Difference between revisions of "SEM Sample Coater (Hummer)"

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|picture=SEMSample.jpg
 
|picture=SEMSample.jpg
 
|type = Inspection, Test and Characterization
 
|type = Inspection, Test and Characterization
|super= Tony Bosch
+
|super= Don Freeborn
 
|location=Bay 1
 
|location=Bay 1
 
|description =
 
|description =

Revision as of 11:12, 15 April 2020

SEM Sample Coater (Hummer)
SEMSample.jpg
Tool Type Inspection, Test and Characterization
Location Bay 1
Supervisor Don Freeborn
Supervisor Phone (805) 893-7975
Supervisor E-Mail dfreeborn@ece.ucsb.edu
Description
Manufacturer Hummer


About

This system is for coating Pd/Au thin layers onto samples that will charge during FESEM inspection.