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- 17:03, 21 March 2024 diff hist +58 Stepper Recipes →Negative Resist (ASML DUV): UVN dev time current Tag: Visual edit
- 15:05, 20 March 2024 diff hist +149 MLA150 - Troubleshooting →Causes: added OAF driving off wafer current Tag: Visual edit
- 15:04, 20 March 2024 diff hist +172 Direct-Write Lithography Recipes →Maskless Aligner (Heidelberg MLA150): link to Troubleshooting/OOFocus section current Tag: Visual edit
- 17:27, 14 March 2024 diff hist +429 Direct-Write Lithography Recipes →Maskless Aligner (Heidelberg MLA150): added FEM comment Tag: Visual edit
- 17:17, 14 March 2024 diff hist -29 Direct-Write Lithography Recipes →Greyscale Lithography (MLA150): deleted Flood Expose column Tag: Visual edit
- 03:27, 13 March 2024 diff hist -1,261 Stepper 3 (ASML DUV) removed Wiki-hosted ASML procedures, linked to gDrive procedures (access restricted) current Tag: Visual edit
- 16:16, 12 March 2024 diff hist +62 Nanofab Job Postings →Process/Wafer Fab Engineer Level 3 (Staff position): not reviewing apps current Tag: Visual edit
- 16:13, 12 March 2024 diff hist +48 Main Page link to Job Postings current Tag: Visual edit
- 15:47, 12 March 2024 diff hist -1,402 Template:Announcements deleted duplicates and old >2wk old annc
- 09:54, 11 March 2024 diff hist +271 ICP Etching Recipes →Through Silicon Via (TSV) etch (DSEiii): added note on TSV rocess - discuss with staff before running current Tag: Visual edit
- 09:42, 11 March 2024 diff hist +9 m Staff List →Process Group current Tag: Visual edit
- 09:42, 11 March 2024 diff hist +75 Staff List →Process Group: added mission statement Tag: Visual edit
- 10:19, 9 March 2024 diff hist -1 IBD: Calibrating Optical Thickness Corrected 1050/1100 FP correction current Tag: Visual edit
- 12:54, 7 March 2024 diff hist +861 Nanofab Job Postings added R&D2 pos Tag: Visual edit
- 11:15, 7 March 2024 diff hist +526 Tube Furnace (Tystar 8300) process limits added current Tag: Visual edit
- 18:43, 5 March 2024 diff hist 0 File:Oxford Etcher - InP Ridge Etch using Oxford PlasmaPro 100 Cobra - 2021-09-08.pdf John d uploaded a new version of File:Oxford Etcher - InP Ridge Etch using Oxford PlasmaPro 100 Cobra - 2021-09-08.pdf current
- 18:35, 5 March 2024 diff hist 0 File:Oxford Etcher - InP Grating Etch at 20 C - Oxford Cobra 300 2021-08-26.pdf John d uploaded a new version of File:Oxford Etcher - InP Grating Etch at 20 C - Oxford Cobra 300 2021-08-26.pdf current
- 18:33, 5 March 2024 diff hist 0 File:Oxford Etcher - InP Grating Etch at 20 C - Oxford Cobra 300 2021-08-26.pdf John d uploaded a new version of File:Oxford Etcher - InP Grating Etch at 20 C - Oxford Cobra 300 2021-08-26.pdf
- 18:22, 5 March 2024 diff hist 0 File:Oxford Etcher - InP Grating Etch at 20 C - Oxford Cobra 300 2021-08-26.pdf John d uploaded a new version of File:Oxford Etcher - InP Grating Etch at 20 C - Oxford Cobra 300 2021-08-26.pdf
- 16:25, 4 March 2024 diff hist +47 m Packaging Recipes →Dicing Saw Recipes (ADT 7100) current
- 13:55, 1 March 2024 diff hist +148 Oxygen Plasma System Recipes →N2/O2 Recipes: note that wafers get hotter than recipe name indicates. current Tag: Visual edit
- 12:07, 1 March 2024 diff hist +3 Suss Aligners (SUSS MJB-3) →IR Aligner: removed hammamatsu current Tag: Visual edit
- 12:06, 1 March 2024 diff hist +285 Suss Aligners (SUSS MJB-3) →IR Aligner: added photo of front-to-back IR camera alignment inspection Tag: Visual edit
- 12:04, 1 March 2024 diff hist +81 N File:IR Alignment check 01 - crop.png current
- 11:52, 1 March 2024 diff hist +85 Tool List →Optical Microscopy: link to MJB-IR IR scope current Tag: Visual edit
- 11:30, 1 March 2024 diff hist +51 N File:OlympusDSX1000.jpg New photo with non-proprietary image. current
- 21:08, 29 February 2024 diff hist +19 m Field Emission SEM 2 (JEOL IT800SHL) current Tag: Visual edit
- 21:07, 29 February 2024 diff hist +419 SEM 1 (JEOL IT800SHL) →Operating Procedures: linked to CalTech stuf correction vid with tops current Tag: Visual edit
- 13:46, 29 February 2024 diff hist +132 Oxygen Plasma System Recipes →N2/O2 effect on Gold contacts & Substrate Temperature: minor additions to clarify gold optical absorption Tag: Visual edit
- 12:29, 27 February 2024 diff hist +135 Direct-Write Lithography Recipes →Greyscale Lithography (MLA150): added link to GS page Tag: Visual edit
- 17:24, 23 February 2024 diff hist +14 Template:Announcements re-added "startfeed" <startfeed />
- 12:20, 23 February 2024 diff hist -23 Template:Announcements moved RIE5 below DSE and ICP1
- 12:18, 23 February 2024 diff hist -589 Template:Announcements deleted EB4, other tools up. Updated ICP1 and DSE from emails.
- 12:16, 23 February 2024 diff hist +15 m Critical Point Dryer current Tag: Visual edit
- 12:15, 23 February 2024 diff hist +182 Critical Point Dryer mention tool removed, link to QSF CPD Tag: Visual edit
- 12:13, 23 February 2024 diff hist -93 Tool List →Measurement & Characterization: deleted goniometer Tag: Visual edit
- 12:12, 23 February 2024 diff hist +189 Plasma Clean (Gasonics 2000) mention tool removed, link to YES and Pan1 Ashing current Tag: Visual edit
- 12:10, 23 February 2024 diff hist +95 SEM 1 (JEOL IT800SHL) mentioned nabity litho Tag: Visual edit
- 12:08, 23 February 2024 diff hist -19 Tool List →Direct-Write Lithography: link to SEM 1 Tag: Visual edit
- 12:08, 23 February 2024 diff hist -4 Tool List →Lithography: removed "FEI" text Tag: Visual edit
- 12:50, 16 February 2024 diff hist +69 Calculators + Utilities →Python Scripts: made scripts into header 2 current Tag: Visual edit
- 15:17, 15 February 2024 diff hist +12 m DSEIII (PlasmaTherm/Deep Silicon Etcher) added model number current
- 15:15, 15 February 2024 diff hist +191 DSEIII (PlasmaTherm/Deep Silicon Etcher) added example SEM Tag: Visual edit
- 15:12, 15 February 2024 diff hist -5 Category:Inspection, Test and Characterization fixed link current Tag: Redirect target changed
- 15:10, 15 February 2024 diff hist +1 Main Page fixed Metro/Test link Tag: Visual edit
- 15:06, 15 February 2024 diff hist -6 m ICP Etching Recipes →High Rate Bosch Etch (DSEIII) Tag: Visual edit: Switched
- 15:05, 15 February 2024 diff hist +291 ICP Etching Recipes →High Rate Bosch Etch (DSEIII): added SEM of Bosch etched posts Tag: Visual edit
- 15:00, 15 February 2024 diff hist +77 N File:DSEiii Bosch Ecth SEM Example 01.png current
- 14:58, 14 February 2024 diff hist +1 m Template:Announcements →E-Beam #4 (CHA) - UP
- 14:58, 14 February 2024 diff hist -149 Template:Announcements EB4 up
- 17:34, 13 February 2024 diff hist +373 Nanofab Job Postings Intern - thin-fils: added description Tag: Visual edit
- 17:31, 13 February 2024 diff hist +174 Nanofab Job Postings →Process/Wafer Fab Engineer (Staff position): updated Tag: Visual edit
- 17:23, 13 February 2024 diff hist +21 Nanofab Job Postings →1) Processing Technician - Thin-Film & Etch Characterizations: added "staff" postion Tag: Visual edit
- 12:56, 13 February 2024 diff hist -1,338 Template:Announcements deleted defunct announcements
- 17:44, 12 February 2024 diff hist +296 Stepper 2 (AutoStep 200) link to stepper vs contact tutorial current Tag: Visual edit
- 17:43, 12 February 2024 diff hist +295 Stepper 1 (GCA 6300) link to stepper vs. contact PPT current Tag: Visual edit
- 17:43, 12 February 2024 diff hist +7 m Stepper 3 (ASML DUV) →General Capabilities/Overview: fixed link Tag: Visual edit
- 17:42, 12 February 2024 diff hist 0 m File:Demis D John - Stepper Reticle Layout vs Wafer Layout.pdf John d moved page File:UCSB Stepper Reticle Layout vs Wafer Layout v5.pdf to File:Demis D John - Stepper Reticle Layout vs Wafer Layout.pdf without leaving a redirect: better name current
- 17:41, 12 February 2024 diff hist +295 Stepper 3 (ASML DUV) link to stepper vs. contact litho PPT Tag: Visual edit
