Difference between revisions of "Rapid Thermal Processor (SSI Solaris 150)"
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| − | {{WIP}} <!-- | + | {{WIP}} <!-- CLICK HERE: WIP means "Work In Progress" - delete the "WIP" widget when article is ready.--> |
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| − | == About == | + | ==About== |
{{todo|insert basic info}} | {{todo|insert basic info}} | ||
| − | == Detailed Specificiations == | + | ==Detailed Specificiations== |
{{todo|list of specs, wafer sizes etc.}} | {{todo|list of specs, wafer sizes etc.}} | ||
| − | == Operating Instructions == | + | ==Operating Instructions== |
| − | * [[SSI Solaris 150 - Operating Procedure|Solaris 150 Operating Procedure]] | + | |
| − | * [https://www.nanotech.ucsb.edu/wiki/images/6/66/Solaris_150_install_manual_software3_0_revQ.pdf User manual] | + | *[[SSI Solaris 150 - Operating Procedure|Solaris 150 Operating Procedure]] |
| + | *[https://www.nanotech.ucsb.edu/wiki/images/6/66/Solaris_150_install_manual_software3_0_revQ.pdf User manual] | ||
Revision as of 14:49, 25 October 2019
 Work In Progress This article is still under construction. It may contain factual errors. Content is subject to change. |
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About
| To Do: insert basic info |
Detailed Specificiations
| To Do: list of specs, wafer sizes etc. |