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- 15:55, 8 June 2022 diff hist +412 Vacuum Deposition Recipes link to process control data Tag: Visual edit
- 15:53, 8 June 2022 diff hist +33 Process Group - Process Control Data updated heading titles to include "Process COntrol Data" for linking purposes. Tag: Visual edit
- 10:29, 6 June 2022 diff hist +5 m Deep UV Optical Microscope (Olympus) →Other Info Tag: Visual edit
- 10:28, 6 June 2022 diff hist +118 Filmetrics F40-UV Microscope-Mounted link to all scopes Tag: Visual edit
- 10:27, 6 June 2022 diff hist +118 Digital Microscope (Olympus DSX1000) link to all scopes Tag: Visual edit
- 10:27, 6 June 2022 diff hist +207 Deep UV Optical Microscope (Olympus) note that DUV camera is non-funcitonal Tag: Visual edit
- 10:26, 6 June 2022 diff hist +101 Laser Scanning Confocal M-scope (Olympus LEXT) link to all scopes Tag: Visual edit
- 07:52, 6 June 2022 diff hist +184 Template:Announcements ASML down - TCU
- 23:10, 4 June 2022 diff hist -141 Template:Announcements deleted lab open, updated Unaxis SiD4 delivery.
- 12:13, 1 June 2022 diff hist +203 Template:Announcements plating bench down 6/7th
- 11:03, 1 June 2022 diff hist +34 m Template:Announcements
- 10:13, 1 June 2022 diff hist -272 Template:Announcements CR open
- 08:58, 1 June 2022 diff hist +48 Template:Announcements HVAC closure update
- 08:11, 27 May 2022 diff hist +50 m Lift-Off with I-Line Imaging Resist + LOL2000 Underlayer added author credits Tag: Visual edit
- 21:24, 26 May 2022 diff hist +258 MLA Recipes →Positive Resist (MLA150) current Tag: Visual edit
- 21:22, 26 May 2022 diff hist +25 MLA Recipes →Positive Resist (MLA150) Tag: Visual edit
- 15:54, 26 May 2022 diff hist +210 COVID-19 User Policies masks mandatory May 27th Tag: Visual edit: Switched
- 15:50, 26 May 2022 diff hist -1,097 Template:Announcements deleted: Old COVID policy (March), AFM UP, F50 Up
- 15:48, 26 May 2022 diff hist +419 Template:Announcements masks mandatory May 27th
- 11:57, 26 May 2022 diff hist +84 Lab Rules →Wet Benches: Added heading for "Glassware Confiscation Policy" (2.9.2.1) Tag: Visual edit
- 09:28, 25 May 2022 diff hist -1 m Template:Announcements
- 09:28, 25 May 2022 diff hist +159 Template:Announcements Unaxis Dep down SiD4
- 12:14, 24 May 2022 diff hist +333 Template:Announcements CR closure June 1, 6-9am
- 15:43, 20 May 2022 diff hist +6 m Test Data of etching SiO2 with CHF3/CF4 set header row Tag: Visual edit
- 10:46, 20 May 2022 diff hist +13 m ICP-PECVD (Unaxis VLR) →Detailed Specifications Tag: Visual edit
- 21:12, 19 May 2022 diff hist -193 Template:Announcements AFM up, deleted F10, LEXT
- 20:58, 19 May 2022 diff hist 0 m Oxford ICP Etcher - Process Control Data Tag: Visual edit
- 20:56, 19 May 2022 diff hist +43 Oxford ICP Etcher - Process Control Data updated SEM links to state "45°" or "XS" Tag: Visual edit
- 20:43, 19 May 2022 diff hist 0 m Oxford ICP Etcher - Process Control Data Tag: Visual edit
- 20:42, 19 May 2022 diff hist +125 Oxford ICP Etcher - Process Control Data uploaded SEMs Tag: Visual edit
- 20:42, 19 May 2022 diff hist 0 N File:Oxford InP 60C XS05.jpg current
- 20:41, 19 May 2022 diff hist 0 N File:Oxford InP 60C 45DEG05.jpg current
- 20:39, 19 May 2022 diff hist 0 N File:Oxford InP 60C 45DEG02.jpg current
- 09:27, 19 May 2022 diff hist +153 Oxford ICP Etcher - Process Control Data added etch cal, SEMs TBA Tag: Visual edit
- 09:15, 19 May 2022 diff hist +156 Oxford ICP Etcher - Process Control Data added "sample prep" section - still needs solution detials added Tag: Visual edit
- 08:43, 19 May 2022 diff hist +296 Oxford ICP Etcher - Process Control Data Added dummy InP and seasoning steps Tag: Visual edit
- 17:16, 18 May 2022 diff hist -111 Probe Station & Curve Tracer deleted old DMM - removed form setup (didn't work) Tag: Visual edit
- 07:30, 13 May 2022 diff hist +100 Optical Film Thickness (Nanometric) note to use FIlmtrics F40, and locaiton=Removed From Lab current Tag: Visual edit
- 07:28, 13 May 2022 diff hist -41 Tool List →Thickness + Optical Constants: Deleted Nanometrics (removed from lab) Tag: Visual edit
- 07:27, 13 May 2022 diff hist +148 Optical Film Thickness (Filmetrics) tool decomissioned notice,locaiton="removed from lab" current Tag: Visual edit
- 07:26, 13 May 2022 diff hist -81 Tool List →Thin-Film/Material Analysis: deleted FIlmetrics F20 Tag: Visual edit
- 11:39, 11 May 2022 diff hist +101 Services link to hourly rates Tag: Visual edit
- 11:33, 11 May 2022 diff hist -34 m Template:Announcements →AFM: DOWN: fix link
- 11:33, 11 May 2022 diff hist +86 m Template:Announcements →AFM: DOWN: link to tool
- 11:32, 11 May 2022 diff hist +124 Template:Announcements AFM down
- 17:32, 10 May 2022 diff hist +912 Process Group - Process Control Data →Etching: links to all etching process control pages Tag: Visual edit
- 17:27, 10 May 2022 diff hist -27 m ICP Etching Recipes Renaming Process Control Data Tag: Visual edit
- 17:25, 10 May 2022 diff hist -148 m ICP Etching Recipes renamed "historical data" to "process control" data Tag: Visual edit
- 17:18, 10 May 2022 diff hist -6 m Sputtering Recipes →Ion Beam Deposition (Veeco NEXUS) Tag: Visual edit
- 17:18, 10 May 2022 diff hist -2 Sputtering Recipes →Ion Beam Deposition (Veeco NEXUS): changed style to Page Title Tag: Visual edit
- 17:17, 10 May 2022 diff hist +3,304 N Process Group - Process Control Data Links to all PECVD and IBD data pages Tag: Visual edit
- 17:16, 10 May 2022 diff hist +71 m Sputtering Recipes minor updates Tag: Visual edit
- 17:15, 10 May 2022 diff hist +12 Ion Beam Deposition (Veeco NEXUS) →Detailed Specifications: mentioned ITO not installed, minor formatting Tag: Visual edit
- 17:06, 10 May 2022 diff hist +30 Sputtering Recipes →Ion Beam Deposition (Veeco NEXUS): rename process control plots for clarity Tag: Visual edit
- 17:01, 10 May 2022 diff hist -23 PECVD Recipes renamed Process Control plots for clarity Tag: Visual edit
- 16:35, 10 May 2022 diff hist +135 Nanofab Staff Internal Pages →Process Group: link to Process Control Data Tag: Visual edit
- 07:24, 10 May 2022 diff hist -108 Template:Announcements F50 up
- 12:17, 5 May 2022 diff hist +24 Test Data of etching SiO2 with CHF3/CF4 updated temperature reduction comment Tag: Visual edit
- 14:32, 4 May 2022 diff hist +3 PECVD Recipes →Si3N4 [ICP-PECVD]: corrected "current process data" links, previously pointed to "HDSiO" tab Tag: Visual edit
- 08:44, 4 May 2022 diff hist +354 Template:Announcements F50 down
- 08:41, 4 May 2022 diff hist -96 Template:Announcements →F10-RT Down: fixed links
- 08:40, 4 May 2022 diff hist +724 Template:Announcements F10-RT down
- 08:17, 4 May 2022 diff hist +2 Oxford ICP Etcher - Process Control Data modified comment on "brown gunk" observation. Tag: Visual edit
- 08:16, 4 May 2022 diff hist 0 m Oxford ICP Etcher - Process Control Data →Dependence on Sample Size: set table row to header style Tag: Visual edit
- 08:13, 4 May 2022 diff hist -113 Oxford ICP Etcher - Process Control Data Add row explaining change in mask pattern Tag: Visual edit
- 16:21, 3 May 2022 diff hist -419 Template:Announcements deleted lasb closure
