Rapid Thermal Processor (SSI Solaris 150)

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Work In Progress

This article is still under construction. It may contain factual errors. Content is subject to change.


Rapid Thermal Processor (SSI Solaris 150)
RTP-Solaris-150.jpg
Tool Type Thermal Processing
Location Bay 5
Supervisor Brian Lingg
Supervisor Phone (805) 893-8145
Supervisor E-Mail lingg_b@ucsb.edu
Description Rapid Thermal Annealing (RTA)
Manufacturer SSI
Model Solaris 150
Thermal Processing Recipes
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Detailed Specificiations

To Do: list of specs, wafer sizes etc.

Operating Instructions