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- 18:02, 2 February 2024 diff hist +4 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures current
- 18:01, 2 February 2024 diff hist +4 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 18:00, 2 February 2024 diff hist +4 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 17:59, 2 February 2024 diff hist +81 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 17:59, 2 February 2024 diff hist +81 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 17:58, 2 February 2024 diff hist +81 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 17:58, 2 February 2024 diff hist -1 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 17:57, 2 February 2024 diff hist +86 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 17:56, 2 February 2024 diff hist -340 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 17:55, 2 February 2024 diff hist 0 File:SURFSCAN 6200 122123 small substrates.pdf Biljana uploaded a new version of File:SURFSCAN 6200 122123 small substrates.pdf current
- 17:55, 2 February 2024 diff hist 0 File:SURFSCAN 6200 122123 for 4inch wafers.pdf Biljana uploaded a new version of File:SURFSCAN 6200 122123 for 4inch wafers.pdf current
- 17:55, 2 February 2024 diff hist 0 File:SURFSCAN 6200 122123 for 8inch wafers.pdf Biljana uploaded a new version of File:SURFSCAN 6200 122123 for 8inch wafers.pdf current
- 17:54, 2 February 2024 diff hist 0 File:SURFSCAN 6200 122023 for 6inch wafers.pdf Biljana uploaded a new version of File:SURFSCAN 6200 122023 for 6inch wafers.pdf current
- 10:45, 24 January 2024 diff hist -12 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 10:41, 24 January 2024 diff hist +130 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 10:39, 24 January 2024 diff hist 0 File:Wafer Particle Count-Process Traveler.pdf Biljana uploaded a new version of File:Wafer Particle Count-Process Traveler.pdf current
- 11:04, 11 January 2024 diff hist +116 Ion Beam Deposition (Veeco NEXUS) →Documentation current
- 11:03, 11 January 2024 diff hist +103 Ion Beam Deposition (Veeco NEXUS) →Documentation
- 11:02, 11 January 2024 diff hist 0 N File:IBD Troubleshooting Guide.pdf current
- 11:02, 11 January 2024 diff hist 0 N File:IBD SOP.pdf current
- 10:57, 11 January 2024 diff hist 0 N File:IBD SOP.docx current
- 15:27, 9 January 2024 diff hist +100 Stepper 2 (AutoStep 200) →Operating Procedures
- 15:26, 9 January 2024 diff hist 0 N File:Autostep 200 Stepper manual focus.pdf current
- 16:52, 8 January 2024 diff hist +2 Stepper 2 (AutoStep 200) →Operating Procedures
- 16:51, 8 January 2024 diff hist -201 Stepper 2 (AutoStep 200) →Operating Procedures
- 16:47, 8 January 2024 diff hist +124 Stepper 2 (AutoStep 200) →Operating Procedures
- 16:46, 8 January 2024 diff hist 0 N File:Focus and exposure optimization- Autostep200-II.pdf current
- 16:35, 8 January 2024 diff hist +131 Stepper 2 (AutoStep 200) →Operating Procedures
- 16:34, 8 January 2024 diff hist 0 N File:General information about AUTOSTEP 200.pdf current
- 16:34, 8 January 2024 diff hist +4 Stepper 2 (AutoStep 200) →Operating Procedures
- 16:33, 8 January 2024 diff hist -3 Stepper 2 (AutoStep 200) →Operating Procedures Tag: Visual edit
- 16:32, 8 January 2024 diff hist -82 Stepper 2 (AutoStep 200) →Operating Procedures
- 16:31, 8 January 2024 diff hist +124 Stepper 2 (AutoStep 200) →Operating Procedures
- 16:30, 8 January 2024 diff hist +78 Stepper 2 (AutoStep 200) →Operating Procedures
- 16:28, 8 January 2024 diff hist +2 Stepper 2 (AutoStep 200) →Operating Procedures
- 16:28, 8 January 2024 diff hist -23 Stepper 2 (AutoStep 200) →Operating Procedures
- 16:27, 8 January 2024 diff hist -141 Stepper 2 (AutoStep 200) →Recipes
- 16:27, 8 January 2024 diff hist +110 Stepper 2 (AutoStep 200) →Recipes
- 16:24, 8 January 2024 diff hist +35 Stepper 2 (AutoStep 200) Operating Procedures →Other Useful links for this system:: two alignments current Tag: Visual edit
- 16:17, 8 January 2024 diff hist +24 Stepper 2 (AutoStep 200) Operating Procedures →Other Useful links for this system:
- 15:53, 8 January 2024 diff hist 0 N File:AUTOSTEP 200 User Accessible Commands 010524.pdf current
- 15:43, 8 January 2024 diff hist 0 N File:Autostep200 Training Old Training Manual.pdf current
- 12:51, 8 January 2024 diff hist -2 Stepper 2 (AutoStep 200) →Operating Procedures
- 12:50, 8 January 2024 diff hist -2 Stepper 2 (AutoStep 200) →Operating Procedures
- 12:49, 8 January 2024 diff hist +18 Stepper 2 (AutoStep 200) →Operating Procedures
- 12:45, 8 January 2024 diff hist +30 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →2. Second layer
- 12:44, 8 January 2024 diff hist +102 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →2. Second layer
- 12:41, 8 January 2024 diff hist +126 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →2. Second layer
- 12:39, 8 January 2024 diff hist 0 N File:Single centered mask-Piece 2nd litho AUTOSTEP 200.pdf current
- 12:39, 8 January 2024 diff hist -257 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →2. Second layer
- 12:38, 8 January 2024 diff hist +50 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →2. Second layer Tag: Visual edit
- 12:36, 8 January 2024 diff hist -7 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →2. Second layer Tag: Visual edit
- 12:35, 8 January 2024 diff hist -3 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →2. Second layer Tag: Visual edit
- 12:35, 8 January 2024 diff hist +8 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →2. Second layer
- 12:33, 8 January 2024 diff hist 0 N File:4 Quads mask plate Piece - 2nd litho AUTOSTEP 200 (1).pdf current
- 12:29, 8 January 2024 diff hist +47 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →2. Second layer Tag: Visual edit
- 12:27, 8 January 2024 diff hist -148 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →2. Second layer
- 12:27, 8 January 2024 diff hist -5 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →Single centered mask plate Tag: Visual edit
- 12:23, 8 January 2024 diff hist +156 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →Single centered mask plate
