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- 08:36, 23 March 2020 diff hist +5 Stepper 1 (GCA 6300) →Operating Procedures
- 08:34, 23 March 2020 diff hist -2 Stepper 1 (GCA 6300) →Operating Procedures
- 08:34, 23 March 2020 diff hist -1 Stepper 1 (GCA 6300) →Operating Procedures
- 08:33, 23 March 2020 diff hist +45 Stepper 1 (GCA 6300) →Operating Procedures
- 08:31, 23 March 2020 diff hist -1 GCA 6300 Reboot Procedures Tag: Visual edit
- 08:22, 23 March 2020 diff hist +3 GCA 6300 Reboot Procedures
- 08:19, 23 March 2020 diff hist +1,576 N GCA 6300 Reboot Procedures Created page with "Reboot – When terminal keyboard locks up (frozen keyboard), etc. 1. If the terminal keyboard (the main keyboard used for alignment) is not responding, first make sure the NO..."
- 08:14, 23 March 2020 diff hist +9 N File:GCA 6300 Reboot computers.docx current
- 08:10, 23 March 2020 diff hist +32 Stepper 1 (GCA 6300) →Operating Procedures
- 20:01, 22 March 2020 diff hist +42 Stepper 2 (AutoStep 200) →Operating Procedures
- 20:01, 22 March 2020 diff hist +47 Autostep 200 Troubleshooting and Recovery
- 20:00, 22 March 2020 diff hist -2 Stepper 2 (AutoStep 200) →Operating Procedures
- 19:59, 22 March 2020 diff hist -1 Stepper 2 (AutoStep 200) →Operating Procedures
- 19:58, 22 March 2020 diff hist +4 Stepper 2 (AutoStep 200) →Operating Procedures
- 19:57, 22 March 2020 diff hist -8 Stepper 2 (AutoStep 200) Operating Procedures
- 19:56, 22 March 2020 diff hist +39 Stepper 2 (AutoStep 200) →Operating Procedures
- 19:51, 22 March 2020 diff hist +9 Stepper 1 (GCA 6300) →Operating Procedures
- 19:50, 22 March 2020 diff hist -6 Stepper 1 (GCA 6300) →Operating Procedures
- 19:50, 22 March 2020 diff hist +6 Stepper 1 (GCA 6300) →Operating Procedures
- 19:50, 22 March 2020 diff hist 0 Stepper 1 (GCA 6300) →Operating Procedures
- 19:49, 22 March 2020 diff hist +13 Stepper 1 (GCA 6300) →Operating Procedures
- 19:48, 22 March 2020 diff hist -11 Stepper 1 (GCA 6300) →Operating Procedures
- 19:40, 22 March 2020 diff hist +1 Troubleshooting and Recovery Tag: Visual edit
- 19:39, 22 March 2020 diff hist +427 Troubleshooting and Recovery Tag: Visual edit
- 19:12, 22 March 2020 diff hist +2 Troubleshooting and Recovery Tag: Visual edit
- 19:11, 22 March 2020 diff hist +4,310 Troubleshooting and Recovery
- 18:57, 22 March 2020 diff hist -2 Stepper 1 (GCA 6300) →Operating Procedures
- 10:36, 20 March 2020 diff hist +65 Programming a Job →JOB Programming - FULL current
- 09:42, 19 March 2020 diff hist -8 Stepper 1 (GCA 6300) - Standard Operating Procedure current
- 09:30, 19 March 2020 diff hist +121 Stepper 1 (GCA 6300) - Standard Operating Procedure →Resist spin coating and cleaning the back-side of wafer
- 09:20, 19 March 2020 diff hist -102 Stepper 1 (GCA 6300) - Standard Operating Procedure →Running a FOCUS and\or EXPOSURE matrix
- 09:19, 19 March 2020 diff hist +73 Stepper 1 (GCA 6300) - Standard Operating Procedure →Running a FOCUS and\or EXPOSURE matrix
- 09:14, 19 March 2020 diff hist -1 Stepper 1 (GCA 6300) - Standard Operating Procedure →Running a FOCUS and\or EXPOSURE matrix
- 22:33, 18 March 2020 diff hist +2 Stepper 1 (GCA 6300) - Standard Operating Procedure →Running a JOB-Normal Operation
- 22:22, 18 March 2020 diff hist -1 Stepper 1 (GCA 6300) - Standard Operating Procedure →Running a JOB-Normal Operation
- 22:20, 18 March 2020 diff hist -9 Stepper 1 (GCA 6300) - Standard Operating Procedure →Running a JOB-Normal Operation
- 22:16, 18 March 2020 diff hist +8 Stepper 1 (GCA 6300) - Standard Operating Procedure →Running a JOB-Normal Operation