- 16:13, 2 May 2022 diff hist +291 S-Cubed Flexi - Operating Procedure link to DSK bake vs dev rate, recipe minor updates Tag: Visual edit
- 16:05, 2 May 2022 diff hist +2,188 S-Cubed Flexi - Operating Procedure inital procedure, and initial recipes Tag: Visual edit
- 11:14, 29 April 2022 diff hist +161 Oxford ICP Etcher - Process Control Data bolded the title row Tag: Visual edit
- 14:27, 28 April 2022 diff hist +45 Unaxis VLR Etch - Process Control Data comments on undercut profile from 3/29/22 Tag: Visual edit
- 17:48, 27 April 2022 diff hist +355 Lift-Off with I-Line Imaging Resist + LOL2000 Underlayer mentioned switching Imaging PR Tag: Visual edit
- 17:45, 27 April 2022 diff hist +23 m Lithography Recipes →Lift-Off Recipes Tag: Visual edit
- 17:39, 27 April 2022 diff hist +10 m Lithography Recipes →Lift-Off Recipes Tag: Visual edit
- 17:35, 27 April 2022 diff hist +4,054 Lift-Off with I-Line Imaging Resist + LOL2000 Underlayer wrote initial process Tag: Visual edit
- 16:34, 27 April 2022 diff hist +891 N Lift-Off with I-Line Imaging Resist + LOL2000 Underlayer added Tips, copied from DUV Liftoff page Tag: Visual edit
- 16:32, 27 April 2022 diff hist +142 Lift-Off with DUV Imaging + PMGI Underlayer corrected typo current Tag: Visual edit
- 16:29, 27 April 2022 diff hist -23 Lift-Off with DUV Imaging + PMGI Underlayer →Tips: fixed link to liftoff tutorial Tag: Visual edit
- 16:25, 27 April 2022 diff hist +633 Lithography Recipes →Lift-Off Recipes: link to I-Line Liftoff w/ LOL underlayer Tag: Visual edit
- 18:49, 26 April 2022 diff hist +72 Template:Announcements updated lab closure msg
- 15:51, 26 April 2022 diff hist +200 Unaxis VLR Etch - Process Control Data →Data - InP Ridge Etch (Unaxis VLR): updated chamber conditioning Tag: Visual edit
- 12:03, 25 April 2022 diff hist +339 Microscopes added AmScope camera model #, minor changes to liknj to Amscope section Tag: Visual edit
- 19:02, 20 April 2022 diff hist +49 Tool List →Dry Etch: added Raith Velion to Dry Etch > Ion Milling section Tag: Visual edit
- 23:31, 19 April 2022 diff hist +200 Dry Etching Recipes added Nb, Os rows, "A" for Pan1/2 Tag: Visual edit
- 23:14, 19 April 2022 diff hist +174 Thermal Processing Recipes →Bonding with Intermediate layer: link to Logitech recipes page Tag: Visual edit
- 11:54, 19 April 2022 diff hist -36 m Template:Announcements →LEXT Confocal: DOWN: fix link
- 11:53, 19 April 2022 diff hist +154 Template:Announcements →LEXT Confocal: DOWN: linked to DX-1000
- 11:51, 19 April 2022 diff hist +117 Template:Announcements updated floor cleaning closure
- 13:09, 15 April 2022 diff hist -799 Unaxis VLR Etch - Process Control Data added WorkInProgress, example table rows Tag: Visual edit
- 13:08, 15 April 2022 diff hist +1,403 N Unaxis VLR Etch - Process Control Data pasted table from Oxford ICP Tag: Visual edit: Switched
- 13:06, 15 April 2022 diff hist +9 ICP Etching Recipes →ICP-Etch (Unaxis VLR): link to Process Control Data Tag: Visual edit
- 13:02, 15 April 2022 diff hist +233 ICP Etching Recipes added Process Control Data sections for each tool Tag: Visual edit
- 11:56, 15 April 2022 diff hist +72 Process Group - Remote Fabrication Jobs fixed links to Equipment work Tag: Visual edit
- 20:51, 13 April 2022 diff hist -228 Template:Announcements Deleted DUVscope
- 20:49, 13 April 2022 diff hist +229 Template:Announcements Friday lab closure
- 17:45, 12 April 2022 diff hist +225 Dry Etching Recipes Oxford links to GaN+GaAs recipes Tag: Visual edit
- 17:43, 12 April 2022 diff hist +5 Dry Etching Recipes Oxford GaN link Tag: Visual edit
- 17:43, 12 April 2022 diff hist +1 m ICP Etching Recipes →Oxford ICP Etcher (PlasmaPro 100 Cobra) Tag: Visual edit
- 17:40, 12 April 2022 diff hist +275 ICP Etching Recipes →Oxford ICP Etcher (PlasmaPro 100 Cobra): link to GaN etch recipes Tag: Visual edit
- 13:12, 12 April 2022 diff hist -632 Template:Announcements deleted MJB, EBL service
- 12:50, 12 April 2022 diff hist +3 Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher
- 12:49, 12 April 2022 diff hist +1 Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher moved cals table to the top
- 21:08, 7 April 2022 diff hist +1,997 N ASML Stepper 3 - Job Creator initial description of usage and caveats current Tag: Visual edit
- 12:12, 7 April 2022 diff hist +105 Frequently Asked Questions →Authorship on Publications: added local technicians are put as authors Tag: Visual edit
- 10:17, 5 April 2022 diff hist +368 Template:Announcements added JEOL EBL service
- 10:48, 4 April 2022 diff hist +264 Template:Announcements added Lee's MJB service
- 12:55, 31 March 2022 diff hist +10 IBD: Calibrating Optical Thickness added approx year developed Tag: Visual edit
- 12:54, 31 March 2022 diff hist +241 IBD: Calibrating Optical Thickness minor updates Tag: Visual edit
- 12:51, 31 March 2022 diff hist 0 File:IBD SiO-FP - long 1100nm - Reflectivity Spectrum (EMpy).png John d uploaded a new version of File:IBD SiO-FP - long 1100nm - Reflectivity Spectrum (EMpy).png current
- 12:50, 31 March 2022 diff hist -42 Ion Beam Deposition (Veeco NEXUS) →Recipes: DBR Calibration-Method page created, removed the "avaialbel from process group" text Tag: Visual edit
- 12:49, 31 March 2022 diff hist +4,212 N IBD: Calibrating Optical Thickness initial version, full method described, images inserted. Tag: Visual edit
- 12:43, 31 March 2022 diff hist +97 N File:IBD 9-period DBR - Reflectivity Spectrum (EMpy).png current
- 12:36, 31 March 2022 diff hist +105 N File:IBD SiO-FP - long 1100nm - Reflectivity Spectrum (EMpy).png
- 13:30, 29 March 2022 diff hist +13 m ICP-PECVD (Unaxis VLR) →Recipes: format link to bold/underline Tag: Visual edit
- 05:20, 26 March 2022 diff hist +173 Microscopes note about turning turrets by hand Tag: Visual edit
- 05:19, 26 March 2022 diff hist +165 UCSB NanoFab Microscope Training added not about turning obj turrets by hand Tag: Visual edit
- 16:57, 23 March 2022 diff hist +74 ASML 5500 Mask Making Guidelines →Submission Details: move Barcode to "vendor instructions" Tag: Visual edit
- 14:09, 23 March 2022 diff hist +341 Template:Announcements GCA service added
- 14:08, 23 March 2022 diff hist +228 Template:Announcements DUV Scope update
- 10:40, 23 March 2022 diff hist +4 m Calculators + Utilities →Example CAD File Tag: Visual edit
- 10:29, 23 March 2022 diff hist +36 Stepper 3 (ASML DUV) →Design & Fabrication Tools: Changed title to "Design Tools". JobCreator: mention remotely-uploadable, Tag: Visual edit
- 12:31, 22 March 2022 diff hist +164 m Maskless Aligner (Heidelberg MLA150) →Video Trainings: minor formatting Tag: Visual edit
- 12:29, 22 March 2022 diff hist +6 Dry Etching Recipes fixed link to FL-ICP recipes Tag: Visual edit
- 11:02, 22 March 2022 diff hist +30 m Optical Film Thickness (Nanometric) formatting "unavaialble" note Tag: Visual edit
- 10:59, 22 March 2022 diff hist +108 Optical Film Thickness (Nanometric) Note stating tool removed from lab. Tag: Visual edit
- 16:10, 21 March 2022 diff hist +66 COVID-19 User Policies masks optional, added "in progress" to full policies. Tag: Visual edit
- 16:08, 21 March 2022 diff hist -438 Template:Announcements New COVID letter from chancellor. deleted ASML maint. LEXT down.
