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- 06:29, 15 March 2021 diff hist +32 Template:Announcements ASML temp stable/cals
- 16:12, 11 March 2021 diff hist -443 Template:Announcements deleted compressor note, ASML Open for use
- 14:19, 10 March 2021 diff hist +235 Tube Furnace (Tystar 8300) →Process Information: added Gases Available Tag: Visual edit
- 10:13, 9 March 2021 diff hist +31 m Services →Request Remote Fabrication Services: minor emphasis Tag: Visual edit
- 10:11, 9 March 2021 diff hist +25 Services point to 'fab svc on this page instgead of Wix Tag: Visual edit
- 11:41, 5 March 2021 diff hist -4 m Calculators + Utilities →KLayout: large files comments Tag: Visual edit
- 12:54, 3 March 2021 diff hist +412 Services Remote Fab Svc: added UCSB & Inter-UC paperwork Tag: Visual edit
- 19:56, 1 March 2021 diff hist -13 Template:Announcements CR open, compressors
- 12:55, 1 March 2021 diff hist +74 Stepper Recipes →DUV-42P: added 2500rpm note Tag: Visual edit
- 06:23, 1 March 2021 diff hist -143 m Template:Announcements updated post time
- 06:21, 1 March 2021 diff hist +394 Template:Announcements cleanroom closed, compressor down
- 15:50, 26 February 2021 diff hist +386 Laser Etch Monitoring →Procedures: Linked to video training Tag: Visual edit
- 07:46, 26 February 2021 diff hist +31 Atomic Layer Deposition Recipes →Al2O3 deposition (ALD CHAMBER 3): rate on AlOx / O* ~2x faster Tag: Visual edit
- 18:54, 24 February 2021 diff hist +31 Lift-Off with DUV Imaging + PMGI Underlayer →Tips: changed to 2x underlayer thickness Tag: Visual edit
- 10:13, 23 February 2021 diff hist +13 Category:NOID current
- 10:12, 23 February 2021 diff hist +790 N ASML Stepper 3 - Substrates smaller than 100mm/4-inch initial topic placeholders current Tag: Visual edit
- 07:46, 23 February 2021 diff hist +109 Stepper 3 (ASML DUV) →Operating Procedures: link to "ASML Stepper 3 - Substrates smaller than 100mm/4-inch" Tag: Visual edit
- 23:57, 22 February 2021 diff hist +24 m Maskless Aligner (Heidelberg MLA150) Tag: Visual edit: Switched
- 23:56, 22 February 2021 diff hist -28 Maskless Aligner (Heidelberg MLA150) →Video Trainings: New Video Training (v2) Tag: Visual edit: Switched
- 14:02, 18 February 2021 diff hist +34 Maskless Aligner (Heidelberg MLA150) →Detailed Specifications: updated ALignment specs from FAT Tag: Visual edit
- 11:40, 17 February 2021 diff hist -3 E-Beam 1 (Sharon) changed "material tables" to "recipes" to be consistent with rest of site. Tag: Visual edit
- 09:23, 17 February 2021 diff hist +178 Atomic Layer Deposition Recipes →Atomic Layer Deposition (Oxford FlexAL): note on plasma being faster Tag: Visual edit
- 08:55, 17 February 2021 diff hist +335 Template:Announcements ASML PM March 8th
- 10:03, 16 February 2021 diff hist +39 PECVD 2 (Advanced Vacuum) →Recipes: mention historical data Tag: Visual edit
- 04:50, 9 February 2021 diff hist +2 m MLA150 - Troubleshooting →Defocus: unable to enter ±25 full range: typo Tag: Visual edit
- 10:22, 8 February 2021 diff hist +38 Maskless Aligner (Heidelberg MLA150) →Detailed Specifications: added max write area Tag: Visual edit
- 12:27, 5 February 2021 diff hist +53 m MLA150 - Large Image GDS Generation Tag: Visual edit
- 12:05, 5 February 2021 diff hist +422 MLA150 - Troubleshooting added "Stage not centered" Tag: Visual edit
- 23:14, 2 February 2021 diff hist +248 ICP Etching Recipes →PlasmaTherm/SLR Fluorine Etcher: SiVertHF: note on removing Native SiO2 Tag: Visual edit
- 23:08, 2 February 2021 diff hist +73 ICP Etching Recipes added (Fluorine ICP Etcher) to titles Tag: Visual edit
- 17:18, 2 February 2021 diff hist 0 Stepper 3 (ASML DUV) corrected PanOpto video traing link Tag: Visual edit
- 18:11, 1 February 2021 diff hist +64 m Thermal Processing Recipes →Tystar 8300 Tag: Visual edit
- 18:08, 1 February 2021 diff hist +235 Tube Furnace (Tystar 8300) →Recipes: link to recipes page Tag: Visual edit
- 10:28, 1 February 2021 diff hist +255 Services →Request Remote Fabrication Services: separate "paperwork" section for Fab Svc Tag: Visual edit
- 10:22, 1 February 2021 diff hist +1,811 Services →Fabrication Services by NanoFab Staff: pasted Services text - same as the nanotech page. minor updates. Tag: Visual edit
- 10:13, 1 February 2021 diff hist 0 File:UCSB Service Agreement.pdf John d uploaded a new version of File:UCSB Service Agreement.pdf
- 10:09, 1 February 2021 diff hist +79 N Category:COVID description current Tag: Visual edit
- 11:08, 30 January 2021 diff hist +64 Process Group - Lab Stocking/Supplies Tasks Update: not needed. current Tag: Visual edit