- 22:14, 18 March 2020 diff hist +30 Stepper 1 (GCA 6300)
- 11:08, 10 March 2020 diff hist 0 PECVD Recipes →ICP-PECVD (Unaxis VLR)
- 15:36, 27 February 2020 diff hist -16 PECVD Recipes →SiN deposition (Unaxis VLR)
- 15:35, 27 February 2020 diff hist +270 PECVD Recipes →SiN deposition (Unaxis VLR)
- 15:32, 27 February 2020 diff hist -2 PECVD Recipes →SiN deposition (Unaxis VLR)
- 15:32, 27 February 2020 diff hist -131 PECVD Recipes →SiN deposition (Unaxis VLR)
- 15:31, 27 February 2020 diff hist +1 PECVD Recipes →SiN deposition (Unaxis VLR)
- 15:30, 27 February 2020 diff hist +127 PECVD Recipes →SiN deposition (Unaxis VLR)
- 15:29, 27 February 2020 diff hist +125 PECVD Recipes →SiN deposition (Unaxis VLR)
- 15:27, 27 February 2020 diff hist +144 PECVD Recipes →ICP-PECVD (Unaxis VLR)
- 15:27, 27 February 2020 diff hist -124 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 15:26, 27 February 2020 diff hist 0 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 15:26, 27 February 2020 diff hist +1 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 15:26, 27 February 2020 diff hist +123 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 15:24, 27 February 2020 diff hist -2 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 15:23, 27 February 2020 diff hist +260 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 15:23, 27 February 2020 diff hist -261 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 15:22, 27 February 2020 diff hist +150 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 15:21, 27 February 2020 diff hist +1 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 15:21, 27 February 2020 diff hist +149 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 15:19, 27 February 2020 diff hist +261 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 15:18, 27 February 2020 diff hist +134 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 15:17, 27 February 2020 diff hist +136 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 13:23, 27 February 2020 diff hist +1 PECVD Recipes →SiN deposition (Unaxis VLR)
- 13:23, 27 February 2020 diff hist +4 PECVD Recipes →SiN deposition (Unaxis VLR)
- 13:22, 27 February 2020 diff hist -1 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 15:00, 6 February 2020 diff hist +3 PECVD Recipes →SiO2 deposition (PECVD #1)
- 15:00, 6 February 2020 diff hist +9 PECVD Recipes →SiN deposition (PECVD #1)
- 14:59, 6 February 2020 diff hist +97 PECVD Recipes →SiN deposition (PECVD #1)
- 14:58, 6 February 2020 diff hist +1 PECVD Recipes →SiO2 deposition (PECVD #1)
- 14:58, 6 February 2020 diff hist +100 PECVD Recipes →SiO2 deposition (PECVD #1)
- 14:55, 6 February 2020 diff hist -9 PECVD Recipes →Standard Recipe
- 14:53, 6 February 2020 diff hist +1 PECVD Recipes →Standard Recipe
- 14:53, 6 February 2020 diff hist +110 PECVD Recipes →Standard Recipe
- 14:52, 6 February 2020 diff hist +1 PECVD Recipes →Standard Recipe
- 14:51, 6 February 2020 diff hist +113 PECVD Recipes →SiN deposition (PECVD #2)
- 14:49, 6 February 2020 diff hist -141 PECVD Recipes →Standard Recipe
- 14:48, 6 February 2020 diff hist +107 PECVD Recipes →Low-Stress SiN deposition (PECVD #2)
- 14:46, 6 February 2020 diff hist -1 PECVD Recipes →Low-Stress SiN deposition (PECVD #2)
- 14:46, 6 February 2020 diff hist +2 PECVD Recipes →Low-Stress SiN deposition (PECVD #2)
- 14:45, 6 February 2020 diff hist +141 PECVD Recipes →Standard Recipe
- 14:03, 30 January 2020 diff hist +11 PECVD Recipes →SiN deposition (Unaxis VLR)