- 17:38, 12 February 2024 diff hist +56 N File:Demis D John - Stepper Reticle Layout vs Wafer Layout.pdf Demis Tutorial on Contact vs Stepper litho
- 15:39, 12 February 2024 diff hist +116 Ellipsometer (Woollam) - Measuring thin metals with oxide pre-measurement minor updates current Tag: Visual edit
- 15:37, 12 February 2024 diff hist +27 Ellipsometer (Woollam) →Operating Procedures: updated oxide pre-meas name to "refl enhance" current Tag: Visual edit
- 12:41, 10 February 2024 diff hist +80 Photolithography - Improving Adhesion Photoresist Adhesion →HMDS Process for PR Improving Adhesion: dehydration/O2 pasma midifcation current Tag: Visual edit
- 15:31, 7 February 2024 diff hist 0 m Dry Etching Recipes corrected links current Tag: Visual edit
- 15:30, 7 February 2024 diff hist +4 Dry Etching Recipes corected Panaosnic model numbers + links Tag: Visual edit
- 15:29, 7 February 2024 diff hist 0 ICP Etching Recipes →ICP Etch 1 (Panasonic E626I): changed model number to E646V Tag: Visual edit
- 15:28, 7 February 2024 diff hist +1 ICP Etching Recipes →ICP Etch 2 (Panasonic E640): changed model number to E626I
- 15:19, 7 February 2024 diff hist +1 Tool List →ICP-RIE: corrected Pan model numbers & links
- 15:19, 7 February 2024 diff hist +42 N ICP Etch 2 (Panasonic E640) John d moved page ICP Etch 2 (Panasonic E640) to ICP Etch 2 (Panasonic E626I): Corrected model number current Tag: New redirect
- 15:19, 7 February 2024 diff hist 0 m ICP Etch 2 (Panasonic E626I) John d moved page ICP Etch 2 (Panasonic E640) to ICP Etch 2 (Panasonic E626I): Corrected model number current
- 15:18, 7 February 2024 diff hist +14 ICP Etch 2 (Panasonic E626I) added model number to tool info
- 15:18, 7 February 2024 diff hist +42 N ICP Etch 1 (Panasonic E626I) John d moved page ICP Etch 1 (Panasonic E626I) to ICP Etch 1 (Panasonic E646V): corrected model number current Tag: New redirect
- 15:18, 7 February 2024 diff hist 0 m ICP Etch 1 (Panasonic E646V) John d moved page ICP Etch 1 (Panasonic E626I) to ICP Etch 1 (Panasonic E646V): corrected model number current
- 15:18, 7 February 2024 diff hist +13 ICP Etch 1 (Panasonic E646V) added model
- 21:51, 5 February 2024 diff hist +177 Packaging Recipes →Dicing Saw Recipes (ADT 7100): mockup of dicing alignment guides (ASCII) Tag: Visual edit
- 21:11, 5 February 2024 diff hist +828 Packaging Recipes →Dicing Saw Recipes (ADT 7100): Added dicing instructions Tag: Visual edit
- 21:10, 5 February 2024 diff hist +92 N File:Example Dicing Instructions for UC Santa Barbara v1.pptx Example Dicing Instructions for UC Santa Barbara v1.pptx Demis D John, 2024-02 current
- 15:41, 4 February 2024 diff hist +93 MLA150 - Design Guidelines →Limitations & Workarounds: added screenshot of "Set Zero" button current Tag: Visual edit
- 15:40, 4 February 2024 diff hist +43 N File:MLA Set Zero button IMG 2352.jpg current
- 22:06, 2 February 2024 diff hist +16 MLA150 - Troubleshooting →Greyscale Lithography Limitations: updated link Tag: Visual edit
- 22:05, 2 February 2024 diff hist +2,449 MLA150 - Design Guidelines →Limitations: X-Y and Rotational alignment updates Tag: Visual edit
- 21:41, 2 February 2024 diff hist -160 m MLA150 - Troubleshooting minor additons/grammar Tag: Visual edit
- 09:08, 31 January 2024 diff hist +246 ICP Etching Recipes →Through Silicon Via (TSV) etch (DSEiii): what to do if see black grass Tag: Visual edit
- 09:06, 31 January 2024 diff hist +135 ICP Etching Recipes →High Rate Bosch Etch (DSEIII): mentioned Al2O3 selectivity Tag: Visual edit
- 09:03, 31 January 2024 diff hist +393 ICP Etching Recipes →High Rate Bosch Etch (DSEIII): mentioned using hardmask for patterning to edge, SiO2 selectivity mentioned Tag: Visual edit
- 16:24, 30 January 2024 diff hist +814 Thermal Processing Recipes →Tystar 8300: added wafer cleaning current Tag: Visual edit
- 09:15, 23 January 2024 diff hist +10 Template:Announcements →Gowning Refresh: added date to title
- 09:15, 23 January 2024 diff hist -641 Template:Announcements deleted gca maint
- 13:58, 22 January 2024 diff hist -203 Stepper 3 (ASML DUV) →Design Tools: moved JobCreator into software section, highlighted Mask Making page Tag: Visual edit
- 11:08, 17 January 2024 diff hist +235 Template:Announcements Oxford cobra sfotware bugs
- 11:07, 17 January 2024 diff hist -368 Template:Announcements EB1 UP, delete ASML UP
- 18:41, 12 January 2024 diff hist +377 Stepper 3 (ASML DUV) →Online Video Trainings: updated panopto login instructions Tag: Visual edit
- 18:39, 12 January 2024 diff hist +39 N File:2024-01 ASML Running Job Thumbnail.png current
- 18:35, 12 January 2024 diff hist +28 N File:2024-01 PanOpto - UCSB Login.png current
- 18:33, 12 January 2024 diff hist +33 N File:2024-01 PanOpto - Canvas dropdown.png current
- 18:00, 11 January 2024 diff hist +224 Template:Announcements ASML PM Jan 29
- 14:47, 11 January 2024 diff hist +255 Stepper 2 (AutoStep 200) →Operating Procedures: added sub sections Tag: Visual edit
- 14:38, 11 January 2024 diff hist +80 N Stepper 2 (Autostep 200) - Job Programming John d moved page Stepper 2 (Autostep 200) - Job Programming to Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences: more descriptive title current Tag: New redirect
- 14:38, 11 January 2024 diff hist 0 m Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences John d moved page Stepper 2 (Autostep 200) - Job Programming to Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences: more descriptive title current
- 08:51, 11 January 2024 diff hist +16 Template:Announcements →DUV Flood: UP with new procedure
- 08:49, 11 January 2024 diff hist +289 Template:Announcements EBeam1 down/update
- 08:28, 11 January 2024 diff hist +257 Template:Announcements asml Up, gown refresh
- 21:55, 9 January 2024 diff hist +1,038 Services added links to Supplies to Bring FAQ page, and reworded heading titles for better TOC display, current Tag: Visual edit
- 18:19, 4 January 2024 diff hist -4 Template:Announcements →Job Opening: Process Engineer
- 18:19, 4 January 2024 diff hist +7 Template:Announcements →DUV Flood: UP with new procedure
- 18:18, 4 January 2024 diff hist 0 Template:Announcements →DUV Flood: UP with new procedure
- 18:17, 4 January 2024 diff hist +1 Template:Announcements
- 18:17, 4 January 2024 diff hist 0 Template:Announcements
- 18:16, 4 January 2024 diff hist +27 N User:John d Demis D. John redirect to Demis_D._John current Tags: New redirect Visual edit: Switched
- 17:51, 4 January 2024 diff hist +185 Template:Announcements asml update
- 17:41, 4 January 2024 diff hist -537 Template:Announcements updated DUV flood is UP, deleted old lab shutdown and PECVD maint messages
- 17:21, 4 January 2024 diff hist +224 Tool List Title --> Measurement & Characterization & description text Tag: Visual edit
- 17:15, 4 January 2024 diff hist -19 MediaWiki:Sidebar changed Inspection/Test/Char --> Metrology & Test current
- 14:44, 4 January 2024 diff hist +155 Autostep 200 Mask Making Guidance →Alignment Marks (Global, Local/DFAS): link to CAD files section, removed Vernier link (since its on CAD files section) current Tag: Visual edit
- 14:40, 4 January 2024 diff hist 0 File:Vernier Template.gds John d uploaded a new version of File:Vernier Template.gds current
- 11:56, 4 January 2024 diff hist +15 Autostep 200 Mask Making Guidance →Alignment Marks (Global, Local/DFAS): placeholder for reticle handbook Tag: Visual edit
- 11:43, 4 January 2024 diff hist +457 Surface Analysis (KLA/Tencor Surfscan) →Documentation: added info, and inof on LPC wafers Tag: Visual edit
- 11:36, 4 January 2024 diff hist +133 N Surfscan Errors and Workarounds added keuyboard workaround current Tag: Visual edit
- 11:34, 4 January 2024 diff hist +95 Surface Analysis (KLA/Tencor Surfscan) reorg, remove old SOP, replaced with new PDF SOP's for each wafer size Tag: Visual edit