- 17:06, 3 March 2022 diff hist +9 Chemical-Mechanical Polisher (Logitech) link to Logitech Bonder Tag: Visual edit
- 17:04, 3 March 2022 diff hist +126 Wafer Bonder (Logitech WBS7) →About: links to applicable tools Tag: Visual edit
- 12:45, 3 March 2022 diff hist 0 PECVD Recipes →Low-Stress SiN deposition (PECVD #2): bullet formatting Tag: Visual edit: Switched
- 12:31, 3 March 2022 diff hist +178 PECVD Recipes →PECVD 2 (Advanced Vacuum): link to LS-SiN plots Tag: Visual edit
- 12:28, 3 March 2022 diff hist 0 m OLD - PECVD2 Recipes John d moved page PECVD2 Recipes to OLD - PECVD2 Recipes without leaving a redirect: this page is not linked anywhere, looks like 2014 data only current
- 15:06, 1 March 2022 diff hist +2 Tool List →Packaging: fixed FLip-scribe link Tag: Visual edit
- 15:06, 1 March 2022 diff hist 0 m Wafer Cleaver (PELCO Flip-Scribe) John d moved page Wafer Cleaver (PELCO LatticeAx) to Wafer Cleaver (PELCO Flip-Scribe) without leaving a redirect: wrong name
- 14:59, 1 March 2022 diff hist +646 KLayout Design Tips Added Editing Mode Tag: Visual edit
- 09:46, 1 March 2022 diff hist +303 Wafer Cleaver (PELCO Flip-Scribe) LatticeAx --> Flip-Scribe Tag: Visual edit
- 09:43, 1 March 2022 diff hist +115 Wafer Cleaver (PELCO Flip-Scribe) links to Mfg
- 09:35, 1 March 2022 diff hist +43 N File:LatticeAx.jpg Image of PELCO LAtticeAx tool current
- 09:27, 1 March 2022 diff hist +864 N Wafer Cleaver (PELCO Flip-Scribe) new tool page
- 09:20, 1 March 2022 diff hist +243 Tool List →Packaging: added sub-categories, Linked to new LatticeAx tool Tag: Visual edit
- 08:56, 1 March 2022 diff hist +130 m Contact Aligner (SUSS MA-6) →About: minor rearrangement Tag: Visual edit
- 08:52, 1 March 2022 diff hist +62 m Contact Aligner (SUSS MA-6) linked to SB6 Bonder page Tag: Visual edit
- 00:07, 1 March 2022 diff hist +546 ASML 5500 Mask Making Guidelines →Submission Details: updates and calrifications Tag: Visual edit
- 16:08, 28 February 2022 diff hist +462 Step Profilometer (KLA Tencor P-7) →Detailed Specifications: added basic info Tag: Visual edit
- 08:59, 26 February 2022 diff hist +27 m ICP Etching Recipes →Old Deleted Recipes: changed "don" to "supervisor" Tag: Visual edit
- 10:39, 22 February 2022 diff hist -23 ASML 5500 Mask Making Guidelines →Templates: corrected link to reticle programming spreadsheet Tag: Visual edit
- 09:44, 21 February 2022 diff hist +108 Process Group - Remote Fabrication Jobs link to takss/priority list Tag: Visual edit
- 13:44, 17 February 2022 diff hist +327 ICP-PECVD (Unaxis VLR) →About: mention SiD4 config and expense/applicaiton Tag: Visual edit
- 13:43, 17 February 2022 diff hist +116 PECVD Recipes →ICP-PECVD (Unaxis VLR): mention cost/application to optics Tag: Visual edit
- 18:03, 16 February 2022 diff hist +340 Maskless Aligner (Heidelberg MLA150) added minimum fearture size and note on DSP transparent substrates Tag: Visual edit
- 11:48, 14 February 2022 diff hist +72 N File:ASML Reticle Programming Params - MyReticleBarCode v1.xlsx John d moved page File:ASML Reticle Programming Params - MyReticleBarCode v1.xlsx to File:ASML Reticle Programming Params - MASKJAN2020 v1.xlsx: Rename to include reticle barcode in filename current Tag: New redirect
- 11:48, 14 February 2022 diff hist 0 m File:ASML Reticle Programming Params - MASKJAN2020 v1.xlsx John d moved page File:ASML Reticle Programming Params - MyReticleBarCode v1.xlsx to File:ASML Reticle Programming Params - MASKJAN2020 v1.xlsx: Rename to include reticle barcode in filename current
- 11:47, 14 February 2022 diff hist 0 File:ASML Reticle Programming Params - MASKJAN2020 v1.xlsx John d uploaded a new version of File:ASML Reticle Programming Params - MyReticleBarCode v1.xlsx
- 13:49, 11 February 2022 diff hist +53 m ICP Etch 2 (Panasonic E626I) →Recipes Tag: Visual edit
- 13:48, 11 February 2022 diff hist +97 ICP Etch 1 (Panasonic E646V) separate process control section/link Tag: Visual edit
- 13:47, 11 February 2022 diff hist +59 ICP Etch 2 (Panasonic E626I) →Recipes: separate Process Control section/link Tag: Visual edit
- 13:24, 11 February 2022 diff hist +31 Test Data of etching SiO2 with CHF3/CF4 minor update to diamond experiemnt comment. Tag: Visual edit
- 13:23, 11 February 2022 diff hist -36 ICP Etching Recipes →ICP Etch 2 (Panasonic E640): updated ICP1 and ICP2 with Process Control sections for SiO2 etch tests. Tag: Visual edit
- 13:22, 11 February 2022 diff hist +252 N MediaWiki:Deletereason-dropdown added common NanoFab reasons for deletion current
- 13:19, 11 February 2022 diff hist +504 Test Data of etching SiO2 with CHF3/CF4-ICP1 new section :pasted data from CHF3/CF4/O2 etch data
- 13:13, 11 February 2022 diff hist +22 ICP Etching Recipes →SiO2 Etch Historical Data: reanmed to include tool name Tag: Visual edit
- 13:12, 11 February 2022 diff hist -37 ICP Etching Recipes →SiO2 Etching (Fluorine ICP Etcher): consolidated FL-ICP Prcoess Control data Tag: Visual edit
- 13:11, 11 February 2022 diff hist +493 Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher pasted Ning's 2nd data table, hilighted recipe changes and comment about data being "in progress"
- 12:28, 11 February 2022 diff hist +1 ICP Etching Recipes →PlasmaTherm/SLR Fluorine Etcher: moved historical data to top Tag: Visual edit
- 12:46, 4 February 2022 diff hist +260 Template:Announcements ASML maintenance
- 15:24, 1 February 2022 diff hist +3 m Autostep 200 Mask Making Guidance →Mask Layout Tag: Visual edit
- 15:23, 1 February 2022 diff hist +119 m Autostep 200 Mask Making Guidance →Photomask Ordering Info Tag: Visual edit
- 10:00, 1 February 2022 diff hist +327 Autostep 200 Mask Making Guidance →Photomask Ordering Info: added info Tag: Visual edit
- 09:39, 1 February 2022 diff hist +428 Autostep 200 Mask Making Guidance →Alignment Marks: adde Vernier CAD file Tag: Visual edit
- 09:37, 1 February 2022 diff hist +110 N File:Vernier Template.gds Vernier Registration/Alignment Test structure for lithography. Designed by Demis D. John, 2008.
- 09:03, 1 February 2022 diff hist -14 m Stepper 2 (AutoStep 200) →Process Information Tag: Visual edit
- 17:30, 31 January 2022 diff hist +185 Autostep 200 Mask Making Guidance →Mask Layout: 2nd attempt to describe Shutter positioning Tag: Visual edit
- 17:19, 31 January 2022 diff hist +352 Autostep 200 Mask Making Guidance →Mask Layout: 1st attempt at describing shutter blades Tag: Visual edit
- 17:00, 31 January 2022 diff hist +172 Autostep 200 Mask Making Guidance →Mask Layout / Alignment Marks: split into Mask layout separate section Tag: Visual edit
- 16:55, 31 January 2022 diff hist +30 Autostep 200 Troubleshooting and Recovery →What to do if you cannot undo the problem or need some help: link to each contact, update to use "Report tool issue' button on SUM current Tag: Visual edit
- 17:09, 28 January 2022 diff hist +358 m Oxford ICP Etcher - Process Control Data →Data - InP Ridge Etch (Oxford ICP Etcher) Tag: Visual edit
- 17:06, 28 January 2022 diff hist +805 Oxford ICP Etcher - Process Control Data updated tables, split into "sample size dpeendence" table Tag: Visual edit
- 21:43, 27 January 2022 diff hist +356 MLA150 - Troubleshooting →Solutions for small substrates: added THomas Messner's solution: disable Overview Camera before starting exposure Tag: Visual edit
- 11:42, 24 January 2022 diff hist -26 Packaging Recipes →Blade Exposure Calculation: image size increase Tag: Visual edit: Switched
- 11:13, 24 January 2022 diff hist +40 m Packaging Recipes →Anatomy of a Blade Tag: Visual edit
- 10:55, 21 January 2022 diff hist +346 Atomic Layer Deposition Recipes →Temperature: mentioned "thermal" and slower rate. Tag: Visual edit
- 10:53, 21 January 2022 diff hist +661 Atomic Layer Deposition Recipes →Al2O3 deposition (ALD CHAMBER 3): added terms "Plasma/Thermal/Ozone". Also added Chamber 1 Al2O3 Tag: Visual edit