- 14:02, 30 January 2020 diff hist +156 PECVD Recipes →SiN deposition (Unaxis VLR)
- 14:01, 30 January 2020 diff hist +129 PECVD Recipes →SiN deposition (Unaxis VLR)
- 13:26, 14 January 2020 diff hist +139 PECVD Recipes →PECVD 2 (Advanced Vacuum)
- 13:25, 14 January 2020 diff hist +142 PECVD Recipes →Uniformity Data
- 13:25, 14 January 2020 diff hist +126 PECVD Recipes →Thin-Film Properties
- 13:24, 14 January 2020 diff hist +139 PECVD Recipes →Uniformity Data
- 13:23, 14 January 2020 diff hist +129 PECVD Recipes →SiN deposition (PECVD #2)
- 13:22, 14 January 2020 diff hist +136 PECVD Recipes →Uniformity Data
- 13:21, 14 January 2020 diff hist +126 PECVD Recipes →SiO2 deposition (PECVD #2)
- 13:17, 14 January 2020 diff hist +139 PECVD Recipes →Historical Particulate Data
- 13:16, 14 January 2020 diff hist +152 PECVD Recipes →Uniformity Data
- 13:15, 14 January 2020 diff hist +140 PECVD Recipes →Uniformity Data
- 13:12, 14 January 2020 diff hist +124 PECVD Recipes →SiN deposition (PECVD #1)
- 13:09, 14 January 2020 diff hist +136 PECVD Recipes →SiO2 deposition (PECVD #1)
- 14:39, 13 December 2019 diff hist +3 PECVD Recipes →ICP-PECVD (Unaxis VLR)
- 14:39, 13 December 2019 diff hist +144 PECVD Recipes →ICP-PECVD (Unaxis VLR)
- 14:35, 13 December 2019 diff hist +131 PECVD Recipes →SiN deposition (Unaxis VLR)
- 14:00, 12 December 2019 diff hist +2 PECVD Recipes →SiO2 deposition (PECVD #2)
- 13:59, 12 December 2019 diff hist +1 PECVD Recipes →Low-Stress SiN deposition (PECVD #2)
- 13:59, 12 December 2019 diff hist +1 PECVD Recipes →SiN deposition (PECVD #2)
- 13:57, 12 December 2019 diff hist +18 PECVD Recipes →PECVD 1 (PlasmaTherm 790)
- 13:56, 12 December 2019 diff hist -2 PECVD Recipes →PECVD 1 (PlasmaTherm 790)
- 13:56, 12 December 2019 diff hist +6 PECVD Recipes →PECVD 1 (PlasmaTherm 790)
- 13:54, 12 December 2019 diff hist +140 PECVD Recipes →PECVD 1 (PlasmaTherm 790)
- 13:42, 12 December 2019 diff hist -138 PECVD Recipes →PECVD 2 (Advanced Vacuum)
- 13:41, 12 December 2019 diff hist +139 PECVD Recipes →PECVD 2 (Advanced Vacuum)
- 13:38, 12 December 2019 diff hist -3 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 13:38, 12 December 2019 diff hist 0 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 13:34, 12 December 2019 diff hist +421 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 13:28, 12 December 2019 diff hist +279 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 13:24, 12 December 2019 diff hist +134 PECVD Recipes Tag: Visual edit: Switched
- 09:19, 11 October 2019 diff hist +162 Stepper 2 (AutoStep 200) Operating Procedures Tag: Visual edit
- 09:14, 11 October 2019 diff hist -101 Stepper 2 (AutoStep 200) Operating Procedures Tag: Visual edit
- 08:24, 3 October 2019 diff hist +2 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 08:22, 3 October 2019 diff hist +128 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 08:12, 3 October 2019 diff hist +123 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 07:56, 3 October 2019 diff hist +100 PECVD Recipes →SiN deposition (Unaxis VLR)
- 07:39, 3 October 2019 diff hist 0 N SiN 100C Table-2019 Created blank page current Tag: Visual edit
- 07:35, 3 October 2019 diff hist -71 PECVD Recipes →SiN deposition (Unaxis VLR) Tag: Visual edit
- 07:31, 3 October 2019 diff hist -6 PECVD Recipes →SiN deposition (Unaxis VLR)
- 07:27, 3 October 2019 diff hist +103 PECVD Recipes →SiN deposition (Unaxis VLR)
- 07:52, 18 September 2019 diff hist +7 Stepper 2 (AutoStep 200) →Operating Procedures Tag: Visual edit