- 11:24, 22 December 2023 diff hist +17 Stepper 3 (ASML DUV) →Process Information: made wafer bow it's own section Tag: Visual edit
- 15:09, 6 December 2023 diff hist +694 Laser Etch Monitoring →Limitations: added laser spot wize current Tag: Visual edit
- 17:57, 5 December 2023 diff hist +64 Dry Etching Recipes FL-ICP SiN etch linked Tag: Visual edit
- 17:56, 5 December 2023 diff hist +462 ICP Etching Recipes →PlasmaTherm/SLR Fluorine Etcher: added Bill's SiN etch recipe Tag: Visual edit
- 11:04, 1 December 2023 diff hist -275 ASML 5500 Mask Making Guidelines removed AlMark GDS file current Tag: Visual edit
- 10:28, 1 December 2023 diff hist +35 m Stepper 3 (ASML DUV) →Process Information: DO NOT RUN wafer with too high bow Tag: Visual edit
- 12:12, 30 November 2023 diff hist +669 N YES Recipe Screenshots: STD-O2 screenshots of "STD-O2-180C-3KW-30sec" and "STD-O2-100C-3KW-15min" current Tag: Visual edit
- 12:11, 30 November 2023 diff hist +40 N File:STD-O2-180C-3KW-30sec - steps.jpg current
- 12:10, 30 November 2023 diff hist +41 N File:STD-O2-180C-3KW-30sec - header.jpg current
- 12:09, 30 November 2023 diff hist +41 N File:STD-O2-100C-3KW-15min - steps.jpg current
- 12:09, 30 November 2023 diff hist +42 N File:STD-O2-100C-3KW-15min - header.jpg current
- 12:08, 30 November 2023 diff hist +725 N YES Recipe Screenshots: STD-N2-O2 screenshots of "STD-N2-O2-100C-0.7KW-15sec" and "STD-N2-O2-180C-3KW-1min" current Tag: Visual edit
- 12:07, 30 November 2023 diff hist +48 N File:STD-N2-O2-100C-0.7KW-15sec - steps.jpg current
- 12:06, 30 November 2023 diff hist +49 N File:STD-N2-O2-100C-0.7KW-15sec - header.jpg current
- 12:05, 30 November 2023 diff hist +56 N File:STD-N2-O2-180C-3KW-1min - steps.jpg current
- 12:03, 30 November 2023 diff hist +59 N File:STD-N2-O2-180C-3KW-1min - header.jpg current
- 12:02, 30 November 2023 diff hist +158 Oxygen Plasma System Recipes →Plasma Clean (YES EcoClean): links to recipe screenshots for both N2-O2 & O2 Tag: Visual edit
- 17:53, 25 November 2023 diff hist 0 Usage Data and Statistics →Numbers of Annual Users: typo year current Tag: Visual edit
- 13:09, 22 November 2023 diff hist +73 Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) added "FL-ICP" for SEO current Tag: Visual edit
- 12:31, 22 November 2023 diff hist +237 Plasma Clean (YES EcoClean) →Etch Method: mentioned back of wafer exposure to gas current Tag: Visual edit
- 16:02, 21 November 2023 diff hist +221 MLA150 - Design Guidelines →Limitations: updated failed rotation text Tag: Visual edit
- 13:38, 21 November 2023 diff hist +704 Plasma Clean (YES EcoClean) images of carrier wafers Tag: Visual edit
- 13:36, 21 November 2023 diff hist +88 N File:YES Pocket Carrier Wafers - 50mm pocket.jpg current
- 13:35, 21 November 2023 diff hist +76 N File:YES Pocket Carrier Wafers - 90mm pocket.jpg current
- 08:59, 21 November 2023 diff hist +288 Frequently Asked Questions →What Supplies do I need to bring to the lab?: updates current Tag: Visual edit
- 22:09, 16 November 2023 diff hist +1 Template:Announcements moved PECVD2 annc up
- 22:06, 16 November 2023 diff hist 0 m Template:News current
- 22:02, 16 November 2023 diff hist 0 Template:News →NanoFab Featured in Regional Tech Videos: images fix with underscores (for RSS feed)
- 17:59, 16 November 2023 diff hist -7 m Template:Announcements →Year End Shutdown
- 17:59, 16 November 2023 diff hist 0 File:Nanofabrication Facility Project Description.xlsx John d uploaded a new version of File:Nanofabrication Facility Project Description.xlsx current
- 16:46, 16 November 2023 diff hist +65 Oxygen Plasma System Recipes →Plasma Clean (YES EcoClean): added Ru oxidation in O2-only Tag: Visual edit
- 16:44, 16 November 2023 diff hist +125 Plasma Clean (YES EcoClean) →Recipes: preview of recipes page. Tag: Visual edit
- 10:26, 9 November 2023 diff hist +56 Template:News added videos signature for RSS feed
- 12:22, 8 November 2023 diff hist 0 File:Techtopia Vid - Thumbnail PlayButton.jpg John d uploaded a new version of File:Techtopia Vid - Thumbnail PlayButton.jpg current
- 12:21, 8 November 2023 diff hist 0 File:NanoFab COE Engineering Vid - thumbnail 2 crop.jpg John d uploaded a new version of File:NanoFab COE Engineering Vid - thumbnail 2 crop.jpg current
- 12:11, 8 November 2023 diff hist +355 Template:News →NanoFab Featured in Regional Tech Videos: table with thumbnail links to videos
- 11:33, 8 November 2023 diff hist +52 N File:NanoFab COE Engineering Vid - thumbnail 2 crop.jpg
- 11:32, 8 November 2023 diff hist +42 N File:Techtopia Vid - Thumbnail PlayButton.jpg
- 11:31, 8 November 2023 diff hist +2 m Template:News →NanoFab Featured in Regional Tech Videos
- 11:30, 8 November 2023 diff hist +442 Template:News NanoFab video promos
- 14:59, 7 November 2023 diff hist -13 Template:News →NanoFab staff awarded Goleta's Innovator of the Year 2023
- 14:58, 7 November 2023 diff hist +636 Template:News Demis innovator of the year
- 14:52, 7 November 2023 diff hist -157 Template:Announcements removed qhitespac and internal comments (since vraj's script was pushing them to the bottom, instead of top where they used to be for human-readable instructions))
- 14:49, 7 November 2023 diff hist -636 Template:Announcements lab card/iris access, Symmetry app and updates
- 14:41, 7 November 2023 diff hist +1,195 Main Page BIG update - pasted from Homepage_Draft1
- 18:25, 6 November 2023 diff hist +363 Frequently Asked Questions →How do I get my files from the NanoFab computers?: added “when will my FYP a folder show up?” Tag: Visual edit
- 20:55, 5 November 2023 diff hist -2 Wet Etching Recipes set "wet ethcing references" to H1 level, instead of being a sub-set of the Wet Etchign Table current Tag: Visual edit
- 15:47, 2 November 2023 diff hist +65 m MLA150 - Troubleshooting →Stitching Tag: Visual edit
- 15:47, 2 November 2023 diff hist +321 MLA150 - Troubleshooting →Stitching: mention fix by overexposure + CD Bias Tag: Visual edit
- 15:28, 2 November 2023 diff hist +1 m MLA150 - Troubleshooting →Stitching Tag: Visual edit
- 15:28, 2 November 2023 diff hist +234 MLA150 - Troubleshooting →Stitching: added SEM of 400nm line/space with 50nm stitching bump Tag: Visual edit
- 15:26, 2 November 2023 diff hist +59 N File:MLA150 - 160D0F15 stitching notch - 01.jpg current
- 15:19, 2 November 2023 diff hist +772 MLA150 - Troubleshooting stitching secviton on y-oriented ridges Tag: Visual edit
- 15:14, 2 November 2023 diff hist +139 Maskless Aligner (Heidelberg MLA150) →Design Tools/Info: descriptions of the links Tag: Visual edit
- 13:59, 2 November 2023 diff hist +127 Homepage Draft1 moved "other links" into white-bg single-cells current
- 17:15, 1 November 2023 diff hist +58 Aidan Hopkins →Current Work: fixed broken tool links current Tag: Visual edit
- 17:09, 1 November 2023 diff hist +68 Maskless Aligner (Heidelberg MLA150) →Operating Procedures: mention user manuals Tag: Visual edit
- 17:02, 1 November 2023 diff hist -172 Microscopes →Microscope #1: Olympus BHMJL (Room 1111): deleted link to Olympus user manual (file deleted) current Tag: Visual edit
- 12:19, 1 November 2023 diff hist +222 UCSB Nanofab Wiki:About added NanoFab-it email link & website links. current
- 16:10, 31 October 2023 diff hist -1,748 MLA150 - Troubleshooting →Greyscale Lithography Limitations: moved content to Greyscale design guidelines page and linked to that. Tag: Visual edit
- 16:09, 31 October 2023 diff hist +1,888 MLA150 - Design Guidelines →Greyscale Lithography: pasted Limitations from Troubleshootig page Tag: Visual edit
- 16:05, 31 October 2023 diff hist +2,028 MLA150 - Design Guidelines →Greyscale Lithography: added updates and suggestions Tag: Visual edit
- 08:36, 31 October 2023 diff hist +8 Ellipsometer (Woollam) Force table of contents display
- 20:49, 30 October 2023 diff hist +4 Template:News italics old article link