- 23:12, 13 January 2022 diff hist +133 ICP Etching Recipes →Oxford ICP Etcher (PlasmaPro 100 Cobra): GaN ALE section started Tag: Visual edit
- 23:11, 13 January 2022 diff hist +238 ICP Etching Recipes →Oxford ICP Etcher (PlasmaPro 100 Cobra): NOTE: Rates in these 2021-09 characterizations are lower than current due to a software timing bug, fixed in 2022-01 Tag: Visual edit
- 23:09, 13 January 2022 diff hist +174 Oxford ICP Etcher - Process Control Data described basic 'fab process Tag: Visual edit
- 23:07, 13 January 2022 diff hist +55 ICP Etching Recipes →Process Control Data (Oxford ICP Etcher) Tag: Visual edit
- 23:05, 13 January 2022 diff hist -17 m Oxford ICP Etcher - Process Control Data removed WIP Tag: Visual edit
- 23:03, 13 January 2022 diff hist +56 Oxford ICP Etcher - Process Control Data added SEM images for Jan 11th-12th cals Tag: Visual edit
- 23:03, 13 January 2022 diff hist +36 N File:2022-01-12 Oxford InP Ridge Wiki Post - Cal03.pdf Oxford ICP Etch Cals03 current
- 22:55, 13 January 2022 diff hist +33 N File:2022-01-12 Oxford InP Ridge Wiki Post - Cal02.pdf Oxford ICP Cal SEMs current
- 22:51, 13 January 2022 diff hist +161 Oxford ICP Etcher - Process Control Data →Data - InP Ridge Etch (Oxford ICP Etcher): updated SEM 1 Tag: Visual edit
- 22:51, 13 January 2022 diff hist +38 N File:2022-01-11 Oxford InP Ridge Wiki Post - Cal01.pdf Oxford ICP Etch Cal SEMs current
- 21:43, 13 January 2022 diff hist +84 m MLA150 - Troubleshooting →Unexpected Behavior Tag: Visual edit
- 21:41, 13 January 2022 diff hist +271 MLA150 - Troubleshooting →Out Of Focus Exposures: Boris’ solutionnadded Tag: Visual edit
- 14:24, 13 January 2022 diff hist -1,009 Oxford ICP Etcher - Process Control Data in progress InP Ridge Etch Tag: Visual edit
- 14:21, 13 January 2022 diff hist +1,617 N Oxford ICP Etcher - Process Control Data pasted ICP2 data table Tag: Visual edit: Switched
- 14:21, 13 January 2022 diff hist +156 Oxford ICP Etcher (PlasmaPro 100 Cobra) →Recipes: link to Process Control Data Tag: Visual edit
- 14:20, 13 January 2022 diff hist +3 ICP Etching Recipes →Historical Data (Oxford ICP Etcher): changed to "process control data" Tag: Visual edit
- 14:18, 13 January 2022 diff hist +208 ICP Etching Recipes →Oxford ICP Etcher (PlasmaPro 100 Cobra): link to Historical Data Tag: Visual edit
- 15:14, 12 January 2022 diff hist +136 Frequently Asked Questions →Cell Phone Calls: mention eduroam network Tag: Visual edit
- 15:11, 12 January 2022 diff hist +189 m Frequently Asked Questions →Forcing Calls to use Wifi (not Cellular) Tag: Visual edit
- 15:08, 12 January 2022 diff hist +441 Frequently Asked Questions →Forcing Calls to use Wifi (not Cellular): additional troubleshooting Tag: Visual edit
- 15:22, 11 January 2022 diff hist -42 Stepper 3 (ASML DUV) →Operating Procedures: merged Troubleshooting into Operating Procedures Tag: Visual edit
- 10:43, 11 January 2022 diff hist +675 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration →IQC (Image Quality Control) Calibration Check: method for adding focus correction to exposure Tag: Visual edit: Switched
- 08:48, 7 January 2022 diff hist +113 Video Training: Uploading to GauchoCast/Panopto (Internal) →Uploading to the Web current Tag: Visual edit: Switched
- 08:45, 7 January 2022 diff hist +13 Nanofab Staff Internal Pages →Video Training procedures Tag: Visual edit
- 08:43, 7 January 2022 diff hist +2,328 N Video Training - Introduction (Internal) general methods - Demis current Tag: Visual edit
- 08:24, 7 January 2022 diff hist +89 Nanofab Staff Internal Pages →NanoFab IT: mentoined where to find instrucitons on Google Drive Tag: Visual edit
- 22:33, 6 January 2022 diff hist +91 Nanofab Staff Internal Pages moved olf pages to bottom Tag: Visual edit
- 22:32, 6 January 2022 diff hist +183 Nanofab Staff Internal Pages added NanoFab IT, and linked to NanoFab-it OnDema filter/page Tag: Visual edit
- 23:08, 4 January 2022 diff hist +6 m Sputtering Recipes →Ion Beam Deposition (Veeco NEXUS): credit Demis for the data Tag: Visual edit
- 14:58, 4 January 2022 diff hist +159 UCSB NanoFab Microscope Training →Depth Measurements using focus: added meas. error Tag: Visual edit
- 12:54, 4 January 2022 diff hist +100 m Packaging Recipes →Blade Exposure Calculation Tag: Visual edit
- 12:52, 4 January 2022 diff hist -30 m Packaging Recipes →Blade Exposure Calculation: enlarge img Tag: Visual edit
- 12:51, 4 January 2022 diff hist +191 Packaging Recipes →Calculated Blade Exposures: added blade exposure calc Tag: Visual edit
- 12:50, 4 January 2022 diff hist +37 N File:ADT Dicing - Blade Exposure diagram.png current
- 12:41, 4 January 2022 diff hist +1,753 Packaging Recipes →Dicing Saw Recipes (ADT 7100): added Dicing Tips Tag: Visual edit
- 11:29, 4 January 2022 diff hist +35 Tool List →Inspection, Test and Characterization: rearranged, moved "other properties" to end, renamed "Surfscan" to "particle counts" Tag: Visual edit
- 11:13, 4 January 2022 diff hist +79 Test Data of etching SiO2 with CHF3/CF4 →Alternate Data (not updated since 2019) Tag: Visual edit
- 11:12, 4 January 2022 diff hist +209 Test Data of etching SiO2 with CHF3/CF4 pasted link to alternate etch data Tag: Visual edit
- 11:11, 4 January 2022 diff hist -158 ICP Etching Recipes →Historical Data (SiO2 Etch, Panasonic 2): removed 2nd data table Tag: Visual edit
- 13:36, 3 January 2022 diff hist -693 Template:Announcements Deleted Flu vacc. mandate
- 13:34, 3 January 2022 diff hist +4 Template:Announcements →Jan 2022 UCSB COVID Protocols
- 13:33, 3 January 2022 diff hist +1,993 Template:Announcements pasted useful UCSB Jan COVID policiues
- 16:10, 21 December 2021 diff hist 0 File:Out of Focus Exposures - Carl Peterson (Krisnamoorthy Group, 2021-12).png John d uploaded a new version of File:Out of Focus Exposures - Carl Peterson (Krisnamoorthy Group, 2021-12).png current
- 16:09, 21 December 2021 diff hist +36 MLA150 - Troubleshooting →Out Of Focus Exposures: "features less than 100µm" Tag: Visual edit
- 11:52, 21 December 2021 diff hist -5 m MLA150 - Troubleshooting →Out Of Focus Exposures Tag: Visual edit
- 11:52, 21 December 2021 diff hist +285 MLA150 - Troubleshooting →Out Of Focus Exposures: inserted image of out-of-focus exposure Tag: Visual edit
- 11:50, 21 December 2021 diff hist +87 N File:Out of Focus Exposures - Carl Peterson (Krisnamoorthy Group, 2021-12).png
- 11:39, 21 December 2021 diff hist -3 m MLA150 - Troubleshooting fix bullets
- 11:38, 21 December 2021 diff hist -2 m MLA150 - Troubleshooting →Unexpected Behavior Tag: Visual edit
- 11:34, 21 December 2021 diff hist -38 MLA150 - Troubleshooting rearranged sections, increased heading level to 1 & 2 Tag: Visual edit
- 11:07, 21 December 2021 diff hist +62 MLA150 - Troubleshooting Tag: Visual edit
- 00:26, 16 December 2021 diff hist +182 Nanofab Staff Internal Pages →Old / Defunct Tag: Visual edit
- 00:21, 16 December 2021 diff hist +94 m Ion Beam Deposition (Veeco NEXUS) →Recipes Tag: Visual edit
- 00:19, 16 December 2021 diff hist -424 Sputtering Recipes →Ion Beam Deposition (Veeco NEXUS): deleted IBD Cals spreadsheet Tag: Visual edit
- 00:18, 16 December 2021 diff hist +426 Old Deposition Data - 2021-12-15 →Ion Beam Deposition (Veeco NEXUS): added IBD Cals spreadsheet current Tag: Visual edit
- 00:15, 16 December 2021 diff hist -2 Old Deposition Data - 2021-12-15 →Ion Beam Deposition (Veeco NEXUS): promoted to Page Title
- 00:15, 16 December 2021 diff hist +359 Old Deposition Data - 2021-12-15 →SiO2 deposition (IBD): added old IBD data Tag: Visual edit
- 00:12, 16 December 2021 diff hist +6,481 Old Deposition Data - 2021-12-15 pasted Old (2021-12-15) IBD recipe data
- 00:11, 16 December 2021 diff hist -613 Sputtering Recipes →Ion Beam Deposition (Veeco NEXUS): pasted Nastazia M's new data
- 00:09, 16 December 2021 diff hist -12,460 PECVD Recipes pasted NastaziaM's new data links
- 00:07, 16 December 2021 diff hist +167 Deposition Data - temporary 2021-12-15 →Standard Cleaning Procedure (IBD): cleaning current Tag: Visual edit
