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- 14:02, 13 August 2013 diff hist +526 PECVD Recipes →PECVD 1 (PlasmaTherm 790): added placeholders for varying-stress SiN & SiOxNy
- 13:53, 13 August 2013 diff hist +218 Vacuum Deposition Recipes Added IBD available (A) recipes, PECVD#1 SiON recipes
- 13:12, 13 August 2013 diff hist +2 Sputtering Recipes →Ion Beam Deposition (Veeco NEXUS)
- 13:12, 13 August 2013 diff hist +2 Sputtering Recipes →Ion Beam Deposition (Veeco NEXUS)
- 13:12, 13 August 2013 diff hist -4 Sputtering Recipes →TiO{{sub|2}} deposition (IBD): rates & indices
- 13:12, 13 August 2013 diff hist +24 Sputtering Recipes →SiN deposition (IBD)
- 13:11, 13 August 2013 diff hist -1 Sputtering Recipes →SiO{{sub|2}} deposition (IBD)
- 13:11, 13 August 2013 diff hist +56 Sputtering Recipes →TiO{{sub|2}} deposition (IBD)
- 13:10, 13 August 2013 diff hist +111 Sputtering Recipes →Ion Beam Deposition (Veeco NEXUS)
- 13:05, 13 August 2013 diff hist 0 Ion Beam Deposition (Veeco NEXUS) →Documentation
- 13:05, 13 August 2013 diff hist +116 Ion Beam Deposition (Veeco NEXUS) →Documentation: linked to sputtering recipes
- 13:01, 13 August 2013 diff hist +118 Ion Beam Deposition (Veeco NEXUS) →Detailed Specifications
- 12:57, 13 August 2013 diff hist -56 Ion Beam Deposition (Veeco NEXUS) →About
- 12:56, 13 August 2013 diff hist +63 Ion Beam Deposition (Veeco NEXUS) →Detailed Specifications: updated targets, AR coating
- 12:54, 13 August 2013 diff hist +18 Ion Beam Deposition (Veeco NEXUS) →About
- 12:53, 13 August 2013 diff hist +714 Ion Beam Deposition (Veeco NEXUS) →About: denisty, avail. metals, calibration.
- 12:44, 13 August 2013 diff hist +135 Sputtering Recipes →Ta{{sub|2}}O{{sub|5}} deposition (IBD): added reate, index, stress
- 12:41, 13 August 2013 diff hist +136 Sputtering Recipes →SiN deposition (IBD): added rate, index, stress
- 12:36, 13 August 2013 diff hist +137 Sputtering Recipes →SiO{{sub|2}} deposition (IBD): added rate, index, stress
- 11:17, 13 August 2013 diff hist +208 Sputtering Recipes →Ion Beam Deposition (Veeco NEXUS): added link to ibd calibrations spreadsheet