- 07:49, 18 September 2019 diff hist -7 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences
- 07:32, 18 September 2019 diff hist +13 Stepper 1 (GCA 6300) →Operating Procedures Tag: Visual edit
- 07:31, 18 September 2019 diff hist +14 Stepper 2 (AutoStep 200) →Operating Procedures Tag: Visual edit
- 11:30, 10 September 2019 diff hist -2 PECVD Recipes →ICP-PECVD (Unaxis VLR)
- 11:29, 10 September 2019 diff hist +142 PECVD Recipes →ICP-PECVD (Unaxis VLR)
- 10:48, 10 September 2019 diff hist -8 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 10:48, 10 September 2019 diff hist -10 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 10:47, 10 September 2019 diff hist -9 PECVD Recipes →SiN deposition (Unaxis VLR)
- 10:46, 10 September 2019 diff hist +6 PECVD Recipes →SiN deposition (Unaxis VLR)
- 10:46, 10 September 2019 diff hist 0 PECVD Recipes →SiN deposition (Unaxis VLR)
- 10:45, 10 September 2019 diff hist 0 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 10:45, 10 September 2019 diff hist +42 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 10:45, 10 September 2019 diff hist +272 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 10:41, 10 September 2019 diff hist +147 PECVD Recipes →SiN deposition (Unaxis VLR)
- 08:49, 10 September 2019 diff hist +1 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 08:49, 10 September 2019 diff hist +9 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 08:48, 10 September 2019 diff hist -5 PECVD Recipes →SiO2 deposition (Unaxis VLR) Tag: Visual edit
- 08:47, 10 September 2019 diff hist +131 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 08:46, 10 September 2019 diff hist +131 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 08:40, 10 September 2019 diff hist -36 PECVD Recipes →SiN deposition (Unaxis VLR): update Tag: Visual edit
- 08:38, 10 September 2019 diff hist +2 PECVD Recipes →SiN deposition (Unaxis VLR)
- 08:37, 10 September 2019 diff hist +19 PECVD Recipes →SiN deposition (Unaxis VLR)
- 08:36, 10 September 2019 diff hist +110 PECVD Recipes →SiN deposition (Unaxis VLR)
- 08:33, 10 September 2019 diff hist +3 Unaxis SiN100C 300nm-2019 current
- 08:24, 10 September 2019 diff hist +3 N Unaxis SiN100C 300nm-2019 WIP Tag: Visual edit
- 08:22, 10 September 2019 diff hist +34 PECVD Recipes →SiN deposition (Unaxis VLR) Tag: Visual edit
- 14:13, 21 June 2019 diff hist -82 Stepper 2 (AutoStep 200) →Detailed Specifications: about stepper Tag: Visual edit
- 15:41, 20 June 2019 diff hist +3 N Stepper 1 (GCA 6300) Available chucks wip current Tag: Visual edit
- 15:39, 20 June 2019 diff hist +72 Stepper 1 (GCA 6300) - Standard Operating Procedure →Loading a wafer into the system Tag: Visual edit
- 15:32, 20 June 2019 diff hist +5,924 N Stepper 1 (GCA 6300) Substrate Thickness, Shim Thickness ans Target Thickness shims current Tag: Visual edit
- 15:25, 20 June 2019 diff hist +139 Stepper 1 (GCA 6300) - Standard Operating Procedure →Loading a wafer into the system Tag: Visual edit
- 15:24, 20 June 2019 diff hist +607 Stepper 1 (GCA 6300) - Standard Operating Procedure →Loading a wafer into the system Tag: Visual edit
- 15:13, 20 June 2019 diff hist +1,071 N Stepper 1 (GCA6300) How to select proper chuck Created page with "{| class="wikitable" | colspan="3" |GCA 6300 CHUCKS |- |Chuck Name/Wafer Size |Substrate Thickness |Chuck Thickness |- | | | |- |1/4 of 2"(and smaller) |~717um (+/-100) |5.40..." current Tag: Visual edit
- 15:10, 20 June 2019 diff hist +59 Stepper 1 (GCA 6300) - Standard Operating Procedure →Loading a wafer into the system Tag: Visual edit
