Rapid Thermal Processor (SSI Solaris 150)

From UCSB Nanofab Wiki
Revision as of 09:57, 19 July 2019 by Lingg (talk | contribs) (Operating Instructions)
Jump to: navigation, search
UnderConstruction.jpg

Work In Progress

This article is still under construction. It may contain factual errors. Content is subject to change.


Rapid Thermal Processor (SSI Solaris 150)
RTP-Solaris-150.jpg
Tool Type Thermal Processing
Location Bay 5
Supervisor Brian Lingg
Supervisor Phone (805) 893-8145
Supervisor E-Mail lingg_b@ucsb.edu
Description Rapid Thermal Annealing (RTA)
Manufacturer SSI
Model Solaris 150
Thermal Processing Recipes
Sign up for this tool



About

To Do: insert basic info

Detailed Specificiations

To Do: list of specs, wafer sizes etc.

Operating Instructions