- 00:05, 16 December 2021 diff hist +575 Deposition Data - temporary 2021-12-15 →Ion Beam Deposition (Veeco NEXUS): pasted SiOxNy data
- 00:03, 16 December 2021 diff hist +2,234 Deposition Data - temporary 2021-12-15 →Ion Beam Deposition (Veeco NEXUS): updated IBD Tag: Visual edit
- 23:49, 15 December 2021 diff hist +1,751 Deposition Data - temporary 2021-12-15 New data links Tag: Visual edit
- 07:35, 15 December 2021 diff hist +24,157 N Old Deposition Data - 2021-12-15 Created page with "OLD Data: Copied on 2021-12-14 {{recipes|Vacuum Deposition}} =PECVD 1 (PlasmaTherm 790)= ====Historical Particulate Data==== *[https://docs.google.com/spreadsheets/d..." Tag: Visual edit: Switched
- 07:35, 15 December 2021 diff hist +107 Nanofab Staff Internal Pages →Old / Defunct Tag: Visual edit
- 07:32, 15 December 2021 diff hist -11,328 Deposition Data - temporary 2021-12-15
- 07:31, 15 December 2021 diff hist +26 Deposition Data - temporary 2021-12-15 Tag: Visual edit
- 07:31, 15 December 2021 diff hist +24,158 N Deposition Data - temporary 2021-12-15 pasted old data
- 07:30, 15 December 2021 diff hist +83 Nanofab Staff Internal Pages →Old / Defunct: temp. link to dep data Tag: Visual edit
- 06:10, 15 December 2021 diff hist +1,908 MLA150 - Troubleshooting →Out Of Focus Exposures: Debugging section Tag: Visual edit
- 09:31, 14 December 2021 diff hist +598 Old Deposition Data - NastaziaM 2021-11-22 modified PECVD1 and PECVD 1 for same titles as old data current Tag: Visual edit
- 09:20, 14 December 2021 diff hist +24,230 Old Deposition Data - NastaziaM 2021-11-22 pasted all old data from https://wiki.nanotech.ucsb.edu/wiki/PECVD_Recipes Tag: Visual edit
- 09:02, 14 December 2021 diff hist +10 m Nanofab Staff Internal Pages Tag: Visual edit
- 09:21, 11 December 2021 diff hist +115 m ICP Etching Recipes →Si Deep RIE (PlasmaTherm/Bosch Etch): linnks to new DSE & FL_ICP recipes Tag: Visual edit
- 09:20, 11 December 2021 diff hist +331 ICP Etching Recipes →Oxford ICP Etcher (PlasmaPro 100 Cobra): links for GaAs, GaSb Tag: Visual edit
- 12:16, 8 December 2021 diff hist +504 N MA6 Backside Alignment - Allowed Mark Locations 100-mm BSA chuck with cutouts measurements current Tag: Visual edit
- 12:15, 8 December 2021 diff hist +67 N File:MA-6 4-inch BSA chuck - 2631 - measurements.jpg current
- 12:12, 8 December 2021 diff hist +53 Contact Aligner (SUSS MA-6) →Documentation: link to "backside alignment - allowed mark locations" Tag: Visual edit
- 12:10, 8 December 2021 diff hist +2 m Contact Aligner (SUSS MA-6) minor wording Tag: Visual edit
- 12:11, 7 December 2021 diff hist 0 m Template:Announcements →New COVID Protocols: minor formatting
- 12:10, 7 December 2021 diff hist -1,191 Template:Announcements delete old Weekly-Testing & COVID-Protocols & OxfordICP messages
- 11:01, 1 December 2021 diff hist +439 DSEIII (PlasmaTherm/Deep Silicon Etcher) added section for Edge-Bead removal of PR etc Tag: Visual edit
- 11:27, 24 November 2021 diff hist +164 m Photolithography - Improving Adhesion Photoresist Adhesion mentioned lift-off delam Tag: Visual edit
- 11:25, 24 November 2021 diff hist +26 m Lithography Recipes →General Photolithography Techniques Tag: Visual edit
- 11:24, 24 November 2021 diff hist +180 Lithography Recipes added General Photolitho section to TOC Tag: Visual edit
- 11:22, 24 November 2021 diff hist +1,309 N Photolithography - Manual Edge-Bead Removal Techniques added razor, EBR100 and lithographic methods Tag: Visual edit
- 11:12, 24 November 2021 diff hist 0 m Lithography Recipes →General Photolithography Techniques: changed linked page title Tag: Visual edit
- 11:12, 24 November 2021 diff hist 0 m Photolithography - Improving Adhesion Photoresist Adhesion John d moved page Photolithography - HMDS Process for Improving Adhesion to Photolithography - Improving Adhesion Photoresist Adhesion without leaving a redirect: more generalized page title
- 11:11, 24 November 2021 diff hist +1,119 N Photolithography - Improving Adhesion Photoresist Adhesion added Underlayers for PR adhesion Tag: Visual edit
- 11:05, 24 November 2021 diff hist +447 Lithography Recipes Added "General Photlith techniques" section and links to 2 pages Tag: Visual edit
- 21:43, 22 November 2021 diff hist +938 Process Group - Billing Instructions added "Billing rates" section current Tag: Visual edit
- 13:45, 22 November 2021 diff hist +7 N Old Deposition Data - NastaziaM 2021-11-22 Created page with "Testing" Tag: Visual edit
- 13:45, 22 November 2021 diff hist +31 Nanofab Staff Internal Pages →Process Group: link to old dep data Tag: Visual edit
- 15:09, 18 November 2021 diff hist +527 Surface Analysis (KLA/Tencor Surfscan) added exmaple of low particle count Tag: Visual edit
- 15:07, 18 November 2021 diff hist +44 N File:Surfscan Low-Particle Example - G2.png current
- 15:05, 18 November 2021 diff hist +44 N File:Surfscan Low-Particle Example - G4.png current
- 14:35, 15 November 2021 diff hist +207 Logitech WBS7 - Procedure for Wax Mounting with bulk Crystalbond Stick added POLOS cleaning step Tag: Visual edit
- 14:33, 15 November 2021 diff hist +172 Logitech WBS7 - Procedure for Wax Mounting with bulk Crystalbond Stick link to Logitech Wafer Bonder Tag: Visual edit
- 08:43, 12 November 2021 diff hist +379 KLayout Design Tips force TOC at top, minor updates
- 08:29, 12 November 2021 diff hist +338 Maskless Aligner (Heidelberg MLA150) "updates to training video" links below video training Tag: Visual edit
- 12:23, 11 November 2021 diff hist +1,060 ASML Stepper 3 Standard Operating Procedure →Running a focus and/or exposure matrix: discussion of "process window" and "tolerance" Tag: Visual edit
- 16:47, 4 November 2021 diff hist -181 Template:Announcements Removed fl-icp
- 11:17, 4 November 2021 diff hist +377 PECVD Recipes →Cleaning Recipes (PECVD #2): added cleaning times Tag: Visual edit
- 11:04, 4 November 2021 diff hist +91 m PECVD 2 (Advanced Vacuum) →About: link to LSNitride data Tag: Visual edit
- 11:03, 4 November 2021 diff hist +179 PECVD 2 (Advanced Vacuum) →About: separated specs into sub-sections Tag: Visual edit
- 10:53, 4 November 2021 diff hist -1 m Template:Announcements
- 10:53, 4 November 2021 diff hist +181 Template:Announcements FL-ICP down
- 10:45, 4 November 2021 diff hist +90 Stepper 3 (ASML DUV) →Process Information: added Max wafer thickness Tag: Visual edit
- 12:08, 1 November 2021 diff hist +63 Resistivity Mapper (CDE RESMAP) added CSV export Tag: Visual edit
- 08:58, 1 November 2021 diff hist +392 MLA150 - Troubleshooting →Unexpected Behavior: moved to top. Added Reconverting CAD file. Tag: Visual edit
- 08:51, 1 November 2021 diff hist 0 File:MLA Quarter-Wafer Alignment.jpg John d uploaded a new version of File:MLA Quarter-Wafer Alignment.jpg current
- 11:21, 28 October 2021 diff hist +213 Lift-Off with DUV Imaging + PMGI Underlayer →Process Limits: suggest LOL, PMGI double-spin etc. Tag: Visual edit
- 21:51, 27 October 2021 diff hist -5 m ASML Stepper 3 Error Recovery, Troubleshooting and Calibration corrected max. expansion to 200pm (current machine setting) Tag: Visual edit
- 21:49, 27 October 2021 diff hist +837 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration added Wafer Expansion workaround Tag: Visual edit
- 12:15, 22 October 2021 diff hist +229 N Template:StaffInfoSecondary DJ Copy of NickL's "StaffInfoSecondary" template
- 12:13, 22 October 2021 diff hist +10,286 N Template:Tool2 copy of NickL's "Tool2" template
- 12:12, 22 October 2021 diff hist +659 N Template:StaffInfo DJ copy of original StaffInfo tempalte
- 11:42, 22 October 2021 diff hist +183 Template:StaffInfo added descriptive info about this template. current
- 11:20, 22 October 2021 diff hist +193 Services →Important Info on Fabrication Services: added link to publications policy Tag: Visual edit
- 17:01, 21 October 2021 diff hist -359 Template:Announcements deleted wifi maint.