- 20:47, 30 October 2023 diff hist -5 Template:News remove HR
- 20:47, 30 October 2023 diff hist +4 Homepage Draft1 Tag: Visual edit: Switched
- 20:41, 30 October 2023 diff hist +3 Homepage Draft1 Tag: Visual edit
- 20:40, 30 October 2023 diff hist +458 Template:News - Older Articles pasted old articles from `news` current
- 20:39, 30 October 2023 diff hist -2,788 Template:News moved older articles to "old articles page"
- 20:38, 30 October 2023 diff hist +79 Template:News link to older articles
- 20:35, 30 October 2023 diff hist +7,781 N Template:News - Older Articles pasted news from ~2022 bthibeault culling
- 20:30, 30 October 2023 diff hist +10 m Calculators + Utilities →KLayout Tag: Visual edit
- 20:28, 30 October 2023 diff hist -14 m Calculators + Utilities →KLayout Design Tips Tag: Visual edit
- 20:27, 30 October 2023 diff hist -1 MediaWiki:Sidebar merge "NanoFab usage" into "data+info" section
- 20:26, 30 October 2023 diff hist -28 MediaWiki:Sidebar moved Process Control & Calcs --> "Data and Info" section
- 20:23, 30 October 2023 diff hist -167 Template:Homepage Topbanners deleted COVID policies current
- 20:20, 30 October 2023 diff hist -16 Homepage Draft1 Tag: Visual edit: Switched
- 20:17, 30 October 2023 diff hist +80 Homepage Draft1 removed right sidebar (redundant links), moved links into main table
- 20:07, 30 October 2023 diff hist +5 Homepage Draft1 `featuredArticle`-->`Homepage_GeneralInfo`
- 20:06, 30 October 2023 diff hist +1,269 N Template:Homepage GeneralInfo pasted from template `FeaturedArticle` current
- 20:03, 30 October 2023 diff hist +58 Homepage Draft1 recipes table width = 100%, vertical-align=top
- 19:59, 30 October 2023 diff hist +901 Homepage Draft1 added table of equip/recipes/data Tag: Visual edit
- 19:50, 30 October 2023 diff hist +17 Homepage Draft1 `nav2` --> `Homepage_BottomBanner` Tag: Visual edit: Switched
- 19:50, 30 October 2023 diff hist +477 N Template:Homepage BottomBanner pasted from template `nav2`, change contact to NanoFab-it@ece... current
- 19:46, 30 October 2023 diff hist +16 Homepage Draft1 cahnged `nav` template to `Homepage_Topbanners`
- 19:44, 30 October 2023 diff hist +1,780 N Template:Homepage Topbanners pasted from `nav` template
- 19:37, 30 October 2023 diff hist +106 Template:Announcements →Job Opening: Process Engineer: link to job openings page
- 14:56, 27 October 2023 diff hist +762 Frequently Asked Questions added Net ID PW reset instructions (from Claudia email) 2023-10-27 Tag: Visual edit
- 10:34, 27 October 2023 diff hist -2 MLA150 - Design Guidelines →Alignment Marks Tag: Visual edit
- 10:33, 27 October 2023 diff hist +219 MLA150 - Design Guidelines →Automatic Alignment: mentioned expose bitmaps Tag: Visual edit
- 14:55, 26 October 2023 diff hist +535 Nanofab Job Postings added Process Engineer position 2023-10 Tag: Visual edit
- 10:21, 18 October 2023 diff hist -8 Template:Announcements →ProbeStation scheduled IT maintenance: removed "hello all" and bulleted the dates
- 16:57, 16 October 2023 diff hist +17 m Measurements and Imaging with Amscope Camera - Quickstart Usage Guide figure caption clarify current Tag: Visual edit
- 12:41, 16 October 2023 diff hist +39 m Microscopes Text replacement - "Amscope Quickstart Usage Guide" to "Measurements and Imaging with Amscope Camera - Quickstart Usage Guide"
- 12:41, 16 October 2023 diff hist +117 m UCSB NanoFab Microscope Training Text replacement - "Amscope Quickstart Usage Guide" to "Measurements and Imaging with Amscope Camera - Quickstart Usage Guide" current
- 12:39, 16 October 2023 diff hist +83 N Amscope Quickstart Usage Guide John d moved page Amscope Quickstart Usage Guide to Measurements and Imaging with Amscope Camera - Quickstart Usage Guide: more descriptive title for printing current Tag: New redirect
- 12:39, 16 October 2023 diff hist 0 m Measurements and Imaging with Amscope Camera - Quickstart Usage Guide John d moved page Amscope Quickstart Usage Guide to Measurements and Imaging with Amscope Camera - Quickstart Usage Guide: more descriptive title for printing
- 12:28, 16 October 2023 diff hist +247 Measurements and Imaging with Amscope Camera - Quickstart Usage Guide camera rotation Tag: Visual edit
- 10:00, 16 October 2023 diff hist +32 ASML 5500 Mask Making Guidelines →Templates: asml spreadsheet "expert" usage Tag: Visual edit
- 13:53, 13 October 2023 diff hist +128 Photolithography - Manual Edge-Bead Removal Techniques →EBR100 Swabbing: remove more rather than less current Tag: Visual edit
- 14:52, 12 October 2023 diff hist +10 m Nanofab New User Onboarding current Tag: Visual edit
- 11:44, 11 October 2023 diff hist +14 Template:Announcements →Unaxis ICP-PECVD is DOWN: changed to UP
- 12:13, 4 October 2023 diff hist +1 m Template:News
- 12:13, 4 October 2023 diff hist +434 Template:News added chips act MEC award
- 12:10, 4 October 2023 diff hist +5 m News Feed current
- 12:07, 4 October 2023 diff hist +2 m News Feed →CHIPS Act Award Announced: UCSB NanoFab Tag: Visual edit
- 12:06, 4 October 2023 diff hist +415 News Feed chips act
- 14:51, 29 September 2023 diff hist +321 Stepper 3 (ASML DUV) →Online Video Trainings: privatized the Video Trianings, note on how to reaquire access. Tag: Visual edit
- 11:08, 28 September 2023 diff hist +210 ICP Etching Recipes →Si Etching (Fluorine ICP Etcher): added proces snotes / 99% PR mask issue Tag: Visual edit
- 16:02, 27 September 2023 diff hist 0 m Usage Data and Statistics →Numbers of Annual Users Tag: Visual edit
- 11:46, 27 September 2023 diff hist 0 m Nanofab Staff Internal Pages Protected "Nanofab Staff Internal Pages" ([Edit=Allow only administrators] (indefinite) [Move=Allow only administrators] (indefinite))
- 09:37, 27 September 2023 diff hist +62 Nanofab New User Onboarding silva's corrections Tag: Visual edit
- 09:31, 27 September 2023 diff hist -82 Staff List moved Aidan --> Equip, deleted Lingg Tag: Visual edit
- 22:25, 26 September 2023 diff hist -278 ASML 5500 Mask Making Guidelines →Vendor/Ordering Instructions: removed duplicate defs Tag: Visual edit
- 20:48, 26 September 2023 diff hist -22 Holographic Lith/PL Setup (Custom) cusotme system, updated supervisor current
- 20:45, 26 September 2023 diff hist +13 Photoluminescence PL Setup (Custom) current
- 20:45, 26 September 2023 diff hist +29 Photoluminescence PL Setup (Custom)
- 20:45, 26 September 2023 diff hist -45 Photoluminescence PL Setup (Custom) supervisor = Demis
- 20:43, 26 September 2023 diff hist +113 Holographic Lith/PL Setup (Custom) →Detailed Specifications: minor updates to specs Tag: Visual edit
- 11:51, 26 September 2023 diff hist +23 Nanofab Staff Internal Pages moved onboarding to new "administration" section Tag: Visual edit
- 21:13, 25 September 2023 diff hist +662 ASML 5500 Mask Making Guidelines →Vendor/Ordering Instructions: added prpgramming worksheet links here as well Tag: Visual edit
- 15:41, 25 September 2023 diff hist +2,217 N Nanofab New User Onboarding inital page Tag: Visual edit
- 14:49, 25 September 2023 diff hist +56 Nanofab Job Postings all positions filled Tag: Visual edit
- 13:47, 25 September 2023 diff hist +226 Nanofab Staff Internal Pages →Useful UCSB Pages: link to New User Onboarding pages Tag: Visual edit
- 14:11, 22 September 2023 diff hist +19 m GCA 6300 Mask Making Guidance current
- 14:09, 22 September 2023 diff hist +15 m Autostep 200 Mask Making Guidance
- 14:08, 22 September 2023 diff hist +122 Contact Aligner (SUSS MA-6) →Documentation: link to UCSB mask ordering procedure current Tag: Visual edit
- 14:08, 22 September 2023 diff hist +122 Suss Aligners (SUSS MJB-3) →Documentation: link to mask ordering info for UCSB users Tag: Visual edit
- 14:08, 22 September 2023 diff hist +15 m ASML 5500 Mask Making Guidelines
- 14:07, 22 September 2023 diff hist +122 ASML 5500 Mask Making Guidelines link to UCSB mask purchasing info Tag: Visual edit