- 12:17, 8 January 2024 diff hist -13,866 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →JOB Programming - FULL: corrections regarding exposing pieces Tag: Visual edit
- 12:06, 8 January 2024 diff hist -14 Stepper 2 (AutoStep 200) →Operating Procedures
- 12:05, 8 January 2024 diff hist -2,710 Stepper 2 (AutoStep 200) Operating Procedures →Running a FOCUS and\or EXPOSURE matrix Tag: Visual edit
- 12:05, 8 January 2024 diff hist -7,008 Stepper 2 (AutoStep 200) Operating Procedures →Resist spin coating and cleaning the back-side of wafer: organizing SOP as they are for GCA 6300 Tag: Visual edit
- 12:02, 8 January 2024 diff hist -152 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →First layer Tag: Visual edit
- 12:01, 8 January 2024 diff hist -154 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →First layer
- 12:01, 8 January 2024 diff hist +162 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →First layer
- 11:58, 8 January 2024 diff hist 0 N File:Single centered mask-Piece 1st litho AUTOSTEP 200.pdf current
- 11:42, 8 January 2024 diff hist +1 Stepper 2 (AutoStep 200) →Operating Procedures
- 11:41, 8 January 2024 diff hist 0 N File:Autostep 200 - Setting up the Job.pdf current
- 11:36, 8 January 2024 diff hist +109 Stepper 2 (AutoStep 200) →Operating Procedures
- 11:00, 8 January 2024 diff hist +132 Stepper 2 (AutoStep 200) →Operating Procedures
- 10:59, 8 January 2024 diff hist 0 File:Running the JOB- One Page Instructions.pdf Biljana uploaded a new version of File:Running the JOB- One Page Instructions.pdf current
- 10:58, 8 January 2024 diff hist -132 Stepper 2 (AutoStep 200) →Operating Procedures
- 10:57, 8 January 2024 diff hist +132 Stepper 2 (AutoStep 200) →Operating Procedures
- 10:56, 8 January 2024 diff hist 0 N File:Running the JOB- One Page Instructions.pdf
- 10:56, 8 January 2024 diff hist -140 Stepper 2 (AutoStep 200) →Operating Procedures
- 17:42, 5 January 2024 diff hist +20 Stepper 2 (AutoStep 200) →Operating Procedures
- 17:40, 5 January 2024 diff hist +132 Stepper 2 (AutoStep 200) →Operating Procedures
- 17:39, 5 January 2024 diff hist 0 N File:Autostep 200 - Standard Operating Procedure-2023.pdf current
- 17:20, 5 January 2024 diff hist 0 N File:Autostep200+chucks+shims.pdf current
- 17:12, 5 January 2024 diff hist 0 N File:Autostep 200 chucks-2023.pdf current
- 17:00, 5 January 2024 diff hist 0 N File:Autostep 200 Chucks table.pdf current
- 16:32, 5 January 2024 diff hist +143 Stepper 2 (AutoStep 200) →Operating Procedures
- 16:30, 5 January 2024 diff hist 0 N File:Autostep 200 Running a JOB One Page Instructions.pdf current
- 15:44, 5 January 2024 diff hist -2 Stepper 1 (GCA 6300) →Operating Procedures
- 15:43, 5 January 2024 diff hist 0 N File:GCA 6300 Standard Operating Procedure 010524.pdf current
- 15:35, 5 January 2024 diff hist +2 Stepper 1 (GCA 6300) →Operating Procedures
- 15:28, 5 January 2024 diff hist 0 N File:GCA 6300 Available chucks 2023.pdf current
- 15:26, 5 January 2024 diff hist 0 N File:GCA 6300+chucks+shims 2023 (1).pdf current
- 15:11, 5 January 2024 diff hist 0 N File:GCA 6300 Chucks table 2023.pdf current
- 15:07, 5 January 2024 diff hist 0 N File:GCA 6300+chucks+shims 2023.xlsx current
- 15:07, 5 January 2024 diff hist 0 N File:GCA 6300 Available chucks 2023.pptx current
- 17:48, 4 January 2024 diff hist +30 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 17:47, 4 January 2024 diff hist +10 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 17:46, 4 January 2024 diff hist +11 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 17:45, 4 January 2024 diff hist -112 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 17:45, 4 January 2024 diff hist +119 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 17:43, 4 January 2024 diff hist -85 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 17:42, 4 January 2024 diff hist -276 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 17:41, 4 January 2024 diff hist +237 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 17:38, 4 January 2024 diff hist 0 N File:Wafer Particle Count-Process Traveler.pdf
- 17:38, 4 January 2024 diff hist 0 N File:SURFSCAN 6200 122123 small substrates.pdf
- 17:37, 4 January 2024 diff hist 0 N File:SURFSCAN 6200 122123 for 4inch wafers.pdf
- 17:37, 4 January 2024 diff hist 0 N File:SURFSCAN 6200 122123 for 8inch wafers.pdf
- 17:37, 4 January 2024 diff hist 0 N File:SURFSCAN 6200 122023 for 6inch wafers.pdf
- 17:05, 4 January 2024 diff hist +77 Wafer scanning process traveler →Wafers to Use: updated surfscan instructions. current Tag: Visual edit
- 16:57, 4 January 2024 diff hist +77 Wafer scanning process traveler →Scan before process step: updates scanning procesure Tag: Visual edit
- 16:46, 4 January 2024 diff hist +1 Wafer scanning process traveler →Scanning procedure for 4" Si wafers
- 16:07, 29 December 2023 diff hist +51 Biljana Stamenic current
- 15:56, 29 December 2023 diff hist 0 Biljana Stamenic
- 15:55, 29 December 2023 diff hist 0 Biljana Stamenic
- 15:55, 29 December 2023 diff hist -35 Biljana Stamenic →Tools
- 15:55, 29 December 2023 diff hist -1 Biljana Stamenic →Tools
- 15:54, 29 December 2023 diff hist +68 Biljana Stamenic
- 15:53, 29 December 2023 diff hist +8 Biljana Stamenic
- 15:52, 29 December 2023 diff hist +8 Biljana Stamenic →About Tag: Visual edit
- 15:46, 29 December 2023 diff hist -2 Stepper 1 (GCA 6300) →Operating Procedures
- 15:46, 29 December 2023 diff hist +5 Stepper 1 (GCA 6300) →Operating Procedures
- 15:45, 29 December 2023 diff hist -16 Stepper 1 (GCA 6300) →Operating Procedures
- 15:44, 29 December 2023 diff hist +8 Stepper 1 (GCA 6300) →Operating Procedures
- 15:44, 29 December 2023 diff hist +2 Stepper 1 (GCA 6300) →Operating Procedures
- 15:42, 29 December 2023 diff hist -141 Stepper 1 (GCA 6300) →Operating Procedures
- 15:38, 29 December 2023 diff hist +92 Stepper 1 (GCA 6300) →Operating Procedures
- 15:37, 29 December 2023 diff hist 0 N File:GCA 6300 - Commands.pdf current
- 12:57, 29 December 2023 diff hist +25 Stepper 1 (GCA 6300) →Operating Procedures