- 11:07, 30 January 2021 diff hist +323 ASML Stepper 3 Dicing Guide Programming Update: state doesn’t work and workaround. current Tag: Visual edit
- 06:24, 27 January 2021 diff hist +964 ICP Etching Recipes →High Rate Bosch Etch (DSEIII): Bsoch PR selectivity, tips to reduce black silicon, edge bead removal process link Tag: Visual edit
- 06:21, 27 January 2021 diff hist +28 ASML DUV: Edge Bead Removal via Photolithography credits and date Tag: Visual edit
- 06:18, 27 January 2021 diff hist +138 ASML DUV: Edge Bead Removal via Photolithography note on I-line process Tag: Visual edit
- 14:59, 23 January 2021 diff hist +443 MLA150 - Troubleshooting →Known Bugs & Workarounds: added Exposure Log. Tag: Visual edit
- 13:46, 21 January 2021 diff hist +945 MLA150 - Troubleshooting added Focal Depth motor (contact staff) and Covert not launching Tag: Visual edit
- 13:32, 21 January 2021 diff hist +9 MLA150 - Troubleshooting moved TOC below summary
- 13:31, 21 January 2021 diff hist +1,787 N MLA150 - Troubleshooting added Defocus bug and Compuer Restart. Tag: Visual edit
- 11:32, 21 January 2021 diff hist +161 Maskless Aligner (Heidelberg MLA150) →Documentation: link to MLA150 - Troubleshoting Tag: Visual edit
- 00:40, 21 January 2021 diff hist +427 Oxygen Plasma System Recipes →Plasma Clean (YES EcoClean): guidelines added Tag: Visual edit
- 00:37, 21 January 2021 diff hist +5 m Oxygen Plasma System Recipes →O2 Ashing Tag: Visual edit
- 00:37, 21 January 2021 diff hist +538 Oxygen Plasma System Recipes →Ashers (Technics PEII): added O2 ashing recipes Tag: Visual edit
- 10:06, 20 January 2021 diff hist +186 Sputter 5 (AJA ATC 2200-V) link to recipes Tag: Visual edit
- 08:17, 20 January 2021 diff hist +85 Lift-Off with DUV Imaging + PMGI Underlayer →Suggested Process for Liftoff: ultrasonic note Tag: Visual edit
- 08:13, 20 January 2021 diff hist -1 m Calculators + Utilities →KLayout: reduced recommended number of polygon points Tag: Visual edit
- 08:11, 20 January 2021 diff hist +108 ASML 5500 Mask Making Guidelines →CAD Tips: link to Cad tutorials Tag: Visual edit
- 08:10, 20 January 2021 diff hist +967 Calculators + Utilities →KLayout: handling large files Tag: Visual edit
- 08:00, 20 January 2021 diff hist +71 m ASML 5500 Mask Making Guidelines →CAD Tips: Wf. Flat Down w/r/to –Y Tag: Visual edit
- 07:59, 20 January 2021 diff hist +113 ASML 5500 Mask Making Guidelines →Vendor Instructions: added "right reading chrome down:" and note on pellicles Tag: Visual edit
- 07:54, 20 January 2021 diff hist -70 m ASML 5500 Mask Making Guidelines →Templates: updated "Programming spreadsheet" text and alignment mark text Tag: Visual edit
- 07:50, 20 January 2021 diff hist 0 File:ASML Reticle Programming Params - MASKJAN2020 v1.xlsx John d uploaded a new version of File:ASML Reticle Programming Params - MyReticleBarCode v1.xlsx
- 07:42, 20 January 2021 diff hist +115 Nanofab Staff Internal Pages link to ASML dicing guide prog. Tag: Visual edit
- 09:06, 15 January 2021 diff hist +301 ASML 5500 Mask Making Guidelines Added polarity & side to example figure Tag: Visual edit
- 06:33, 15 January 2021 diff hist -665 Template:Announcements deleted "new tool installs"
- 23:15, 12 January 2021 diff hist -2,647 GoPro Hero8 Black (Internal) link to Uploading instructions current Tag: Visual edit
- 23:14, 12 January 2021 diff hist +1,153 N Video Training: Uploading to GauchoCast/Panopto (Internal) pasted info from GoPro page Tag: Visual edit
- 18:31, 12 January 2021 diff hist +9 m ICP Etch 2 (Panasonic E626I) →Documentation: minor formatting Tag: Visual edit
- 18:24, 12 January 2021 diff hist +264 GoPro Hero8 Black (Internal) added photo of GoPro + Headstrap Tag: Visual edit
- 18:21, 12 January 2021 diff hist +62 N File:Photo - GoPro Black 8 and Headstrap.png current
- 10:49, 12 January 2021 diff hist 0 m Vacuum Deposition Recipes SPutt4: Ru: A-->R Tag: Visual edit
- 10:48, 12 January 2021 diff hist +50 Vacuum Deposition Recipes added link to APutter 4 : Ru ("A") Tag: Visual edit
- 10:47, 12 January 2021 diff hist +351 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V): added Ru ; link to SiO2 Etching with Ruthenium Hardmask doc. Tag: Visual edit
- 10:40, 12 January 2021 diff hist +67 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V): added Ru Tag: Visual edit
- 17:32, 11 January 2021 diff hist -46 m ICP Etching Recipes →SiO2 Etching: wrote bias variations Tag: Visual edit
- 17:48, 10 January 2021 diff hist +29 Template:Announcements →New Tool Installations: minor updates to tool status
- 17:46, 10 January 2021 diff hist -192 Template:Announcements deleted MLA maint.
