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- 06:29, 15 March 2021 diff hist +32 Template:Announcements ASML temp stable/cals
- 16:12, 11 March 2021 diff hist -443 Template:Announcements deleted compressor note, ASML Open for use
- 14:19, 10 March 2021 diff hist +235 Tube Furnace (Tystar 8300) →Process Information: added Gases Available Tag: Visual edit
- 10:13, 9 March 2021 diff hist +31 m Services →Request Remote Fabrication Services: minor emphasis Tag: Visual edit
- 10:11, 9 March 2021 diff hist +25 Services point to 'fab svc on this page instgead of Wix Tag: Visual edit
- 11:41, 5 March 2021 diff hist -4 m Calculators + Utilities →KLayout: large files comments Tag: Visual edit
- 12:54, 3 March 2021 diff hist +412 Services Remote Fab Svc: added UCSB & Inter-UC paperwork Tag: Visual edit
- 19:56, 1 March 2021 diff hist -13 Template:Announcements CR open, compressors
- 12:55, 1 March 2021 diff hist +74 Stepper Recipes →DUV-42P: added 2500rpm note Tag: Visual edit
- 06:23, 1 March 2021 diff hist -143 m Template:Announcements updated post time
- 06:21, 1 March 2021 diff hist +394 Template:Announcements cleanroom closed, compressor down
- 15:50, 26 February 2021 diff hist +386 Laser Etch Monitoring →Procedures: Linked to video training Tag: Visual edit
- 07:46, 26 February 2021 diff hist +31 Atomic Layer Deposition Recipes →Al2O3 deposition (ALD CHAMBER 3): rate on AlOx / O* ~2x faster Tag: Visual edit
- 18:54, 24 February 2021 diff hist +31 Lift-Off with DUV Imaging + PMGI Underlayer →Tips: changed to 2x underlayer thickness Tag: Visual edit
- 10:13, 23 February 2021 diff hist +13 Category:NOID current
- 10:12, 23 February 2021 diff hist +790 N ASML Stepper 3 - Substrates smaller than 100mm/4-inch initial topic placeholders current Tag: Visual edit
- 07:46, 23 February 2021 diff hist +109 Stepper 3 (ASML DUV) →Operating Procedures: link to "ASML Stepper 3 - Substrates smaller than 100mm/4-inch" Tag: Visual edit
- 23:57, 22 February 2021 diff hist +24 m Maskless Aligner (Heidelberg MLA150) Tag: Visual edit: Switched
- 23:56, 22 February 2021 diff hist -28 Maskless Aligner (Heidelberg MLA150) →Video Trainings: New Video Training (v2) Tag: Visual edit: Switched
- 14:02, 18 February 2021 diff hist +34 Maskless Aligner (Heidelberg MLA150) →Detailed Specifications: updated ALignment specs from FAT Tag: Visual edit
- 11:40, 17 February 2021 diff hist -3 E-Beam 1 (Sharon) changed "material tables" to "recipes" to be consistent with rest of site. Tag: Visual edit
- 09:23, 17 February 2021 diff hist +178 Atomic Layer Deposition Recipes →Atomic Layer Deposition (Oxford FlexAL): note on plasma being faster Tag: Visual edit
- 08:55, 17 February 2021 diff hist +335 Template:Announcements ASML PM March 8th
- 10:03, 16 February 2021 diff hist +39 PECVD 2 (Advanced Vacuum) →Recipes: mention historical data Tag: Visual edit
- 04:50, 9 February 2021 diff hist +2 m MLA150 - Troubleshooting →Defocus: unable to enter ±25 full range: typo Tag: Visual edit
- 10:22, 8 February 2021 diff hist +38 Maskless Aligner (Heidelberg MLA150) →Detailed Specifications: added max write area Tag: Visual edit
- 12:27, 5 February 2021 diff hist +53 m MLA150 - Large Image GDS Generation Tag: Visual edit
- 12:05, 5 February 2021 diff hist +422 MLA150 - Troubleshooting added "Stage not centered" Tag: Visual edit
- 23:14, 2 February 2021 diff hist +248 ICP Etching Recipes →PlasmaTherm/SLR Fluorine Etcher: SiVertHF: note on removing Native SiO2 Tag: Visual edit
- 23:08, 2 February 2021 diff hist +73 ICP Etching Recipes added (Fluorine ICP Etcher) to titles Tag: Visual edit
- 17:18, 2 February 2021 diff hist 0 Stepper 3 (ASML DUV) corrected PanOpto video traing link Tag: Visual edit
- 18:11, 1 February 2021 diff hist +64 m Thermal Processing Recipes →Tystar 8300 Tag: Visual edit
- 18:08, 1 February 2021 diff hist +235 Tube Furnace (Tystar 8300) →Recipes: link to recipes page Tag: Visual edit
- 10:28, 1 February 2021 diff hist +255 Services →Request Remote Fabrication Services: separate "paperwork" section for Fab Svc Tag: Visual edit
- 10:22, 1 February 2021 diff hist +1,811 Services →Fabrication Services by NanoFab Staff: pasted Services text - same as the nanotech page. minor updates. Tag: Visual edit
- 10:13, 1 February 2021 diff hist 0 File:UCSB Service Agreement.pdf John d uploaded a new version of File:UCSB Service Agreement.pdf
- 10:09, 1 February 2021 diff hist +79 N Category:COVID description current Tag: Visual edit
- 11:08, 30 January 2021 diff hist +64 Process Group - Lab Stocking/Supplies Tasks Update: not needed. current Tag: Visual edit
- 11:07, 30 January 2021 diff hist +323 ASML Stepper 3 Dicing Guide Programming Update: state doesn’t work and workaround. current Tag: Visual edit
- 06:24, 27 January 2021 diff hist +964 ICP Etching Recipes →High Rate Bosch Etch (DSEIII): Bsoch PR selectivity, tips to reduce black silicon, edge bead removal process link Tag: Visual edit
- 06:21, 27 January 2021 diff hist +28 ASML DUV: Edge Bead Removal via Photolithography credits and date Tag: Visual edit
- 06:18, 27 January 2021 diff hist +138 ASML DUV: Edge Bead Removal via Photolithography note on I-line process Tag: Visual edit
- 14:59, 23 January 2021 diff hist +443 MLA150 - Troubleshooting →Known Bugs & Workarounds: added Exposure Log. Tag: Visual edit
- 13:46, 21 January 2021 diff hist +945 MLA150 - Troubleshooting added Focal Depth motor (contact staff) and Covert not launching Tag: Visual edit
- 13:32, 21 January 2021 diff hist +9 MLA150 - Troubleshooting moved TOC below summary
- 13:31, 21 January 2021 diff hist +1,787 N MLA150 - Troubleshooting added Defocus bug and Compuer Restart. Tag: Visual edit
- 11:32, 21 January 2021 diff hist +161 Maskless Aligner (Heidelberg MLA150) →Documentation: link to MLA150 - Troubleshoting Tag: Visual edit
- 00:40, 21 January 2021 diff hist +427 Oxygen Plasma System Recipes →Plasma Clean (YES EcoClean): guidelines added Tag: Visual edit
- 00:37, 21 January 2021 diff hist +5 m Oxygen Plasma System Recipes →O2 Ashing Tag: Visual edit
- 00:37, 21 January 2021 diff hist +538 Oxygen Plasma System Recipes →Ashers (Technics PEII): added O2 ashing recipes Tag: Visual edit