- 14:06, 22 September 2023 diff hist +110 Autostep 200 Mask Making Guidance link to UCSB purchasing info Tag: Visual edit
- 14:06, 22 September 2023 diff hist +81 GCA 6300 Mask Making Guidance link to purchainf for UCSB users Tag: Visual edit
- 14:05, 22 September 2023 diff hist +941 N Photomask Ordering Procedure for UCSB Users pasted procedure from email current Tag: Visual edit
- 21:39, 21 September 2023 diff hist +21 IBD: Calibrating Optical Thickness added category Process
- 21:36, 21 September 2023 diff hist +145 Sputtering Recipes →Ion Beam Deposition (Veeco NEXUS) current Tag: Visual edit
- 21:33, 21 September 2023 diff hist +10 Ion Beam Deposition (Veeco NEXUS) →Recipes Tag: Visual edit
- 21:32, 21 September 2023 diff hist +12 Laser Etch Monitoring added CObra to location list Tag: Visual edit
- 21:32, 21 September 2023 diff hist +1,242 Laser Etch Monitoring added Limitations section Tag: Visual edit
- 18:32, 20 September 2023 diff hist 0 Template:News fixed links
- 18:31, 20 September 2023 diff hist +143 Template:News new JEOL SEM's
- 18:26, 20 September 2023 diff hist +1,829 N Homepage Draft1 pasted Main_Page source code
- 16:46, 20 September 2023 diff hist +308 Holographic Lith/PL Setup (Custom) header level set correctly, link to recipes page Tag: Visual edit
- 06:44, 19 September 2023 diff hist +22 Stepper Recipes →Positive Resist (ASML DUV): UV26 updates from data sheet Tag: Visual edit
- 17:15, 15 September 2023 diff hist +150 IBD: Calibrating Optical Thickness fixed formula newlines Tag: Visual edit: Switched
- 17:08, 15 September 2023 diff hist +105 IBD: Calibrating Optical Thickness formatting updates to equations Tag: Visual edit
- 17:03, 15 September 2023 diff hist +20 m IBD: Calibrating Optical Thickness Tag: Visual edit
- 17:03, 15 September 2023 diff hist +158 IBD: Calibrating Optical Thickness added publication policy Tag: Visual edit
- 15:16, 15 September 2023 diff hist +898 Calculators + Utilities →CAD Design Tips: minor updates, mentioend AutoCAD Tag: Visual edit
- 10:41, 15 September 2023 diff hist +513 ASML 5500: Recovering from an Error updated, linked to Error Logs section current Tag: Visual edit
- 10:36, 15 September 2023 diff hist +31 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration →Error Logs: made name more descriptive current Tag: Visual edit
- 13:02, 13 September 2023 diff hist -12 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration →Exposing with corrected Focus Offset from IQC Tag: Visual edit: Switched
- 12:59, 13 September 2023 diff hist +17 m ASML Stepper 3 Error Recovery, Troubleshooting and Calibration →Important Warnings Tag: Visual edit
- 12:55, 13 September 2023 diff hist +52 m ASML Stepper 3 Error Recovery, Troubleshooting and Calibration explain software login Tag: Visual edit
- 12:54, 13 September 2023 diff hist +5 m ASML Stepper 3 Error Recovery, Troubleshooting and Calibration →IQC (Image Quality Control) Calibration Check: indent image Tag: Visual edit: Switched
- 12:52, 13 September 2023 diff hist -3 m ASML Stepper 3 Error Recovery, Troubleshooting and Calibration →IQC (Image Quality Control) Calibration Check: moved IQC screenshot up Tag: Visual edit
- 12:50, 13 September 2023 diff hist 0 File:ASML IQC Focus Mean Correction screenshot.jpg John d uploaded a new version of File:ASML IQC Focus Mean Correction screenshot.jpg current
- 12:46, 13 September 2023 diff hist +4 m Stepper 3 (ASML DUV) →Process Information Tag: Visual edit
- 12:45, 13 September 2023 diff hist +546 Stepper 3 (ASML DUV) →Process Information: Updated Wafer Bow requirements Tag: Visual edit
- 11:17, 13 September 2023 diff hist +1,395 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration added error log reading section Tag: Visual edit
- 11:09, 13 September 2023 diff hist +81 N File:ASML Stepper 3 - HELP button error log screenshot.png current
- 15:33, 12 September 2023 diff hist +14 Tool List →Electron Microscopy: renamed and fixed link for SEM2 Tag: Visual edit
- 15:32, 12 September 2023 diff hist -1,849 Field Emission SEM 2 (JEOL IT800SHL) copied page from SEM1, linked to SEM1 page.
- 15:20, 12 September 2023 diff hist +50 N Field Emission SEM 2 (JEOL 7600F) John d moved page Field Emission SEM 2 (JEOL 7600F) to Field Emission SEM 2 (JEOL IT800SHL): new tool., old tool replaced current Tag: New redirect
- 15:20, 12 September 2023 diff hist 0 m Field Emission SEM 2 (JEOL IT800SHL) John d moved page Field Emission SEM 2 (JEOL 7600F) to Field Emission SEM 2 (JEOL IT800SHL): new tool., old tool replaced
- 08:14, 12 September 2023 diff hist +45 m ASML Stepper 3 Error Recovery, Troubleshooting and Calibration →Important Warnings Tag: Visual edit
- 16:46, 11 September 2023 diff hist +436 NanoFab Process Group Examples for Users section, with Links to Example Trello Job Board & example google drive folder. current Tag: Visual edit
- 10:08, 9 September 2023 diff hist +299 Oxygen Plasma System Recipes →N2/O2 Recipes: clarified recipe renaming, and hearing of wafers Tag: Visual edit
- 15:02, 6 September 2023 diff hist -14 m Template:Announcements →Dicing Saw (ADT) Upgrade 10/9 - PLEASE READ: deleted "PLEASE READ"
- 09:10, 2 September 2023 diff hist +951 KLayout Design Tips How to print text current Tag: Visual edit
- 09:02, 2 September 2023 diff hist -25 m Calculators + Utilities →KLayout Tag: Visual edit
- 15:33, 28 August 2023 diff hist +42 Stepper 2 (AutoStep 200) Operating Procedures →Other Useful links for this system:: explained Quick vs Detailed Tag: Visual edit
- 14:53, 28 August 2023 diff hist +9 m ICP Etching Recipes →Through Silicon Via etch (DSEiii) Tag: Visual edit
- 14:52, 28 August 2023 diff hist +164 ICP Etching Recipes →Through Silicon Via etch (DSEiii): added link to publication policy Tag: Visual edit
- 14:43, 28 August 2023 diff hist +25 ICP Etching Recipes →Through Silicon Via etch (DSEiii): mention PR thickness requirement Tag: Visual edit
- 14:36, 28 August 2023 diff hist +26 Stepper 2 (AutoStep 200) Operating Procedures heading for useful links Tag: Visual edit
- 14:34, 28 August 2023 diff hist +251 Stepper 2 (AutoStep 200) Operating Procedures links to other pages at top Tag: Visual edit
- 17:16, 21 August 2023 diff hist +4 m Frequently Asked Questions →Authorship on Publications Tag: Visual edit
- 17:16, 21 August 2023 diff hist +149 Frequently Asked Questions →Publications acknowledging the Nanofab: link to LIGO papers with >1000 authors Tag: Visual edit
- 11:14, 20 August 2023 diff hist +84 Stepper 3 (ASML DUV) →Process Information: added maximu. Dose & disallowed EVL PR’s Tag: Visual edit
- 11:08, 20 August 2023 diff hist +177 Stepper 3 (ASML DUV) Added KrF and some more info on piece part, and removed unnecessary heading Tag: Visual edit
- 10:07, 15 August 2023 diff hist +10 MediaWiki:Sidebar Added link to process control data pages
- 10:04, 15 August 2023 diff hist +134 Process Group - Process Control Data move TOC below intro current Tag: Visual edit: Switched
- 10:03, 15 August 2023 diff hist +139 Process Group - Process Control Data description of process control data
- 09:58, 15 August 2023 diff hist +61 MediaWiki:Sidebar Added link to process control data pages
- 09:56, 9 August 2023 diff hist +183 MLA150 - Troubleshooting →Greyscale Lithography Limitations: updated that X-Y alignment may work, just not rotation. Tag: Visual edit
- 07:14, 9 August 2023 diff hist -16 Oxygen Plasma System Recipes →O2-Only Recipes: removed "To be added", as these recipes are currently on the tool Tag: Visual edit
- 17:07, 8 August 2023 diff hist +443 Sputtering Recipes added Sputter 3 ignition issues Tag: Visual edit
- 20:42, 7 August 2023 diff hist +69 Maskless Aligner (Heidelberg MLA150) →Video Trainings: added training procedure Tag: Visual edit
- 12:50, 7 August 2023 diff hist +119 Stepper 3 (ASML DUV) added minimum wafer thickness Tag: Visual edit
