SEM Sample Coater (Hummer)

From UCSB Nanofab Wiki
Revision as of 11:12, 15 April 2020 by Silva (talk | contribs)
Jump to navigation Jump to search
SEM Sample Coater (Hummer)
SEMSample.jpg
Tool Type Inspection, Test and Characterization
Location Bay 1
Supervisor Don Freeborn
Supervisor Phone (805) 893-7975
Supervisor E-Mail dfreeborn@ece.ucsb.edu
Description
Manufacturer Hummer


About

This system is for coating Pd/Au thin layers onto samples that will charge during FESEM inspection.

Retrieved from "https://wiki.nanofab.ucsb.edu/w/index.php?title=SEM_Sample_Coater_(Hummer)&oldid=157945"