Difference between revisions of "Rapid Thermal Processor (SSI Solaris 150)"

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==Detailed Specificiations==
==Detailed Specificiations==

Revision as of 13:06, 10 March 2020


Work In Progress

This article is still under construction. It may contain factual errors. Content is subject to change.

Rapid Thermal Processor (SSI Solaris 150)
Tool Type Thermal Processing
Location Bay 5
Supervisor Brian Lingg
Supervisor Phone (805) 893-8145
Supervisor E-Mail lingg_b@ucsb.edu
Description Rapid Thermal Annealing (RTA)
Manufacturer SSI
Model Solaris 150
Thermal Processing Recipes
Sign up for this tool



Detailed Specificiations

To Do: list of specs, wafer sizes etc.

Operating Instructions