Difference between revisions of "Rapid Thermal Processor (SSI Solaris 150)"
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| − | == |
+ | ==About== |
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+ | ==Detailed Specificiations== |
{{todo|list of specs, wafer sizes etc.}} |
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+ | ==Operating Instructions== |
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+ | *[[SSI Solaris 150 - Operating Procedure|Solaris 150 Operating Procedure]] |
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+ | *[https://www.nanotech.ucsb.edu/wiki/images/6/66/Solaris_150_install_manual_software3_0_revQ.pdf User manual] |
Revision as of 14:49, 25 October 2019
 Work In Progress This article is still under construction. It may contain factual errors. Content is subject to change. |
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About
| To Do: insert basic info |
Detailed Specificiations
| To Do: list of specs, wafer sizes etc. |