- 07:22, 19 October 2021 diff hist +359 Template:Announcements wifi maint. oct 21 6a
- 16:25, 12 October 2021 diff hist +567 Digital Microscope (Olympus DSX1000) updated description Tag: Visual edit
- 11:50, 12 October 2021 diff hist +250 Wet Benches →Wafer Toxic Corrosive Benches: added photo of the various wafer holders Tag: Visual edit
- 11:49, 12 October 2021 diff hist +75 N File:Bay 4 toxic Corrosive - wafer sample holders - IMG 4243.jpg current
- 09:21, 12 October 2021 diff hist -1 m Template:Announcements
- 09:20, 12 October 2021 diff hist -235 Template:Announcements deleted Microscope service
- 17:33, 11 October 2021 diff hist +39 COVID-19 User Policies →NanoFab Policies: mentioned that masks are provided, for Thermo-Fischer vendor Tag: Visual edit
- 14:01, 8 October 2021 diff hist +293 ICP Etching Recipes →InP Ridge Etch (Oxford ICP Etcher): links to PDFs of etch characterizations Tag: Visual edit
- 13:59, 8 October 2021 diff hist +111 N File:Oxford Etcher - InP Ridge Etch using Oxford PlasmaPro 100 Cobra - 2021-09-08.pdf Oxford Etcher - InP Ridge Etch using Oxford PlasmaPro 100 Cobra - 2021-09-08 Ning Cao, 2021-09-08
- 13:55, 8 October 2021 diff hist +93 N File:Oxford Etcher - InP Grating Etch at 20 C - Oxford Cobra 300 2021-08-26.pdf Oxford Etcher - InP Grating Etch at 20 C - Oxford Cobra 300 2021-08-26 Ning Cao
- 13:53, 8 October 2021 diff hist +128 Dry Etching Recipes link to Oxford InP/PnGaAsP recipes Tag: Visual edit
- 16:23, 7 October 2021 diff hist +253 Template:Announcements microscopy tech service
- 09:54, 7 October 2021 diff hist 0 m Stepper 3 (ASML DUV) →Design & Fabrication Tools: fix indent Tag: Visual edit: Switched
- 09:53, 7 October 2021 diff hist +132 Stepper 3 (ASML DUV) →Operating Procedures: added Mask Making to "Design/Fab tools" Tag: Visual edit
- 09:36, 7 October 2021 diff hist +45 Calculators + Utilities →Python Scripts: "pythonXY" --> "Spyder" Tag: Visual edit
- 10:39, 4 October 2021 diff hist -264 Template:Announcements deleted ASML PM
- 17:13, 1 October 2021 diff hist +7 m Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) →Detailed Specifications Tag: Visual edit
- 17:12, 1 October 2021 diff hist +318 Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) →Detailed Specifications: mentioned 5mm exlcusion & wafers breaking Tag: Visual edit
- 17:10, 1 October 2021 diff hist +289 Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) added small-sample mounting notes Tag: Visual edit
- 17:07, 1 October 2021 diff hist -941 Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) deleted old mounting/Bosch process info Tag: Visual edit
- 08:00, 30 September 2021 diff hist -1 m Template:Announcements
- 08:00, 30 September 2021 diff hist -122 Template:Announcements Oxford ICP
- 21:30, 29 September 2021 diff hist -7 m Template:News →Oxford PlasmaPro ICP Etcher Cobra installed
- 21:29, 29 September 2021 diff hist -10 m Template:News
- 16:09, 29 September 2021 diff hist -23 m Maskless Aligner (Heidelberg MLA150) fixed HIMT link Tag: Visual edit
- 12:13, 29 September 2021 diff hist +22 m ICP Etching Recipes →SiO2 Etching (Fluorine ICP Etcher): listed etch gasses used Tag: Visual edit
- 11:59, 29 September 2021 diff hist +143 Oxford ICP Etcher (PlasmaPro 100 Cobra) →Detailed Specifications: updated ICP/RF powers Tag: Visual edit
- 11:27, 29 September 2021 diff hist +475 Template:News ADDED OXFROD ICP etch
- 11:19, 29 September 2021 diff hist +24 Oxford ICP Etcher (PlasmaPro 100 Cobra) updates to allowed materials Tag: Visual edit
- 10:45, 29 September 2021 diff hist +124 Oxford ICP Etcher (PlasmaPro 100 Cobra) →Detailed Specifications: added image, notes on substrate materials "discuss with staff" Tag: Visual edit
- 10:42, 29 September 2021 diff hist 0 File:OxfordPlasmaPro.jpg John d uploaded a new version of File:OxfordPlasmaPro.jpg current
- 10:41, 29 September 2021 diff hist +36 N File:OxfordPlasmaPro.jpg Photo from User Manual
- 19:19, 28 September 2021 diff hist +15 m MLA150 - Troubleshooting →Aligning to a quarter-wafer Tag: Visual edit
- 19:18, 28 September 2021 diff hist +182 MLA150 - Troubleshooting →Aligning to a quarter-wafer: inserted schematic Tag: Visual edit
- 19:16, 28 September 2021 diff hist +68 N File:MLA Quarter-Wafer Alignment.jpg
- 19:01, 28 September 2021 diff hist +183 MLA150 - Troubleshooting →Aligning to a quarter-wafer: minor description update Tag: Visual edit
- 18:57, 28 September 2021 diff hist +2,034 MLA150 - Troubleshooting added ALigning to a Quarter Wafer Tag: Visual edit
- 21:39, 27 September 2021 diff hist +2 m MLA150 - CAD Files and Templates Tag: Visual edit
- 21:39, 27 September 2021 diff hist +23 m MLA150 - CAD Files and Templates →Resolution and Calibration Patterns Tag: Visual edit
- 21:37, 27 September 2021 diff hist -1 m Maskless Aligner (Heidelberg MLA150) →Troubleshooting & Known Bugs
- 21:36, 27 September 2021 diff hist +37 m Maskless Aligner (Heidelberg MLA150) →Detailed Specifications Tag: Visual edit
- 21:35, 27 September 2021 diff hist +105 Maskless Aligner (Heidelberg MLA150) →Design Tools/Info: renaming/reorg for clarify Tag: Visual edit: Switched
- 17:02, 27 September 2021 diff hist +60 ICP Etching Recipes →Photoresist & ARC (Fluorine ICP Etcher): subheadings for BARC and PR strip Tag: Visual edit
- 22:10, 23 September 2021 diff hist -44 Template:Publications →Highly Selective and Vertical Etch of Silicon Dioxide using Ruthenium Films as an Etch Mask: fixed FL-ICP link
- 15:57, 23 September 2021 diff hist +91 Template:Announcements wifi update
- 10:26, 23 September 2021 diff hist -83 Dicing Saw (ADT) →Detailed Specifications: deleted old SOP, Lee's SOP only Tag: Visual edit
- 10:14, 23 September 2021 diff hist -64 Dicing Saw (ADT) →Recipes: corrected link to recipes Tag: Visual edit
- 10:11, 23 September 2021 diff hist +17 Packaging Recipes →Dicing Saw Recipes (ADT 7100): link to Thermocarbon website Tag: Visual edit
- 17:25, 21 September 2021 diff hist +68 Calculators + Utilities →Example CAD File: GDS version of CAD Tutorial Tag: Visual edit
- 17:23, 21 September 2021 diff hist +27 N File:CAD Tutorial for ASML Reticle v1 GDS.gds current
- 17:21, 21 September 2021 diff hist -1,195 Calculators + Utilities →KLayout: moved KLayout tips to separate Klayout tips page Tag: Visual edit
- 17:20, 21 September 2021 diff hist +1,952 KLayout Design Tips pasted more tips from Calc+Utilities page Tag: Visual edit
- 17:08, 21 September 2021 diff hist +374 Calculators + Utilities →Material Parameters: added Lesker links Tag: Visual edit
- 17:04, 21 September 2021 diff hist +302 Calculators + Utilities →KLayout: minor updates to KLayout / Circles Tag: Visual edit
- 16:02, 21 September 2021 diff hist -168 Calculators + Utilities →L-Edit: updated to ECE's license Tag: Visual edit
- 17:32, 20 September 2021 diff hist +23 m Template:Announcements
- 17:32, 20 September 2021 diff hist +253 Template:Announcements UCSB netowrk problems
- 14:18, 11 September 2021 diff hist +1 Dry Etching Recipes FL-ICP: SiN = A Tag: Visual edit
- 21:44, 10 September 2021 diff hist +381 Sputter 5 (AJA ATC 2200-V) link to sputter 3/4 procedures, link to SUM page for targets, and ToolInfo toolID added Tag: Visual edit
- 21:36, 10 September 2021 diff hist +62 m Sputter 3 (AJA ATC 2000-F) →Materials Table: minor cleanup Tag: Visual edit
- 21:34, 10 September 2021 diff hist +290 Sputter 4 (AJA ATC 2200-V) link to recipes page, rearranged specs, materials at bottom Tag: Visual edit
- 17:07, 9 September 2021 diff hist +1,173 Stepper Recipes linked to PR datasheets Tag: Visual edit
- 15:59, 9 September 2021 diff hist +67 Stepper 2 (AutoStep 200) move mask-making to "process info" Tag: Visual edit
- 15:40, 9 September 2021 diff hist +687 Stepper 2 (AutoStep 200) →Process Information: aded CAD files section Tag: Visual edit
- 15:38, 9 September 2021 diff hist +68 N File:GCA Local Alignment Mark Dotted.gds current
- 15:36, 9 September 2021 diff hist +48 N File:GCA Local Alignment Mark.gds current
- 15:31, 9 September 2021 diff hist +12 Stepper 1 (GCA 6300) →Process Information: added CAD Files heading Tag: Visual edit
- 15:29, 9 September 2021 diff hist +522 Stepper 1 (GCA 6300) →Process Information: links to Photomask & Alignment CAD files Tag: Visual edit
- 15:27, 9 September 2021 diff hist +46 N File:GCA Global Mark.gds current
- 15:19, 8 September 2021 diff hist +650 Template:Announcements added MikeS's Stepper 1+2 PM's
- 22:39, 7 September 2021 diff hist +54 Template:Announcements →New COVID Protocols: link to full policies
- 16:13, 7 September 2021 diff hist +156 Stepper 3 (ASML DUV) reorganization Tag: Visual edit
- 16:04, 7 September 2021 diff hist +380 Template:Announcements Aidan's fire alarm email
- 16:03, 7 September 2021 diff hist +270 Template:Announcements ASML PM Feb March 8th
- 15:00, 3 September 2021 diff hist -28 Oxford ICP Etcher (PlasmaPro 100 Cobra) →Recipes: corrected link to recipes Tag: Visual edit
