Difference between revisions of "Resistivity Mapper (CDE RESMAP)"
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|picture=CDEResmap.jpg |
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|type = Inspection, Test and Characterization |
|type = Inspection, Test and Characterization |
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+ | |super= Bill Millerski |
|phone=(805)839-3918x217 |
|phone=(805)839-3918x217 |
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|location=Bay ? |
|location=Bay ? |
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Revision as of 08:33, 28 October 2021
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About
The CDE Resmap 4 point resistivity mapper is used for measuring resistivity across the wafer for substrates and thin films deposited in the facility. The system can do automated resistivity mapping for pieces to 8 inch wafers.
The resistivity range is 2 mOhm/Square to 5 MOhm/square. Contour plots, 3D plots, histograms, data exporting are supported from the Windows XP based control system.