Difference between revisions of "RIE Etching Recipes"
Jump to navigation
Jump to search
Line 14: | Line 14: | ||
=[[RIE 5 (PlasmaTherm)]] = |
=[[RIE 5 (PlasmaTherm)]] = |
||
− | ==AlGaAs Etching (RIE 5)== |
+ | ==AlGaAs\GaAs Etching (RIE 5)== |
− | *[[media:13-GaAs-AlGaAs_Etching-RIE-5.pdf|AlGaAs Etch Recipes - BCl<sub>3</sub>-SiCl<sub>4</sub>]] |
+ | *[[media:13-GaAs-AlGaAs_Etching-RIE-5.pdf|GaAs\AlGaAs Etch Recipes - BCl<sub>3</sub>-SiCl<sub>4</sub>]] |
==GaN Etching (RIE 5)== |
==GaN Etching (RIE 5)== |
Revision as of 17:09, 23 October 2013
Back to Dry Etching Recipes.