- 14:12, 3 September 2021 diff hist +48 Dry Etching Recipes corrected Oxford link Tag: Visual edit
- 14:10, 3 September 2021 diff hist +705 ICP Etching Recipes Added Oxfrod ICP section and placeholder recipes Tag: Visual edit
- 14:04, 3 September 2021 diff hist +360 m Dry Etching Recipes corrected Row Bg colors
- 13:58, 3 September 2021 diff hist +973 Dry Etching Recipes Updated formatting- smaller font for model #, header colors
- 13:41, 3 September 2021 diff hist +231 Dry Etching Recipes inserted Oxford ICP column Tag: Visual edit
- 13:38, 3 September 2021 diff hist +2,774 N Oxford ICP Etcher (PlasmaPro 100 Cobra) first attempt at page
- 13:33, 3 September 2021 diff hist -4 m DSEIII (PlasmaTherm/Deep Silicon Etcher) corrected header level Tag: Visual edit
- 13:14, 3 September 2021 diff hist +359 Laser Etch Monitoring →Specific Procedures: Added Oxford Laser Mon Tag: Visual edit
- 13:13, 3 September 2021 diff hist +40 Tool List →ICP-RIE: link to Oxford ICP new page Tag: Visual edit
- 12:55, 3 September 2021 diff hist 0 File:Annotated PR etch - Om1000 03 - ARC + Cl + PR etch v1.jpg John d uploaded a new version of File:Annotated PR etch - Om1000 03 - ARC + Cl + PR etch v1.jpg current
- 09:35, 30 August 2021 diff hist -729 Template:Announcements deleted aidan's announcements
- 14:47, 27 August 2021 diff hist +299 Microscopes added Filmetrics F40-UV Tag: Visual edit
- 14:43, 27 August 2021 diff hist +139 Microscopes →Procedures & Tools: General-Use vs. Training-Required sections Tag: Visual edit
- 10:25, 26 August 2021 diff hist +1 m Services →Other U.C. Campuses: indent Attachment A
- 10:25, 26 August 2021 diff hist 0 m Services →Other U.C. Campuses: indent Attachment A
- 10:24, 26 August 2021 diff hist -8 m Services →Other U.C> Campuses: removed redlink to questionnaire, →Fabrication Services by NanoFab Staff: minor wording/formatting Tag: Visual edit
- 08:34, 26 August 2021 diff hist +135 Process Group - Remote Fabrication Jobs direct link to Fab Svc wall Tag: Visual edit
- 08:21, 26 August 2021 diff hist +143 Services →Fabrication Services by NanoFab Staff: formatting updates Tag: Visual edit: Switched
- 14:47, 24 August 2021 diff hist +30 PECVD 2 (Advanced Vacuum) moved recipes to bottom (like other pages) Tag: Visual edit
- 14:46, 24 August 2021 diff hist +8 PECVD 1 (PlasmaTherm 790) →Recipes & Process Data: renamed to Recipes and Historical Tag: Visual edit
- 14:45, 24 August 2021 diff hist +40 PECVD 2 (Advanced Vacuum) →Recipes: renamed to Recipes & Historical Tag: Visual edit
- 15:05, 23 August 2021 diff hist +81 Template:Announcements slashes on users
- 15:03, 23 August 2021 diff hist +6 m Template:Announcements changed CDA to Aidan
- 15:03, 23 August 2021 diff hist +365 Template:Announcements CDA repair closures
- 09:20, 7 August 2021 diff hist +157 Contact Aligner (SUSS MA-6) link to recipes Tag: Visual edit
- 14:18, 4 August 2021 diff hist +362 Autostep 200 Mask Making Guidance →Photomask Ordering Info: updated Photomask pordering info, added GDS template file Tag: Visual edit
- 14:15, 4 August 2021 diff hist +194 N File:GCA Stepper MaskPlate Master-DarkField 5x.gds GCA Stepper (Autostep 200 or 6300) Photomask template. Darkfield, at Reticle-scale (5x magnification already applied). Insert your design as Instances with 5x up-scaling applied. current
- 12:16, 3 August 2021 diff hist +263 MLA150 - Troubleshooting →Known Bugs & Workarounds: Stage bot centered - note about Small / OV camera Tag: Visual edit
- 09:50, 3 August 2021 diff hist +38 Test Data of etching SiO2 with CHF3/CF4 Comment on 7/22 check. Tag: Visual edit
- 12:05, 2 August 2021 diff hist +77 Template:Announcements SEM2 update from Aidan
- 12:04, 2 August 2021 diff hist -1 m Template:Announcements corrected timestamp
- 12:03, 2 August 2021 diff hist +39 Template:Announcements corrected timestamp
- 10:31, 30 July 2021 diff hist +113 Template:Announcements Sem 2 down
- 10:58, 27 July 2021 diff hist -10 m Stepper Recipes →DUV-42P-6: updated spin speed / noted mistake Tag: Visual edit
- 10:19, 27 July 2021 diff hist +991 Process Group - Remote Fabrication Jobs Links ot OnDema pages for each employee Tag: Visual edit
- 10:15, 27 July 2021 diff hist -13 Nanofab Staff Internal Pages →Process Group: minor rename Tag: Visual edit
- 11:58, 20 July 2021 diff hist +169 MLA150 - Troubleshooting →Defocus: unable to enter ±25 full range: Added name of recent Resist tempalte "General-Focus" Tag: Visual edit
- 10:50, 15 July 2021 diff hist +583 MLA150 - Design Guidelines →Alignment Marks: comment on mark placement across wafer Tag: Visual edit
- 10:42, 15 July 2021 diff hist +145 MLA150 - Design Guidelines →Automatic Alignment: added Reduced Detection area Tag: Visual edit
- 10:03, 15 July 2021 diff hist +663 MLA150 - Design Guidelines added alignment marks Tag: Visual edit
- 10:53, 14 July 2021 diff hist +65 ICP Etching Recipes →PlasmaTherm/SLR Fluorine Etcher: section header for Cleaning Recipes / TBA Tag: Visual edit
- 10:01, 14 July 2021 diff hist -47 Wet Etching Recipes →The Master Table of Wet Etching (Include All Materials): deleted 2nd "Extra Notes" column, combined date into "Verified by" Tag: Visual edit
- 08:19, 14 July 2021 diff hist +69 Wet Etching Recipes →The Master Table of Wet Etching (Include All Materials): KOH > linked to KOH bath Tag: Visual edit
- 10:46, 13 July 2021 diff hist +41 N File:200um square v1.gds TESTING only - please delte current
- 13:47, 12 July 2021 diff hist +48 m Stepper Recipes →DUV-42P-6: updated etching links Tag: Visual edit
- 13:43, 12 July 2021 diff hist +16 m ICP Etching Recipes →Photoresist and ARC Etching (Panasonic 1): fixed URL link Tag: Visual edit
- 14:19, 9 July 2021 diff hist +928 Atomic Layer Deposition Recipes →Atomic Layer Deposition (Oxford FlexAL): Recipe info on Plasma, Ratios Tag: Visual edit
- 11:49, 9 July 2021 diff hist -2 Services →Other U.C. Campuses: corrected broken email link
- 16:50, 8 July 2021 diff hist +40 Autostep 200 Mask Making Guidance added magnification Tag: Visual edit
- 16:48, 8 July 2021 diff hist +5 Autostep 200 Mask Making Guidance corercted dimensions to 5x5x0.090 Tag: Visual edit
- 16:44, 8 July 2021 diff hist +163 Autostep 200 Mask Making Guidance added Plate materials/dimensions Tag: Visual edit
- 11:20, 7 July 2021 diff hist +88 Nanofab Staff Internal Pages →Process Group: added link to Supplies Costs Tag: Visual edit
- 12:55, 2 July 2021 diff hist +91 Process Group - Billing Instructions →Supplies Costs: sotrage location in notes Tag: Visual edit
- 12:53, 2 July 2021 diff hist -2 m Process Group - Billing Instructions →Supplies Charges: --> Supplies Costs Tag: Visual edit
- 12:53, 2 July 2021 diff hist +51 Process Group - Billing Instructions force TOC
- 12:45, 2 July 2021 diff hist +16 Process Group - Billing Instructions →Supplies Charges: updated prices wafers Tag: Visual edit
- 12:44, 2 July 2021 diff hist +238 Process Group - Billing Instructions added wafer costs Tag: Visual edit
- 11:51, 2 July 2021 diff hist +24 m Process Group - Billing Instructions table title row Tag: Visual edit: Switched
- 11:48, 2 July 2021 diff hist +1,068 Process Group - Billing Instructions added shipping supplies table Tag: Visual edit: Switched
- 11:39, 2 July 2021 diff hist +1,637 N Process Group - Billing Instructions added overhead charges, F&A rate etc. Tag: Visual edit
- 11:36, 2 July 2021 diff hist +27 N File:RechargeApp - 02 - F+A auto v2.png current
- 11:27, 2 July 2021 diff hist +25 N File:RechargeApp - 01 - line items for other charges.png current
- 11:21, 2 July 2021 diff hist +17 m Nanofab Staff Internal Pages Tag: Visual edit
- 11:21, 2 July 2021 diff hist +106 Nanofab Staff Internal Pages →Process Group: link to Billing Instructions Tag: Visual edit
- 23:32, 29 June 2021 diff hist +17 m Chemical List BT --> Lab Director Tag: Visual edit
- 23:31, 29 June 2021 diff hist +466 m Wet Etching Recipes KOH: added mention of "low-stress" SiN Tag: Visual edit
- 23:19, 29 June 2021 diff hist +218 Wet Etching Recipes link to Chemicals List Tag: Visual edit
- 23:09, 29 June 2021 diff hist +33 m Mechanical Polisher (Allied) recipes TBD Tag: Visual edit
- 23:04, 29 June 2021 diff hist -51 Flip-Chip Bonder (Finetech) remove incorrect phone/email tags from Tool template
- 20:35, 23 June 2021 diff hist -801 Process Group - Remote Fabrication Jobs deleted Trello, updated OnDema Tag: Visual edit
- 10:22, 23 June 2021 diff hist +904 Plasma Clean (YES EcoClean) added etch method & applications Tag: Visual edit
- 10:16, 23 June 2021 diff hist +742 Ashers (Technics PEII) →About: applicaitons section Tag: Visual edit
- 09:47, 21 June 2021 diff hist +12 Stepper Recipes →DUV-42P: corrected to 2500rpm for 60nm thick, DUV42P-6 formulation Tag: Visual edit
- 11:30, 17 June 2021 diff hist 0 m Vacuum Deposition Recipes changed IBD SiON A --> R Tag: Visual edit
- 13:46, 14 June 2021 diff hist -293 Template:Announcements ISO spray updat,e deleted ASML maint.