- 12:47, 7 August 2023 diff hist +89 m Wafer Bonder (Logitech WBS7) →Recipes: minro note of what is in the recipe sections Tag: Visual edit
- 13:54, 4 August 2023 diff hist +67 Maskless Aligner (Heidelberg MLA150) →About: link to greyscale limitations page. Tag: Visual edit
- 15:40, 2 August 2023 diff hist +630 Template:Announcements mla150 annc
- 10:04, 1 August 2023 diff hist +146 Oxygen Plasma System Recipes →O2-Only Recipes: note on dim plasma Tag: Visual edit
- 14:32, 30 July 2023 diff hist +1,820 MLA150 - Troubleshooting Greyscale limitations Tag: Visual edit
- 15:57, 20 July 2023 diff hist +172 Maskless Aligner (Heidelberg MLA150) →Video Trainings: note on training proceudre Tag: Visual edit
- 16:50, 18 July 2023 diff hist +13 Field Emission SEM 2 (JEOL IT800SHL) →Operating Procedures: uplaoded SOP v08.12 from Mitchell Tag: Visual edit
- 16:49, 18 July 2023 diff hist +40 N File:JEOL 7600F UserManual.pdf v08.12, from Bill Mitchell current
- 16:09, 17 July 2023 diff hist -19 m Oxygen Plasma System Recipes →O2 Recipe Characterization Tag: Visual edit
- 16:02, 17 July 2023 diff hist +1,512 Oxygen Plasma System Recipes →Plasma Clean (YES EcoClean): updates, explained Gold oxidation etc. Placeholders for recipe names Tag: Visual edit
- 15:40, 17 July 2023 diff hist -8 Dry Etching Recipes deleted extra blank column, linked Technics & YES Ecoclean to recipes page. Tag: Visual edit
- 18:48, 8 July 2023 diff hist +155 Packaging Recipes →Photoresist: added to use squirt bottles. Tag: Visual edit
- 20:43, 7 July 2023 diff hist +18 UCSB NanoFab Microscope Training →Measurements Tag: Visual edit
- 05:29, 28 June 2023 diff hist +1 m ASML Stepper 3 Error Recovery, Troubleshooting and Calibration →Exposing with corrected Focus Offset via IQC Tag: Visual edit
- 04:21, 28 June 2023 diff hist +220 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration →Important Warnings: explain how to bring warnings window to front Tag: Visual edit
- 04:17, 28 June 2023 diff hist +160 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration →IQC (Image Quality Control) Calibration Check: added subheading for “exposing with IQC correction” Tag: Visual edit
- 12:10, 23 June 2023 diff hist +202 Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) →Documentation: link to Manual edge bead removal page Tag: Visual edit
- 12:08, 23 June 2023 diff hist +96 Photolithography - Manual Edge-Bead Removal Techniques →EBR100 Swabbing: minor description about ebr wicking / drying Tag: Visual edit
- 20:57, 22 June 2023 diff hist +355 ASML 5500 Mask Making Guidelines added alignment mark info Tag: Visual edit
- 15:45, 21 June 2023 diff hist +64 Rapid Thermal Processor (SSI Solaris 150) Added “RTA” and abbreviations for searchability Tag: Visual edit
- 13:13, 20 June 2023 diff hist +6 m Photolithography - Manual Edge-Bead Removal Techniques →Lithographic Edge Bead Removal Tag: Visual edit
- 22:37, 15 June 2023 diff hist +346 m Wet Etching Recipes table: link to Piranha section Tag: Visual edit
- 22:32, 15 June 2023 diff hist -1,111 m Wet Etching Recipes →Organic removal: headings for Organics Removal section Tag: Visual edit
- 22:15, 15 June 2023 diff hist +6 Wet Etching Recipes →Table of Wet Etching Recipes: InGaAs exothermic comment Tag: Visual edit
- 22:14, 15 June 2023 diff hist +97 Wet Etching Recipes →Table of Wet Etching Recipes: Added InP & InGaAs selective etches for stop-etch Tag: Visual edit
- 21:33, 15 June 2023 diff hist -238 Wet Etching Recipes →Table of Wet Etching Recipes: added selective substrate removal recipes for GaAs/AlGaAs (from Garrett Cole), oxide removal dips for InP, GaAs (from memory) Tag: Visual edit
- 10:27, 15 June 2023 diff hist +153 Atomic Layer Deposition Recipes →Oxford FlexAL Chamber #1: Metals: added BDEAS recipe - needs more info current Tag: Visual edit
- 14:01, 14 June 2023 diff hist +944 Direct-Write Lithography Recipes →Greyscale Lithography (MLA150): adde dgresyscale starter process Tag: Visual edit
- 13:52, 14 June 2023 diff hist +232 Direct-Write Lithography Recipes →Positive Resist (MLA150): explain rehydration step Tag: Visual edit
- 13:38, 14 June 2023 diff hist +219 Direct-Write Lithography Recipes →Positive Resist (MLA150): added SPR220-7.0, from Lubin greyscale project Tag: Visual edit
- 13:23, 14 June 2023 diff hist +1 Template:Announcements →NanoFan Lab is UP: typo
- 16:05, 12 June 2023 diff hist +61 Wet Benches added NEVER heat: ISO, Toluene etc. Tag: Visual edit
- 11:42, 12 June 2023 diff hist +106 Wet Benches →Detailed Specifications: minor updates, clarified that NMP can be heated, ACE can not Tag: Visual edit
- 08:08, 8 June 2023 diff hist +258 Microscopes →Microscope #7: Olympus DSX1000 Digital Microscope (Bay 4): minor updates to specs Tag: Visual edit
- 23:37, 5 June 2023 diff hist +113 Surface Analysis (KLA/Tencor Surfscan) added high-particles images Tag: Visual edit
- 23:36, 5 June 2023 diff hist +38 N File:Surfscan 230113A7G2 after low particles.jpg current
- 23:35, 5 June 2023 diff hist +39 N File:Surfscan - 230113A7 Gain4 high particles.jpg current
- 12:08, 2 June 2023 diff hist 0 File:PECVD1 SiN Stress vs. N2 plot.jpg John d uploaded a new version of File:PECVD1 SiN Stress vs. N2 plot.jpg current
- 11:55, 2 June 2023 diff hist -130 PECVD Recipes →Low Stress Si3N4 (PECVD#1): deleted process control data link Tag: Visual edit
- 11:55, 2 June 2023 diff hist +1 m PECVD Recipes →Low Stress Si3N4 (PECVD#1): indent image Tag: Visual edit: Switched
- 11:54, 2 June 2023 diff hist +428 PECVD Recipes →SiOxNy deposition (PECVD #1): added SiN stress vs. N2 plot Tag: Visual edit
- 11:52, 2 June 2023 diff hist +209 N File:PECVD1 SiN Stress vs. N2 plot.jpg
- 11:30, 1 June 2023 diff hist -64 Oxygen Plasma System Recipes →Plasma Clean (YES EcoClean): deleted false link Tag: Visual edit
- 11:29, 1 June 2023 diff hist +277 Oxygen Plasma System Recipes →Plasma Clean (YES EcoClean): added sub headings to N2/O2, link to new page Tag: Visual edit
- 10:28, 27 May 2023 diff hist +68 Calculators + Utilities →General CAD files for Litho: added authorship to some CAD files Tag: Visual edit
- 11:33, 25 May 2023 diff hist +118 Stepper 3 (ASML DUV) →Resists Used: mnetiuon EBL compatibility Tag: Visual edit
- 11:31, 25 May 2023 diff hist +35 Stepper 3 (ASML DUV) →About: separated "resist info" to it's own heading Tag: Visual edit
- 10:35, 23 May 2023 diff hist +220 ICP-PECVD (Unaxis VLR) added Process Control Data section current Tag: Visual edit
- 16:41, 18 May 2023 diff hist +813 Process Group - Process Control Data →Stepper #3 (ASML DUV): included example images
- 16:40, 18 May 2023 diff hist +1 m Stepper 3 (ASML DUV) →Process Control Data Tag: Visual edit
- 16:40, 18 May 2023 diff hist -1 m Stepper 3 (ASML DUV) →Process Control Data
- 16:39, 18 May 2023 diff hist +254 m Stepper 3 (ASML DUV) →Process Control Data Tag: Visual edit
- 16:37, 18 May 2023 diff hist +209 m Stepper 3 (ASML DUV) →Process Control Data: images link to data now
- 16:35, 18 May 2023 diff hist +360 Stepper 3 (ASML DUV) →Process Control Data: added example images of Process Control Data Tag: Visual edit: Switched
- 16:30, 18 May 2023 diff hist +39 N File:ASML CD Cals - Example Plot.jpg current
- 16:28, 18 May 2023 diff hist +46 N File:ASML CD Cals - Example Table.jpg current
- 15:13, 18 May 2023 diff hist +32 Direct-Write Lithography Recipes →Positive Resist (MLA150) Tag: Visual edit
- 10:34, 15 May 2023 diff hist -408 PECVD Recipes →ICP-PECVD (Unaxis VLR): moved "old recipe" links, fixred gDrive sharing settings Tag: Visual edit
- 22:05, 10 May 2023 diff hist +44 N File:SEM1 JEOL IT800HSL.jpg photo of SEM #1, JEOL IT800HSL current
- 22:01, 10 May 2023 diff hist +178 Microscopes →Microscope #8: AmScope Wide Field of View Stereoscope (Bay 4): added photo Tag: Visual edit: Switched
- 21:58, 10 May 2023 diff hist +45 N File:Amscope Stereoscope Photo.jpg current
