Difference between revisions of "RIE Etching Recipes"

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*[[media:SiO2-Etch-Recipe-using-RIE-3-a.pdf|SiO<sub>2</sub> Etch Recipe with a very low surface damage - CHF<sub>3]]
 
*[[media:SiO2-Etch-Recipe-using-RIE-3-a.pdf|SiO<sub>2</sub> Etch Recipe with a very low surface damage - CHF<sub>3]]
 
==SiN<sub>x</sub> Etching (RIE 3)==
 
==SiN<sub>x</sub> Etching (RIE 3)==
*[[media:|SiN<sub>x</sub> Etch Recipe with a very low surface damage - CHF<sub>3]]
+
*[[media:51-SiNx-Etch-Recipe-using-RIE3.pdf|SiN<sub>x</sub> Etch Recipe with a very low surface damage - CHF<sub>3]]
  
 
=[[RIE 5 (PlasmaTherm)]] =
 
=[[RIE 5 (PlasmaTherm)]] =

Revision as of 14:59, 13 January 2017