- 12:57, 29 December 2023 diff hist +30 Stepper 1 (GCA 6300) →Operating Procedures
- 12:55, 29 December 2023 diff hist -23 Stepper 1 (GCA 6300) →Operating Procedures
- 12:55, 29 December 2023 diff hist -26 Stepper 1 (GCA 6300) →Operating Procedures
- 12:54, 29 December 2023 diff hist +8 Stepper 1 (GCA 6300) →Operating Procedures
- 12:53, 29 December 2023 diff hist -13 Stepper 1 (GCA 6300) →Operating Procedures
- 12:52, 29 December 2023 diff hist +114 Stepper 1 (GCA 6300) →Operating Procedures
- 12:49, 29 December 2023 diff hist +3 Stepper 1 (GCA 6300) →Operating Procedures
- 12:47, 29 December 2023 diff hist +103 Stepper 1 (GCA 6300) →Operating Procedures
- 12:43, 29 December 2023 diff hist +109 Stepper 1 (GCA 6300) →Operating Procedures
- 12:41, 29 December 2023 diff hist +102 Stepper 1 (GCA 6300) →Operating Procedures
- 12:38, 29 December 2023 diff hist -106 Stepper 1 (GCA 6300) →Operating Procedures
- 12:38, 29 December 2023 diff hist +111 Stepper 1 (GCA 6300) →Operating Procedures
- 12:36, 29 December 2023 diff hist +1 Stepper 1 (GCA 6300) →Operating Procedures
- 12:34, 29 December 2023 diff hist +89 Stepper 1 (GCA 6300) →Operating Procedures
- 12:29, 29 December 2023 diff hist 0 N File:GCA6300 Optimizing the process 6.pdf current
- 12:29, 29 December 2023 diff hist 0 N File:GCA 6300 Shutdown and Start up.pdf current
- 12:29, 29 December 2023 diff hist 0 N File:GCA 6300 Reboot frozen keyboard.pdf current
- 12:29, 29 December 2023 diff hist 0 N File:GCA 6300 Programming a Job 7.pdf current
- 12:28, 29 December 2023 diff hist 0 N File:GCA 6300 General Information about system 4.pdf current
- 12:28, 29 December 2023 diff hist 0 N File:GCA 6300 Running a JOB 3.pdf current
- 11:54, 29 December 2023 diff hist 0 N File:GCA 6300 Programming a Job 7.docx current
- 17:19, 21 December 2023 diff hist +4 Surface Analysis (KLA/Tencor Surfscan) →Standard Recipes
- 17:18, 21 December 2023 diff hist +6 Surface Analysis (KLA/Tencor Surfscan) →Standard Recipes
- 17:17, 21 December 2023 diff hist 0 Surface Analysis (KLA/Tencor Surfscan) →Standard Recipes
- 17:16, 21 December 2023 diff hist +30 Surface Analysis (KLA/Tencor Surfscan) →Standard Recipes
- 17:14, 21 December 2023 diff hist 0 N File:SURFSCAN 6200 Small substrates.pdf current
- 17:14, 21 December 2023 diff hist 0 N File:SURFSCAN 6200 2 and 3inch wafers.pdf current
- 17:13, 21 December 2023 diff hist 0 N File:SURFSCAN 6200 4inch wafers.pdf current
- 17:12, 21 December 2023 diff hist +409 Surface Analysis (KLA/Tencor Surfscan) →Standard Recipes
- 16:03, 21 December 2023 diff hist +109 Surface Analysis (KLA/Tencor Surfscan) →Standard Recipes
- 16:01, 21 December 2023 diff hist 0 N File:SURFSCAN 6200 6inch wafers.pdf current
- 15:59, 21 December 2023 diff hist 0 N File:SURFSCAN 6200 8inch wafers.pdf current
- 15:52, 21 December 2023 diff hist 0 Stepper 1 (GCA 6300) →Operating Procedures
- 15:52, 21 December 2023 diff hist 0 Stepper 1 (GCA 6300) →Operating Procedures
- 15:52, 21 December 2023 diff hist -33 Surface Analysis (KLA/Tencor Surfscan) →Standard Recipes
- 15:48, 21 December 2023 diff hist +33 Surface Analysis (KLA/Tencor Surfscan) →Standard Recipes
- 15:47, 21 December 2023 diff hist -115 Surface Analysis (KLA/Tencor Surfscan) →Standard Recipes
- 15:47, 21 December 2023 diff hist -80 Surface Analysis (KLA/Tencor Surfscan) →Standard Recipes Tag: Visual edit: Switched
- 15:45, 21 December 2023 diff hist +98 Surface Analysis (KLA/Tencor Surfscan) →Standard Recipes Tag: Visual edit
- 15:43, 21 December 2023 diff hist +97 Surface Analysis (KLA/Tencor Surfscan) →Standard Recipes
- 15:41, 21 December 2023 diff hist -119 Surface Analysis (KLA/Tencor Surfscan) →Standard Recipes
- 15:41, 21 December 2023 diff hist +8 Surface Analysis (KLA/Tencor Surfscan) →Standard Recipes
- 15:39, 21 December 2023 diff hist +111 Surface Analysis (KLA/Tencor Surfscan) →Standard Recipes
- 15:36, 21 December 2023 diff hist -138 Surface Analysis (KLA/Tencor Surfscan) →Standard Recipes
- 15:35, 21 December 2023 diff hist +13 Surface Analysis (KLA/Tencor Surfscan) →Standard Recipes
- 15:31, 21 December 2023 diff hist +100 Surface Analysis (KLA/Tencor Surfscan) →Standard Recipes
- 15:29, 21 December 2023 diff hist +22 Surface Analysis (KLA/Tencor Surfscan) Tag: Visual edit: Switched
- 15:28, 21 December 2023 diff hist +18 Surface Analysis (KLA/Tencor Surfscan) →About Tag: Visual edit
- 15:27, 21 December 2023 diff hist -1 Surface Analysis (KLA/Tencor Surfscan) →Documentation
- 10:28, 20 December 2023 diff hist +1 PECVD Recipes current Tag: Visual edit: Switched
- 11:12, 15 December 2023 diff hist +2 PECVD Recipes →Low-Stress SiN deposition (PECVD #2)
- 11:11, 15 December 2023 diff hist +1 PECVD Recipes →Low-Stress SiN deposition (PECVD #2)
- 11:11, 15 December 2023 diff hist -6 PECVD Recipes →Low-Stress SiN deposition (PECVD #2)
- 11:03, 15 December 2023 diff hist +6 PECVD Recipes →Low-Stress SiN deposition (PECVD #2)
- 11:03, 15 December 2023 diff hist +2 PECVD Recipes →Low-Stress SiN deposition (PECVD #2)
- 11:02, 15 December 2023 diff hist -4 PECVD Recipes →Low-Stress SiN deposition (PECVD #2)
- 11:02, 15 December 2023 diff hist -4 PECVD Recipes →Low-Stress SiN deposition (PECVD #2)
- 11:01, 15 December 2023 diff hist +5 PECVD Recipes →Low-Stress SiN deposition (PECVD #2)
- 11:00, 15 December 2023 diff hist +222 PECVD Recipes →Low-Stress SiN deposition (PECVD #2)
- 10:57, 15 December 2023 diff hist +1 PECVD Recipes →=SiN deposition (PECVD #2)
- 10:55, 15 December 2023 diff hist +195 PECVD Recipes →SiN deposition (PECVD #2)
- 10:53, 15 December 2023 diff hist +4 PECVD Recipes →SiO2 deposition (PECVD #2)
- 10:52, 15 December 2023 diff hist +130 PECVD Recipes →SiO2 deposition (PECVD #2)
- 10:38, 15 December 2023 diff hist +1 PECVD Recipes →SiO2 deposition (PECVD #2)
- 10:36, 15 December 2023 diff hist +49 PECVD Recipes →SiO2 deposition (PECVD #2): New recipe from Nov. 2023 Tag: Visual edit
- 13:39, 13 September 2023 diff hist +627 Stepper 2 (Autostep 200) - Table of Chucks, Shims, Target Thicknesses Added info for a new shim current Tag: Visual edit