- 21:51, 10 May 2023 diff hist +32 N File:DektakXT.jpg image of Dektak XT current
- 21:51, 10 May 2023 diff hist +40 Step Profilometer (DektakXT) changed image, linked to mfg. current Tag: Visual edit: Switched
- 12:35, 10 May 2023 diff hist +5 SEM 1 (JEOL IT800SHL) →Imaging
- 12:34, 10 May 2023 diff hist +14 SEM 1 (JEOL IT800SHL) cahnged tool pic
- 12:34, 10 May 2023 diff hist +2,712 N SEM 1 (JEOL IT800SHL) iniital page copied from SEM2 Tag: Visual edit: Switched
- 12:25, 10 May 2023 diff hist +7 Tool List →Electron Microscopy: changed links to just "SEM 1/2" and included model number of SEM1, and link to new SEM1 page. Tag: Visual edit
- 23:33, 4 May 2023 diff hist +93 Oxford ICP Etcher (PlasmaPro 100 Cobra) →Documentation: mentioend travelers for etches current Tag: Visual edit
- 11:18, 28 April 2023 diff hist +205 Contact Aligner (SUSS MA-6) →About: explained BSA a bit more. Tag: Visual edit
- 11:16, 28 April 2023 diff hist +163 Contact Aligner (SUSS MA-6) mentioned motorized systems Tag: Visual edit
- 11:15, 28 April 2023 diff hist +101 Suss Aligners (SUSS MJB-3) mentioned that systems are manual, not motorizd. Tag: Visual edit
- 11:13, 28 April 2023 diff hist +30 Tool List →Contact Aligners (Optical Exposure): changed "suss aligners" --> "contact aligners" Tag: Visual edit
- 10:02, 28 April 2023 diff hist +254 Calculators + Utilities →General CAD files for Litho: added schematics Tag: Visual edit
- 10:00, 28 April 2023 diff hist +35 N File:Vented font screnshot.jpg current
- 09:57, 28 April 2023 diff hist +45 N File:Vernier Template v2 screenshot.jpg current
- 09:54, 28 April 2023 diff hist 0 File:Vernier Template.gds John d uploaded a new version of File:Vernier Template.gds
- 09:52, 28 April 2023 diff hist +35 File:Vernier Template.gds →Summary: update date Tag: Visual edit
- 09:51, 28 April 2023 diff hist 0 File:Vernier Template.gds John d uploaded a new version of File:Vernier Template.gds
- 14:52, 27 April 2023 diff hist +225 Stepper 3 (ASML DUV) →Design Tools: CAD files links Tag: Visual edit
- 14:49, 27 April 2023 diff hist +191 Stepper 2 (AutoStep 200) →CAD Files: link to general CAD files Tag: Visual edit
- 14:48, 27 April 2023 diff hist +190 Stepper 1 (GCA 6300) →CAD Files: link to general CAD tempaltes Tag: Visual edit
- 14:47, 27 April 2023 diff hist +101 Calculators + Utilities →CAD Files & Templates: Added heading for general files, description for verniers Tag: Visual edit
- 14:46, 27 April 2023 diff hist +223 MLA150 - CAD Files and Templates link to general CAD file templates current Tag: Visual edit
- 14:11, 26 April 2023 diff hist -13 m Frequently Asked Questions →Authorship on Publications Tag: Visual edit
- 12:44, 26 April 2023 diff hist +1,284 N Ellipsometer (Woollam) - Measuring thin dielectrics with Native Oxide pre-measurement added basic description & steps referring to for details, Measuring_thin_metals_with_oxide_pre-measurement current Tag: Visual edit
- 12:37, 26 April 2023 diff hist +205 Ellipsometer (Woollam) →Operating Procedures: link to thin dielectric meas, pre-meas NatOx Tag: Visual edit
- 10:52, 26 April 2023 diff hist +640 Logitech WBS7 - Procedure for Wax Mounting with bulk Crystalbond Stick updated to 150°C, quantity of wax for 4-inch wafers, and place both wafers in contact on hotplate, not on Logitech. current Tag: Visual edit
- 10:36, 26 April 2023 diff hist +413 Logitech WBS7 - Procedure for Wax Mounting with bulk Crystalbond Stick comment about wax on filter paper Tag: Visual edit
- 09:16, 26 April 2023 diff hist +349 ICP Etching Recipes →Through Silicon Via etch (DSEiii): wax mounting warnings + updates Tag: Visual edit
- 09:10, 26 April 2023 diff hist +272 ICP Etching Recipes →Through Silicon Via etch (DSEiii): publication policy on TSV process Tag: Visual edit
- 23:28, 25 April 2023 diff hist +355 Ion Beam Deposition (Veeco NEXUS) added schematic of ion beam Tag: Visual edit
- 23:27, 25 April 2023 diff hist 0 File:IBD Schematic.jpg John d uploaded a new version of File:IBD Schematic.jpg current
- 23:23, 25 April 2023 diff hist +33 N File:IBD Schematic.jpg
- 13:59, 23 April 2023 diff hist +242 ASML Stepper 3 Standard Operating Procedure →Running a focus and/or exposure matrix: new heading for schematics current Tag: Visual edit
- 14:52, 19 April 2023 diff hist +373 Template:News amscope entry
- 14:51, 19 April 2023 diff hist -10 Microscopes →Microscope #6: AmScope Wide Field of View Stereoscope (Bay 4): changed to Scope #8 Tag: Visual edit
- 14:50, 19 April 2023 diff hist +520 Microscopes Scope #6 initial entry - needs updating Tag: Visual edit
- 14:51, 17 April 2023 diff hist 0 File:Vented font DDJ.gds John d uploaded a new version of File:Vented font DDJ.gds current
- 14:50, 17 April 2023 diff hist +138 Calculators + Utilities →CAD Files & Templates: added instructions for vented font installation Tag: Visual edit
- 09:42, 16 April 2023 diff hist 0 Template:News moved new SEM 1 week earlier
- 09:41, 16 April 2023 diff hist +601 Template:News New SEM and New Scribe+Break
- 20:11, 14 April 2023 diff hist +811 N Automated Wafer Cleaver (Loomis LSD-155LT) initial page Tag: Visual edit: Switched
- 20:06, 14 April 2023 diff hist +55 Tool List →Die Singulation / Down-sizing: link to new Loomis Wafer Cleaver page Tag: Visual edit
- 15:37, 4 April 2023 diff hist +64 Aidan Hopkins →Tools: fixed DSE & wafer bench links
- 15:35, 4 April 2023 diff hist 0 Aidan Hopkins →Tools: fixed wafer bonder link
- 15:35, 4 April 2023 diff hist +6 Aidan Hopkins →Tools: fixed SEM#2 link
- 15:33, 4 April 2023 diff hist +74 E-Beam Lithography Recipes changed SEM#1 link and Nabity title in prep for new SEM current
- 00:52, 3 April 2023 diff hist +323 MLA150 - CAD Files and Templates →Resolution and Calibration Patterns: details on CAD files available on MLA150 computer Tag: Visual edit
- 00:45, 3 April 2023 diff hist +488 Calculators + Utilities →CAD Files & Templates: Added Verniers link & linked to MEMs-exchange, EPFL, and Tag: Visual edit
- 10:32, 2 April 2023 diff hist +1,343 Calculators + Utilities →Example CAD File: links to various lithography system CAD files, vented fonts etc. Tag: Visual edit
- 10:07, 2 April 2023 diff hist +85 N File:Vented font DDJ.gds Vented Font - a font good for liftoff (no enclosed holes), GDS CAD file
- 13:10, 21 March 2023 diff hist +385 Wafer scanning process traveler →Wafers to Use: mention regular prime grade Tag: Visual edit
- 13:07, 21 March 2023 diff hist +21 m Wafer scanning process traveler Tag: Visual edit
- 13:07, 21 March 2023 diff hist +1,043 Wafer scanning process traveler →Data Recording: updated surfscan photos, added examples of before/after and high particle photos. Tag: Visual edit
- 13:03, 21 March 2023 diff hist +57 N File:Surfscan P1 SiN 221208Z5G4 after.jpg current
- 12:59, 21 March 2023 diff hist +37 N File:Surfscan G4 before example - P1 230317E7G4 before.jpg current
- 12:56, 21 March 2023 diff hist 0 File:UCSBTEST1.png John d uploaded a new version of File:UCSBTEST1.png current
- 12:55, 21 March 2023 diff hist 0 File:UCSBTEST2 .png John d uploaded a new version of File:UCSBTEST2 .png current
- 16:24, 20 March 2023 diff hist +122 Calculators + Utilities →KLayout: like to U. waterloo KLayout vids Tag: Visual edit
- 16:05, 20 March 2023 diff hist +1,728 N Oxford Etcher - Sample Size Effect on Etch Rate pasted from old Process Control Dataa: Oxford_ICP_Etcher_-_Process_Control_Data current Tag: Visual edit: Switched
- 16:05, 20 March 2023 diff hist +179 ICP Etching Recipes →Process Control Data (Oxford ICP Etcher): link to Sample Size effect on ER Tag: Visual edit
- 16:02, 20 March 2023 diff hist +41 m Template:News link to all data
- 11:04, 20 March 2023 diff hist +3 Template:Announcements corected SEM #2 --> SEM#1
- 22:01, 18 March 2023 diff hist +27 N User:Mehalana v redirects to Vraj's correct staff page current Tags: New redirect Visual edit: Switched