- 10:02, 14 June 2021 diff hist -1 m RIE Etching Recipes →Photoresist and ARC (RIE 5) current Tag: Visual edit
- 10:02, 14 June 2021 diff hist +121 Dry Etching Recipes corrected links to PR & ARC etching Tag: Visual edit
- 10:01, 14 June 2021 diff hist +256 RIE Etching Recipes →Photoresist and ARC: added tool name to header title Tag: Visual edit
- 09:59, 14 June 2021 diff hist +28 ICP Etching Recipes →ICP Etch 1 (Panasonic E626I): corrected header titles to include "(Pan 1/2" Tag: Visual edit
- 10:41, 7 June 2021 diff hist +47 m MLA150 - Troubleshooting →Workaround Tag: Visual edit
- 10:40, 7 June 2021 diff hist +58 m MLA150 - Troubleshooting →Workaround: link to reboot prcedure
- 10:38, 7 June 2021 diff hist +1,997 MLA150 - Troubleshooting Out of Focus exposures - problem + solutions Tag: Visual edit
- 12:12, 3 June 2021 diff hist +175 Vacuum Oven (YES) added info from Brian Lingg current Tag: Visual edit
- 12:09, 3 June 2021 diff hist +114 Ovens - Overview of All Lab Ovens added YES info Tag: Visual edit
- 13:32, 2 June 2021 diff hist +25 m Stepper 3 (ASML DUV) added Model field in Tool templ.
- 13:24, 2 June 2021 diff hist +35 m Vacuum Deposition Recipes BG color of "SiN- Low stress"
- 14:13, 28 May 2021 diff hist +96 Atomic Layer Deposition Recipes →Oxford FlexAL Chamber #3: Dielectrics: started historical data seciton Tag: Visual edit
- 08:34, 27 May 2021 diff hist -2 m Editing Tutorials Tag: Visual edit
- 08:34, 27 May 2021 diff hist +831 Editing Tutorials Updating a file version Tag: Visual edit
- 08:32, 27 May 2021 diff hist 0 File:UCSB-Facilities-Use-Agreement.pdf John d uploaded a new version of File:UCSB-Facilities-Use-Agreement.pdf
- 08:32, 27 May 2021 diff hist 0 File:UCSB Service Agreement.pdf John d uploaded a new version of File:UCSB Service Agreement.pdf
- 08:25, 27 May 2021 diff hist +106 m Frequently Asked Questions →How do I get a login to the wiki?: link to Wiki admin contact page Tag: Visual edit
- 08:07, 27 May 2021 diff hist +19 Template:News →SiO2 etching, High-Aspect Ratio
- 08:05, 27 May 2021 diff hist +51 m Template:News added date to SiO2 etch article
- 08:01, 27 May 2021 diff hist +253 ICP Etching Recipes →SiO2 Etching (Fluorine ICP Etcher): link to publication Tag: Visual edit
- 07:58, 27 May 2021 diff hist +36 ICP Etching Recipes →Ru (Ruthenium) Etch (Panasonic 2): link to pub Tag: Visual edit
- 07:56, 27 May 2021 diff hist +905 Template:News Added info about Bill's SiO2 etching paper
- 07:41, 27 May 2021 diff hist +536 Template:Publications link to Bill's Ru-masked SiO2 paper
- 12:35, 26 May 2021 diff hist +149 Direct-Write Lithography Recipes →Maskless Aligner (Heidelberg MLA150): mention that any I-Line PR will work. Tag: Visual edit
- 13:26, 21 May 2021 diff hist +42 m Template:Announcements
- 13:25, 21 May 2021 diff hist +27 m Template:Announcements
- 13:24, 21 May 2021 diff hist -31 m Template:Announcements linked to new policies directly
- 13:22, 21 May 2021 diff hist +24 m COVID-19 User Policies summary at top of annoucnements Tag: Visual edit
- 15:57, 17 May 2021 diff hist 0 File:Nanofabrication Facility Project Description.xlsx John d uploaded a new version of File:Nanofabrication Facility Project Description.xlsx
- 13:06, 17 May 2021 diff hist +155 Stepper Recipes →DUV-42P: link to FL-ICP and Technics for BARC etches Tag: Visual edit
- 13:04, 17 May 2021 diff hist +526 ICP Etching Recipes →PlasmaTherm/SLR Fluorine Etcher: added BARC and PR etches Tag: Visual edit
- 12:55, 17 May 2021 diff hist +8 m Stepper Recipes →DUV-42P-6: comments on corrected spin speed Tag: Visual edit
- 12:53, 17 May 2021 diff hist +4 Stepper Recipes →DUV-42P: aDDED "-6" to the DUV42P part number Tag: Visual edit
- 12:52, 17 May 2021 diff hist +3 Lithography Recipes →Chemicals Stocked + Datasheets: corrected part number for DUV42P (added "-6") Tag: Visual edit
- 06:17, 17 May 2021 diff hist +8 Nanofab Staff Internal Pages →Process Group: moved lab Stocking to "Old" section Tag: Visual edit
- 06:15, 17 May 2021 diff hist +218 Process Group - Remote Fabrication Jobs link to OnDema.io NanoFab Workspace Tag: Visual edit
- 12:09, 11 May 2021 diff hist +4 Template:News →Wafer Polisher available: link to Lingg's page
- 12:08, 11 May 2021 diff hist +57 m Template:News →Wafer Polisher added to tool list: link to polisher wiki page
- 11:38, 11 May 2021 diff hist +34 Tool List →Wet Processing: link to Mechanical_Polisher_(Allied) Tag: Visual edit
- 11:36, 11 May 2021 diff hist +96 N File:AlliedPolisher10-1110.jpg Photo of Allied Polisher model 10-1110 ; Initial photo - cropped and color boosted current
- 11:33, 11 May 2021 diff hist +620 N Mechanical Polisher (Allied) initial Page
- 16:49, 10 May 2021 diff hist +203 Template:News Added allied polisher
- 06:56, 6 May 2021 diff hist +62 Process Group - Remote Fabrication Jobs link to Trello: UCSB Nanofab Tag: Visual edit
- 06:51, 6 May 2021 diff hist +30 m Process Group - Remote Fabrication Jobs Tag: Visual edit
- 06:50, 6 May 2021 diff hist +10 Process Group - Remote Fabrication Jobs Tag: Visual edit
- 06:50, 6 May 2021 diff hist -43 Process Group - Remote Fabrication Jobs Tag: Visual edit
- 21:34, 5 May 2021 diff hist +920 N Process Group - Remote Fabrication Jobs Trello -filter your own jobs Tag: Visual edit
- 21:33, 5 May 2021 diff hist +46 N File:Board - Search Cards - Select User.png current