- 13:17, 13 September 2023 diff hist +39 Stepper 2 (Autostep 200) - Chuck Selection Adding a new chuck current Tag: Visual edit
- 16:49, 18 January 2023 diff hist +226 PECVD Recipes →Low Stress Si3N4 [ICP-PECVD]
- 16:48, 18 January 2023 diff hist +208 PECVD Recipes →Si3N4 [ICP-PECVD]
- 16:47, 18 January 2023 diff hist +219 PECVD Recipes →High Deposition Rate SiO2 [ICP-PECVD]
- 16:46, 18 January 2023 diff hist +8 PECVD Recipes →Low Deposition Rate SiO2 [ICP-PECVD]
- 16:45, 18 January 2023 diff hist +212 PECVD Recipes →Low Deposition Rate SiO2 [ICP-PECVD]
- 17:30, 13 June 2022 diff hist -159 PECVD Recipes →SiO2 deposition (PECVD #1)
- 17:29, 13 June 2022 diff hist +159 PECVD Recipes →SiO2 deposition (PECVD #1)
- 14:32, 13 June 2022 diff hist -2 PECVD Recipes →SiO2 deposition (PECVD #1)
- 14:31, 13 June 2022 diff hist +2 PECVD Recipes →SiO2 deposition (PECVD #1)
- 14:30, 13 June 2022 diff hist -156 PECVD Recipes →SiO2 deposition (PECVD #1)
- 14:28, 13 June 2022 diff hist 0 PECVD Recipes →SiO2 deposition (PECVD #1)
- 14:27, 13 June 2022 diff hist +2 PECVD Recipes →SiO2 deposition (PECVD #1)
- 14:26, 13 June 2022 diff hist +156 PECVD Recipes →SiO2 deposition (PECVD #1)
- 12:16, 9 September 2021 diff hist -293 E-Beam Evaporation Recipes Updated tooling factor for Al in E-beam#4. Tag: Visual edit
- 09:47, 7 May 2021 diff hist -42 Troubleshooting and Recovery →What to do in case of computer (monitor) freeze-up. current Tag: Visual edit
- 09:46, 7 May 2021 diff hist -7 Troubleshooting and Recovery →What to do in case of computer (monitor) freeze-up. Tag: Visual edit
- 09:46, 7 May 2021 diff hist +151 Troubleshooting and Recovery →What to do in case of computer (monitor) freeze-up.: reboot Tag: Visual edit
- 09:44, 7 May 2021 diff hist +1,766 GCA 6300 Reboot Procedures reboot and shutdwon-start up current Tag: Visual edit
- 09:40, 7 May 2021 diff hist -1,956 Troubleshooting and Recovery →What to do in case of computer (monitor) freeze-up.: rebooring Tag: Visual edit
- 10:13, 5 May 2021 diff hist +1,447 Troubleshooting and Recovery troublwshooting Tag: Visual edit
- 10:01, 5 May 2021 diff hist +77 GCA 6300 USer Accessible Commands →List of commands: mapping command added current Tag: Visual edit
- 15:47, 19 February 2021 diff hist +139 PECVD Recipes →PECVD 2 (Advanced Vacuum)
- 15:45, 19 February 2021 diff hist +160 PECVD Recipes →SiO2 deposition (PECVD #2)
- 15:44, 19 February 2021 diff hist +136 PECVD Recipes →Uniformity Data
- 15:42, 19 February 2021 diff hist +142 PECVD Recipes →Uniformity Data
- 15:37, 19 February 2021 diff hist +139 PECVD Recipes →Uniformity Data
- 15:33, 19 February 2021 diff hist +176 PECVD Recipes →SiO2 deposition (PECVD #1)
- 15:30, 19 February 2021 diff hist +139 PECVD Recipes →Historical Particulate Data
- 15:29, 19 February 2021 diff hist +152 PECVD Recipes →Uniformity Data
- 15:28, 19 February 2021 diff hist +140 PECVD Recipes →Uniformity Data
- 22:31, 16 February 2021 diff hist +136 PECVD Recipes →Thin-Film Properties
- 22:30, 16 February 2021 diff hist +124 PECVD Recipes →Thin-Film Properties
- 22:29, 16 February 2021 diff hist +119 PECVD Recipes →Thin-Film Properties
- 22:28, 16 February 2021 diff hist +126 PECVD Recipes →Thin-Film Properties
- 22:27, 16 February 2021 diff hist +123 PECVD Recipes →Thin-Film Properties
- 22:25, 16 February 2021 diff hist 0 PECVD Recipes →Thin-Film Properties
- 22:24, 16 February 2021 diff hist -2 PECVD Recipes →Thin-Film Properties
- 14:43, 13 November 2020 diff hist +3,288 N MLA Recipes MLa recipes- Bilja trying to link R to recipes Tag: Visual edit
- 14:21, 13 November 2020 diff hist +270 Lithography Recipes →Photolithography Recipes
- 14:16, 13 November 2020 diff hist +40 Lithography Recipes →Photolithography Recipes
- 14:15, 13 November 2020 diff hist +40 Lithography Recipes →Photolithography Recipes
- 16:29, 3 November 2020 diff hist -120 PECVD Recipes →Low-Stress SiN deposition (PECVD #2)
- 16:28, 3 November 2020 diff hist -127 PECVD Recipes →SiN deposition (PECVD #2)
- 16:28, 3 November 2020 diff hist -112 PECVD Recipes →SiO2 deposition (PECVD #2)
- 12:32, 16 October 2020 diff hist +150 Stepper Recipes
- 21:28, 13 October 2020 diff hist -2 PECVD Recipes →SiO2 deposition (PECVD #1)
- 21:28, 13 October 2020 diff hist +118 PECVD Recipes →SiN deposition (PECVD #1)
- 09:38, 13 October 2020 diff hist -228 PECVD Recipes
- 09:14, 13 October 2020 diff hist -1 PECVD Recipes →Historical Particulate Data
- 09:13, 13 October 2020 diff hist +1 PECVD Recipes →PECVD 1 (PlasmaTherm 790)
- 09:13, 13 October 2020 diff hist -109 PECVD Recipes →SiN deposition (PECVD #1)
- 16:38, 9 October 2020 diff hist -10 Direct-Write Lithography Recipes →Negative Resist (MLA150)
- 16:37, 9 October 2020 diff hist +64 Direct-Write Lithography Recipes →Negative Resist (MLA150)
- 16:16, 9 October 2020 diff hist +45 Direct-Write Lithography Recipes →Negative Resist (MLA150)
- 16:14, 9 October 2020 diff hist +10 Direct-Write Lithography Recipes →Negative Resist (MLA150)
- 16:12, 9 October 2020 diff hist +7 Direct-Write Lithography Recipes →Negative Resist (MLA150)
- 15:42, 9 October 2020 diff hist 0 Direct-Write Lithography Recipes →Negative Resist (MLA150)
- 15:34, 9 October 2020 diff hist 0 Direct-Write Lithography Recipes →Negative Resist (MLA150)
- 15:33, 9 October 2020 diff hist +22 Direct-Write Lithography Recipes →Positive Resist (MLA150)
- 15:01, 9 October 2020 diff hist -1 Direct-Write Lithography Recipes →Positive Resist (MLA150)
- 14:58, 9 October 2020 diff hist +1 Direct-Write Lithography Recipes →Positive Resist (MLA150)
- 14:56, 9 October 2020 diff hist +4 Direct-Write Lithography Recipes →Positive Resist (MLA150)
- 14:52, 9 October 2020 diff hist +3 Direct-Write Lithography Recipes →Positive Resist (MLA150)
- 14:12, 9 October 2020 diff hist +19 Direct-Write Lithography Recipes →Positive Resist (MLA150)
- 11:41, 9 October 2020 diff hist +3 Direct-Write Lithography Recipes →Positive Resist (MLA150)
- 11:39, 9 October 2020 diff hist -2 Direct-Write Lithography Recipes →Maskless Aligner (Heidelberg MLA150)
- 11:38, 9 October 2020 diff hist +55 Direct-Write Lithography Recipes →Positive Resist (MLA150)
