD #2): bullet formatting Tag: Visual edit: Switched
- 12:31, 3 March 2022 diff hist +178 PECVD Recipes →PECVD 2 (Advanced Vacuum): link to LS-SiN plots Tag: Visual edit
- 12:28, 3 March 2022 diff hist 0 m OLD - PECVD2 Recipes John d moved page PECVD2 Recipes to OLD - PECVD2 Recipes without leaving a redirect: this page is not linked anywhere, looks like 2014 data only current
- 15:06, 1 March 2022 diff hist +2 Tool List →Packaging: fixed FLip-scribe link Tag: Visual edit
- 15:06, 1 March 2022 diff hist 0 m Wafer Cleaver (PELCO Flip-Scribe) John d moved page Wafer Cleaver (PELCO LatticeAx) to Wafer Cleaver (PELCO Flip-Scribe) without leaving a redirect: wrong name
- 14:59, 1 March 2022 diff hist +646 KLayout Design Tips Added Editing Mode Tag: Visual edit
- 09:46, 1 March 2022 diff hist +303 Wafer Cleaver (PELCO Flip-Scribe) LatticeAx --> Flip-Scribe Tag: Visual edit
- 09:43, 1 March 2022 diff hist +115 Wafer Cleaver (PELCO Flip-Scribe) links to Mfg
- 09:35, 1 March 2022 diff hist +43 N File:LatticeAx.jpg Image of PELCO LAtticeAx tool current
- 09:27, 1 March 2022 diff hist +864 N Wafer Cleaver (PELCO Flip-Scribe) new tool page
- 09:20, 1 March 2022 diff hist +243 Tool List →Packaging: added sub-categories, Linked to new LatticeAx tool Tag: Visual edit
- 08:56, 1 March 2022 diff hist +130 m Contact Aligner (SUSS MA-6) →About: minor rearrangement Tag: Visual edit
- 08:52, 1 March 2022 diff hist +62 m Contact Aligner (SUSS MA-6) linked to SB6 Bonder page Tag: Visual edit
- 00:07, 1 March 2022 diff hist +546 ASML 5500 Mask Making Guidelines →Submission Details: updates and calrifications Tag: Visual edit
- 16:08, 28 February 2022 diff hist +462 Step Profilometer (KLA Tencor P-7) →Detailed Specifications: added basic info Tag: Visual edit
- 08:59, 26 February 2022 diff hist +27 m ICP Etching Recipes →Old Deleted Recipes: changed "don" to "supervisor" Tag: Visual edit
- 10:39, 22 February 2022 diff hist -23 ASML 5500 Mask Making Guidelines →Templates: corrected link to reticle programming spreadsheet Tag: Visual edit
- 09:44, 21 February 2022 diff hist +108 Process Group - Remote Fabrication Jobs link to takss/priority list Tag: Visual edit
- 13:44, 17 February 2022 diff hist +327 ICP-PECVD (Unaxis VLR) →About: mention SiD4 config and expense/applicaiton Tag: Visual edit
- 13:43, 17 February 2022 diff hist +116 PECVD Recipes →ICP-PECVD (Unaxis VLR): mention cost/application to optics Tag: Visual edit
- 18:03, 16 February 2022 diff hist +340 Maskless Aligner (Heidelberg MLA150) added minimum fearture size and note on DSP transparent substrates Tag: Visual edit
- 11:48, 14 February 2022 diff hist +72 N File:ASML Reticle Programming Params - MyReticleBarCode v1.xlsx John d moved page File:ASML Reticle Programming Params - MyReticleBarCode v1.xlsx to File:ASML Reticle Programming Params - MASKJAN2020 v1.xlsx: Rename to include reticle barcode in filename current Tag: New redirect
- 11:48, 14 February 2022 diff hist 0 m File:ASML Reticle Programming Params - MASKJAN2020 v1.xlsx John d moved page File:ASML Reticle Programming Params - MyReticleBarCode v1.xlsx to File:ASML Reticle Programming Params - MASKJAN2020 v1.xlsx: Rename to include reticle barcode in filename current
- 11:47, 14 February 2022 diff hist 0 File:ASML Reticle Programming Params - MASKJAN2020 v1.xlsx John d uploaded a new version of File:ASML Reticle Programming Params - MyReticleBarCode v1.xlsx
- 13:49, 11 February 2022 diff hist +53 m ICP Etch 2 (Panasonic E626I) →Recipes Tag: Visual edit
- 13:48, 11 February 2022 diff hist +97 ICP Etch 1 (Panasonic E646V) separate process control section/link Tag: Visual edit
- 13:47, 11 February 2022 diff hist +59 ICP Etch 2 (Panasonic E626I) →Recipes: separate Process Control section/link Tag: Visual edit
- 13:24, 11 February 2022 diff hist +31 Test Data of etching SiO2 with CHF3/CF4 minor update to diamond experiemnt comment. Tag: Visual edit
- 13:23, 11 February 2022 diff hist -36 ICP Etching Recipes →ICP Etch 2 (Panasonic E640): updated ICP1 and ICP2 with Process Control sections for SiO2 etch tests. Tag: Visual edit
- 13:22, 11 February 2022 diff hist +252 N MediaWiki:Deletereason-dropdown added common NanoFab reasons for deletion current
- 13:19, 11 February 2022 diff hist +504 Test Data of etching SiO2 with CHF3/CF4-ICP1 new section :pasted data from CHF3/CF4/O2 etch data
- 13:13, 11 February 2022 diff hist +22 ICP Etching Recipes →SiO2 Etch Historical Data: reanmed to include tool name Tag: Visual edit