- 14:23, 20 June 2019 diff hist -27 Stepper 2 (AutoStep 200) Operating Procedures →Reticle Loading and Unloading Tag: Visual edit
- 13:46, 20 June 2019 diff hist +4 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →JOB Programming - FULL Tag: Visual edit
- 13:37, 20 June 2019 diff hist +4,137 N Stepper 2 (Autostep 200) - Table of Chucks, Shims, Target Thicknesses pasted table from excel Tag: Visual edit
- 13:35, 20 June 2019 diff hist +921 N Stepper 2 (Autostep 200) - Chuck Selection pasted table from excel Tag: Visual edit
- 13:28, 20 June 2019 diff hist +182 Stepper 2 (AutoStep 200) Operating Procedures →Loading a wafer into the system: links to table pages Tag: Visual edit
- 08:22, 17 June 2019 diff hist -31 Stepper 1 (GCA 6300) →Operating Procedures Tag: Visual edit
- 08:20, 17 June 2019 diff hist +2,387 GCA 6300 USer Accessible Commands commands Tag: Visual edit
- 08:09, 17 June 2019 diff hist +3 N GCA 6300 USer Accessible Commands Created page with "WIP"
- 08:09, 17 June 2019 diff hist +38 Stepper 1 (GCA 6300) →Operating Procedures Tag: Visual edit
- 08:08, 17 June 2019 diff hist +36 Stepper 1 (GCA 6300) →Operating Procedures Tag: Visual edit
- 08:07, 17 June 2019 diff hist +2,315 Autostep 200 User Accessible Commands commands Tag: Visual edit
- 08:06, 17 June 2019 diff hist +3 N Autostep 200 User Accessible Commands Created page with "WIP"
- 08:06, 17 June 2019 diff hist +4 Stepper 2 (AutoStep 200) →Operating Procedures Tag: Visual edit
- 08:05, 17 June 2019 diff hist -69 Stepper 2 (AutoStep 200) →Operating Procedures Tag: Visual edit
- 08:04, 17 June 2019 diff hist +40 Stepper 2 (AutoStep 200) Commands Tag: Visual edit
- 15:38, 13 June 2019 diff hist +38 Stepper 2 (AutoStep 200) →Operating Procedures Tag: Visual edit
- 15:37, 13 June 2019 diff hist +3 Autostep 200 Troubleshooting and Recovery wip Tag: Visual edit
- 15:36, 13 June 2019 diff hist +3 N Autostep 200 Troubleshooting and Recovery Troubleshooting and Recovery Tag: Visual edit
- 15:36, 13 June 2019 diff hist +42 Stepper 2 (AutoStep 200) Autostep Troubleshooting and Recovery Tag: Visual edit
- 15:34, 13 June 2019 diff hist +35 Stepper 2 (AutoStep 200) Troubleshooting and Recovery Tag: Visual edit
- 15:33, 13 June 2019 diff hist +3 N Troubleshooting and Recovery Troubleshooting and Recovery Tag: Visual edit
- 15:33, 13 June 2019 diff hist +35 Stepper 1 (GCA 6300) Troubleshooting and Recovery Tag: Visual edit
- 15:30, 13 June 2019 diff hist +5,471 GCA 6300 Mask Making Guidance mask layout Tag: Visual edit
- 15:28, 13 June 2019 diff hist +2,023 Autostep 200 Mask Making Guidance mask layout Tag: Visual edit
- 15:24, 13 June 2019 diff hist -75 User Accessible Commands commands current Tag: Visual edit
- 15:15, 13 June 2019 diff hist +3 N Autostep 200 Mask Making Guidance mask making guidance Tag: Visual edit
- 15:15, 13 June 2019 diff hist +71 Stepper 2 (AutoStep 200) new pages Tag: Visual edit
- 15:13, 13 June 2019 diff hist +1 Stepper 1 (GCA 6300) →Operating Procedures Tag: Visual edit
- 15:12, 13 June 2019 diff hist +4,196 GCA 6300 Mask Making Guidance mask making guidance Tag: Visual edit
- 15:10, 13 June 2019 diff hist +2,422 User Accessible Commands commands Tag: Visual edit
- 14:44, 13 June 2019 diff hist +16 N User Accessible Commands WIP Tag: Visual edit
- 14:43, 13 June 2019 diff hist +16 N GCA 6300 Mask Making Guidance WIP Tag: Visual edit
- 14:42, 13 June 2019 diff hist +67 Stepper 1 (GCA 6300) GCA 6300 MAsk MAking Guidance Tag: Visual edit
- 14:35, 13 June 2019 diff hist +114 Stepper 2 (AutoStep 200) Operating Procedures →Running a JOB - Normal Operation Tag: Visual edit