- 20:53, 14 July 2020 diff hist 0 PECVD Recipes →Uniformity Data
- 20:52, 14 July 2020 diff hist 0 PECVD Recipes →Uniformity Data
- 20:49, 14 July 2020 diff hist 0 PECVD Recipes →Uniformity Data
- 20:47, 14 July 2020 diff hist 0 PECVD Recipes →Uniformity Data
- 20:46, 14 July 2020 diff hist -124 PECVD Recipes →SiN deposition (PECVD #2)
- 20:45, 14 July 2020 diff hist 0 PECVD Recipes →Thin-Film Properties
- 20:43, 14 July 2020 diff hist +126 PECVD Recipes →Thin-Film Properties
- 20:41, 14 July 2020 diff hist 0 PECVD Recipes →SiO2 deposition (PECVD #2)
- 20:40, 14 July 2020 diff hist +1 PECVD Recipes →PECVD 2 (Advanced Vacuum)
- 12:03, 2 July 2020 diff hist -8 Unaxis wafer coating procedure →a) Prepare wafers: Tag: Visual edit
- 12:02, 2 July 2020 diff hist -20 Unaxis wafer coating procedure →1. Unaxis deposition - 300nm of SiO2 LDR film @250°C Tag: Visual edit
- 12:01, 2 July 2020 diff hist +29 Unaxis wafer coating procedure Tag: Visual edit
- 12:01, 2 July 2020 diff hist +7 Unaxis wafer coating procedure Tag: Visual edit
- 12:00, 2 July 2020 diff hist +4,199 N Unaxis wafer coating procedure Created page with "'''1. Unaxis deposition - 300nm of SiO2 LDR film @250°C''' a) Prepare wafers: · Regular 4 " Si wafer ~500nm think for seasoning · Your substrate for d..." Tag: Visual edit
- 11:47, 2 July 2020 diff hist -58 ICP-PECVD (Unaxis VLR) Tag: Visual edit
- 11:44, 2 July 2020 diff hist +65 ICP-PECVD (Unaxis VLR) →Documentation Tag: Visual edit
- 11:42, 2 July 2020 diff hist +68 N Wafer coating procedure Created page with "[https://wiki.nanotech.ucsb.edu/wiki/File:Unaxis_SOP_3-30-2020.docx]" current Tag: Visual edit
- 11:41, 2 July 2020 diff hist +4 ICP-PECVD (Unaxis VLR) →Documentation: wafer coating procedure correction Tag: Visual edit
- 11:37, 2 July 2020 diff hist -76 ICP-PECVD (Unaxis VLR) →Documentation Tag: Visual edit
- 11:36, 2 July 2020 diff hist +65 ICP-PECVD (Unaxis VLR) →Documentation Tag: Visual edit
- 22:39, 11 June 2020 diff hist 0 PECVD Recipes →Thin-Film Properties
- 22:37, 11 June 2020 diff hist -125 PECVD Recipes →Thin-Film Properties
- 22:37, 11 June 2020 diff hist +125 PECVD Recipes →Thin-Film Properties
- 10:12, 27 May 2020 diff hist -17 PECVD 2 (Advanced Vacuum) →Documentation Tag: Visual edit
- 10:12, 27 May 2020 diff hist +77 PECVD 2 (Advanced Vacuum) →Documentation Tag: Visual edit
- 10:10, 27 May 2020 diff hist +40 N File:SOP for Advanced Vacuum PECVD.pdf 5-27-2020 Biljana Stamenic current
- 10:04, 27 May 2020 diff hist +49 PECVD 2 (Advanced Vacuum) →Documentation Tag: Visual edit
- 10:02, 27 May 2020 diff hist -58 PECVD 2 (Advanced Vacuum) →Documentation Tag: Visual edit
- 09:58, 27 May 2020 diff hist +6 PECVD 2 (Advanced Vacuum) →Documentation Tag: Visual edit
- 09:58, 27 May 2020 diff hist -8 PECVD 2 (Advanced Vacuum) Tag: Visual edit
- 09:55, 27 May 2020 diff hist +63 PECVD 2 (Advanced Vacuum) →Documentation Tag: Visual edit
- 09:54, 27 May 2020 diff hist +6 PECVD 2 (Advanced Vacuum) →Documentation Tag: Visual edit
- 09:54, 27 May 2020 diff hist +15 PECVD 2 (Advanced Vacuum) →Documentation Tag: Visual edit
- 09:53, 27 May 2020 diff hist -91 PECVD 2 (Advanced Vacuum) →Documentation Tag: Visual edit
- 09:47, 27 May 2020 diff hist +65 PECVD 2 (Advanced Vacuum) →Documentation Tag: Visual edit
- 09:46, 27 May 2020 diff hist +4 PECVD 2 (Advanced Vacuum) →Documentation Tag: Visual edit
- 09:46, 27 May 2020 diff hist +25 PECVD 2 (Advanced Vacuum) →Documentation Tag: Visual edit
- 09:45, 27 May 2020 diff hist -28 PECVD 2 (Advanced Vacuum) →Documentation
- 09:43, 27 May 2020 diff hist +61 N Operating Instructions Created page with "Advanced Vacuum PECVD.pdf" current Tag: Visual edit
- 09:40, 27 May 2020 diff hist +4 PECVD 2 (Advanced Vacuum) →Documentation Tag: Visual edit
- 09:36, 27 May 2020 diff hist 0 N File:Advanced Vacuum PECVD.pdf current
- 09:31, 27 May 2020 diff hist +1 PECVD 1 (PlasmaTherm 790) →Documentation Tag: Visual edit
- 08:50, 8 May 2020 diff hist -151 PECVD Recipes →ICP-PECVD (Unaxis VLR) Tag: Visual edit
- 17:16, 22 April 2020 diff hist +1 PECVD Recipes →SiN deposition (PECVD #1)
- 17:16, 22 April 2020 diff hist -29 PECVD Recipes →SiN deposition (PECVD #1)
- 17:08, 22 April 2020 diff hist -37 PECVD Recipes →SiO2 deposition (PECVD #1)
- 16:57, 22 April 2020 diff hist +57 PECVD1 Wafer Coating Process Tag: Visual edit
- 16:54, 22 April 2020 diff hist +18 Wafer Coating Process Traveler current Tag: Visual edit
- 16:53, 22 April 2020 diff hist -18 Wafer Coating Process Traveler link to recipes Tag: Visual edit
- 16:52, 22 April 2020 diff hist +54 Wafer Coating Process Traveler Tag: Visual edit
- 16:50, 22 April 2020 diff hist +1,475 Wafer Coating Process Traveler →STD SiO2 Tag: Visual edit
- 16:48, 22 April 2020 diff hist -8 Wafer Coating Process Traveler →STD SiO2 Tag: Visual edit
- 16:47, 22 April 2020 diff hist +724 Wafer Coating Process Traveler →Standard oxide deposition Tag: Visual edit
- 16:43, 22 April 2020 diff hist -7 Wafer Coating Process Traveler →STD LS Nitride2 at 300C Tag: Visual edit
- 16:42, 22 April 2020 diff hist -3,906 Wafer Coating Process Traveler Replaced content with "There are three standard recipes : STD SiO2, STD Nitride2, and STD LS Nitride2 at 300C. Instructions bellow explain how to run each of the recipes ( seasoning, deposition,..." Tags: Replaced Visual edit
- 16:38, 22 April 2020 diff hist +4 PECVD 2 (Advanced Vacuum) →Documentation Tag: Visual edit
- 16:38, 22 April 2020 diff hist -9 PECVD 2 (Advanced Vacuum) →Documentation Tag: Visual edit
- 16:37, 22 April 2020 diff hist +78 PECVD 2 (Advanced Vacuum) →Documentation Tag: Visual edit
- 16:36, 22 April 2020 diff hist +93 PECVD 2 (Advanced Vacuum) →Documentation Tag: Visual edit
- 16:35, 22 April 2020 diff hist +21 PECVD 2 (Advanced Vacuum) Tag: Visual edit
- 16:33, 22 April 2020 diff hist +11 PECVD1 Wafer Coating Process SiN and SiO2 depositions Tag: Visual edit
- 16:31, 22 April 2020 diff hist -13 PECVD1 Wafer Coating Process →PECVD#1 SiN @250C Tag: Visual edit
- 16:30, 22 April 2020 diff hist +49 PECVD1 Wafer Coating Process →PECVD#1 SiN @250C Tag: Visual edit
- 16:28, 22 April 2020 diff hist +4 PECVD1 Wafer Coating Process Tag: Visual edit
