SEM Sample Coater (Hummer)

From UCSB Nanofab Wiki
Revision as of 06:23, 22 June 2022 by John d (talk | contribs) (added more info and placeholder for SOP and link to techniqures to reduce chargign)
Jump to navigation Jump to search
SEM Sample Coater (Hummer)
Tool Type Inspection, Test and Characterization
Location Bay 1
Supervisor Don Freeborn
Supervisor Phone (805) 893-7975
Supervisor E-Mail
Manufacturer Hummer


This system is for coating Pd/Au thin layers onto samples that will charge during FESEM inspection.

When to use

If you tried SEM'ing a sample, and the sample appears to drift/move during imaging/capture, or astigmatism is constantly changing, then your sample may be charging up and deflecting the electron beams. This is common for imaging insulators such as substrates made of glass (SiO2), or substrates coated in glass (SiO2, SiN) or thick photoresist (≥1µm). Thin layers (<<1µm) on top of conductive substrates (eg. 200nm SiO2 on Silicon substrate) can often allow electron beams and fields to penetrate to the conductor, possibly not requiring AuPd coating.

Operating Procedures

To Do: Upload SOP. Printouts available at tool.