- 10:27, 16 March 2023 diff hist -8 Stepper 3 (ASML DUV) →Operating Procedures: moved training procedure above Tag: Visual edit
- 12:22, 15 March 2023 diff hist +19 GCA 6300 Mask Making Guidance link to Autostep 200 mask page
- 12:21, 15 March 2023 diff hist +97 GCA 6300 Mask Making Guidance
- 12:16, 15 March 2023 diff hist 0 m Stepper 2 (AutoStep 200) →Process Information Tag: Visual edit
- 12:16, 15 March 2023 diff hist +25 m Stepper 2 (AutoStep 200) →Process Information Tag: Visual edit
- 12:15, 15 March 2023 diff hist +180 Stepper 2 (AutoStep 200) copied Mask making link to SOP section as well, minor formatting elsewhere. Tag: Visual edit
- 10:31, 15 March 2023 diff hist +2,035 Autostep 200 Mask Making Guidance addded Submission Details section Tag: Visual edit
- 16:23, 13 March 2023 diff hist 0 File:Single centered mask-Piece 2nd litho AUTOSTEP 200.pptx John d uploaded a new version of File:Single centered mask-Piece 2nd litho AUTOSTEP 200.pptx current
- 14:09, 10 March 2023 diff hist +643 Stepper Recipes →Stepper 3 (ASML DUV): added Process Control Data section
- 14:07, 10 March 2023 diff hist +45 m Process Group - Process Control Data Litho to Top of page, link to ASML recipes page
- 14:04, 10 March 2023 diff hist +738 Process Group - Process Control Data New Litho section + Stepper3 ASML section with links to process control data Tag: Visual edit: Switched
- 14:01, 10 March 2023 diff hist +1,321 Stepper 3 (ASML DUV) link to Process Control Data Tag: Visual edit
- 15:36, 5 March 2023 diff hist +114 XeF2 Etch (Xetch) Link to recipes oage Tag: Visual edit
- 00:17, 26 February 2023 diff hist +14 Template:Announcements →Flip-Chip Bonder repair
- 20:12, 25 February 2023 diff hist -16 Template:Announcements FCB update
- 10:17, 25 February 2023 diff hist +8 m Step Profilometer (DektakXT) added date of replacement Tag: Visual edit
- 16:00, 23 February 2023 diff hist +797 PECVD Recipes →ICP-PECVD (Unaxis VLR): cleaned up process control section, and added 800nm max SiO2 thickness before cleaning Tag: Visual edit
- 15:01, 21 February 2023 diff hist -51 Probe Station: I-V Curves with Keithley 2400 and Python Script anaconda inzstruction current Tag: Visual edit
- 09:53, 20 February 2023 diff hist +56 ICP Etching Recipes →Process Control Data (Oxford ICP Etcher): linked to new google sheets data Tag: Visual edit
- 21:45, 16 February 2023 diff hist +37 Photolithography - Manual Edge-Bead Removal Techniques →Lithographic Edge Bead Removal: link to DUV FLood exposure Tag: Visual edit
- 21:43, 16 February 2023 diff hist +2 m Lithography Recipes fixed link current Tag: Visual edit
- 21:42, 16 February 2023 diff hist +2 m Lithography Recipes remove TOC again
- 21:42, 16 February 2023 diff hist +36 Lithography Recipes →General Photolithography Techniques: made each section a linkable header level Tag: Visual edit
- 21:40, 16 February 2023 diff hist -2 m Lithography Recipes add TOC to get header link
- 12:36, 14 February 2023 diff hist +995 Frequently Asked Questions →General NanoFab Questions: added "what supplies do i need to bring?" Tag: Visual edit
- 12:21, 14 February 2023 diff hist -1 m Template:Announcements
- 18:31, 13 February 2023 diff hist -86 Template:Announcements FCB update
- 10:35, 13 February 2023 diff hist +323 Template:Announcements Unaxis Etch Down
- 10:34, 13 February 2023 diff hist +121 Template:Announcements FCB update
- 13:23, 10 February 2023 diff hist +168 Probe Station & Curve Tracer →Operation Procedures & Manuals: linked to probe station usage rules current Tag: Visual edit
- 09:28, 10 February 2023 diff hist -9 m Tool List →Electrical Analysis: fix QFI link Tag: Visual edit
- 00:25, 8 February 2023 diff hist +247 Maskless Aligner (Heidelberg MLA150) →Documentation: link to FEM tips Tag: Visual edit
- 16:32, 7 February 2023 diff hist +250 MLA150 - Design Guidelines →Greyscale Lithography: addded more info Tag: Visual edit
- 16:28, 7 February 2023 diff hist +833 ASML Stepper 3 Standard Operating Procedure →Running a focus and/or exposure matrix: added "general process" for FEMs Tag: Visual edit
- 11:08, 7 February 2023 diff hist +6 Template:Announcements updated Dektak XT, link for training available
- 11:06, 7 February 2023 diff hist -54 Step Profilometer (DektakXT) updated that tool is availabel for training. Tag: Visual edit
- 11:37, 6 February 2023 diff hist +202 Template:Announcements added back the "ENDFEED" lines and updated comment to indicate not to delete this.
- 11:24, 1 February 2023 diff hist -28 m Foong Fatt current
- 11:24, 1 February 2023 diff hist -8 m Foong Fatt
- 11:19, 1 February 2023 diff hist +296 N Foong Fatt initial page copied from Demis D John Tag: Visual edit: Switched
- 11:17, 1 February 2023 diff hist -7 Staff List Afdded Foong Tag: Visual edit
- 14:56, 30 January 2023 diff hist +200 ICP Etching Recipes →PlasmaTherm/SLR Fluorine Etcher: added recipe tips, RF 1/RF 2/ignition tips. Tag: Visual edit
- 07:49, 30 January 2023 diff hist -4 Nanofab Job Postings deleted Process Engineer, added Undergrad process technician Tag: Visual edit
- 20:04, 29 January 2023 diff hist +314 Template:Announcements jeol sem down
- 16:05, 27 January 2023 diff hist +247 Template:Announcements FCB update
- 16:03, 27 January 2023 diff hist -21 Template:Announcements Oxford etcher update
- 14:48, 27 January 2023 diff hist +315 Template:Announcements SB6 down
- 14:46, 27 January 2023 diff hist +429 Template:Announcements MLA downtime Mon 2023-01-30 5:30pm
- 01:54, 27 January 2023 diff hist -549 Template:Announcements deleted GCA maintenance
- 01:52, 27 January 2023 diff hist -36 Template:Announcements blue-m oven UP
- 11:04, 26 January 2023 diff hist +21 m Template:Announcements blue m update
- 10:50, 26 January 2023 diff hist +206 Template:Announcements updated oxford
- 11:42, 25 January 2023 diff hist +3 Template:News →Wafer Polisher available: updated to Millerski
- 11:41, 25 January 2023 diff hist +243 Template:News dektak xt announcement
- 11:39, 25 January 2023 diff hist +249 Template:Announcements dektak xt notice
- 14:12, 24 January 2023 diff hist +18 Suss Aligners (SUSS MJB-3) →Optical Spectrum with No Filter: added "exposure" to clairfy which optical spectrum Tag: Visual edit
- 14:09, 24 January 2023 diff hist +38 m Suss Aligners (SUSS MJB-3) →IR Aligner Tag: Visual edit
- 14:51, 23 January 2023 diff hist +87 Wafer scanning process traveler Tag: Visual edit
- 14:46, 23 January 2023 diff hist +111 Step Profilometer (DektakXT) note about 6M --> XT upgrade Tag: Visual edit
- 11:29, 23 January 2023 diff hist +157 Wafer scanning process traveler →Selecting a Haze range: added example Tag: Visual edit
- 11:27, 23 January 2023 diff hist -5,719 Wafer scanning process traveler deleted claibration and SPC sections (not installed) Tag: Visual edit
- 11:26, 23 January 2023 diff hist +14 m Wafer scanning process traveler Tag: Visual edit
- 11:24, 23 January 2023 diff hist +335 Wafer scanning process traveler →Scanning procedure for 4" Si wafers ( right indexer): added "run process step" section Tag: Visual edit
- 09:12, 23 January 2023 diff hist +339 Suss Aligners (SUSS MJB-3) added info on IR Aligner Tag: Visual edit
- 13:00, 20 January 2023 diff hist +101 ICP Etching Recipes →Process Control Data (Panasonic 2): header for Sio2 etch data Tag: Visual edit
- 12:59, 20 January 2023 diff hist +149 ICP Etching Recipes →Oxford ICP Etcher (PlasmaPro 100 Cobra): added placeholder for cleaning recipes Tag: Visual edit
- 12:56, 20 January 2023 diff hist +157 Process Group - Process Control Data increased all heading levels to get HR's between Dep/Etch sections Tag: Visual edit: Switched
- 12:50, 20 January 2023 diff hist +969 Process Group - Process Control Data →Oxford PlasmaPro Cobra Etcher: link to new Google sheets data (ND's) Tag: Visual edit: Switched