- 16:26, 22 April 2020 diff hist +16 PECVD1 Wafer Coating Process
- 16:23, 22 April 2020 diff hist -897 PECVD1 Wafer Coating Process Tag: Visual edit
- 16:21, 22 April 2020 diff hist +137 PECVD 1 (PlasmaTherm 790) →Documentation Tag: Visual edit
- 16:19, 22 April 2020 diff hist +112 PECVD1 Wafer Coating Process →SiO2 @250C Tag: Visual edit
- 16:18, 22 April 2020 diff hist +18 PECVD1 Wafer Coating Process Tag: Visual edit
- 16:14, 22 April 2020 diff hist +783 PECVD1 Wafer Coating Process Tag: Visual edit
- 16:09, 22 April 2020 diff hist -217 PECVD1 Wafer Coating Process →SiN @250C Tag: Visual edit
- 15:59, 22 April 2020 diff hist -6 ICP-PECVD (Unaxis VLR) →Documentation Tag: Visual edit
- 13:27, 22 April 2020 diff hist +11 ICP-PECVD (Unaxis VLR) →Documentation Tag: Visual edit
- 13:25, 22 April 2020 diff hist +1 Wafer Coating Process Traveler →Unaxis deposition - SiO2 LDR film @250°C Tag: Visual edit
- 13:24, 22 April 2020 diff hist +1 Wafer Coating Process Traveler →Unaxis deposition - 300nm SiO2 HDR film @250°C Tag: Visual edit
- 13:24, 22 April 2020 diff hist +1 Wafer Coating Process Traveler →Unaxis deposition - 300nm SiN film @250°C Tag: Visual edit
- 13:24, 22 April 2020 diff hist +28 Wafer Coating Process Traveler →Unaxis deposition - 300nm SiN film @250°C Tag: Visual edit
- 11:33, 22 April 2020 diff hist -13 ICP-PECVD (Unaxis VLR) →Documentation Tag: Visual edit
- 11:33, 22 April 2020 diff hist -131 ICP-PECVD (Unaxis VLR) →Documentation Tag: Visual edit
- 11:31, 22 April 2020 diff hist -988 Wafer Scanning process Traveler wafers scanning procedure current Tag: Visual edit
- 11:29, 22 April 2020 diff hist -744 Wafer scanning process traveler →Scan before process calibration Tag: Visual edit
- 11:25, 22 April 2020 diff hist -316 Wafer Scanning process Traveler →Wafers to Use Tag: Visual edit
- 11:23, 22 April 2020 diff hist +454 Wafer scanning process traveler →Wafers to Use Tag: Visual edit
- 11:14, 22 April 2020 diff hist -917 Wafer Coating Process Traveler →Unaxis deposition - SiO2 LDR film @250°C Tag: Visual edit
- 11:10, 22 April 2020 diff hist +766 Wafer Coating Process Traveler →Unaxis deposition - SiO2 LDR film @250°C: correction on Unaxis recipes Tag: Visual edit
- 11:02, 22 April 2020 diff hist -4 Wafer Coating Process Traveler →Unaxis deposition - SiO2 LDR film @250°C Tag: Visual edit
- 10:57, 22 April 2020 diff hist +97 Wafer Coating Process Traveler →Unaxis deposition - SiO2 LDR film @250°C Tag: Visual edit
- 10:37, 22 April 2020 diff hist +151 PECVD Recipes →Historical Particulate Data
- 10:34, 22 April 2020 diff hist +1 PECVD Recipes →Historical Particulate Data
- 17:36, 21 April 2020 diff hist +254 PECVD Recipes →Thin-Film Properties: corrections in Unaxis films Tag: Visual edit
- 17:33, 21 April 2020 diff hist +237 PECVD Recipes →SiO2 250C Deposition (Unaxis VLR)
- 13:39, 21 April 2020 diff hist +123 ICP-PECVD (Unaxis VLR) →Documentation: added link Tag: Visual edit
- 13:29, 21 April 2020 diff hist +105 PECVD Recipes →Thin-Film Properties: added one sentence Tag: Visual edit
- 13:25, 21 April 2020 diff hist +116 Wafer Coating Process Traveler →Unaxis deposition - 300nm SiO2 LDR film @250°C Tag: Visual edit
- 12:28, 21 April 2020 diff hist -3 PECVD Recipes →ICP-PECVD (Unaxis VLR)
- 12:27, 21 April 2020 diff hist -4 PECVD Recipes →ICP-PECVD (Unaxis VLR)
- 12:25, 21 April 2020 diff hist +32 PECVD Recipes →SiO2 250C Deposition (Unaxis VLR)
- 12:24, 21 April 2020 diff hist +34 PECVD Recipes →SiN LS 250C Deposition (Unaxis VLR)
- 12:22, 21 April 2020 diff hist -3 PECVD Recipes →ICP-PECVD (Unaxis VLR)
- 12:22, 21 April 2020 diff hist -2 PECVD Recipes →SiN 250C deposition (Unaxis VLR)
- 12:21, 21 April 2020 diff hist +37 PECVD Recipes →ICP-PECVD (Unaxis VLR)
- 12:18, 21 April 2020 diff hist +1 PECVD Recipes →ICP-PECVD (Unaxis VLR)
- 12:16, 21 April 2020 diff hist -268 PECVD Recipes →SiO2 250C Deposition (Unaxis VLR)
- 12:14, 21 April 2020 diff hist +358 PECVD Recipes →ICP-PECVD (Unaxis VLR)
- 12:05, 21 April 2020 diff hist -699 PECVD Recipes →ICP-PECVD (Unaxis VLR)
- 12:03, 21 April 2020 diff hist +418 PECVD Recipes →ICP-PECVD (Unaxis VLR)
- 12:02, 21 April 2020 diff hist +49 PECVD Recipes →SiN deposition (PECVD #1) Tag: Visual edit
- 11:55, 21 April 2020 diff hist +120 PECVD Recipes →Standard Recipe
- 11:54, 21 April 2020 diff hist +118 PECVD Recipes →Standard Recipe
- 11:53, 21 April 2020 diff hist +112 PECVD Recipes →Standard Recipe
- 11:02, 21 April 2020 diff hist -21 PECVD Recipes →Standard Recipe Tag: Visual edit
- 11:00, 21 April 2020 diff hist +72 N STD SiO2 recipe Created page with "[https://wiki.nanotech.ucsb.edu/w/images/4/4f/Adv._PECVD2-STD_SiO2.xlsx]" current Tag: Visual edit
- 11:00, 21 April 2020 diff hist +21 PECVD Recipes →SiO2 deposition (PECVD #2) Tag: Visual edit
- 10:59, 21 April 2020 diff hist 0 File:Adv. PECVD2-STD SiO2.xlsx Biljana uploaded a new version of File:Adv. PECVD2-STD SiO2.xlsx current
- 10:53, 21 April 2020 diff hist +1 PECVD Recipes →SiO2 deposition (PECVD #2)
- 10:43, 21 April 2020 diff hist -93 PECVD Recipes →Standard Recipe
- 10:43, 21 April 2020 diff hist -1 PECVD Recipes →Standard Recipe
- 10:43, 21 April 2020 diff hist +2 PECVD Recipes →Standard Recipe
- 10:42, 21 April 2020 diff hist +92 PECVD Recipes →Standard Recipe
- 10:35, 21 April 2020 diff hist -91 PECVD Recipes →Standard Recipe
- 10:29, 21 April 2020 diff hist +1 PECVD Recipes →Standard Recipe
- 10:24, 21 April 2020 diff hist +69 PECVD Recipes →Standard Recipe Tag: Visual edit
- 10:18, 21 April 2020 diff hist +4 PECVD Recipes →Standard Recipe Tag: Visual edit
- 10:17, 21 April 2020 diff hist +17 PECVD Recipes →SiO2 deposition (PECVD #2) Tag: Visual edit
- 10:16, 21 April 2020 diff hist -293 PECVD Recipes →Standard Recipe Tag: Visual edit
- 10:09, 21 April 2020 diff hist +80 PECVD Recipes →Standard Recipe: New LS Nitride 2 recipe Tag: Visual edit
- 10:08, 21 April 2020 diff hist 0 N File:Adv. PECVD2- STD LSNitride2.xlsx current
- 10:07, 21 April 2020 diff hist +24 PECVD Recipes →Standard Recipe: STD New version of the recipe Tag: Visual edit
