Difference between revisions of "RIE Etching Recipes"
Jump to navigation
Jump to search
Line 15: | Line 15: | ||
=[[RIE 3 (MRC)]] = |
=[[RIE 3 (MRC)]] = |
||
+ | ==SiO<sub>2</sub> Etching (RIE 3)== |
||
+ | *[[media:|SiO<sub>2</sub> Etch Recipe - CHF<sub>3]] |
||
=[[RIE 5 (PlasmaTherm)]] = |
=[[RIE 5 (PlasmaTherm)]] = |
Revision as of 11:06, 29 July 2016
Back to Dry Etching Recipes.
RIE 1 (Custom)
RIE 2 (MRC)
CdZnTe Etching (RIE 2)
ZnS Etching (RIE 2)
ITO Etching (RIE 2)
InP-InGaAsP-InGaAlAs Etching (RIE 2)
RIE 3 (MRC)
SiO2 Etching (RIE 3)
- [[media:|SiO2 Etch Recipe - CHF3]]