Difference between revisions of "Rapid Thermal Processor (SSI Solaris 150)"

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== About ==
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==About==
 
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== Detailed Specificiations ==
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==Detailed Specificiations==
 
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== Operating Instructions ==
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==Operating Instructions==
* [[SSI Solaris 150 - Operating Procedure|Solaris 150 Operating Procedure]]
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* [https://www.nanotech.ucsb.edu/wiki/images/6/66/Solaris_150_install_manual_software3_0_revQ.pdf User manual]
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*[[SSI Solaris 150 - Operating Procedure|Solaris 150 Operating Procedure]]
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*[https://www.nanotech.ucsb.edu/wiki/images/6/66/Solaris_150_install_manual_software3_0_revQ.pdf User manual]

Revision as of 14:49, 25 October 2019

UnderConstruction.jpg

Work In Progress

This article is still under construction. It may contain factual errors. Content is subject to change.


Rapid Thermal Processor (SSI Solaris 150)
RTP-Solaris-150.jpg
Tool Type Thermal Processing
Location Bay 5
Supervisor Brian Lingg
Supervisor Phone (805) 893-8145
Supervisor E-Mail lingg_b@ucsb.edu
Description Rapid Thermal Annealing (RTA)
Manufacturer SSI
Model Solaris 150
Thermal Processing Recipes
Sign up for this tool



About

To Do: insert basic info

Detailed Specificiations

To Do: list of specs, wafer sizes etc.

Operating Instructions