- 10:06, 21 April 2020 diff hist +78 PECVD Recipes →Standard Recipe Tag: Visual edit
- 10:05, 21 April 2020 diff hist 0 N File:Adv. PECVD2- STD Nitride2.xlsx current
- 10:05, 21 April 2020 diff hist +21 PECVD Recipes →SiN deposition (PECVD #2): STD Nitride recipe new version Tag: Visual edit
- 10:04, 21 April 2020 diff hist -9 PECVD Recipes →Standard Recipe Tag: Visual edit
- 10:03, 21 April 2020 diff hist +73 PECVD Recipes →SiO2 deposition (PECVD #2) Tag: Visual edit
- 10:02, 21 April 2020 diff hist +26 PECVD Recipes →Standard Recipe Tag: Visual edit
- 10:00, 21 April 2020 diff hist -241 PECVD Recipes →Standard Recipe Tag: Visual edit
- 09:59, 21 April 2020 diff hist -90 PECVD Recipes →Standard Recipe Tag: Visual edit
- 09:58, 21 April 2020 diff hist -1 PECVD Recipes →Standard Recipe Tag: Visual edit
- 09:57, 21 April 2020 diff hist +73 PECVD Recipes →Standard Recipe Tag: Visual edit
- 09:57, 21 April 2020 diff hist -93 PECVD Recipes →Standard Recipe: Updated recipe for STD SiO2 Tag: Visual edit
- 09:55, 21 April 2020 diff hist +9 PECVD Recipes →Standard Recipe: updated recipe for STD SiO2 Tag: Visual edit
- 09:54, 21 April 2020 diff hist 0 N File:Adv. PECVD2-STD SiO2.xlsx
- 14:10, 20 April 2020 diff hist -181 PECVD Recipes →SiO2 250C Data 2019: recipe cleanup Tag: Visual edit
- 13:52, 20 April 2020 diff hist +24 PECVD Recipes →SiN deposition (Unaxis VLR): change in name of recipe Tag: Visual edit
- 13:49, 20 April 2020 diff hist -855 PECVD Recipes →SiO2 deposition (Unaxis VLR): deleting some recipes Tag: Visual edit
- 13:41, 20 April 2020 diff hist +123 Wafer Scanning/Coating Process Traveler ( combined/less detailed) →Run on "real wafer" current Tag: Visual edit
- 13:32, 20 April 2020 diff hist -132 Wafer Scanning/Coating Process Traveler ( combined/less detailed) corrections on unaxis scan Tag: Visual edit
- 11:28, 20 April 2020 diff hist -6 Wafer Scanning/Coating Process Traveler ( combined/less detailed) →Scan After process calibration Tag: Visual edit
- 11:28, 20 April 2020 diff hist +7 Wafer Scanning/Coating Process Traveler ( combined/less detailed) →Scan Before Deposition Tag: Visual edit
- 11:27, 20 April 2020 diff hist +3,040 Wafer Scanning/Coating Process Traveler ( combined/less detailed) →Scan before process calibration Tag: Visual edit
- 10:39, 20 April 2020 diff hist +330 Wafer Scanning/Coating Process Traveler ( combined/less detailed) Tag: Visual edit
- 10:12, 20 April 2020 diff hist +7 N Wafer Scanning/Coating Process Traveler ( combined/less detailed) wip Tag: Visual edit
- 10:11, 20 April 2020 diff hist +4 ICP-PECVD (Unaxis VLR) →Documentation Tag: Visual edit
- 10:11, 20 April 2020 diff hist +113 ICP-PECVD (Unaxis VLR) →Documentation: scan/coat Tag: Visual edit
- 10:03, 20 April 2020 diff hist +44 PECVD Recipes →" Post-Dep Clean" recipe Tag: Visual edit
- 10:01, 20 April 2020 diff hist -650 PECVD Recipes →SiN deposition (Unaxis VLR) Tag: Visual edit
- 09:36, 20 April 2020 diff hist +1,374 Wafer Scanning process Traveler scanning wafers Tag: Visual edit
- 09:20, 20 April 2020 diff hist +2,131 N Wafer Scanning process Traveler Scanning wafers Tag: Visual edit
- 08:13, 20 April 2020 diff hist +4 ICP-PECVD (Unaxis VLR) →Documentation Tag: Visual edit
- 08:11, 20 April 2020 diff hist +5 ICP-PECVD (Unaxis VLR) →Documentation Tag: Visual edit
- 08:09, 20 April 2020 diff hist +28 ICP-PECVD (Unaxis VLR) →Documentation Tag: Visual edit
- 14:36, 15 April 2020 diff hist +102 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →First layer Tag: Visual edit
- 14:36, 15 April 2020 diff hist 0 N File:Single centered mask-Piece 1st litho AUTOSTEP 200.pptx current
- 14:35, 15 April 2020 diff hist -110 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →First layer Tag: Visual edit
- 14:32, 15 April 2020 diff hist +98 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →Single centered mask plate Tag: Visual edit
- 14:30, 15 April 2020 diff hist +4 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →Multi layered mask plate Tag: Visual edit
- 14:28, 15 April 2020 diff hist -4 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →Multi layered mask plate Tag: Visual edit
- 14:23, 15 April 2020 diff hist +50 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →Multi layered mask plate Tag: Visual edit
- 14:22, 15 April 2020 diff hist +102 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →Single centered mask plate Tag: Visual edit
- 14:17, 15 April 2020 diff hist +50 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences Tag: Visual edit
- 14:15, 15 April 2020 diff hist 0 N File:Single centerd mask- Piece 1st litho AUTOSTEP 200-PIECES.pptx current
- 14:15, 15 April 2020 diff hist 0 N File:Single centered mask-Piece 2nd litho AUTOSTEP 200.pptx
- 14:14, 15 April 2020 diff hist 0 N File:4 Quads mask plate Piece - 2nd litho AUTOSTEP 200.pptx current
- 10:08, 15 April 2020 diff hist +82 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →Second layer Tag: Visual edit
- 10:06, 15 April 2020 diff hist +153 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →Second layer Tag: Visual edit
- 10:02, 15 April 2020 diff hist +229 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →First layer Tag: Visual edit
- 09:41, 15 April 2020 diff hist -8,781 Wafer scanning process traveler →Calibration Tag: Visual edit
- 09:39, 15 April 2020 diff hist -216 Wafer scanning process traveler →Start the scan application Tag: Visual edit
- 09:33, 15 April 2020 diff hist +207 Wafer scanning process traveler →Wafers to Use: wafer scan basic info Tag: Visual edit
- 09:25, 15 April 2020 diff hist -7,690 Glossary glossary items current Tag: Visual edit
- 09:14, 15 April 2020 diff hist +15 Errors errors current Tag: Visual edit
- 12:08, 8 April 2020 diff hist +100 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences fixced PPTX link Tag: Visual edit
- 10:03, 8 April 2020 diff hist +60 N AUTOSTEP 200-PIECES 1st litho BL and BR orientation.pptx 1st litho current Tag: Visual edit
- 10:02, 8 April 2020 diff hist +62 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →First layer: 1st litho on pieces Tag: Visual edit
