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- 11:30, 17 June 2021 diff hist 0 m Vacuum Deposition Recipes changed IBD SiON A --> R Tag: Visual edit
- 13:46, 14 June 2021 diff hist -293 Template:Announcements ISO spray updat,e deleted ASML maint.
- 10:02, 14 June 2021 diff hist -1 m RIE Etching Recipes →Photoresist and ARC (RIE 5) current Tag: Visual edit
- 10:02, 14 June 2021 diff hist +121 Dry Etching Recipes corrected links to PR & ARC etching Tag: Visual edit
- 10:01, 14 June 2021 diff hist +256 RIE Etching Recipes →Photoresist and ARC: added tool name to header title Tag: Visual edit
- 09:59, 14 June 2021 diff hist +28 ICP Etching Recipes →ICP Etch 1 (Panasonic E626I): corrected header titles to include "(Pan 1/2" Tag: Visual edit
- 10:41, 7 June 2021 diff hist +47 m MLA150 - Troubleshooting →Workaround Tag: Visual edit
- 10:40, 7 June 2021 diff hist +58 m MLA150 - Troubleshooting →Workaround: link to reboot prcedure
- 10:38, 7 June 2021 diff hist +1,997 MLA150 - Troubleshooting Out of Focus exposures - problem + solutions Tag: Visual edit
- 12:12, 3 June 2021 diff hist +175 Vacuum Oven (YES) added info from Brian Lingg current Tag: Visual edit
- 12:09, 3 June 2021 diff hist +114 Ovens - Overview of All Lab Ovens added YES info Tag: Visual edit
- 13:32, 2 June 2021 diff hist +25 m Stepper 3 (ASML DUV) added Model field in Tool templ.
- 13:24, 2 June 2021 diff hist +35 m Vacuum Deposition Recipes BG color of "SiN- Low stress"
- 14:13, 28 May 2021 diff hist +96 Atomic Layer Deposition Recipes →Oxford FlexAL Chamber #3: Dielectrics: started historical data seciton Tag: Visual edit
- 08:34, 27 May 2021 diff hist -2 m Editing Tutorials Tag: Visual edit
- 08:34, 27 May 2021 diff hist +831 Editing Tutorials Updating a file version Tag: Visual edit
- 08:32, 27 May 2021 diff hist 0 File:UCSB-Facilities-Use-Agreement.pdf John d uploaded a new version of File:UCSB-Facilities-Use-Agreement.pdf
- 08:32, 27 May 2021 diff hist 0 File:UCSB Service Agreement.pdf John d uploaded a new version of File:UCSB Service Agreement.pdf
- 08:25, 27 May 2021 diff hist +106 m Frequently Asked Questions →How do I get a login to the wiki?: link to Wiki admin contact page Tag: Visual edit
- 08:07, 27 May 2021 diff hist +19 Template:News →SiO2 etching, High-Aspect Ratio
- 08:05, 27 May 2021 diff hist +51 m Template:News added date to SiO2 etch article
- 08:01, 27 May 2021 diff hist +253 ICP Etching Recipes →SiO2 Etching (Fluorine ICP Etcher): link to publication Tag: Visual edit
- 07:58, 27 May 2021 diff hist +36 ICP Etching Recipes →Ru (Ruthenium) Etch (Panasonic 2): link to pub Tag: Visual edit
- 07:56, 27 May 2021 diff hist +905 Template:News Added info about Bill's SiO2 etching paper
- 07:41, 27 May 2021 diff hist +536 Template:Publications link to Bill's Ru-masked SiO2 paper
- 12:35, 26 May 2021 diff hist +149 Direct-Write Lithography Recipes →Maskless Aligner (Heidelberg MLA150): mention that any I-Line PR will work. Tag: Visual edit
- 13:26, 21 May 2021 diff hist +42 m Template:Announcements
- 13:25, 21 May 2021 diff hist +27 m Template:Announcements
- 13:24, 21 May 2021 diff hist -31 m Template:Announcements linked to new policies directly
- 13:22, 21 May 2021 diff hist +24 m COVID-19 User Policies summary at top of annoucnements Tag: Visual edit
- 15:57, 17 May 2021 diff hist 0 File:Nanofabrication Facility Project Description.xlsx John d uploaded a new version of File:Nanofabrication Facility Project Description.xlsx
- 13:06, 17 May 2021 diff hist +155 Stepper Recipes →DUV-42P: link to FL-ICP and Technics for BARC etches Tag: Visual edit
- 13:04, 17 May 2021 diff hist +526 ICP Etching Recipes →PlasmaTherm/SLR Fluorine Etcher: added BARC and PR etches Tag: Visual edit
- 12:55, 17 May 2021 diff hist +8 m Stepper Recipes →DUV-42P-6: comments on corrected spin speed Tag: Visual edit
- 12:53, 17 May 2021 diff hist +4 Stepper Recipes →DUV-42P: aDDED "-6" to the DUV42P part number Tag: Visual edit
- 12:52, 17 May 2021 diff hist +3 Lithography Recipes →Chemicals Stocked + Datasheets: corrected part number for DUV42P (added "-6") Tag: Visual edit
- 06:17, 17 May 2021 diff hist +8 Nanofab Staff Internal Pages →Process Group: moved lab Stocking to "Old" section Tag: Visual edit
- 06:15, 17 May 2021 diff hist +218 Process Group - Remote Fabrication Jobs link to OnDema.io NanoFab Workspace Tag: Visual edit
- 12:09, 11 May 2021 diff hist +4 Template:News →Wafer Polisher available: link to Lingg's page
- 12:08, 11 May 2021 diff hist +57 m Template:News →Wafer Polisher added to tool list: link to polisher wiki page
- 11:38, 11 May 2021 diff hist +34 Tool List →Wet Processing: link to Mechanical_Polisher_(Allied) Tag: Visual edit
- 11:36, 11 May 2021 diff hist +96 N File:AlliedPolisher10-1110.jpg Photo of Allied Polisher model 10-1110 ; Initial photo - cropped and color boosted current
- 11:33, 11 May 2021 diff hist +620 N Mechanical Polisher (Allied) initial Page
- 16:49, 10 May 2021 diff hist +203 Template:News Added allied polisher
- 06:56, 6 May 2021 diff hist +62 Process Group - Remote Fabrication Jobs link to Trello: UCSB Nanofab Tag: Visual edit
- 06:51, 6 May 2021 diff hist +30 m Process Group - Remote Fabrication Jobs Tag: Visual edit
- 06:50, 6 May 2021 diff hist +10 Process Group - Remote Fabrication Jobs Tag: Visual edit
- 06:50, 6 May 2021 diff hist -43 Process Group - Remote Fabrication Jobs Tag: Visual edit
- 21:34, 5 May 2021 diff hist +920 N Process Group - Remote Fabrication Jobs Trello -filter your own jobs Tag: Visual edit
- 21:33, 5 May 2021 diff hist +46 N File:Board - Search Cards - Select User.png current