Difference between revisions of "Rapid Thermal Processor (SSI Solaris 150)"
Jump to navigation
Jump to search
(inital page with `todo` listed) |
m (Corrected typo in recipe link) |
||
| Line 3: | Line 3: | ||
|super = Brian Lingg |
|super = Brian Lingg |
||
|picture=RTP-Solaris-150.jpg |
|picture=RTP-Solaris-150.jpg |
||
| − | |type = Thermal |
+ | |type = Thermal Processing |
|recipe = Thermal Processing |
|recipe = Thermal Processing |
||
|toolid = 999 |
|toolid = 999 |
||
Revision as of 23:06, 30 May 2019
 Work In Progress This article is still under construction. It may contain factual errors. Content is subject to change. |
| |||||||||||||||||||||||
About
| To Do: insert basic info |
Detailed Specificiations
| To Do: list of specs, wafer sizes etc. |