- 18:08, 9 January 2021 diff hist +26 m Lithography Recipes →Holography Recipes: included XHRiC Tag: Visual edit
- 18:03, 9 January 2021 diff hist +5 m Lithography Recipes →Holography Recipes Tag: Visual edit
- 18:02, 9 January 2021 diff hist +80 m Lithography Recipes →Holography Recipes: mentione THMR usage Tag: Visual edit
- 12:27, 8 January 2021 diff hist 0 m Template:Announcements fixed indent
- 22:45, 7 January 2021 diff hist +58 MLA150 - Large Image GDS Generation pasted method Tag: Visual edit
- 22:43, 7 January 2021 diff hist +2,510 N MLA150 - Large Image GDS Generation pasted method Tag: Visual edit
- 22:12, 7 January 2021 diff hist +154 Maskless Aligner (Heidelberg MLA150) →Documentation: link to Large Image Patterning Tag: Visual edit
- 09:11, 6 January 2021 diff hist -105 Template:Announcements deleted annual shutdown, added MLA maint.
- 08:34, 5 January 2021 diff hist +120 m Calculators + Utilities →KLayout Tag: Visual edit
- 08:31, 5 January 2021 diff hist +225 Calculators + Utilities →KLayout: added Circles > PCell method Tag: Visual edit
- 09:21, 4 January 2021 diff hist +170 Direct-Write Lithography Recipes →Positive Resist (MLA150): note about HIMT design giving higher dose result Tag: Visual edit
- 21:28, 23 December 2020 diff hist +136 Frequently Asked Questions →How do I get my files from the NanoFab computers?: link to SUM email page Tag: Visual edit
- 10:06, 12 December 2020 diff hist +4 m Direct-Write Lithography Recipes →Negative Resist (MLA150) Tag: Visual edit
- 09:25, 11 December 2020 diff hist +302 Calculators + Utilities →KLayout: added how to show Origin Tag: Visual edit
- 13:16, 10 December 2020 diff hist +40 PECVD1 Wafer Coating Process corrected titles current Tag: Visual edit
- 13:08, 10 December 2020 diff hist +100 Video Training: Hosting with Zoom and GacuhoCast/Panopto how to locate video to playback current Tag: Visual edit
- 09:06, 9 December 2020 diff hist 0 File:Attachment A - UCSB Master Facilities Use Agreement Labs.pdf John d uploaded a new version of File:Attachment A - UCSB Master Facilities Use Agreement Labs.pdf current
- 17:19, 8 December 2020 diff hist +8 m ASML 5500 Mask Making Guidelines Tag: Visual edit
- 17:19, 8 December 2020 diff hist -24 ASML 5500 Mask Making Guidelines
- 17:16, 8 December 2020 diff hist +124 ASML 5500 Mask Making Guidelines larger reticle_layout image, link to example CAD file Tag: Visual edit
- 17:12, 8 December 2020 diff hist +246 ASML 5500 Mask Making Guidelines added Reticle_Layout screenshto and updated Example CAD file link Tag: Visual edit
- 17:07, 8 December 2020 diff hist +84 N File:CAD Tutorial for ASML Reticle v1 - screenshot Reticle Layout cell.png current
- 08:01, 8 December 2020 diff hist +22 m File:Facility-Use-MOU---Intercampus-UC-User.pdf cat. Services
- 08:01, 8 December 2020 diff hist +22 m File:UCSB Service Agreement.pdf cat. Services
- 08:01, 8 December 2020 diff hist +19 m File:User Protocols Coronavirus 2020-09-14-1.pdf cat. COVID
- 08:00, 8 December 2020 diff hist +19 m File:COVID Entering the CR and Gowning Protocols-USE THIS ONE v2.pdf cat. COVID current