- 14:32, 13 June 2019 diff hist +290 Stepper 2 (AutoStep 200) Operating Procedures →Running a JOB - Normal Operation Tag: Visual edit
- 14:29, 13 June 2019 diff hist +58 Stepper 2 (AutoStep 200) Operating Procedures →Running a JOB - Normal Operation Tag: Visual edit
- 14:27, 13 June 2019 diff hist +7 Stepper 1 (GCA 6300) - Standard Operating Procedure →Spin coating and cleaning the back-side of wafer Tag: Visual edit
- 14:27, 13 June 2019 diff hist +169 Stepper 2 (AutoStep 200) Operating Procedures →Cleaning the back-side of wafer Tag: Visual edit
- 14:25, 13 June 2019 diff hist +161 Stepper 1 (GCA 6300) - Standard Operating Procedure →Cleaning the back-side of wafer Tag: Visual edit
- 14:22, 13 June 2019 diff hist +339 Stepper 1 (GCA 6300) - Standard Operating Procedure →Running a JOB-Normal Operation Tag: Visual edit
- 12:14, 13 June 2019 diff hist +50 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →JOB Programming - FULL Tag: Visual edit
- 12:04, 13 June 2019 diff hist +5 Programming a Job →JOB Programming - FULL Tag: Visual edit
- 11:59, 13 June 2019 diff hist -856 Programming a Job →JOB Programming - FULL Tag: Visual edit
- 16:01, 11 June 2019 diff hist +1 Programming a Job →JOB Programing - FULL Tag: Visual edit
- 16:01, 11 June 2019 diff hist -63 Stepper 1 (GCA 6300) page Tag: Visual edit
- 16:00, 11 June 2019 diff hist +1 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences programming Tag: Visual edit
- 15:59, 11 June 2019 diff hist +224 Programming a Job programming a job Tag: Visual edit
- 15:20, 11 June 2019 diff hist +13,361 Programming a Job programming Tag: Visual edit
- 15:18, 11 June 2019 diff hist +7 N Programming a Job testing Tag: Visual edit
- 15:17, 11 June 2019 diff hist +24 Stepper 1 (GCA 6300) programing a job page Tag: Visual edit
- 15:35, 10 June 2019 diff hist +40 Stepper 1 (GCA 6300) →Operating Procedures
- 15:34, 10 June 2019 diff hist +2 Stepper 1 (GCA 6300) →Operating Procedures
- 15:33, 10 June 2019 diff hist -25 Stepper 1 (GCA 6300) →Operating Procedures
- 15:33, 10 June 2019 diff hist +46 Stepper 1 (GCA 6300) →Operating Procedures
- 15:31, 10 June 2019 diff hist +59 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences programming Tag: Visual edit
- 15:28, 10 June 2019 diff hist -3,242 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →JOB Programing - FULL Tag: Visual edit
- 09:30, 10 June 2019 diff hist +4,810 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →JOB Programing - FULL Tag: Visual edit
- 15:58, 6 June 2019 diff hist +11,757 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences programming Tag: Visual edit
- 15:58, 6 June 2019 diff hist -11,819 Stepper 2 (AutoStep 200) Operating Procedures corr Tag: Visual edit
- 15:56, 6 June 2019 diff hist +11,785 Stepper 2 (AutoStep 200) Operating Procedures →JOB Programing- FULL Tag: Visual edit
- 14:07, 6 June 2019 diff hist +34 Stepper 2 (AutoStep 200) Operating Procedures job programing Tag: Visual edit
- 14:01, 6 June 2019 diff hist +36 Stepper 2 (AutoStep 200) Operating Procedures →Cleaning the back-side of wafer Tag: Visual edit
- 14:00, 6 June 2019 diff hist +18 Stepper 1 (GCA 6300) - Standard Operating Procedure →Wafer Loading Tag: Visual edit
- 13:57, 6 June 2019 diff hist -9 Stepper 2 (AutoStep 200) →Standard Operating Procedures Tag: Visual edit
- 13:57, 6 June 2019 diff hist +9 Stepper 2 (AutoStep 200) →Operating Procedures Tag: Visual edit
- 13:55, 6 June 2019 diff hist +1 Stepper 2 (AutoStep 200) Operating Procedures →Running a JOB- Normal Operation Tag: Visual edit