- 10:01, 8 April 2020 diff hist 0 N File:AUTOSTEP 200-PIECES 1st litho BL and BR orientation.pptx current
- 10:00, 8 April 2020 diff hist +92 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →First layer Tag: Visual edit
- 09:58, 8 April 2020 diff hist -3 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →Exposing wafer pieces: 1st litho Tag: Visual edit
- 20:34, 7 April 2020 diff hist +26 N AUTOSTEP 200-PIECES instruction 6-20-19.pptx exposing a piece current Tag: Visual edit
- 20:33, 7 April 2020 diff hist +4 Exposing a wafer piece wafer piece current Tag: Visual edit
- 20:33, 7 April 2020 diff hist +44 N Exposing a wafer piece Created page with "AUTOSTEP_200-PIECES_instruction_6-20-19.pptx"
- 20:32, 7 April 2020 diff hist +28 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →Exposing wafer pieces Tag: Visual edit
- 20:32, 7 April 2020 diff hist 0 N File:AUTOSTEP 200-PIECES instruction 6-20-19.pptx current
- 20:31, 7 April 2020 diff hist 0 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →Exposing wafer pieces Tag: Visual edit
- 16:13, 7 April 2020 diff hist +543 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →Exposing wafer pieces Tag: Visual edit
- 16:05, 7 April 2020 diff hist +1,435 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →Exposing wafers substrates Tag: Visual edit
- 15:43, 7 April 2020 diff hist +66 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →Job Programming Tag: Visual edit
- 15:38, 7 April 2020 diff hist +17 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →Job Programming Tag: Visual edit
- 15:35, 7 April 2020 diff hist -11 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →<<PASS>> (writing the pass for first layer) Tag: Visual edit
- 15:32, 7 April 2020 diff hist +206 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →Job Programming Tag: Visual edit
- 15:26, 7 April 2020 diff hist +10 N File:Mask plate-Sign convention.png current
- 15:22, 7 April 2020 diff hist +20 N File:Alignment key offset Sign Convention.png current
- 15:18, 7 April 2020 diff hist +292 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences programming Tag: Visual edit
- 15:08, 7 April 2020 diff hist +44 N Errors Created page with "On this page add list of most common errors:"
- 15:08, 7 April 2020 diff hist +4 Surface Analysis (KLA/Tencor Surfscan) →Documentation Tag: Visual edit
- 15:07, 7 April 2020 diff hist +8 Surface Analysis (KLA/Tencor Surfscan) →Documentation Tag: Visual edit
- 15:01, 7 April 2020 diff hist +31 PECVD Recipes →Cleaning Recipes (Unaxis VLR Dep) Tag: Visual edit
- 14:35, 7 April 2020 diff hist -1 PECVD Recipes →" STD CF4/O2 Clean recipe" Tag: Visual edit
- 14:34, 7 April 2020 diff hist 0 PECVD Recipes →" STD CF4/O2 Clean recipe" Tag: Visual edit
- 14:33, 7 April 2020 diff hist +93 PECVD Recipes →" STD CF4/O2 Clean recipe" Tag: Visual edit
- 14:32, 7 April 2020 diff hist +8 N File:PECVD2 photo for cleaning.png current
- 14:25, 7 April 2020 diff hist +592 PECVD Recipes →Cleaning Recipes (PECVD #2) Tag: Visual edit
- 14:24, 7 April 2020 diff hist +5 N File:PECVD2 clean.png current
- 14:21, 7 April 2020 diff hist +5 N File:AdvPECVD2LSNdep2.jpg current
- 14:17, 7 April 2020 diff hist +456 PECVD Recipes →Cleaning Recipes (PECVD #1) Tag: Visual edit
- 14:14, 7 April 2020 diff hist +16 N File:PECVD1-cleaning.png
- 13:57, 7 April 2020 diff hist +210 PECVD Recipes →Cleaning Recipes (PECVD #1) Tag: Visual edit
- 13:23, 7 April 2020 diff hist -33 Autostep 200 Troubleshooting and Recovery →Troubleshooting Tag: Visual edit
- 13:22, 7 April 2020 diff hist +277 Autostep 200 Troubleshooting and Recovery →Troubleshooting Tag: Visual edit
- 13:08, 7 April 2020 diff hist -2 GCA 6300 USer Accessible Commands →List of commands: Tag: Visual edit
- 13:08, 7 April 2020 diff hist -2 Autostep 200 User Accessible Commands →List of commands: current Tag: Visual edit
- 13:08, 7 April 2020 diff hist -2 Autostep 200 User Accessible Commands →List of commands Tag: Visual edit
- 13:07, 7 April 2020 diff hist -2 Stepper 2 (AutoStep 200) Tag: Visual edit
- 13:05, 7 April 2020 diff hist +57 Autostep 200 User Accessible Commands →Asccessible Commands: characters Tag: Visual edit
- 13:04, 7 April 2020 diff hist +15 Autostep 200 User Accessible Commands commands Tag: Visual edit
- 13:02, 7 April 2020 diff hist +79 Autostep 200 User Accessible Commands commands Tag: Visual edit
- 13:00, 7 April 2020 diff hist -34 Stepper 1 (GCA 6300) →Operating Procedures Tag: Visual edit
- 12:59, 7 April 2020 diff hist +32 Stepper 1 (GCA 6300)
- 12:59, 7 April 2020 diff hist -22 Stepper 1 (GCA 6300) →Operating Procedures Tag: Visual edit
- 12:59, 7 April 2020 diff hist +91 Stepper 1 (GCA 6300) →Staff Procedures Tag: Visual edit
- 12:58, 7 April 2020 diff hist +22 Stepper 1 (GCA 6300) Staff procedures Tag: Visual edit
- 12:57, 7 April 2020 diff hist +23 Stepper 1 (GCA 6300) →Operating Procedures Tag: Visual edit
- 12:56, 7 April 2020 diff hist +1 Stepper 1 (GCA 6300) →Operating Procedures Tag: Visual edit
- 12:55, 7 April 2020 diff hist +60 Troubleshooting and Recovery →Errors Tag: Visual edit
- 12:47, 7 April 2020 diff hist +15 Troubleshooting and Recovery Tag: Visual edit
- 12:45, 7 April 2020 diff hist -73 Troubleshooting and Recovery →What to do in case of unplanned power outage. Tag: Visual edit
- 12:41, 7 April 2020 diff hist -68 Troubleshooting and Recovery Tag: Visual edit
- 12:40, 7 April 2020 diff hist -8 Troubleshooting and Recovery →What to do in case of unplanned power outage. Tag: Visual edit
- 11:55, 7 April 2020 diff hist -7 Troubleshooting and Recovery →What to do if the local alignment or wafer exposure mapping hangs up on the upper monitor. Tag: Visual edit
- 11:53, 7 April 2020 diff hist -8 GCA 6300 USer Accessible Commands →List of control characters: Tag: Visual edit
- 11:52, 7 April 2020 diff hist -6 GCA 6300 USer Accessible Commands →Control Characters Tag: Visual edit
- 11:52, 7 April 2020 diff hist +7 GCA 6300 USer Accessible Commands →List of control characters: list Tag: Visual edit
- 11:49, 7 April 2020 diff hist +59 GCA 6300 USer Accessible Commands →Commands: list Tag: Visual edit