- 13:53, 6 June 2019 diff hist -80 Stepper 2 (AutoStep 200) Operating Procedures →Running a FOCUS and\or EXPOSURE matrix Tag: Visual edit
- 11:20, 6 June 2019 diff hist +2,729 Stepper 2 (AutoStep 200) Operating Procedures →Running a FOCUS and\or EXPOSURE matrix Tag: Visual edit
- 11:19, 6 June 2019 diff hist +46 Stepper 2 (AutoStep 200) Operating Procedures EXP. matrix Tag: Visual edit
- 11:18, 6 June 2019 diff hist +5,845 Stepper 2 (AutoStep 200) Operating Procedures standard operating procedure Tag: Visual edit
- 10:15, 6 June 2019 diff hist +2,947 Stepper 1 (GCA 6300) - Standard Operating Procedure focus exposure matrix Tag: Visual edit
- 09:51, 6 June 2019 diff hist +119 Stepper 1 (GCA 6300) - Standard Operating Procedure →Running a JOB-Normal Operation Tag: Visual edit
- 09:14, 6 June 2019 diff hist +5,069 Stepper 1 (GCA 6300) - Standard Operating Procedure →Cleaning the back-side of wafer Tag: Visual edit
- 14:50, 31 May 2019 diff hist -572 Stepper 1 (GCA 6300) - Standard Operating Procedure wafer loading Tag: Visual edit
- 14:37, 31 May 2019 diff hist +941 Stepper 2 (AutoStep 200) Operating Procedures Setting up the job Tag: Visual edit
- 14:24, 31 May 2019 diff hist -2 Stepper 2 (AutoStep 200) Operating Procedures →Loading a wafer into the system Tag: Visual edit
- 14:23, 31 May 2019 diff hist +2,111 Stepper 2 (AutoStep 200) Operating Procedures loading the wafer Tag: Visual edit
- 13:42, 31 May 2019 diff hist -1,458 Stepper 2 (AutoStep 200) Operating Procedures →Reticle Loading and Unloading Tag: Visual edit
- 13:08, 31 May 2019 diff hist +1,995 Stepper 1 (GCA 6300) - Standard Operating Procedure wafer loading Tag: Visual edit
- 13:02, 31 May 2019 diff hist -86 Stepper 1 (GCA 6300) - Standard Operating Procedure →Reticle Loading and Unloading Tag: Visual edit
- 13:01, 31 May 2019 diff hist +28 Stepper 1 (GCA 6300) - Standard Operating Procedure →Reticle Loading and Unloading Tag: Visual edit
- 12:58, 31 May 2019 diff hist +3,877 Stepper 1 (GCA 6300) - Standard Operating Procedure gca 6300 cleaning, loading reticle Tag: Visual edit
- 10:58, 31 May 2019 diff hist +7 N Stepper 1 (GCA 6300) - Standard Operating Procedure work in progress icon
- 10:57, 31 May 2019 diff hist +131 Stepper 1 (GCA 6300) →Operating Procedures: link to new SOP in progress Tag: Visual edit
- 10:53, 31 May 2019 diff hist +7 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences work in progress
- 10:53, 31 May 2019 diff hist +125 Stepper 2 (AutoStep 200) →Operating Procedures: link to SOP Tag: Visual edit
- 10:51, 31 May 2019 diff hist +2,893 Stepper 2 (AutoStep 200) Operating Procedures →Reticle Loading/Unloading: Work In Progress Tag: Visual edit: Switched
- 10:50, 31 May 2019 diff hist 0 N Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences blank page Tag: Visual edit
- 10:49, 31 May 2019 diff hist +67 Stepper 2 (AutoStep 200) →Operating Procedures: link to Job Programming Tag: Visual edit
- 10:24, 31 May 2019 diff hist +956 Stepper 2 (AutoStep 200) Operating Procedures initial sections
- 14:40, 26 March 2019 diff hist +2 Surface Analysis (KLA/Tencor Surfscan) Tag: Visual edit
- 14:40, 26 March 2019 diff hist -22 Surface Analysis (KLA/Tencor Surfscan) Tag: Visual edit
- 14:39, 26 March 2019 diff hist -75 Surface Analysis (KLA/Tencor Surfscan) Tag: Visual edit
- 14:38, 26 March 2019 diff hist +276 Surface Analysis (KLA/Tencor Surfscan) standard recipes info Tag: Visual edit
- 14:19, 26 March 2019 diff hist +15 N File:UCSBTEST2 for small particles.png current